Coating liquid supply system

Abstract

The utility model discloses a coating liquid supply system which comprises a first liquid supply unit, a first liquid supply pipeline and a coating head, one end of the first liquid supply pipeline is connected with a solution outlet of the first liquid supply unit, and the other end is connected with a solution inlet of the coating head; a first liquid supply pump, a first bubble detection unit and a first liquid supply valve are sequentially arranged on the first liquid supply pipeline in the direction from the first liquid supply unit to the coating head; the first liquid return pipeline is communicated with an inlet of the first liquid supply valve and the first liquid supply unit; a second liquid supply valve and a second bubble detection unit are sequentially arranged on the first liquid return pipeline in the direction from the inlet of the first liquid supply valve to the first liquid supply unit; the control module is electrically connected with the first liquid supply pump, the first bubble detection unit, the first liquid supply valve, the second liquid supply valve and the second bubble detection unit; and the first liquid supply valve and the second liquid supply valve are interlocked. Bubbles in the pipeline are automatically emptied, and the labor cost is saved.

Description

Technical Field

[0001] This utility model relates to the field of coating technology, and in particular to a coating liquid supply system. Background Technology

[0002] Coating technology, as a major application technology for thin film forming, is now widely used in high-tech fields such as new materials, new energy, and semiconductors. The stability of the coating liquid supply system plays a decisive role in important indicators such as the thickness and uniformity of the coated film. For example, the introduction of gas into components such as the liquid supply pipeline and the inner cavity of the coating head can have a significant impact on the film surface or the uniformity of the thickness.

[0003] There are two main sources of gas in the coating liquid supply system: one is the gas inside the supply pipeline, the pump body of the supply pump, and the inner cavity of the coating head when the liquid supply begins to be injected into the coating head; the other is the gas mixed in when the solution is emptied or the pipeline joints are loose during the coating process.

[0004] For the first scenario described above, the current common solution involves workers manually controlling the liquid supply pump, supply lines, and vent valve on the coating head to inject liquid into the coating head's interior. They then observe the condition of the supply lines, vent lines, and the coating head's outlet to determine if air has been purged. This method requires a series of manual controls for venting and is highly dependent on the worker's visual observation, making it cumbersome and carrying a significant risk of misjudgment.

[0005] In the second scenario described above, if the solution is found to be depleted or a loose connection in the supply line introduces gas during the coating process, the only recourse is to halt the equipment for troubleshooting before resuming coating. Depletion of the solution or leaks due to loose connections during coating will inevitably cause significant fluctuations in the coating supply, severely impacting film thickness and uniformity. Furthermore, downtime not only wastes solution, labor, and equipment but also affects production capacity.

[0006] Solving these technical problems has become an urgent technical challenge for the industry. Summary of the Invention

[0007] In order to at least solve the above-mentioned technical problems, the purpose of this utility model is to provide a coating liquid supply system that realizes automatic air venting in the pipeline and saves labor costs.

[0008] To achieve the above objectives, the coating liquid supply system provided by this utility model includes:

[0009] First liquid supply unit, first liquid supply pipeline and coating head;

[0010] One end of the first liquid supply pipe is connected to the solution outlet of the first liquid supply unit, and the other end is connected to the solution inlet of the coating head.

[0011] On the first liquid supply pipeline, a first liquid supply pump, a first bubble detection unit, and a first liquid supply valve are sequentially arranged from the first liquid supply unit toward the coating head.

[0012] The first return pipeline connects the inlet of the first supply valve to the first supply unit.

[0013] On the first return pipeline, a second supply valve and a second bubble detection unit are sequentially installed from the inlet of the first supply valve toward the first supply unit;

[0014] The control module is electrically connected to the first liquid supply pump, the first bubble detection unit, the first liquid supply valve, the second liquid supply valve, and the second bubble detection unit.

[0015] The first liquid supply valve is interlocked with the second liquid supply valve.

[0016] Furthermore, on the first liquid supply pipeline, a first defoaming device is provided on the side of the first liquid supply pump away from the first bubble detection unit;

[0017] The control module is electrically connected to the first defoaming device.

[0018] Furthermore, on the first liquid supply pipeline, between the first liquid supply valve and the fourth bubble detection unit, there is also:

[0019] The pipeline flow control valve is electrically connected to the control module.

[0020] Furthermore, it also includes: a second liquid supply unit and a second liquid supply pipeline;

[0021] One end of the second liquid supply pipeline is connected to the solution outlet of the second liquid supply unit, and the other end is connected to the inlet of the pipeline flow control valve.

[0022] On the second liquid supply pipeline, a second liquid supply pump, a fifth bubble detection unit, and a fourth liquid supply valve are sequentially installed from the second liquid supply unit toward the pipeline flow control valve.

[0023] The control module is electrically connected to the second liquid supply pump, the fifth bubble detection unit, and the fourth liquid supply valve.

[0024] The fourth liquid supply valve is interlocked with the first liquid supply valve.

[0025] Furthermore, it also includes:

[0026] The second return pipeline connects the inlet of the fourth supply valve to the second supply unit.

[0027] On the second return pipeline, a fifth supply valve and a sixth bubble detection unit are sequentially installed from the inlet of the fourth supply valve toward the second supply unit;

[0028] The control module is electrically connected to the fifth liquid supply valve and the sixth bubble detection unit;

[0029] The fifth liquid supply valve is interlocked with the fourth liquid supply valve.

[0030] Furthermore, on the second liquid supply pipeline, a second defoaming device is provided on the side of the second liquid supply pump away from the fifth bubble detection unit;

[0031] The control module is electrically connected to the second defoaming device.

[0032] Furthermore, on the first liquid supply pipeline, a sixth liquid supply valve is provided on the side of the first defoaming device away from the first liquid supply pump;

[0033] The sixth liquid supply valve is electrically connected to the control module.

[0034] Furthermore, on the second liquid supply pipeline, a seventh liquid supply valve is provided on the side of the second defoaming device away from the second liquid supply pump;

[0035] The seventh liquid supply valve is electrically connected to the control module.

[0036] Furthermore, the first bubble detection unit, the second bubble detection unit, the third bubble detection unit, the fourth bubble detection unit, the fifth bubble detection unit, and the sixth bubble detection unit are all ultrasonic bubble sensors.

[0037] Furthermore, the coating head is a slit coating head.

[0038] The coating liquid supply system of this application embodiment includes: a first liquid supply unit, a first liquid supply pipeline, and a coating head; one end of the first liquid supply pipeline is connected to the solution outlet of the first liquid supply unit, and the other end is connected to the solution inlet of the coating head; on the first liquid supply pipeline, a first liquid supply pump, a first bubble detection unit, and a first liquid supply valve are sequentially arranged from the first liquid supply unit toward the coating head; a first return liquid pipeline connects the inlet of the first liquid supply valve to the first liquid supply unit; on the first return liquid pipeline, a second liquid supply valve and a second bubble detection unit are sequentially arranged from the inlet of the first liquid supply valve toward the first liquid supply unit; a control module is electrically connected to the first liquid supply pump, the first bubble detection unit, the first liquid supply valve, the second liquid supply valve, and the second bubble detection unit; the first liquid supply valve and the second liquid supply valve are interlocked. The coating liquid supply system of this application embodiment realizes automatic venting of air bubbles in the pipeline, saving labor costs and improving production efficiency; it avoids the phenomenon of air bubbles entering the coating head affecting product quality; and it reduces the phenomenon of needing to stop the machine to vent air bubbles due to air bubbles in the pipeline, thus affecting production efficiency. Attached Figure Description

[0039] The accompanying drawings are provided to further illustrate the present application and form part of the specification. Together with the embodiments of the present application, they serve to explain the present application but do not constitute a limitation thereof. In the drawings:

[0040] Figure 1 This is a schematic diagram of the coating liquid supply system according to an embodiment of this application;

[0041] Figure 2 This is a wiring diagram of the control module according to an embodiment of this application.

[0042] Explanation of reference numerals in the attached figures:

[0043] 101-First liquid supply unit; 102-Sixth liquid supply valve; 103-First defoaming device; 104-First liquid supply pump; 105-First bubble detection unit; 106-First liquid supply valve; 107-First liquid supply pipeline; 108-Pipeline flow control valve; 109-Fourth bubble detection unit; 110-Paint head; 111-Third liquid supply valve; 112-Third bubble detection unit; 113-Paint head venting pipeline; 114-Return liquid storage unit; 115-Second liquid supply valve; 116-First return liquid pipeline; 117-Second bubble detection unit; 118-Second liquid supply unit; 119-Seventh liquid supply valve; 120-Second defoaming device; 121-Second liquid supply pump; 122-Fifth bubble detection unit; 123-Fourth liquid supply valve; 124-Second liquid supply pipeline; 125-Fifth liquid supply valve; 126-Second return liquid pipeline; 127-Sixth bubble detection unit. Detailed Implementation

[0044] Embodiments of this application will now be described in more detail with reference to the accompanying drawings. While some embodiments of this application are shown in the drawings, it should be understood that this application can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of this application. It should be understood that the drawings and embodiments of this application are for illustrative purposes only and are not intended to limit the scope of protection of this application.

[0045] It should be understood that the steps described in the method embodiments of this application may be performed in different orders and / or in parallel. Furthermore, the method embodiments may include additional steps and / or omit the steps shown. The scope of this application is not limited in this respect.

[0046] The term "comprising" and its variations as used herein are open-ended inclusions, meaning "including but not limited to". The term "based on" means "at least partially based on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment"; the term "some embodiments" means "at least some embodiments". Definitions of other terms will be given in the description below.

[0047] It should be noted that the terms "one" and "multiple" used in this application are illustrative rather than restrictive, and those skilled in the art should understand that, unless explicitly stated otherwise in the context, they should be understood as "one or more". "Multiple" should be understood as two or more.

[0048] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0049] This application provides a coating liquid supply system, including:

[0050] First liquid supply unit, first liquid supply pipeline and coating head;

[0051] One end of the first liquid supply pipe is connected to the solution outlet of the first liquid supply unit, and the other end is connected to the solution inlet of the coating head.

[0052] On the first liquid supply pipeline, a first liquid supply pump, a first bubble detection unit, and a first liquid supply valve are sequentially arranged from the first liquid supply unit toward the coating head.

[0053] The first return pipeline connects the inlet of the first supply valve to the first supply unit.

[0054] On the first return pipeline, a second supply valve and a second bubble detection unit are sequentially installed from the inlet of the first supply valve toward the first supply unit;

[0055] The control module is electrically connected to the first liquid supply pump, the first bubble detection unit, the first liquid supply valve, the second liquid supply valve, and the second bubble detection unit.

[0056] The first liquid supply valve is interlocked with the second liquid supply valve.

[0057] Example 1

[0058] Figure 1 This is a schematic diagram of the coating liquid supply system according to an embodiment of this application. Figure 2 This is a wiring diagram of the control module according to an embodiment of this application. The following will be combined with... Figure 1-2 The structure of the coating liquid supply system according to the embodiments of this application will be described in detail.

[0059] In one exemplary embodiment, the coating solution supply system of this application is used to supply coating solution to the coating head 110.

[0060] In one exemplary embodiment, the coating liquid supply system of this application includes: a liquid supply unit, a first liquid supply pipe 107, and a coating head 110.

[0061] In one exemplary embodiment, the liquid supply unit is the provider of the coating solution; as needed, the liquid supply unit can provide the coating solution actively or passively, and the passive provision of the coating solution is, for example, a liquid supply tank.

[0062] In one exemplary embodiment, the liquid supply unit includes a first liquid supply unit 101.

[0063] In one exemplary embodiment, the applicator 110 is a slit applicator.

[0064] In one exemplary embodiment, one end of the first liquid supply pipe 107 is connected to the solution outlet of the first liquid supply unit 101, and the other end is connected to the solution inlet of the coating head 110; it can be understood that the solution in the first liquid supply unit 101 is transported to the coating head 110 through the first liquid supply pipe 107.

[0065] In one exemplary embodiment, a first liquid supply pump 104, a first bubble detection unit 105, and a first liquid supply valve 106 are sequentially arranged on the first liquid supply pipeline 107 from the first liquid supply unit 101 toward the coating head 110.

[0066] In one exemplary embodiment, the coating liquid supply system of this application further includes a first return liquid pipe 116.

[0067] In one exemplary embodiment, the first return pipe 116 connects the inlet of the first supply valve 106 to the first supply unit 101.

[0068] In one exemplary embodiment, a second liquid supply valve 115 and a second bubble detection unit 117 are sequentially provided on the first return liquid pipeline 116 from the inlet of the first liquid supply valve 106 toward the first liquid supply unit 101.

[0069] In one exemplary embodiment, the coating liquid supply system of this application further includes: a coating head drain pipe 113.

[0070] In one exemplary embodiment, the inlet of the vent pipe 113 of the coating head is connected to the vent of the coating head 110.

[0071] In one exemplary embodiment, a third liquid supply valve 111 and a third bubble detection unit 112 are sequentially provided on the vent pipe 113 of the coating head from the inlet to the outlet of the coating head 110.

[0072] In one exemplary embodiment, the end of the nozzle venting pipe 113 is connected to a return liquid storage unit 114 as needed, that is, when the nozzle 110 vents air bubbles, the solution is discharged into the return liquid storage unit 114 through the nozzle venting pipe 113.

[0073] In one exemplary embodiment, the return liquid storage unit 114 may be a return liquid storage tank.

[0074] In one exemplary embodiment, a fourth bubble detection unit 109 is further provided on the first liquid supply pipeline 107 between the first liquid supply valve 106 and the solution inlet of the coating head 110.

[0075] In one exemplary embodiment, the fourth bubble detection unit 109 may be disposed near the coating head 110 end of the first liquid supply pipe 107, as needed.

[0076] In one exemplary embodiment, the coating liquid supply system of this application further includes a control module.

[0077] In one exemplary embodiment, the control module is electrically connected to the first liquid supply pump 104, the first bubble detection unit 105, the first liquid supply valve 106, the second liquid supply valve 115, the second bubble detection unit 117, the third liquid supply valve 111, the third bubble detection unit 112, and the fourth bubble detection unit 109. It can be understood that the operation of the first liquid supply pump 104, the first liquid supply valve 106, the second liquid supply valve 115, and the third liquid supply valve 111 is controlled by the control module. The signals collected by the first bubble detection unit 105, the second bubble detection unit 117, the third bubble detection unit 112, and the fourth bubble detection unit 109 are all transferred to the control module. Then, the control module controls the working state of the first liquid supply pump 104, the first liquid supply valve 106, the second liquid supply valve 115, and the third liquid supply valve 111 according to the collected signals.

[0078] In one exemplary embodiment, the first liquid supply valve 106 and the second liquid supply valve 115 are interlocked, that is, the working states of the first liquid supply valve 106 and the second liquid supply valve 115 are opposite. For example, when the first liquid supply valve 106 is open, the second liquid supply valve 115 is closed, and when the first liquid supply valve 106 is closed, the second liquid supply valve 115 is open.

[0079] In one exemplary embodiment, a first defoaming device 103 is provided on the side of the first liquid supply pump 104 away from the first bubble detection unit 105 on the first liquid supply pipeline 107.

[0080] In one exemplary embodiment, the control module is electrically connected to the first defoaming device 103, which can be understood as the control module controlling the first defoaming device 103 to work.

[0081] In one exemplary embodiment, the first defoaming device 103 is an existing forced bubble remover. The first defoaming device 103 uses centrifugal force to separate the tiny bubbles in the solution by high-speed rotation, thereby preventing the tiny bubbles from adhering to the inner wall of the first liquid supply pipe 107. This is because when the bubbles on the inner wall of the first liquid supply pipe 107 accumulate to a certain extent, they will detach from the inner wall of the first liquid supply pipe 107 and enter the coating head 110 with the solution, thus affecting the product.

[0082] In one exemplary embodiment, a pipeline flow control valve 108 is further included between the first liquid supply valve 106 and the fourth bubble detection unit 109 on the first liquid supply pipeline 107.

[0083] In one exemplary embodiment, the pipeline flow control valve 108 is electrically connected to the control module.

[0084] In one exemplary embodiment, the pipeline flow control valve 108 is used to control the flow rate of the solution in the first liquid supply pipeline 107.

[0085] In an exemplary embodiment, the coating liquid supply system of this application further includes: a second liquid supply unit 118 and a second liquid supply pipe 124.

[0086] In one exemplary embodiment, one end of the second liquid supply pipe 124 is connected to the solution outlet of the second liquid supply unit 118, and the other end is connected to the inlet of the pipe flow control valve 108.

[0087] In one exemplary embodiment, a second liquid supply pump 121, a fifth bubble detection unit 122, and a fourth liquid supply valve 123 are sequentially arranged on the second liquid supply pipeline 124 from the second liquid supply unit 118 toward the pipeline flow control valve 108.

[0088] In one exemplary embodiment, the control module is electrically connected to the second liquid supply pump 121, the fifth bubble detection unit 122, and the fourth liquid supply valve 123.

[0089] In one exemplary embodiment, the fourth liquid supply valve 123 is interlocked with the first liquid supply valve 106.

[0090] In one exemplary embodiment, the fourth liquid supply valve 123 is interlocked with the first liquid supply valve 106, which can be understood as the first liquid supply unit 101 and the second liquid supply unit 118 serving as backups for each other and working alternately.

[0091] In one exemplary embodiment, the coating liquid supply system of this application further includes a second return liquid pipe 126.

[0092] In one exemplary embodiment, the second return pipe 126 connects the inlet of the fourth supply valve 123 to the second supply unit 118.

[0093] In one exemplary embodiment, a fifth liquid supply valve 125 and a sixth bubble detection unit 127 are sequentially provided on the second return liquid pipeline 126 from the inlet of the fourth liquid supply valve 123 toward the second liquid supply unit 118.

[0094] In one exemplary embodiment, the control module is electrically connected to the fifth liquid supply valve 125 and the sixth bubble detection unit 127.

[0095] In one exemplary embodiment, the fifth liquid supply valve 125 is interlocked with the fourth liquid supply valve 123.

[0096] In one exemplary embodiment, a second defoaming device 120 is provided on the side of the second liquid supply pump 121 away from the fifth bubble detection unit 122 on the second liquid supply pipeline 124.

[0097] In one exemplary embodiment, the control module is electrically connected to the second defoaming device 120.

[0098] In one exemplary embodiment, a sixth liquid supply valve 102 is provided on the side of the first defoaming device 103 away from the first liquid supply pump 104 on the first liquid supply pipeline 107.

[0099] In one exemplary embodiment, the sixth liquid supply valve 102 is electrically connected to the control module.

[0100] In one exemplary embodiment, a seventh supply valve 119 is provided on the side of the second defoaming device 120 away from the second supply pump 121 on the second supply pipeline 124.

[0101] In one exemplary embodiment, the seventh liquid supply valve 119 is electrically connected to the control module.

[0102] In one exemplary embodiment, the first bubble detection unit 105, the second bubble detection unit 117, the third bubble detection unit 112, the fourth bubble detection unit 109, the fifth bubble detection unit 122, and the sixth bubble detection unit 127 are all existing, commonly used ultrasonic bubble sensors.

[0103] In an exemplary embodiment, the first bubble detection unit 105, the second bubble detection unit 117, the third bubble detection unit 112, the fourth bubble detection unit 109, the fifth bubble detection unit 122, and the sixth bubble detection unit 127 are all used to detect whether there are bubbles in the pipe.

[0104] In an exemplary embodiment, the coating liquid supply system of this application is explained using the example of the first liquid supply unit 101 supplying solution and the first liquid supply pipe 107 initially containing solution: The control module controls the opening of the sixth liquid supply valve 102 and the first liquid supply valve 106 and closes the fourth liquid supply valve 123. The control module also controls the start of the first liquid supply pump 104 to draw the solution from the first liquid supply unit 101 into the first liquid supply pipe 107. When the first liquid supply pipe 107 initially contains solution, the control module can simultaneously control the opening of the third liquid supply valve 111 to allow the solution to directly enter the coating head 110. Air in the first liquid supply pipe 107 is then vented through the coating head venting pipe 113. After neither the first bubble detection unit 105 nor the third bubble detection unit 112 detects any bubbles, the control module determines that there are no bubbles in the first liquid supply pipe 107. At this point, the control module controls the closing of the third liquid supply valve 111, and the coating head 110 can enter the working state.

[0105] In an exemplary embodiment, since the first liquid supply unit 101 and the second liquid supply unit 118 are backups of each other, taking the first liquid supply unit 101 in the working state as an example, at this time, the sixth liquid supply valve 102 and the first liquid supply valve 106 are in the open state, the second liquid supply valve 115, the third liquid supply valve 111 and the fourth liquid supply valve 123 are all in the closed state, and the seventh liquid supply valve 119 can also be in the closed state as needed; the first defoaming device 103, the first bubble detection unit 105, the pipeline flow control valve 108 and the fourth bubble detection unit 109 are in the working state, when the first bubble detection unit 105 When air bubbles are detected in the first liquid supply pipe 107, the first liquid supply valve 106 is closed and the second liquid supply valve 115 is opened, and the solution containing air bubbles is returned to the first liquid supply unit 101 through the first return pipe 116. At the same time as closing the first liquid supply valve 106 and opening the second liquid supply valve 115, the second liquid supply unit 118 is activated, that is, the seventh liquid supply valve 119, the second defoaming device 120, the second liquid supply pump 121, the fifth air bubble detection unit 122 and the fourth liquid supply valve 123 are opened, and the fifth liquid supply valve 125 is closed. At this time, the second liquid supply unit 118 supplies solution to the coating head 110. When neither the first bubble detection unit 105 nor the second bubble detection unit 117 detects any bubbles, it indicates that the bubbles in the solution passing through the first return pipe 116 have been emptied. At this point, you can choose to stop the operation of the sixth supply valve 102, the first defoaming device 103, the first supply pump 104, the first bubble detection unit 105, the second supply valve 115, and the second bubble detection unit 117, and supply the solution to the second supply unit 118; alternatively, you can choose to close the second supply valve 115 and open the first supply valve 106 to restart the first supply pipe 107, and stop the operation of each component on the second supply pipe 124.

[0106] In an exemplary embodiment, similarly, when the solution is supplied through the second supply pipe 124, the first supply valve 106 is closed, and the solution in the first supply unit 101 can circulate through the first return pipe 116. When neither the first bubble detection unit 105 nor the second bubble detection unit 117 detects any bubbles, the solution in the first supply unit 101 can continue to circulate through the first return pipe 116 or the circulation can be stopped so that the solution is in a stopped flow state.

[0107] In an exemplary embodiment, the fact that neither the first bubble detection unit 105 nor the second bubble detection unit 117 of this application detects any bubbles means that when the number of bubbles detected by the first bubble detection unit 105 is the same as the number of bubbles detected by the second bubble detection unit 117, it indicates that all the bubbles detected by the first bubble detection unit 105 have flowed back into the first liquid supply unit 101 through the first return pipe 116. Similarly, the cooperation relationship between the fifth bubble detection unit 122 and the sixth bubble detection unit 127 is the same as the cooperation relationship between the first bubble detection unit 105 and the second bubble detection unit 117.

[0108] In an exemplary embodiment, the first defoaming device 103 and the second defoaming device 120 are used to eliminate bubbles; while the first bubble detection unit 105, the second bubble detection unit 117, the third bubble detection unit 112, the fourth bubble detection unit 109, the fifth bubble detection unit 122 and the sixth bubble detection unit 127 are all used to detect bubbles that have not been eliminated or new bubbles that have been introduced due to air intrusion caused by a malfunction in the connection between components; for example, there are continuous bubbles that cannot be completely processed.

[0109] In one exemplary embodiment, the first defoaming device 103 and the second defoaming device 120 are both existing defoaming devices, such as the product of Hangzhou Kebote Filter Material Co., Ltd.: STLCFF-PDFAD-PTFE-UP0020.

[0110] In an exemplary embodiment, the first bubble detection unit 105, the second bubble detection unit 117, the third bubble detection unit 112, the fourth bubble detection unit 109, the fifth bubble detection unit 122, and the sixth bubble detection unit 127 all employ existing bubble detection devices, such as non-invasive ultrasonic bubble sensors, which are clamp-type bubble air mixing detection sensors that integrate detection and transmission.

[0111] In one exemplary embodiment, the fourth bubble detection unit 109 is used for secondary detection on the pipeline to improve the ability to detect bubbles, so as to further verify whether there are missed bubbles or bubbles generated after the first liquid supply valve 106 and the fourth liquid supply valve 123. When the fourth bubble detection unit 109 detects bubbles, the third liquid supply valve 111 is opened. After the number of bubbles detected by the fourth bubble detection unit 109 is detected by the third bubble detection unit 112, it indicates that these bubbles have been discharged through the coating head venting pipeline 113. At this time, it indicates that the bubbles found in the current liquid supply pipeline have been vented, and the coating head 110 can perform coating operations. When the coating head 110 is not opened, that is, when the coating head 110 is not in working state, the fourth bubble detection unit 109 is set up to avoid the waste of coating solution caused by venting bubbles. Because the bubbles detected by the fourth bubble detection unit 109 can be accurately determined by the third bubble detection unit 112 after verification, the phenomenon of continuous waste of coating solution caused by not knowing whether the bubbles have been vented can be avoided.

[0112] In one exemplary embodiment, when the coating head 110 is in operation and the fourth bubble detection unit 109 detects bubbles, the coating head 110 needs to be stopped to purge the air bubbles. This can be achieved by adjusting the flow control valve 108 to increase the flow rate of the solution. The fourth bubble detection unit 109 can promptly detect whether there is a leak or air intrusion in the first liquid supply valve 106 and the fourth liquid supply valve 123. When air intrudes into the first liquid supply valve 106 and / or the fourth liquid supply valve 123, it can be detected in a timely manner.

[0113] In one exemplary embodiment, as needed, there may be multiple coating head drain pipes 113. When there are multiple coating head drain pipes 113, the multiple coating head drain pipes 113 are evenly distributed on both sides of the upper end of the coating head 110. As needed, each coating head drain pipe 113 may be provided with a third liquid supply valve 111 and a third bubble detection unit 112. Multiple coating head drain pipes 113 may share the same return liquid storage unit 114 or each coating head drain pipe 113 may be configured with an independent return liquid storage unit 114.

[0114] Although the embodiments disclosed in this utility model are as described above, the content is only for the purpose of facilitating understanding of this utility model and is not intended to limit this utility model. Any person skilled in the art to which this utility model pertains may make any modifications and changes in the form and details of the implementation without departing from the spirit and scope disclosed in this utility model, but the patent protection scope of this utility model shall still be determined by the scope defined in the appended claims.

Claims

1. A coating liquid supply system, characterized in that, include: First liquid supply unit, first liquid supply pipeline and coating head; One end of the first liquid supply pipe is connected to the solution outlet of the first liquid supply unit, and the other end is connected to the solution inlet of the coating head; On the first liquid supply pipeline, a first liquid supply pump, a first bubble detection unit, and a first liquid supply valve are sequentially arranged from the first liquid supply unit toward the coating head. The first return liquid pipeline connects the inlet of the first supply liquid valve to the first supply liquid unit; On the first return pipeline, a second supply valve and a second bubble detection unit are sequentially provided from the inlet of the first supply valve toward the first supply unit; The control module is electrically connected to the first liquid supply pump, the first bubble detection unit, the first liquid supply valve, the second liquid supply valve, and the second bubble detection unit. The first liquid supply valve is interlocked with the second liquid supply valve.

2. The coating liquid supply system according to claim 1, characterized in that, It also includes: The nozzle exhaust pipe has an inlet connected to the exhaust port of the nozzle. On the vent pipe of the coating head, a third liquid supply valve and a third bubble detection unit are sequentially provided from the inlet to the outlet of the coating head; On the first liquid supply pipeline, a fourth bubble detection unit is also provided between the first liquid supply valve and the solution inlet of the coating head; The control module is electrically connected to the third liquid supply valve, the third bubble detection unit, and the fourth bubble detection unit.

3. The coating liquid supply system according to claim 2, characterized in that, On the first liquid supply pipeline, a first defoaming device is provided on the side of the first liquid supply pump away from the first bubble detection unit; The control module is electrically connected to the first defoaming device.

4. The coating liquid supply system according to claim 3, characterized in that, On the first liquid supply pipeline, between the first liquid supply valve and the fourth bubble detection unit, there is also: A pipeline flow control valve, which is electrically connected to the control module.

5. The coating liquid supply system according to claim 4, characterized in that, It also includes: a second liquid supply unit and a second liquid supply pipeline; One end of the second liquid supply pipeline is connected to the solution outlet of the second liquid supply unit, and the other end is connected to the inlet of the pipeline flow control valve; On the second liquid supply pipeline, a second liquid supply pump, a fifth bubble detection unit, and a fourth liquid supply valve are sequentially arranged from the second liquid supply unit toward the pipeline flow control valve. The control module is electrically connected to the second liquid supply pump, the fifth bubble detection unit, and the fourth liquid supply valve; The fourth liquid supply valve is interlocked with the first liquid supply valve.

6. The coating liquid supply system according to claim 5, characterized in that, It also includes: The second return liquid pipeline connects the inlet of the fourth supply liquid valve to the second supply liquid unit; On the second return pipeline, a fifth supply valve and a sixth bubble detection unit are sequentially provided from the inlet of the fourth supply valve toward the second supply unit; The control module is electrically connected to the fifth liquid supply valve and the sixth bubble detection unit. The fifth liquid supply valve is interlocked with the fourth liquid supply valve.

7. The coating liquid supply system according to claim 6, characterized in that, On the second liquid supply pipeline, a second defoaming device is provided on the side of the second liquid supply pump away from the fifth bubble detection unit; The control module is electrically connected to the second defoaming device.

8. The coating liquid supply system according to claim 7, characterized in that, On the first liquid supply pipeline, a sixth liquid supply valve is provided on the side of the first defoaming device away from the first liquid supply pump; The sixth liquid supply valve is electrically connected to the control module.

9. The coating liquid supply system according to claim 8, characterized in that, On the second liquid supply pipeline, a seventh liquid supply valve is provided on the side of the second defoaming device away from the second liquid supply pump; The seventh liquid supply valve is electrically connected to the control module.

10. The coating liquid supply system according to claim 9, characterized in that, The first bubble detection unit, the second bubble detection unit, the third bubble detection unit, the fourth bubble detection unit, the fifth bubble detection unit, and the sixth bubble detection unit are all ultrasonic bubble sensors.

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