Vacuum coating device

Abstract

The utility model relates to the technical field of vacuum coating, and discloses a vacuum coating device which comprises a coating cavity, a vacuumizing mechanism and a feeding mechanism, a material carrier is arranged in the coating cavity; the vacuumizing mechanism is connected with the coating cavity and is used for vacuumizing the coating cavity; the feeding mechanism comprises a feeding pipeline, a first switch valve and a second switch valve, the discharging end of the feeding pipeline extends into the coating cavity and is arranged above the material carrier, and the first switch valve and the second switch valve are arranged on the feeding pipeline in a front-back spaced mode in the material flowing direction; a transition cavity is formed in the portion, between the first switch valve and the second switch valve, of the feeding pipeline. The first switch valve and the second switch valve are arranged on the feeding pipeline at intervals to form the transition cavity, when materials need to be added, the materials firstly enter the transition cavity and then enter the coating cavity after being isolated from the outside, the coating cavity does not need to be opened, feeding can be completed under the condition that the coating vacuum environment is not affected, and the coating efficiency is remarkably improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, and more specifically to a vacuum coating apparatus. Background Technology

[0002] Vacuum coating equipment typically places materials in a vacuum coating chamber and heats the materials using electron beams or induction heating, causing the surface components of the materials to evaporate in the form of atomic clusters or ions. These evaporated components then settle onto the substrate surface, forming a thin film through a film-forming process.

[0003] In existing vacuum coating equipment, when changing materials, coating needs to be stopped, the coating chamber needs to be devastated to atmospheric pressure before being opened, and then pre-weighed materials need to be added to the coating chamber. Finally, the coating chamber needs to be evacuated back to the coating process conditions.

[0004] The drawback of this structure is that changing materials takes a long time, and coating processing cannot be carried out during this period, resulting in low coating efficiency. Utility Model Content

[0005] In view of this, the present invention provides a vacuum coating device to solve the problem that existing vacuum coating devices require breaking the vacuum in the coating chamber and re-vacuuming it when changing materials, which takes a long time and results in low coating efficiency.

[0006] This utility model provides a vacuum coating apparatus, comprising:

[0007] The coating chamber contains a material carrier.

[0008] A vacuum pumping mechanism, connected to the coating cavity, is used to evacuate the coating cavity;

[0009] The feeding mechanism includes a feeding pipe, a first switching valve, and a second switching valve. The discharge end of the feeding pipe extends into the coating chamber and is spaced above the material carrier. In the direction of material flow, the first switching valve and the second switching valve are spaced back and forth on the feeding pipe. The portion of the feeding pipe between the first switching valve and the second switching valve forms a transition chamber.

[0010] Beneficial Effects: This invention creates a vacuum environment in the coating chamber by using a vacuum pumping mechanism. When materials need to be added to the coating chamber, the first switch valve is opened and the second switch valve is closed, allowing the material to pass through the first switch valve from the feed end of the feeding pipe into the transition chamber. Since the second switch valve is closed, the coating chamber is prevented from connecting with the outside. Then, the first switch valve is closed and the second switch valve is opened, allowing the material to enter the material carrier from the discharge end of the feeding pipe. The coating chamber is still not connected to the outside, thus minimizing vacuum disruption. This allows for material addition without breaking the vacuum and enables continuous coating, significantly shortening the material changeover time of the vacuum coating device and improving coating efficiency.

[0011] In one optional embodiment, the feeding pipe includes a plurality of front feed pipes and a rear feed pipe, each of the front feed pipes being connected to the rear feed pipe, each of the front feed pipes being provided with a first switching valve, and the rear feed pipe being provided with a second switching valve.

[0012] Beneficial effects: Dividing the feeding pipeline into multiple front-end and rear-end feeding pipes allows for the selection of the corresponding front-end feeding pipe based on the materials required for coating, thereby enabling the selection of the feeding sequence, specifications, and types, which can meet various coating needs and has wide applicability.

[0013] In one optional implementation, a weighing mechanism is provided at the feed end of each of the plurality of front feed tubes.

[0014] Beneficial effects: Weighing mechanisms are provided at the feeding ends of multiple front-end feed pipes, which can accurately weigh the material and add it according to the set material weight.

[0015] In one optional implementation, the weighing mechanism includes:

[0016] The feed hopper is equipped with a weighing sensor at the bottom;

[0017] A drive module, connected to the feeding bin, is used to move the feeding bin to the feeding end corresponding to the front feeding pipe and add material to the feeding end.

[0018] Beneficial effects: The material is first added to the feeding hopper, and the weighing sensor is used to accurately weigh the material in the feeding hopper. Then, the drive module moves the weighed material to the feeding end of the front feeding pipe for feeding, so as to realize automatic weighing and automatic feeding and improve feeding efficiency.

[0019] In one optional implementation, the drive module includes:

[0020] A displacement module is disposed above the feed ends of the plurality of front feed tubes;

[0021] A rotary module is mounted on the displacement module and connected to the feed bin. It is used to drive the feed bin to rotate and move the rotary module and the feed bin to the feed end above the corresponding front feed pipe through the displacement module.

[0022] Beneficial effects: After the required weight of material is added to the feeding hopper, the displacement module drives the rotary module and the feeding hopper to move to the feeding end of the corresponding front feeding pipe. Then, the rotary module drives the feeding hopper to flip, adding the material to the front feeding pipe, realizing automatic feeding. The structure is simple and easy to use.

[0023] In one optional embodiment, each of the front-end feed pipes is provided with a hopper at its feed end. After the rotary module drives the feed bin to rotate, the material is poured into the hopper.

[0024] Beneficial effects: Setting a hopper at the feed end of the front feed pipe can buffer the falling material, allowing the material to fall stably into the front feed pipe, while providing sufficient volume to prevent material accumulation and spillage.

[0025] In one optional embodiment, a feeding mechanism is further included, which is configured corresponding to the feeding hopper and is used to convey materials to the feeding hopper.

[0026] Beneficial effects: By setting up a feeding mechanism, materials can be automatically conveyed to the feeding hopper, further improving the level of automation and coating efficiency.

[0027] In one alternative implementation, the weighing sensor is a pressure sensor.

[0028] Beneficial effects: The load cell uses a pressure sensor, which has a simple structure, low operating cost, strong anti-interference ability, does not need to directly contact the material, and has little impact on the material.

[0029] In one alternative embodiment, the vacuum pumping mechanism is also connected to the transition cavity for evacuating the transition cavity.

[0030] Beneficial effect: By using a vacuum pumping mechanism to evacuate the transition cavity, the influence of external air introduced into the transition cavity during the feeding process on the coating cavity can be reduced.

[0031] In one alternative implementation, the transition cavity is independently connected to a vacuum module for independently evacuating the transition cavity.

[0032] Beneficial effects: By independently evacuating the transition cavity using the vacuum module, the influence of external air introduced into the transition cavity during the feeding process on the coating cavity can be reduced, and the vacuum level in the transition cavity can be self-adjusted.

[0033] In one optional embodiment, a coating turntable is provided inside the coating cavity, and a plurality of material carriers are provided circumferentially on the top of the coating turntable.

[0034] Beneficial effects: Multiple material carriers are rotated on the coating turntable, which can provide materials in turn and continuously add materials to the empty material carriers through the feeding mechanism, so as to achieve uninterrupted coating and further improve coating efficiency. Attached Figure Description

[0035] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0036] Figure 1 This is a schematic diagram of the structure of a vacuum coating apparatus according to an embodiment of the present invention;

[0037] Figure 2 This is a schematic diagram of the feeding mechanism of a vacuum coating apparatus according to an embodiment of the present invention;

[0038] Figure 3 This is a schematic diagram of the structure of multiple front-end feed pipes and weighing mechanism of a vacuum coating device according to an embodiment of the present invention.

[0039] Figure 4 This is a front view of multiple front-end feed pipes and a weighing mechanism of a vacuum coating apparatus according to an embodiment of the present invention;

[0040] Figure 5 This is a schematic diagram of the coating turntable of a vacuum coating apparatus according to an embodiment of the present invention.

[0041] Explanation of reference numerals in the attached figures:

[0042] 1. Coating chamber; 2. Material carrier; 3. Vacuuming mechanism; 4. Feeding mechanism; 401. Feeding pipe; 4011. Front feed pipe; 4012. Rear feed pipe; 4013. Hopper; 402. First switching valve; 403. Second switching valve; 5. Weighing mechanism; 501. Feed bin; 502. Weighing sensor; 503. Drive module; 5031. Displacement module; 5032. Rotary module; 6. Coating turntable. Detailed Implementation

[0043] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0044] The following is combined with Figures 1 to 5 The following describes embodiments of the present invention.

[0045] According to embodiments of the present invention, such as Figure 1 As shown, a vacuum coating apparatus is provided, mainly comprising: a coating chamber 1, a vacuuming mechanism 3, and a feeding mechanism 4. A material carrier 2 is disposed inside the coating chamber 1. The vacuuming mechanism 3 is connected to the coating chamber 1 and is used to evacuate the coating chamber 1. The feeding mechanism 4 includes a feeding pipe 401, a first switching valve 402, and a second switching valve 403. The outlet end of the feeding pipe 401 extends into the coating chamber 1 and is spaced above the material carrier 2. In the material flow direction, the first switching valve 402 and the second switching valve 403 are spaced back and forth on the feeding pipe 401, and the portion of the feeding pipe 401 between the first switching valve 402 and the second switching valve 403 forms a transition cavity.

[0046] The vacuum coating apparatus provided in this embodiment of the invention uses a vacuum pumping mechanism 3 to create a vacuum in the coating chamber 1, forming a coating process environment. When material needs to be added to the coating chamber 1, the first switch valve 402 is opened and the second switch valve 403 is closed, allowing the material to pass through the first switch valve 402 from the feed end of the feeding pipe 401 into the transition chamber. Since the second switch valve 403 is closed, the coating chamber 1 is prevented from communicating with the outside. Afterwards, the first switch valve 402 is closed and the second switch valve 403 is opened, allowing the material to enter the material carrier 2 from the discharge end of the feeding pipe 401. The coating chamber 1 is still not connected to the outside, thus minimizing vacuum disruption in the coating chamber 1. This allows for material addition without breaking the vacuum and enables continuous coating, significantly shortening the material changeover time of the vacuum coating apparatus and improving coating efficiency.

[0047] Moreover, the feeding mechanism 4 does not directly contact the material carrier 2 inside the coating cavity 1. Compared with the traditional feeding mechanism, the present invention has less impact on the material carrier 2, which is beneficial to improving the coating quality.

[0048] Specifically, vacuum coating equipment includes, but is not limited to, intermittent (periodic), semi-continuous, or continuous types. In this embodiment, the material is granular, which is simpler and cheaper to source than rod-shaped materials. After the material is sintered and pressed into rods, its density decreases. During the coating process, the outgassing increases, leading to a decrease in the purity of the film deposited on the substrate surface, thus affecting the coating quality. Additionally, the material carrier 2 can be a crucible.

[0049] Specifically, to facilitate material feeding, the material can be selected to flow from top to bottom, so that automatic feeding can be achieved through the material's own weight. In this case, the first switch valve 402 is located at the upper end, and the second switch valve 403 is located at the lower end.

[0050] It should be noted that the present invention does not limit the structure of the first switching valve 402 and the second switching valve 403. Any existing structure can be selected as needed. For example, the first switching valve 402 and the second switching valve 403 are both ball valves, which have low operating costs and are convenient to use.

[0051] Furthermore, this embodiment of the invention does not limit the vacuum pumping mechanism 3. For example, the vacuum pumping mechanism 3 can be a vacuum pump, a molecular pump, etc.

[0052] In one embodiment, such as Figure 2 As shown, the feeding pipe 401 includes multiple front-end feed pipes 4011 and rear-end feed pipes 4012. Each front-end feed pipe 4011 is connected to a rear-end feed pipe 4012. Each front-end feed pipe 4011 is equipped with a first switching valve 402, and each rear-end feed pipe 4012 is equipped with a second switching valve 403. Dividing the feeding pipe 401 into multiple front-end feed pipes 4011 and rear-end feed pipes 4012 allows for the selection of the corresponding front-end feed pipe 4011 based on the material required for coating, thereby selecting the feeding sequence, specifications, and type, etc., which can meet various coating needs and has wide applicability.

[0053] It should be noted that the number of rear feed pipes 4012 can be selected as one or more as needed. When multiple rear feed pipes 4012 are selected, they can be set to correspond to multiple front feed pipes 4011.

[0054] In one embodiment, such as Figure 1 and Figure 2 As shown, the feeding ends of multiple front-end feed pipes 4011 are equipped with weighing mechanisms 5, which can accurately weigh the weight of materials and add materials according to the set material weight.

[0055] Furthermore, in one embodiment, such as Figures 2 to 4As shown, the weighing mechanism 5 mainly includes a feeding bin 501 and a drive module 503. The feeding bin 501 can be a measuring cup. A weighing sensor 502 is provided at the bottom of the feeding bin 501. The drive module 503 is connected to the feeding bin 501 and is used to drive the feeding bin 501 to move to the feeding end of the corresponding front feeding pipe 4011 and add material to the feeding end.

[0056] The material is first added to the feeding hopper 501. The weighing sensor 502 is used to accurately weigh the material in the feeding hopper 501. Then, the drive module 503 moves the weighed material to the feeding end of the front feeding pipe 4011 for feeding, so as to realize automatic weighing and automatic feeding and improve feeding efficiency.

[0057] Traditional screw feeders use a screw to push granular materials into a material carrier, and control the feed rate by controlling the screw speed. However, due to the varying particle sizes and unpredictable particle movement, the accuracy of the feed rate is poor, resulting in significant deviations. This invention, by installing a weighing sensor 502 at the bottom of the feed hopper 501, can accurately add the weight of the material with minimal deviation.

[0058] Furthermore, in one embodiment, such as Figure 3 and Figure 4 As shown, the drive module 503 includes a displacement module 5031 and a rotary module 5032. The displacement module 5031 is located above the feeding ends of multiple front-end feed pipes 4011. The rotary module 5032 is located on the displacement module 5031 and connected to the feed bin 501, used to drive the feed bin 501 to rotate, and through the displacement module 5031, drive the rotary module 5032 and the feed bin 501 to move above the feeding ends of the corresponding front-end feed pipes 4011.

[0059] After the required weight of material is added to the feeding hopper 501, the displacement module 5031 drives the rotary module 5032 and the feeding hopper 501 to move above the feeding end of the corresponding front feeding pipe 4011. Then, the rotary module 5032 drives the feeding hopper 501 to flip, pouring the material into the front feeding pipe 4011, thus realizing automatic feeding. The structure is simple and easy to use.

[0060] Specifically, the displacement module 5031 can be a guide rail, and the rotary module 5032 is slidably connected to the guide rail via a slider and moves laterally along the guide rail. The rotary module 5032 can be a rotary cylinder, and the rotating shaft of the rotary cylinder is fixedly connected to the feeding bin 501 to drive the feeding bin 501 to rotate along the vertical plane.

[0061] Of course, in other embodiments, the drive module 503 can also be selected from other conventional structures as needed, such as a robotic arm.

[0062] In one embodiment, such as Figure 3 As shown, each front-end feed pipe 4011 is equipped with a trumpet-shaped hopper 4013 at its feed end. After the rotary module 5032 drives the feed bin 501 to rotate, the material is poured into the hopper 4013. The trumpet-shaped hopper 4013 can buffer the falling material, allowing the material to fall stably into the front-end feed pipe 4011, while providing sufficient volume to prevent material accumulation and spillage.

[0063] Specifically, such as Figure 4 As shown, multiple hoppers 4013 are arranged in sequence along the horizontal direction. The displacement module 5031 can drive the feeding bin 501 to move above each hopper 4013. Then, the rotation module 5032 drives the feeding bin 501 to flip and pour the material into the corresponding hopper 4013.

[0064] In one embodiment, the vacuum coating apparatus further includes a feeding mechanism (not shown in the figure), which is correspondingly arranged with the feeding bin 501 and is used to convey materials into the feeding bin 501. By setting up the feeding mechanism, automatic material conveying to the feeding bin 501 can be realized, further improving the degree of automation and coating efficiency. The feeding mechanism can also be electrically connected to a weighing sensor 502. When the weighing sensor 502 detects that the material in the feeding bin 501 has reached a set weight, the feeding mechanism stops feeding.

[0065] Specifically, the feeding mechanism can be a conventional feeding mechanism such as a conveyor or conveyor belt.

[0066] Traditional vibratory feeding mechanisms can easily cause resonance on the surface of the material carrier 2, affecting the coating process. In this embodiment, the feeding mechanism is located outside the coating cavity 1, minimizing its impact on the material carrier 2 and thus reducing its influence on the coating process.

[0067] In some other embodiments, materials can also be manually added to the feed hopper 501. When the weighing sensor 502 detects that the material in the feed hopper 501 has reached the set weight, the feeding stops.

[0068] It should be noted that the asymmetric gravity sensor 502 in this embodiment of the utility model is not limited, and any existing structure can be selected as needed.

[0069] In one embodiment, the load cell 502 is a pressure sensor. The load cell 502, being a pressure sensor, has a simple structure, low operating cost, strong anti-interference capability, and does not require direct contact with the material, thus having minimal impact on the material.

[0070] Of course, in other embodiments, the load cell 502 can also be selected as a capacitive load cell, a hydraulic load cell, etc., as needed.

[0071] In one embodiment, the vacuum pumping mechanism 3 is also connected to the transition cavity for evacuating the transition cavity. By using the vacuum pumping mechanism 3 to evacuate the transition cavity, the influence of external air introduced into the transition cavity during the feeding process on the coating cavity 1 can be reduced.

[0072] In one embodiment, the transition cavity is independently connected to a vacuum module for independent vacuuming of the transition cavity. Using a vacuum module to independently vacuum the transition cavity reduces the impact of external air introduced into the transition cavity during the feeding process on the coating cavity 1, and also allows for self-adjustment of the vacuum level within the transition cavity.

[0073] In one embodiment, such as Figure 5 As shown, a coating turntable 6 is provided inside the coating chamber 1, and multiple material carriers 2 are arranged circumferentially on the top of the coating turntable 6. The multiple material carriers 2 are rotatably arranged on the coating turntable 6, which can provide materials in turn, and continuously add materials to the empty material carriers 2 through the feeding mechanism 4, so as to achieve uninterrupted coating and further improve the coating efficiency.

[0074] Specifically, the coating turntable 6 has a feeding position and a coating position. The feeding position is located below the discharge end of the feeding pipe 401. The coating turntable 6 drives multiple material carriers 2 to rotate, so that the empty material carrier 2 rotates to the feeding position for feeding. After loading the material, the material carrier 2 rotates to the coating position for coating processing, thereby realizing uninterrupted coating.

[0075] The working principle of this utility model embodiment is as follows:

[0076] When material needs to be added to the crucible, the coating turntable 6 rotates multiple crucibles, moving the empty crucible below the discharge end of the feeding pipe 401, i.e., the feeding position. The first switch valve 402 is opened, and the second switch valve 403 is closed. Material is added to the feeding hopper 501 via the feeding mechanism. When the weighing sensor 502 detects that the material in the feeding hopper 501 has reached the set weight, feeding stops. The displacement module 5031 moves the feeding hopper 501 to the hopper 4013 corresponding to the front feeding pipe 4011. The rotation module 5032 rotates the feeding hopper 501, pouring the material into the hopper 4013 and into the transition chamber between the first switch valve 402 and the second switch valve 403. The first switch valve 402 is closed, and the second switch valve 403 is opened, allowing the material to fall into the crucible at the feeding position. The coating turntable 6 rotates the crucible containing the material to the coating position for coating.

[0077] To achieve the basic functions of the vacuum coating apparatus, the vacuum coating apparatus in this embodiment may also include other necessary modules or components, such as a housing and a control system. It should be noted that any suitable existing structure can be selected from the other necessary modules or components included in the vacuum coating apparatus. To clearly and concisely illustrate the technical solution provided in this embodiment, the above-mentioned parts will not be elaborated upon here, and the accompanying drawings have also been simplified accordingly. However, it should be understood that the scope of this utility model is not limited thereto.

[0078] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A vacuum coating apparatus, characterized in that, include: The coating chamber (1) is equipped with a material carrier (2) inside; A vacuum pumping mechanism (3) is connected to the coating chamber (1) and is used to evacuate the coating chamber (1); The feeding mechanism (4) includes a feeding pipe (401), a first switching valve (402) and a second switching valve (403). The discharge end of the feeding pipe (401) extends into the coating chamber (1) and is spaced above the material carrier (2). In the direction of material flow, the first switching valve (402) and the second switching valve (403) are spaced back and forth on the feeding pipe (401). The portion of the feeding pipe (401) between the first switching valve (402) and the second switching valve (403) forms a transition cavity.

2. The vacuum coating apparatus according to claim 1, characterized in that, The feeding pipe (401) includes multiple front feed pipes (4011) and rear feed pipes (4012). Each of the front feed pipes (4011) is connected to the rear feed pipe (4012). Each of the front feed pipes (4011) is provided with a first switch valve (402), and the rear feed pipe (4012) is provided with a second switch valve (403).

3. The vacuum coating apparatus according to claim 2, characterized in that, Weighing mechanisms (5) are provided at the feed ends of the multiple front feed pipes (4011).

4. The vacuum coating apparatus according to claim 3, characterized in that, The weighing mechanism (5) includes: The feed hopper (501) is equipped with a weighing sensor (502) at the bottom; The drive module (503) is connected to the feed bin (501) and is used to drive the feed bin (501) to move to the feed end corresponding to the front feed pipe (4011) and add material to the feed end.

5. The vacuum coating apparatus according to claim 4, characterized in that, The drive module (503) includes: The displacement module (5031) is disposed above the feed end of the plurality of front feed tubes (4011); A rotary module (5032) is mounted on the displacement module (5031) and connected to the feed bin (501). It is used to drive the feed bin (501) to rotate and move the rotary module (5032) and the feed bin (501) to the feed end above the front feed pipe (4011) via the displacement module (5031).

6. The vacuum coating apparatus according to claim 5, characterized in that, Each of the front feed pipes (4011) is provided with a hopper (4013) at its feed end. After the rotary module (5032) drives the feed bin (501) to rotate, the material is poured into the hopper (4013).

7. The vacuum coating apparatus according to claim 4, characterized in that, It also includes a feeding mechanism, which is configured corresponding to the feeding bin (501) and is used to convey materials to the feeding bin (501).

8. The vacuum coating apparatus according to claim 4, characterized in that, The weighing sensor (502) is a pressure sensor.

9. The vacuum coating apparatus according to any one of claims 1 to 8, characterized in that, The vacuum pumping mechanism (3) is also connected to the transition cavity and is used to evacuate the transition cavity; Alternatively, the transition cavity may be independently connected to a vacuum module for independently evacuating the transition cavity.

10. The vacuum coating apparatus according to any one of claims 1 to 8, characterized in that, The coating chamber (1) is provided with a coating turntable (6), and the top of the coating turntable (6) is provided with a plurality of material carriers (2) along the circumferential direction.

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