Welding device of pump shell for vacuum equipment

Abstract

The utility model provides a welding device of a pump case for vacuum equipment, which comprises a base, the top of the base is provided with a fixing disc, the fixing disc is provided with a through hole in a penetrating manner, the welding end of a pump case body can extend into the through hole, the base is provided with a positioning mechanism for positioning the pump case body, and the base is provided with a fixing plate. A clamping mechanism for positioning the flange plate is arranged on the fixing plate relative to the pump shell body, a welding mechanism and a driving mechanism for driving the welding mechanism to rotate along the through opening are arranged on the fixing disc, the driving mechanism comprises an arc-shaped plate which is rotationally arranged on the fixing disc, and the arc-shaped plate and the through opening are coaxially arranged; a plurality of convex teeth are fixedly connected to the outer wall of the arc-shaped plate in the perimeter direction of the arc-shaped plate, the at least two driving gears are arranged on the two sides of the through opening in a relatively rotating mode through rotating shafts, the two driving gears are meshed with the convex teeth, the rotating shafts are driven by a first motor, and the first motor is fixedly installed on the fixing disc. According to the welding device for the pump shell for the vacuum equipment, the effect of guaranteeing the sealing performance of a welding seam between the pump shell body and the flange plate can be achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the pump shell manufacturing technical field for vacuum equipment more specifically, relate to a kind of welding device of pump shell for vacuum equipment. BACKGROUND

[0002] With the rapid development of modern industry, vacuum technology is more and more widely used in semiconductor manufacturing, aerospace, chemical industry and electronic packaging and many other fields, has become one of the key technologies indispensable to high-end manufacturing, the core component of vacuum equipment is pump shell, which undertakes the heavy responsibility of maintaining the vacuum environment inside the equipment, ensuring efficient gas circulation and resisting extreme working conditions, its quality and performance are directly related to the operation reliability and service life of the whole vacuum equipment, the traditional pump shell is mostly completed by manual welding when welding with flange plate, that is, workers hold welding gun along the weld to weld gradually, to realize the sealed welding of shell and flange plate, but since the diameter of pump shell is more than half a meter, that is, the weld between shell and flange plate is a circular weld with a length of more than 1.5 meters, manual welding not only time-consuming and laborious, but also requires high technical skills of workers.

[0003] For the above problems, for the technical problem that the existing pump shell is mostly completed by manual welding when welding with flange plate, that is, workers hold welding gun along the weld to weld gradually, to realize the sealed welding of shell and flange plate, manual welding not only time-consuming and laborious, but also requires high technical skills of workers, after a lot of retrieval, a kind of welding device of pump shell for vacuum equipment is found in patent announcement No. CN221817575U, which belongs to the pump shell manufacturing technical field for vacuum equipment, the device designs index plate rotary table and two shielded welding machines, so that the welding device of pump shell for vacuum equipment can rotate under the drive of index plate rotary table, at the same time, the welding gun of two shielded welding machines performs sealed welding on the circular weld, after sealed welding is completed, workers stop the index plate rotary table and two shielded welding machines by operating button, then take down the shell and flange plate after sealed welding, so as to realize the rotation of spot-welded shell and flange plate under the drive of index plate rotary table, and the welding of pump shell for vacuum equipment of different sizes is realized through positioning sleeve, which can not only improve the welding efficiency of pump shell, but also reduce the technical requirements for workers, and has good applicability.

[0004] However, the above-mentioned welding device of pump shell for vacuum equipment still has some problems. For example, the rotation range of the index plate rotary table of the device is limited, and the connecting surface of the pump shell and the flange plate is circular, which makes it necessary to change the position for welding another part after welding a part of the pump shell and the flange plate, so as to ensure the stability of the weld joint between the pump shell and the flange plate, which may reduce the sealing performance of the connection between them. For the above problems, the utility model provides a kind of welding device of pump shell for vacuum equipment. Utility Model Content

[0005] The present invention aims to solve the technical problems mentioned in the background art and provide a welding device for pump housings of vacuum equipment.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a welding device for a pump housing of a vacuum equipment, comprising: a base with a fixed plate on its top; a through-hole through which the welding end of the pump housing body can extend; a positioning mechanism for positioning the pump housing body on the base; a fixed plate on the base; a clamping mechanism for positioning a flange on the fixed plate relative to the pump housing body; a welding mechanism and a driving mechanism for driving the welding mechanism to rotate along the through-hole on the fixed plate; the welding mechanism is configured to weld the connection between the pump housing body and the flange; the driving mechanism includes:

[0007] An arc-shaped plate is rotatably mounted on the fixed plate. The arc-shaped plate is coaxially arranged with the through-hole. Multiple protruding teeth are fixedly connected to the outer wall of the arc-shaped plate along its circumference.

[0008] At least two drive gears are arranged on both sides of the opening via a rotating shaft, and both drive gears mesh with the convex tooth. The rotating shaft is driven by a first motor, which is fixedly mounted on the fixed plate.

[0009] A further preferred embodiment: the welding mechanism includes:

[0010] The mounting column is fixedly installed on the arc plate, and an electric telescopic rod is rotatably connected to the mounting column;

[0011] An installation assembly is fixedly mounted on the extension end of the electric telescopic rod, and a welding gun is rotatably connected to the installation assembly. The installation assembly is configured to adjust the position and angle of the welding gun.

[0012] A further preferred embodiment: the clamping mechanism includes:

[0013] A double-ended screw is rotatably mounted on the fixed plate. Sliders are threadedly connected to both ends of the double-ended screw. The sliders are slidably mounted on the fixed plate. The double-ended screw is driven by a second motor, which is fixedly mounted on the fixed plate.

[0014] Two clamping plates are fixedly connected to the ends of the two sliders that are away from the double-ended screw. The two clamping plates are arranged opposite to each other, and the clamping plates have an arc-shaped structure with an end face that fits against the outer wall of the flange.

[0015] A further preferred embodiment: the clamping plate has a clamping groove for inserting the flange, the width of the clamping groove being greater than the thickness of the flange.

[0016] A further preferred embodiment: the positioning mechanism comprises two sets, which are arranged opposite to each other on both sides of the base along the pump casing body, and the positioning mechanism includes:

[0017] A support plate is fixedly installed on the side wall of the base. A pressure plate is rotatably connected to the support plate. The pressure plate has an L-shaped structure and an inclined plate is integrally formed on the pressure plate.

[0018] A hydraulic cylinder, the first end of which is hinged to the base, and the second end of which is hinged to the end of the inclined plate away from the pressure plate.

[0019] A further preferred embodiment: the diameter of the connection point between the pump casing and the flange is smaller than the diameter of the port.

[0020] Beneficial effects:

[0021] 1. By incorporating a welding mechanism, a clamping mechanism, a positioning mechanism, and a driving mechanism, the clamping and positioning mechanisms respectively position the flange and the pump casing body. Then, the driving mechanism drives the welding mechanism to perform circular welding between the flange and the pump casing body. This structural design achieves automated circular motion of the welding mechanism, significantly improving welding efficiency compared to manual welding. It ensures the uniformity and continuity of the welding trajectory, avoiding problems such as inconsistent welding speed and trajectory deviation caused by human operation. The coaxial setting can accurately position the welding position, which is conducive to improving welding accuracy and ensuring the quality consistency of the circumferential weld of the pump casing. It meets the stringent requirements of vacuum equipment for pump casing sealing, ensures the smoothness of the weld connection between the pump casing body and the flange, and improves the sealing performance at the connection between the two.

[0022] 2. The flange is equipped with a clamping groove, which facilitates the insertion of the flange and also limits its position in both the horizontal and vertical directions. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0024] Figure 2 This is a side view of the present invention.

[0025] Figure 3 This is a schematic diagram of the positioning mechanism of this utility model.

[0026] Figure 4 This is a schematic diagram of the drive mechanism of this utility model.

[0027] Figure 5This is a schematic diagram of the structure of the first motor of this utility model.

[0028] Figure 6 This is a schematic diagram of the welding mechanism of this utility model.

[0029] Figure 7 This is a schematic diagram of the clamping mechanism of this utility model.

[0030] Figures 1-7 Components: 1. Base; 2. Fixing plate; 3. Pump casing body; 4. Flange; 5. Fixing plate; 6. Welding mechanism; 61. Mounting column; 62. Electric telescopic rod; 63. Mounting assembly; 64. Welding gun; 7. Clamping mechanism; 71. Double-ended screw; 72. Second motor; 73. Slider; 74. Clamping plate; 75. Slide groove; 8. Positioning mechanism; 81. Pressure plate; 82. Inclined plate; 83. Support plate; 84. Hydraulic cylinder; 9. Drive mechanism; 91. Arc plate; 92. Drive gear; 93. Convex tooth; 94. Rotating shaft; 95. First motor; 10. Clamping groove; 11. Through port. Detailed Implementation

[0031] The following will refer to the appendix in the embodiments of this utility model. Figures 1-7 The technical solutions in the embodiments of this utility model will be clearly and completely described.

[0032] Please see Figures 1-7 In this embodiment of the present invention, a welding device for a pump housing of a vacuum equipment includes a base 1, a fixing plate 5 on its top, a through-hole 11 through which the welding end of the pump housing body 3 can extend, a positioning mechanism 8 for positioning the pump housing body 3 on the base 1, a fixing plate 2 on the base 1, a clamping mechanism 7 for positioning a flange 4 on the fixing plate 2 relative to the pump housing body 3, a welding mechanism 6 on the fixing plate 5, and a driving mechanism 9 for driving the welding mechanism 6 to rotate along the through-hole 11. The drive mechanism 9 is configured to weld the connection between the pump housing body 3 and the flange 4. The drive mechanism 9 includes an arc plate 91, which is rotatably mounted on the fixed plate 5. The arc plate 91 is coaxially arranged with the through port 11. Multiple protruding teeth 93 are fixedly connected to the outer wall of the arc plate 91 along its circumference. At least two drive gears 92 are rotatably mounted on both sides of the through port 11 via a rotating shaft 94. Both drive gears 92 mesh with the protruding teeth 93. The rotating shaft 94 is driven by a first motor 95, which is fixedly mounted on the fixed plate 5.

[0033] Specifically, the base 1 serves as the fundamental support component of the entire welding device. The design of the through-hole 11 allows the welding end of the pump housing body 3 to smoothly extend, facilitating subsequent welding operations to directly target the connection between the pump housing body 3 and the flange 4. The positioning mechanism 8 is responsible for precisely fixing the pump housing body 3 to prevent displacement during welding. The clamping mechanism 7 firmly fixes the flange 4, ensuring the relative position of the two is stable. The drive mechanism 9 is crucial for causing the welding mechanism 6 to rotate circumferentially along the through-hole 11. The arc plate 91, as an intermediate component of the transmission, is coaxial with the through-hole 11 to ensure that the rotation trajectory matches the welding requirements. The first motor 95 drives the rotating shaft 94 to rotate, which in turn drives the drive gear 92 connected to it. Since the drive gear 92 meshes with the protruding teeth 93 on the outer wall of the arc plate 91, it drives the arc plate 91 to rotate. The arc plate 91 rotates stably. When the arc plate 91 rotates, the welding mechanism 6 installed on it moves synchronously in a circular motion, carrying out welding work around the connection between the pump casing body 3 and the flange 4, thereby realizing the welding of the flange 4 and the pump casing body 3. This structural design realizes the automated circular motion of the welding mechanism 6, which greatly improves welding efficiency compared with manual welding, ensures the uniformity and continuity of the welding trajectory, and avoids problems such as inconsistent welding speed and trajectory deviation caused by human operation. The coaxial setting can accurately position the welding position, which is conducive to improving welding accuracy, ensuring the quality consistency of the circumferential weld of the pump casing, meeting the stringent requirements of vacuum equipment for the sealing of the pump casing, ensuring the smoothness of the weld connection between the pump casing body 3 and the flange 4, and improving the sealing of the connection between the two.

[0034] It should be noted that the positioning mechanism 8 is a structure for fixing the pump casing body 3, and can fix the flange 4 with corresponding clamps to ensure its stability during welding. Similarly, the clamping mechanism 7 is a clamp that can fix the flange 4. Secondly, when welding the connection between the pump casing body 3 and the flange 4, the driving mechanism 9 drives the welding mechanism 6 to move in a circle along the port 11. When the first motor 95 drives the welding mechanism 6 to rotate one revolution, the welding of the pump casing body 3 and the flange 4 is completed. At this time, the first motor 95 will drive the arc plate 91 to reset. The advantage of this is that it avoids the welding mechanism 6 from getting tangled with the external wiring. Of course, the wiring installation method and working principle of the welding mechanism 6 are existing technologies and will not be described here.

[0035] In this embodiment of the utility model, such as Figure 1 and 6As shown, the welding mechanism 6 includes a mounting column 61, which is fixedly mounted on the arc-shaped plate 91. An electric telescopic rod 62 is rotatably connected to the mounting column 61. A mounting assembly 63 is fixedly mounted on the extension end of the electric telescopic rod 62. A welding gun 64 is rotatably connected to the mounting assembly 63. The mounting assembly 63 is configured to adjust the position and angle of the welding gun 64. Specifically, the mounting column 61 serves as a basic connecting component, firmly fixed to the arc-shaped plate 91. The electric telescopic rod 62 is rotatably connected to it, allowing for flexible extension, retraction, and angle adjustment. The mounting assembly 63 carries the welding gun 64. Through the extension and retraction of the electric telescopic rod 62, the distance between the welding gun 64 and the part to be welded can be adjusted. The mounting assembly 63 itself also has the function of adjusting the position and angle of the welding gun 64. It can finely adjust the posture of the welding gun 64 in real time according to different pump housing models and different welding position requirements. When the drive mechanism 9 drives the arc-shaped plate 91 to rotate, the electric telescopic rod 62 and the mounting assembly 63 work together to ensure that the welding gun 64 always maintains a suitable posture for welding the connection between the pump housing body 3 and the flange 4. It should be noted that, according to the reference... Figure 6 As shown, the electric telescopic rod 62 needs to be paired with a plate, clamps, and a rotating shaft to achieve its own rotation. The mounting assembly 63, used to adjust the structure of the welding gun 64, includes a threaded rod, a rotating shaft, clamps, and a plate. The installation method between them is existing technology.

[0036] In this embodiment of the utility model, such as Figure 1 , Figure 2 and Figure 7As shown, the clamping mechanism 7 includes a double-ended screw 71, which is rotatably mounted on the fixed plate 2. Slider 73s are threadedly connected to both ends of the double-ended screw 71 and slide on the fixed plate 2. The double-ended screw 71 is driven by a second motor 72, which is fixedly mounted on the fixed plate 2. Two clamping plates 74 are fixedly connected to the ends of the two sliders 73 opposite to the double-ended screw 71. The two clamping plates 74 are arranged opposite to each other and have flanges. The arc-shaped structure of the outer wall of the flange 4, which fits against the end face, specifically, because the threads at both ends of the double-ended screw 71 turn in opposite directions, when the second motor 72 drives the double-ended screw 71 to rotate, the two sliders 73 fitted on it will slide in a straight line towards or away from each other. The sliders 73 are fixedly connected to the clamping plates 74. As the sliders 73 slide, the two arc-shaped clamping plates 74 move closer or further away synchronously, thereby realizing the clamping and loosening operation of the flange 4. Before welding, the second motor 72 is started to drive the clamping plates 73 to rotate. The clamping plate 74 holds the flange 4, ensuring that the flange 4 is fixed in position during welding and will not shift or shake. The arc-shaped clamping plate 74 fits against the outer wall of the flange 4, increasing the contact area and distributing the force more evenly, effectively preventing deformation of the flange 4. The automated clamping method saves manpower, improves clamping efficiency, creates favorable conditions for subsequent fast and accurate welding, and ensures welding quality. Furthermore, the clamping plate 74 has a clamping groove 10 for inserting the flange 4. The width of the clamping groove 10 is greater than the thickness of the flange 4. During clamping, the flange 4 is inserted along the clamping groove 10. Since the width of the clamping groove 10 is slightly greater than the thickness of the flange 4, a certain amount of space is reserved for the flange 4 to facilitate its smooth insertion. At the same time, it can also limit the flange 4 in the horizontal and vertical directions. When the double-ended screw 71 drives the slider 73 to close the clamping plate 74, the clamping groove 10 restricts the position of the flange 4 from both sides and the bottom, preventing it from moving during welding.

[0037] In this embodiment of the utility model, such as Figure 1 , Figure 2 and Figure 3As shown, the positioning mechanism 8 consists of two sets, arranged opposite each other on both sides of the base 1 along the pump housing body 3. The positioning mechanism 8 includes a support plate 83, which is fixedly installed on the side wall of the base 1. A pressure plate 81 is rotatably connected to the support plate 83. The pressure plate 81 has an L-shaped structure, and an inclined plate 82 is integrally formed on the pressure plate 81. A hydraulic cylinder 84 has its first end hinged to the base 1, and its second end hinged to the end of the inclined plate 82 away from the pressure plate 81. Specifically, by activating the hydraulic cylinder 84, its piston rod extends and retracts, causing the inclined plate 82 to rotate. Since the pressure plate 81 is rotatably connected to the support plate 83, the pressure plate 81 moves in tandem with the inclined plate 82. The L-shaped pressure plate... When the pressure plate 81 is pressed down or raised, it presses down firmly against the bottom support of the pump housing body 3, restricting the position of the pump housing body 3 from both sides to prevent horizontal or vertical displacement during welding. The positioning force is controllable by using a hydraulic cylinder 84 to drive the pressure plate 81. The clamping force can be flexibly adjusted according to the pump housing body 3 of different sizes and materials to avoid damage to the pump housing body 3 due to excessive pressure, and failure to achieve the positioning effect due to insufficient pressure. At the same time, the symmetrical positioning on both sides ensures that the pump housing body 3 is subjected to balanced force, maintains a stable welding posture, and helps to improve welding accuracy and reduce welding defects caused by the displacement of the pump housing body 3.

[0038] In this embodiment of the utility model, such as Figure 1 As shown, the diameter of the connection between the pump housing body 3 and the flange 4 is smaller than the diameter of the through-hole 11. Specifically, before welding, the welding end of the pump housing body 3 is smoothly passed through the through-hole 11 until the connection between the pump housing body 3 and the flange 4 reaches a suitable welding position. The through-hole 11 provides ample operating space for the welding gun 64 to carry out welding work around the connection, while avoiding interference and collision between the welding mechanism 6 and the edges of the pump housing body 3 and the through-hole 11.

[0039] Working principle: First, the welding end of the pump housing body 3 is inserted into the port 11. Then, by starting the hydraulic cylinder 84, its piston rod extends and retracts, driving the inclined plate 82 to rotate. Since the pressure plate 81 is rotatably connected to the support plate 83, the pressure plate 81 moves in conjunction with the inclined plate 82. The L-shaped pressure plate 81 presses down or lifts. When pressing down, the pressure plate 81 tightly presses against the bottom support foot of the pump housing body 3, restricting the position of the pump housing body 3 from both sides. Then, when the second motor 72 drives the double-headed screw 71 to rotate, the two sliders 73 sleeved on it will slide relative to each other. The sliders 73 are fixedly connected to the clamping plate 74. As the sliders 73 slide, the two arc-shaped clamping plates 74 move synchronously, so that the flange 4 is located in the clamping groove 10, thereby clamping the flange 4. Finally, the position of the welding gun 64 is adjusted by the electric telescopic rod 62 and the mounting assembly 63, so that the nozzle of the welding gun 64 is aligned with the connection between the flange 4 and the pump housing body 3. Finally, by the first Motor 95 drives shaft 94 to rotate, which in turn drives drive gear 92 connected to it. Since drive gear 92 meshes with the protruding teeth 93 on the outer wall of arc plate 91, it drives arc plate 91 to rotate stably. When arc plate 91 rotates, welding mechanism 6 installed on it moves synchronously in a circular motion, carrying out welding work around the connection between pump casing body 3 and flange 4, thereby realizing the welding of flange 4 and pump casing body 3. This structural design realizes the automated circular motion of welding mechanism 6, which greatly improves welding efficiency compared with manual welding, ensures the uniformity and continuity of welding trajectory, and avoids problems such as inconsistent welding speed and trajectory deviation caused by human operation. The coaxial setting can accurately position the welding position, which is conducive to improving welding accuracy, ensuring the quality consistency of the circumferential weld of pump casing, meeting the stringent requirements of vacuum equipment for pump casing sealing, ensuring the smoothness of the weld connection between pump casing body 3 and flange 4, and improving the sealing performance of the connection between the two.

Claims

1. A welding device for a pump housing of a vacuum equipment, characterized in that, include: A base (1) has a fixed plate (5) on its top. The fixed plate (5) has a through-hole (11) through which the welding end of the pump casing body (3) can be inserted. The base (1) has a positioning mechanism (8) for positioning the pump casing body (3). The base (1) has a fixed plate (2). The fixed plate (2) has a clamping mechanism (7) for positioning the flange (4) relative to the pump casing body (3). The fixed plate (5) has a welding mechanism (6) and a driving mechanism (9) for driving the welding mechanism (6) to rotate along the through-hole (11). The welding mechanism (6) is configured to weld the connection between the pump casing body (3) and the flange (4). The driving mechanism (9) includes: An arc-shaped plate (91) is rotatably mounted on the fixed disk (5). The arc-shaped plate (91) is coaxially mounted with the through-hole (11). Multiple protruding teeth (93) are fixedly connected to the outer wall of the arc-shaped plate (91) along its circumference. At least two drive gears (92) are arranged on both sides of the opening (11) via a rotating shaft (94). Both drive gears (92) mesh with the convex tooth (93). The rotating shaft (94) is driven by a first motor (95), which is fixedly mounted on the fixed disk (5).

2. The welding device for a pump housing in a vacuum device according to claim 1, characterized in that: The welding mechanism (6) includes: Mounting column (61) is fixedly mounted on the arc plate (91), and an electric telescopic rod (62) is rotatably connected to the mounting column (61); Mounting assembly (63) is fixedly mounted on the extension end of the electric telescopic rod (62), and welding gun (64) is rotatably connected to the mounting assembly (63). The mounting assembly (63) is configured to adjust the position and angle of the welding gun (64).

3. The welding device for a pump housing in a vacuum device according to claim 1, characterized in that: The clamping mechanism (7) includes: A double-ended screw (71) is rotatably mounted on the fixed plate (2). The two ends of the double-ended screw (71) are fitted with and threaded with sliders (73). The sliders (73) are slidably mounted on the fixed plate (2). The double-ended screw (71) is driven by a second motor (72). The second motor (72) is fixedly mounted on the fixed plate (2). Two clamping plates (74) are fixedly connected to the ends of the two sliders (73) away from the double-headed screw (71), the two clamping plates (74) are arranged opposite to each other, and the clamping plates (74) have an arc-shaped structure with an end face that fits against the outer wall of the flange (4).

4. The welding device for a pump housing in a vacuum device according to claim 3, characterized in that: The clamping plate (74) has a clamping groove (10) for inserting the flange (4), and the width of the clamping groove (10) is greater than the thickness of the flange (4).

5. The welding device for a pump housing in a vacuum equipment according to claim 1, characterized in that: The positioning mechanism (8) consists of two sets, which are arranged opposite to each other on both sides of the base (1) along the pump casing body (3). The positioning mechanism (8) includes: A support plate (83) is fixedly installed on the side wall of the base (1). A pressure plate (81) is rotatably connected to the support plate (83). The pressure plate (81) has an L-shaped structure and an inclined plate (82) is integrally formed on the pressure plate (81). A hydraulic cylinder (84) has its first end hinged to the base (1) and its second end hinged to the end of the inclined plate (82) away from the pressure plate (81).

6. The welding device for a pump housing in a vacuum device according to claim 1, characterized in that: The diameter of the connection point between the pump casing body (3) and the flange (4) is smaller than the diameter of the port (11).

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