Dry ice cleaning device for semiconductor packaging jig
The automated cleaning of semiconductor packaging fixtures using dry ice cleaning equipment solves the problems of low efficiency and safety hazards in existing technologies, achieving efficient and safe cleaning results and ensuring high packaging yield.
Patent Information
- Application Number
- CN202520153867.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-22
- Publication Date
- 2026-02-24
- Estimated Expiration
- 2035-01-22
AI Technical Summary
Existing semiconductor packaging fixture cleaning methods are inefficient, involve significant labor costs and safety hazards, and chemical residues may corrode chips, affecting packaging yield.
The dry ice cleaning device uses a cleaning nozzle to spray a mixture of dry ice particles and high-pressure airflow to automatically clean the fixture. The volatility of dry ice prevents residue, and a dust collection mechanism collects pollutants, thus achieving automated cleaning.
It improves cleaning efficiency, saves labor and reagent costs, eliminates safety hazards, ensures packaging yield, and avoids corrosion of chips by chemical residues.
Smart Images
Figure CN223932167U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to a dry ice cleaning device for semiconductor packaging fixtures, which is applicable to the field of semiconductor packaging production technology. Background Technology
[0002] In semiconductor packaging production, each production process uses corresponding fixtures to assist in packaging. During the packaging process, these fixtures are easily contaminated by substances such as metal oxides, residual silicon powder, resin, and flux. In order to ensure the smooth progress of subsequent packaging processes, the fixtures must be cleaned after each production process so that they can be recycled.
[0003] Existing cleaning methods typically involve manual cleaning using various chemical reagents. However, manual cleaning is not only inefficient and incurs significant labor costs, but the consumption of chemical reagents also increases cleaning costs considerably. Furthermore, different contaminants require different targeted reagents, and different types and categories of chemical reagents have different storage, use, and disposal methods. The management, use, and handling of these chemical reagents consume a great deal of human and material resources. Moreover, some of these reagents are volatile, flammable, and corrosive, posing significant safety hazards during their storage, use, and handling. In addition, because semiconductor chips are highly sensitive to chemicals, if reagent residues on the fixture are not carefully cleaned after cleaning, the chips can easily be corroded and damaged, severely impacting the yield rate of packaging production. Utility Model Content
[0004] To address the shortcomings of the existing technology, this invention proposes a dry ice cleaning device for semiconductor packaging fixtures.
[0005] The technical solution adopted by this utility model is as follows: a dry ice cleaning device for semiconductor packaging fixtures, including a housing, a cleaning mechanism for cleaning the fixtures, and a dust collection mechanism for collecting the pollutants cleaned. The housing includes a cleaning chamber, a cleaning platform disposed inside the cleaning chamber, and multiple fixing components disposed on the cleaning platform for loading the fixtures. The surface of the cleaning platform has several dust removal holes, which are distributed around each fixing component. The cleaning mechanism includes a cleaning nozzle movably disposed above the cleaning platform for blowing cleaning medium to the fixtures, a driving component for driving the cleaning nozzle to move, and a supply component connected to the cleaning nozzle for supplying cleaning medium. The dust collection mechanism includes a dust collection hopper disposed below the cleaning platform and an air suction component connected to the bottom of the dust collection hopper for sucking up pollutants. The dust removal holes are connected to the dust collection hopper. By installing multiple fixtures to be cleaned onto corresponding fixed components, and then driving the cleaning nozzles via a drive assembly, the nozzles sequentially pass over each fixture. Simultaneously, a supply assembly delivers cleaning media to the nozzles, allowing them to spray the cleaning media onto each fixture and remove contaminants. The removed contaminants are then sucked into a dust collection hopper below through dust removal holes around the fixed components by the suction provided by the suction assembly, completing dust removal and preventing secondary contamination of the fixtures. The dry ice cleaning device can automatically clean multiple fixtures simultaneously, eliminating the need for manual cleaning with chemical reagents. This not only improves cleaning efficiency but also saves significant labor costs. Furthermore, using dry ice instead of traditional chemical reagents saves on reagent procurement costs and eliminates the need for specialized storage and management of various reagents, saving considerable manpower and resources. It also avoids the hazards associated with the use and handling of chemical reagents, eliminating safety risks. Moreover, the volatile nature of dry ice ensures no chemical residue remains on the cleaned fixtures, preventing residual chemicals from corroding or burning semiconductor chips during use and ensuring high packaging yield.
[0006] Furthermore, the cleaning platform is located at the bottom of the cleaning chamber, and the housing also includes a baffle vertically installed at the bottom of the cleaning chamber and surrounding the cleaning platform. The baffle blocks any escaping cleaning medium, preventing it from affecting the normal operation of the drive components.
[0007] Furthermore, the drive assembly includes at least one first slide rail disposed at the bottom of the cleaning chamber in a front-to-back direction, a first slide block slidably connected to the first slide rail, a second slide rail disposed above the cleaning table in a left-to-right direction and fixedly connected to the first slide block, a second slide block slidably connected to the second slide rail, a first driver and a second driver respectively driving the first slide block and the second slide block to slide, and a cleaning nozzle disposed on the second slide block. The first driver drives the first slide block to slide back and forth along the first slide rail to move the cleaning nozzle back and forth, and the second driver drives the second slide block to slide left and right along the second slide rail to move the cleaning nozzle left and right, so that the cleaning nozzle can automatically pass over each fixture mounted on the cleaning table in sequence to achieve automatic cleaning of multiple fixtures.
[0008] Furthermore, the drive assembly also includes a third slide rail vertically mounted on the second slide block, a third slide block slidably connected to the third slide rail, and a third driver for driving the third slide block to slide. The cleaning nozzle is fixedly connected to the third slide block. The third driver drives the third slide block to slide up and down along the third slide rail, thereby moving the cleaning nozzle up and down. This allows for adjustments to the distance between the cleaning nozzle and the cleaning table based on the fixture specifications and height. Furthermore, adjusting the distance between the cleaning nozzle and the fixture allows for adjustments to the impact force and range of the cleaning medium sprayed onto the fixture surface, thus adjusting the cleaning intensity.
[0009] Furthermore, the cleaning mechanism also includes a position sensor mounted on the third slide to monitor the position of the cleaning nozzle, thereby enabling automatic cleaning.
[0010] Furthermore, the supply assembly includes a storage tank for storing dry ice and a mixer disposed below the storage tank for mixing the dry ice with high-pressure gas to form a cleaning medium. The input end of the mixer is connected to both the storage tank and the high-pressure gas source, and the output end of the mixer is connected to the cleaning nozzle. Specifically, a crushing mechanism for crushing dry ice is provided in the part of the storage tank connected to the mixer. The storage tank can store sufficient dry ice and crush the dry ice into dry ice particles, which are then conveyed to the mixer. The mixer is connected to an external high-pressure gas source to mix the airflow with the dry ice particles to form a cleaning medium, which is then conveyed to the cleaning nozzle for cleaning the fixture.
[0011] Furthermore, the suction assembly includes a dust collection fan, a filter whose outlet is connected to the dust collection fan, and an inlet connected to the dust collection hopper. The dust collection fan provides suction to draw the washed-off contaminants through the dust collection holes into the dust collection hopper, and then from the dust collection hopper into the filter. Simultaneously, the filter traps the contaminants for removal, thus cleaning the contaminants and preventing secondary contamination of the cleaned fixture by the washed-off contaminants.
[0012] Furthermore, the dust collection hopper is cone-shaped, and the connection between the air inlet of the filter and the dust collection hopper is located at the bottom of the dust collection hopper. The cone-shaped dust collection hopper can concentrate the pollutants falling into it at the bottom of the dust collection hopper so that they can be sucked into the filter.
[0013] Furthermore, the enclosure also includes a drive compartment located below the cleaning chamber. A partition separates the cleaning chamber from the drive compartment. The supply components and dust collection mechanism are both located within the drive compartment. The upper end of the dust collection hopper covers the bottom surface of the partition, and the dust removal holes penetrate the partition and communicate with the dust collection hopper. The partition separates the cleaning chamber from the drive compartment, preventing contaminants from the cleaning process from contaminating the supply components and dust collection mechanism, and also preventing low-temperature dry ice from affecting the normal operation of the supply components and dust collection mechanism.
[0014] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art:
[0015] The dry ice cleaning device for semiconductor packaging fixtures of this invention has a simple structure and is easy to operate. It can automatically clean multiple fixtures simultaneously through a cleaning table, cleaning mechanism, and dust collection mechanism, eliminating the need for manual cleaning with chemical reagents. This not only improves cleaning efficiency but also saves a significant amount of labor costs. Furthermore, using dry ice instead of traditional chemical reagents not only saves on reagent procurement costs but also eliminates the need for specialized storage and management of various reagents, saving considerable manpower and resources. It also avoids the dangers of using and handling chemical reagents, eliminating safety hazards. Moreover, the volatile nature of dry ice ensures that no chemical residues remain on the cleaned fixtures, preventing residual chemicals from corroding or burning semiconductor chips during fixture use and ensuring a high yield rate for packaging. Attached Figure Description
[0016] The following sections will describe some specific embodiments of the present invention in a detailed manner by way of example and not limitation, with reference to the accompanying drawings. The same reference numerals in the drawings denote the same or similar components or parts. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:
[0017] Figure 1 This is a schematic diagram of the structure of one embodiment of the present utility model;
[0018] Figure 2 yes Figure 1 Internal structure diagram of the embodiment shown Figure 1 ;
[0019] Figure 3 yes Figure 2 Enlarged view of the structure of region A in the illustrated embodiment;
[0020] Figure 4 yes Figure 1 Internal structure diagram of the embodiment shown Figure 2 ;
[0021] The annotations in the attached figures are explained as follows:
[0022] 1. Housing; 11. Cleaning chamber; 12. Cleaning table; 121. Dust removal hole; 13. Fixture; 14. Baffle; 15. Drive chamber; 16. Partition; 2. Cleaning mechanism; 21. Cleaning nozzle; 22. Drive assembly; 221. First slide rail; 222. First slide block; 223. Second slide rail; 224. Second slide block; 225. First driver; 226. Second driver; 227. Third slide rail; 228. Third slide block; 229. Third driver; 23. Supply assembly; 231. Storage tank; 232. Mixer; 24. Position sensor; 3. Dust collection mechanism; 31. Dust collection hopper; 32. Suction assembly; 321. Dust collection fan; 322. Filter. Detailed Implementation
[0023] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.
[0024] In the description of this utility model, it should be noted that the terms "front," "back," "left," and "right" used in directional descriptions are defined according to the direction in which a person normally operates the cleaning device. Specifically, when a person is operating the device normally, the side where the person is located is "front," and vice versa. When a person is facing forward, the person's left side is "left," and vice versa. The terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.
[0025] Reference Appendix Figure 1-4The dry ice cleaning device for semiconductor packaging fixtures in this embodiment includes a housing 1, a cleaning mechanism 2 for cleaning the fixture, and a dust collection mechanism 3 for collecting the cleaned contaminants. The housing 1 includes a cleaning chamber 11, a cleaning platform 12 disposed inside the cleaning chamber 11, and multiple fixing members 13 disposed on the cleaning platform 12 for loading the fixture. The surface of the cleaning platform 12 is provided with a plurality of dust removal holes 121, and the plurality of dust removal holes 121 are distributed around each fixing member 13. The cleaning mechanism 2 includes a cleaning nozzle 21 movably disposed above the cleaning platform 12 for blowing cleaning medium (a mixture of dry ice particles and high-pressure airflow) to the fixture, a driving component 22 for driving the cleaning nozzle 21 to move, and a supply component 23 connected to the cleaning nozzle 21 for supplying cleaning medium. The dust collection mechanism 3 includes a dust collection hopper 31 disposed below the cleaning platform 12 and an air suction component 32 connected to the bottom of the dust collection hopper 31 for sucking up contaminants. The dust removal holes 121 are connected to the dust collection hopper 31. By installing the multiple fixtures to be cleaned onto the corresponding fixing members 13, and then driving the cleaning nozzles 21 through the drive assembly 22, the cleaning nozzles 21 pass over each fixture in sequence. At the same time, the supply assembly 23 delivers cleaning medium to the cleaning nozzles 21, so that the cleaning nozzles 21 spray the cleaning medium onto each fixture to wash away the contaminants on the fixtures. The contaminants that are washed off are sucked into the dust collection hopper 31 below from the dust removal holes 121 around the fixing members by the suction provided by the suction assembly 32, thus completing the dust removal and preventing the contaminants washed off from causing secondary pollution to the fixtures. Dry ice cleaning equipment can automatically clean multiple fixtures simultaneously, eliminating the need for manual cleaning with chemical reagents. This not only improves cleaning efficiency but also saves significant labor costs. Furthermore, using dry ice instead of traditional chemical reagents saves on reagent procurement costs and eliminates the need for specialized storage and management of various reagents, saving substantial manpower and resources. It also avoids the hazards associated with the use and handling of chemical reagents, eliminating safety risks. Moreover, the volatile nature of dry ice ensures that no chemical residues remain on the cleaned fixtures, preventing residual chemicals from corroding or burning semiconductor chips during fixture use and ensuring a high yield rate for packaging.
[0026] In a more preferred embodiment, the cleaning platform 12 is disposed at the bottom of the cleaning chamber 11, and the housing 1 further includes a baffle 14 vertically disposed at the bottom of the cleaning chamber 11 and surrounding the cleaning platform 12. The baffle 14 blocks the escaped cleaning medium, preventing the cleaning medium from affecting the normal operation of the drive assembly 22.
[0027] In a more preferred embodiment, the drive assembly 22 includes at least one first slide rail 221 disposed at the bottom of the cleaning chamber 11 in a front-to-back direction, a first slide block 222 slidably connected to the first slide rail 221, a second slide rail 223 disposed above the cleaning table 12 in a left-to-right direction and fixedly connected to the first slide block 222, a second slide block 224 slidably connected to the second slide rail 223, a first driver 225 and a second driver 226 respectively driving the first slide block 222 and the second slide block 224 to slide. The cleaning nozzle 21 is disposed on the second slide block 224. The first driver 225 drives the first slide block 222 to slide back and forth along the first slide rail 221, thereby moving the cleaning nozzle 21 back and forth. In addition, the second driver 226 drives the second slide block 224 to slide left and right along the second slide rail 223, thereby moving the cleaning nozzle 21 left and right. Thus, the cleaning nozzle 21 can automatically pass over each fixture loaded on the cleaning table 12 in sequence, realizing automatic cleaning of multiple fixtures.
[0028] In a more preferred embodiment, the drive assembly 22 further includes a third slide rail 227 vertically disposed on the second slide block 224, a third slide block 228 slidably connected to the third slide rail 227, and a third driver 229 for driving the third slide block 228 to slide. The cleaning nozzle 21 is fixedly connected to the third slide block 228. The third driver 229 drives the third slide block 228 to slide up and down along the third slide rail 227, thereby moving the cleaning nozzle 21 up and down. On the one hand, the distance between the cleaning nozzle 21 and the cleaning table 12 can be adjusted according to the fixture specifications and height. On the other hand, the impact force and range of the cleaning medium sprayed onto the surface of the fixture can be adjusted by adjusting the distance between the cleaning nozzle 21 and the fixture, thereby adjusting the cleaning intensity.
[0029] In a more preferred embodiment, the cleaning mechanism 2 further includes a position sensor 24 disposed on the third slide 228 for monitoring the position of the cleaning nozzle 21, so as to monitor the position of the cleaning nozzle 21 and realize automatic cleaning.
[0030] In a more preferred embodiment, the supply component 23 includes a storage tank 231 for storing dry ice and a mixer 232 disposed below the storage tank 231 for mixing dry ice with high-pressure gas to form a cleaning medium. The input end of the mixer 232 is connected to both the storage tank 231 and the high-pressure gas source, and the output end of the mixer 232 is connected to the cleaning nozzle 21. Specifically, a crushing mechanism for crushing dry ice is provided in the part of the storage tank 231 connected to the mixer 232. The specific structures of the storage tank 231, the mixer 232, and the crushing mechanism are all prior art and will not be described in detail in this embodiment. The storage tank 231 can store sufficient dry ice and crush the dry ice into dry ice particles, which are then transported to the mixer 232. The mixer 232 is connected to an external high-pressure gas source to mix the airflow with the dry ice particles to form a cleaning medium, which is then transported to the cleaning nozzle for cleaning the fixture.
[0031] In a more preferred embodiment, the suction assembly 32 includes a dust collection fan 321 and a filter 322 whose outlet is connected to the dust collection fan 321. The inlet of the filter 322 is connected to the dust collection hopper 31. The dust collection fan 321 provides suction to draw the washed-off contaminants into the dust collection hopper 31 through the dust removal hole 121, and then into the filter 322. Simultaneously, the filter 322 traps the contaminants for removal, thereby cleaning the contaminants and preventing secondary contamination of the cleaned fixture by the washed-off contaminants.
[0032] In a more preferred embodiment, the dust collection hopper 31 is cone-shaped, and the connection between the air inlet end of the filter 322 and the dust collection hopper 31 is located at the bottom of the dust collection hopper 31. The cone-shaped dust collection hopper 31 can concentrate the pollutants falling into it at the bottom of the dust collection hopper 31 so that they can be sucked into the filter 322.
[0033] In a more preferred embodiment, the housing 1 further includes a drive chamber 15 disposed below the cleaning chamber 11. A partition 16 is provided between the cleaning chamber 11 and the drive chamber 15. The supply component 23 and the dust collection mechanism 3 are both located inside the drive chamber 15. The upper end of the dust collection hopper 31 covers the bottom surface of the partition 16, and the dust removal hole 121 penetrates the partition 16 and communicates with the dust collection hopper 31. The partition separates the cleaning chamber 11 from the drive chamber 15, preventing contaminants from cleaning from contaminating the supply component 23 and the dust collection mechanism 3, and also preventing low-temperature dry ice from affecting the normal operation of the supply component 23 and the dust collection mechanism 3.
[0034] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art:
[0035] The dry ice cleaning device for semiconductor packaging fixtures of this invention has a simple structure and is easy to operate. It can automatically clean multiple fixtures simultaneously through a cleaning table, cleaning mechanism, and dust collection mechanism, eliminating the need for manual cleaning with chemical reagents. This not only improves cleaning efficiency but also saves a significant amount of labor costs. Furthermore, using dry ice instead of traditional chemical reagents not only saves on reagent procurement costs but also eliminates the need for specialized storage and management of various reagents, saving considerable manpower and resources. It also avoids the dangers of using and handling chemical reagents, eliminating safety hazards. Moreover, the volatile nature of dry ice ensures that no chemical residues remain on the cleaned fixtures, preventing residual chemicals from corroding or burning semiconductor chips during fixture use and ensuring a high yield rate for packaging.
[0036] The above embodiments are only for illustrating the technical concept and features of this utility model. Their purpose is to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be used to limit the protection scope of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the protection scope of this utility model.
Claims
1. A dry ice cleaning apparatus for semiconductor packaging fixtures, characterized in that, include: The box (1) includes a cleaning chamber (11), a cleaning platform (12) disposed inside the cleaning chamber (11), and a plurality of fasteners (13) disposed on the cleaning platform (12) and used to load the fixture. The surface of the cleaning platform (12) is provided with a plurality of dust removal holes (121), and the plurality of dust removal holes (121) are distributed around each of the fasteners (13). The cleaning mechanism (2) is used to clean the fixture. The cleaning mechanism (2) includes a cleaning nozzle (21) movably disposed above the cleaning table (12) and used to blow cleaning medium to the fixture, a driving component (22) for driving the cleaning nozzle (21) to move, and a supply component (23) connected to the cleaning nozzle (21) and used to supply the cleaning medium. The dust collection mechanism (3) is used to collect the pollutants washed out. The dust collection mechanism (3) includes a dust collection hopper (31) located below the cleaning table (12) and an air suction component (32) connected to the bottom of the dust collection hopper (31) and used to suck up the pollutants. The dust removal hole (121) is connected to the dust collection hopper (31).
2. The dry ice cleaning apparatus for semiconductor packaging fixtures according to claim 1, characterized in that: The cleaning platform (12) is located at the bottom of the cleaning chamber (11), and the box body (1) also includes a baffle (14) that is vertically arranged at the bottom of the cleaning chamber (11) and surrounds the cleaning platform (12).
3. The dry ice cleaning apparatus for semiconductor packaging fixtures according to claim 1, characterized in that: The drive assembly (22) includes at least one first slide rail (221) disposed at the bottom of the cleaning chamber (11) in the front-to-back direction, a first slide block (222) slidably connected to the first slide rail (221), a second slide rail (223) disposed above the cleaning table (12) in the left-to-right direction and fixedly connected to the first slide block (222), a second slide block (224) slidably connected to the second slide rail (223), a first driver (225) and a second driver (226) respectively driving the first slide block (222) and the second slide block (224) to slide, and the cleaning nozzle (21) is disposed on the second slide block (224).
4. The dry ice cleaning apparatus for semiconductor packaging fixtures according to claim 3, characterized in that: The drive assembly (22) further includes a third slide rail (227) vertically disposed on the second slide (224), a third slide (228) slidably connected to the third slide rail (227), and a third driver (229) for driving the third slide (228) to slide. The cleaning nozzle (21) is fixedly connected to the third slide (228).
5. The dry ice cleaning apparatus for semiconductor packaging fixtures according to claim 4, characterized in that: The cleaning mechanism (2) also includes a position sensor (24) disposed on the third slide (228) and used to monitor the position of the cleaning nozzle (21).
6. The dry ice cleaning apparatus for semiconductor packaging fixtures according to claim 1, characterized in that: The supply component (23) includes a storage tank (231) for storing dry ice and a mixer (232) disposed below the storage tank (231) for mixing dry ice with high-pressure gas to form the cleaning medium. The input end of the mixer (232) is connected to the storage tank (231) and the high-pressure gas source, respectively, and the output end of the mixer (232) is connected to the cleaning nozzle (21).
7. The dry ice cleaning apparatus for semiconductor packaging fixtures according to claim 1, characterized in that: The air intake assembly (32) includes a dust collection fan (321) and a filter (322) whose air outlet is connected to the dust collection fan (321). The air inlet of the filter (322) is connected to the dust collection hopper (31).
8. The dry ice cleaning apparatus for semiconductor packaging fixtures according to claim 7, characterized in that: The dust collection hopper (31) is cone-shaped, and the connection between the air inlet end of the filter (322) and the dust collection hopper (31) is located at the bottom of the dust collection hopper (31).
9. The dry ice cleaning apparatus for semiconductor packaging fixtures according to claim 1, characterized in that: The housing (1) also includes a drive chamber (15) located below the cleaning chamber (11). A partition (16) is provided between the cleaning chamber (11) and the drive chamber (15). The supply component (23) and the dust collection mechanism (3) are both located inside the drive chamber (15). The upper end of the dust collection hopper (31) is covered on the bottom surface of the partition (16), and the dust removal hole (121) penetrates the partition (16) and is connected to the dust collection hopper (31).