Mask clamping mechanism

Abstract

The utility model relates to the technical field of semiconductors, in particular to a mask clamping mechanism, which comprises a bottom plate, a pair of mounting grooves, a pair of clamping mechanisms, a pair of clamping mechanisms and a pair of clamping mechanisms, the pair of guide rails are arranged on the bottom plate in parallel and are respectively positioned on the outer sides of the corresponding mounting grooves, so that the two mounting grooves are positioned between the pair of guide rails; the clamping jaw assemblies are arranged at the two ends in the length direction of the guide rail correspondingly, and the movement tracks of the clamping jaw assemblies cover the intervals of the corresponding mounting grooves; the driving device comprises a coil and magnetic steel, the coil is arranged in the mounting groove, and the magnetic steel is mounted on the side, adjacent to the coil, of the clamping jaw assembly; and the pair of grating rulers are respectively arranged on the clamping jaw assembly through fixing plates and are arranged corresponding to the coils.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a mask clamping mechanism. Background Technology

[0002] In semiconductor manufacturing, microelectronic packaging, and other precision-driven processing fields, photomasks are an indispensable core component in photolithography. Their installation, replacement, and transportation must typically be completed precisely within extremely limited spaces. However, most current gripping mechanism designs fail to prioritize space optimization. This design flaw makes operation extremely inconvenient in confined working environments, and in some cases, it's impossible to effectively hold the photomask. This situation not only severely restricts production efficiency but also greatly limits the flexibility of equipment layout, creating numerous obstacles throughout the production process.

[0003] Furthermore, photomasks, being delicate, thin sheet-like objects, are inherently lightweight and easily damaged, placing extremely stringent demands on the control of clamping force. Traditional clamping mechanisms typically employ mechanical or pneumatic clamping methods. While these methods can provide sufficient clamping force to a certain extent, they fall short in terms of precise force control. In actual operation, it is difficult to accurately control the clamping force, and even slight errors can easily lead to deformation or damage to the photomask, thereby affecting product quality and production stability.

[0004] Therefore, this application develops a mask gripping mechanism to solve the problems existing in the prior art. Utility Model Content

[0005] The purpose of this invention is to provide a mask clamping mechanism to solve the problem in the prior art that the mask plate cannot be effectively clamped in a limited space.

[0006] The technical solution of this utility model is: a mask clamping mechanism, comprising:

[0007] The base plate has a pair of mounting grooves that are centrally symmetrically distributed and staggered with each other on its surface.

[0008] A pair of guide rails are arranged parallel to each other on the base plate, and each is located outside the corresponding mounting slot, so that the two mounting slots are located between the pair of guide rails;

[0009] A pair of gripper assemblies are respectively disposed at both ends along the length of the guide rail, and their movement trajectory covers the area corresponding to the mounting groove;

[0010] A driving device, comprising a coil and a magnet, wherein the coil is placed in the mounting groove and the magnet is mounted on the side of the gripper assembly adjacent to the coil;

[0011] A pair of grid rulers are respectively mounted on the gripper assembly via fixing plates and are arranged correspondingly to the coil.

[0012] Preferably, an adjustment plate is installed in the mounting slot, and the adjustment plate has multiple slots that are evenly arranged on the adjustment plate to generate a cogging force between the adjustment plate and the magnet.

[0013] Preferably, the gripper assembly includes a gripper and a movable plate. The movable plate spans across the two guide rails and is slidably disposed on the guide rails to achieve movement along the direction of the guide rails. The gripper is disposed at the end of the movable plate away from the grid ruler, and the gripper is bent into an L-shape for gripping an object.

[0014] Preferably, multiple coils are provided and arranged in an array within the mounting slot, and multiple magnets are provided and arranged in an array on the movable plate. The magnets are arranged opposite to the coils, and the linear motion of the movable plate is achieved through the interaction between the magnetic field generated by the coils and the magnets.

[0015] Preferably, a magnetic guide plate is provided between the magnet and the coil, and the magnetic guide plate is fixed on the magnet or the coil to enhance the magnetic force.

[0016] Preferably, an encoder is provided on one side of the mounting groove, in the direction of movement of the gripper assembly.

[0017] Preferably, the base plate is provided with a plurality of Hall elements along the moving direction of the gripper assembly, and the plurality of Hall elements correspond to the positions of the moving plate.

[0018] Compared with the prior art, the advantages of this utility model are:

[0019] (1) A linear motor with magnets and coils working together is used to reduce the thickness. At the same time, the guide rails are symmetrically distributed and staggered to reduce the length to meet the space requirements. Furthermore, magnetic plates are set on the magnets or coils to increase the magnetic force and increase the thrust and clamping force.

[0020] (2) The grid ruler can acquire the position information of the gripper assembly in real time by working with the reading device to achieve precise control. The encoder is installed to monitor the displacement position and motion state of the gripper assembly in real time. Multiple Hall elements are evenly distributed on the surface of the base plate to accurately feed back the real-time position information of the moving plate, which complements the encoder data and ensures the accuracy and reliability of motion control.

[0021] (3) A rigid material adjustment plate is installed in the mounting slot to form a toothed effect with the magnet. After power is cut off, it provides a stable locking force for the moving plate to prevent the clamped object from falling. Attached Figure Description

[0022] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0023] Figure 1 This is a schematic diagram of the structure of the mask gripping mechanism described in this utility model;

[0024] Figure 2 This is a top view of the structural positions on the base plate of this utility model;

[0025] Figure 3 This is a schematic diagram of the gripper assembly described in this utility model;

[0026] Figure 4 This is a schematic diagram of the structure of the adjustment plate described in this utility model.

[0027] The components are: 1. Base plate; 11. Mounting slot; 2. Guide rail; 3. Gripper assembly; 31. Gripper; 32. Moving plate; 4. Drive device; 41. Coil; 42. Magnet; 5. Grid ruler; 51. Fixing plate; 6. Adjusting plate; 61. Slot; 7. Encoder; 8. Hall element. Detailed Implementation

[0028] The present invention will be further described in detail below with reference to specific embodiments:

[0029] like Figures 1-3 As shown, a mask gripping mechanism includes a base plate 1, guide rails 2, gripper assemblies 3, a drive device 4, and a grid ruler 5. The base plate 1 serves as a supporting foundation, and its surface is provided with a pair of mounting grooves 11. Correspondingly, a pair of guide rails 2 are provided on the outer side of the mounting grooves 11, such that the two mounting grooves 11 are contained between these guide rails 2. This allows the guide rails 2 to not only provide precise guidance for the movement of the gripper assembly 3, but also to provide sufficient stability for the gripper assembly 3, ensuring that the gripper assembly 3 can move smoothly along a predetermined direction. The two gripper assemblies 3 are respectively positioned... At both ends of the guide rail 2 along its length, its movement trajectory can completely cover the corresponding mounting slot 11, allowing the gripper assembly 3 to move freely within the range of the mounting slot 11. The drive device 4 is the power source for driving the gripper assembly 3. It consists of a coil 41 and a magnet 42. The coil 41 is placed in the mounting slot 11, while the magnet 42 is installed on the side of the gripper assembly 3 adjacent to the coil 41. When the coil 41 is energized, it generates a magnetic field. The magnet 42 will be subjected to a force under the action of the magnetic field, thereby driving the gripper assembly 3 to move along the guide rail 2.

[0030] In this embodiment, as Figure 3As shown, the gripper assembly 3 includes a gripper 31 and a movable plate 32. The movable plate 32 spans across the two guide rails 2 and is mounted on the guide rails 2 in a sliding manner, so that the movable plate 32 can move smoothly along the direction of the guide rails 2, thereby driving the gripper 31 to move synchronously. The gripper 31 is located at the end of the movable plate 32 away from the grid ruler 5, and its shape is bent into an L shape, so that the gripper 31 can better fit the object and accurately grip the object.

[0031] Furthermore, a pair of grid rulers 5 are respectively provided on the two moving plates 32 and extend along the clamping direction. They are respectively mounted on the moving plates 32 through the fixing plate 51. The position of the grid rulers 5 corresponds to that of the coil 41. The main function of the grid rulers 5 is to accurately measure the displacement of the gripper assembly 3. By cooperating with the corresponding reading device, the position information of the gripper assembly 3 can be obtained in real time, thereby realizing precise control of the movement position of the gripper assembly 3.

[0032] In practical applications, such as Figures 2-3 As shown, in order to complete the gripping operation in a limited space, although the drive mechanism such as the electric cylinder can be miniaturized to meet the space requirements, its accuracy cannot be guaranteed. Therefore, a linear motor with magnet 42 and coil 41 working together is used. At the same time, the thickness of magnet 42 and the number of turns of coil 41 can be reduced to meet the space requirements. In addition, the two guide rails 2 are centrally symmetrical and staggered. While meeting the gripping force, the space required in length is reduced. However, when the number of turns of coil 41 is insufficient or magnet 42 is too thin, it cannot generate an effective thrust to meet the force required to grip the object. Therefore, a magnetic plate (not shown in the figure) is fixed on magnet 42 or coil 41. Regardless of whether the magnetic plate is placed on magnet 42 or coil 41, the magnetic force can be increased, thereby increasing the thrust of gripper assembly 3. While meeting the space requirements, the thrust is increased, thereby increasing the gripping force and meeting the gripping requirements.

[0033] Furthermore, multiple coils 41 are arranged in an array within the mounting groove 11, and multiple magnets 42 are arranged in an array on the moving plate 32. The magnets 42 are arranged opposite to the coils 41. Through the interaction between the magnetic field generated by the coils 41 and the magnets 42, the linear motion of the moving plate 32 is achieved. The array of multiple coils 41 forms a more uniform magnetic field region, improving the movement accuracy and increasing the overall thrust density, giving the gripper 31 a greater clamping force. The array of multiple magnets 42 can further reduce the deflection or vibration generated by a single magnet 42, improving the stability of the movement.

[0034] like Figure 4As shown, to prevent the clamped object from falling due to a sudden power outage, a rigid adjustment plate 6 is installed in the mounting slot 11. Multiple equally spaced slots 61 are evenly distributed on the surface of the adjustment plate 6. When the magnet 42 on the moving plate 32 is in a relative position with the adjustment plate 6, the magnetic field of the magnet 42 will be embedded in the slot 61 structure of the adjustment plate 6, thereby forming a cogging effect between the two. The cogging force can exist independently of the electromagnetic force. Through the rigid structure of the adjustment plate 6 and the geometric cooperation of the magnet 42 array, a stable locking force is provided to the moving plate 32 after the power is cut off, ensuring that the clamped object can still maintain its position when there is no power supply, avoiding the risk of falling.

[0035] Furthermore, on one side of the mounting slot 11, specifically in the direction of movement of the gripper assembly 3 when it grips an object, an encoder 8 is installed to monitor the displacement position and movement state of the gripper assembly 3 in real time. At the same time, multiple Hall elements 9 are evenly distributed on the surface of the base plate 1 along the moving path of the gripper assembly 3. When the moving plate 32 moves with the gripper assembly 3, the Hall elements 9 can accurately feed back the real-time position information of the moving plate 32 through changes in the magnetic field, which complements the data from the encoder 8 and ensures the accuracy and reliability of motion control.

[0036] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. It is obvious to those skilled in the art that this utility model is not limited to the details of the above exemplary embodiments, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and therefore, all changes falling within the meaning and scope of the equivalents of the claims are intended to be included within this utility model.

Claims

1. A mask gripping mechanism, characterized in that, include: The base plate (1) has a pair of mounting grooves (11) that are centrally symmetrically distributed and staggered with each other on its surface; A pair of guide rails (2) are arranged parallel to each other on the base plate (1) and each is located outside the corresponding mounting groove (11), so that the two mounting grooves (11) are located between the pair of guide rails (2); A pair of gripper assemblies (3) are respectively disposed at both ends along the length direction of the guide rail (2), and their movement trajectories cover the interval corresponding to the mounting groove (11); The driving device (4) includes a coil (41) and a magnet (42). The coil (41) is placed in the mounting groove (11), and the magnet (42) is mounted on the side of the gripper assembly (3) adjacent to the coil (41). A pair of grid rulers (5) are respectively mounted on the gripper assembly (3) via fixing plates (51) and are set correspondingly to the coil (41).

2. The mask gripping mechanism according to claim 1, characterized in that: The gripper assembly (3) includes a gripper (31) and a movable plate (32). The movable plate (32) spans across the two guide rails (2) and is slidably disposed on the guide rails (2) to realize movement along the direction of the guide rails (2). The gripper (31) is disposed at the end of the movable plate (32) away from the grid ruler (5), and the gripper (31) is bent into an L shape for gripping objects.

3. The mask gripping mechanism according to claim 2, characterized in that: Multiple coils (41) are arranged in an array within the mounting slot (11), and multiple magnets (42) are arranged in an array on the movable plate (32). The magnets (42) are arranged opposite to the coils (41). The linear motion of the movable plate (32) is achieved through the interaction between the magnetic field generated by the coils (41) and the magnets (42).

4. The mask gripping mechanism according to claim 1, characterized in that: A magnetic guide plate is provided between the magnet (42) and the coil (41). The magnetic guide plate is fixed on the magnet (42) or the coil (41) to enhance the magnetic force.

5. A mask gripping mechanism according to claim 1, characterized in that: An adjustment plate (6) is installed in the mounting slot (11). The adjustment plate (6) has multiple slots (61) and the multiple slots (61) are evenly arranged on the adjustment plate (6) so that a cogging force is generated between the adjustment plate (6) and the magnet (42).

6. A mask gripping mechanism according to claim 1, characterized in that: An encoder (8) is provided on one side of the mounting groove (11) and in the direction of movement of the gripper assembly (3).

7. A mask gripping mechanism according to claim 2, characterized in that: The base plate (1) is provided with a plurality of Hall elements (9) along the moving direction of the gripper assembly (3), and the plurality of Hall elements (9) correspond to the positions of the moving plate (32).

Images