Rotary growth equipment and growth system

Abstract

The utility model provides rotary growth equipment and a growth system, the rotary growth equipment comprises a shell and a rotary bearing assembly, the shell is internally provided with an accommodating cavity; the rotary bearing assembly comprises a pneumatic pipeline, a rotary support and a supporting piece. The rotating support comprises a rotating assembly part and a plurality of fan blades; the rotating assembly part is rotationally connected to the shell, one end of the rotating assembly part is connected with the fan blades, and the other end penetrates through the shell to be connected with the supporting part; the pneumatic pipeline is arranged in the containing cavity in a penetrating mode and faces the fan blades. The rotary bearing assembly drives the tray supported on the rotary bearing assembly and the sample to be grown to rotate synchronously, so that the sample to be grown can be contacted with growth gas more uniformly and fully in the growth process, and the growth quality is improved. In addition, the effect that the rotating speed is controllable can be achieved through cooperation between the pneumatic pipeline and the rotating support. Compared with the conventional growth technology, the device has the advantages of simple structure, low cost, strong controllability, stable processing quality and the like, and can be used for preparing the gallium nitride substrate.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, specifically to a rotary growth device and growth system. Background Technology

[0002] In the field of semiconductor material growth, especially in the fabrication of gallium nitride (GaN) materials, achieving highly uniform growth is crucial for improving the performance and reliability of grown devices. Gallium nitride, due to its excellent electronic properties such as high electron mobility, high breakdown voltage, and good thermal stability, is widely used in high-tech fields such as optoelectronics, power electronics, and radio frequency devices. However, existing gallium nitride growth techniques generally employ fixed substrate holders, which presents significant limitations during the growth process.

[0003] Specifically, in the growth of gallium nitride (GaN) materials using a fixed substrate, limitations in gas flow dynamics and substrate design prevent gas molecules from achieving a uniform distribution upon reaching the substrate surface. This uneven gas distribution creates dead zones or low-flow areas on the substrate that are inaccessible to the gas. These areas exhibit significant differences in GaN deposition rate and crystal quality compared to areas with sufficient gas contact during growth. This growth inhomogeneity directly affects the electrical and optical properties of GaN materials, thereby limiting the overall performance of the device.

[0004] Furthermore, the design of fixed substrate holders often results in a fixed airflow pattern within the growth chamber, making it difficult to optimize gas distribution and improve growth uniformity by adjusting growth parameters. Although researchers have tried various methods, such as optimizing growth parameters, improving growth chamber design, and using rotating substrate holders, these methods not only fail to achieve significant improvements but also increase process complexity and cost. Therefore, the industry has not yet effectively solved the problem of uneven gas distribution. Summary of the Invention

[0005] Therefore, the technical problem to be solved by this utility model is to overcome the problem of uneven substrate growth in the prior art and to provide a rotary growth device and growth system.

[0006] To solve the above-mentioned technical problems, in a first aspect, this utility model provides a rotary growth device, which includes:

[0007] A housing, wherein the housing has an internal accommodating cavity;

[0008] A rotating support assembly includes a pneumatic pipeline, a rotating tray, and a support member. The support member is disposed above the rotating tray and is used to support a fixed tray, which is used to support a sample to be grown. The rotating tray includes multiple fan blades and a rotating assembly connected to the multiple fan blades. The multiple fan blades are disposed inside the accommodating cavity and extend outward from the rotating assembly. The rotating assembly is rotatably connected to the housing, with one end connected to the multiple fan blades and the other end extending to the outside of the housing and connected to the support member. The pneumatic pipeline extends into the accommodating cavity and faces the fan blades to generate driving gas to drive the multiple fan blades to rotate, thereby causing the sample to be grown in the tray on the support member to rotate.

[0009] In one embodiment of the present invention, the rotating assembly includes a connecting rod and a rotating bearing, the rotating bearing being disposed on the top of the housing, and the connecting rod being inserted into the rotating bearing.

[0010] In one embodiment of the present invention, the support member includes a connecting plate and a plurality of support columns. The connecting plate is connected to the rotary bearing, and the plurality of support columns are disposed on the connecting plate to support and fix the tray.

[0011] In one embodiment of the present invention, the housing further includes a substrate, which is disposed at the top opening of the accommodating cavity, and the rotating bearing assembly is connected to the substrate.

[0012] In one embodiment of the present invention, the substrate includes a connecting through hole, a first embedding groove and a second embedding groove arranged concentrically, a connecting rod passing through the connecting through hole, the first embedding groove surrounding the connecting through hole, the rotary bearing being embedded in the first embedding groove, the second embedding groove surrounding the first embedding groove, and the connecting disk being disposed in the second embedding groove.

[0013] In one embodiment of the present invention, the pneumatic pipeline includes a main body, an air inlet, and an air supply. The air inlet and the air supply are respectively connected to the two ends of the main body. The air inlet is connected to an external air supply device, and the air supply is arranged towards the fan blade.

[0014] In one embodiment of the present invention, the plurality of fan blades are evenly spaced; and / or, the diameter of the air supply section gradually narrows in the direction close to the fan blades, so that the driving gas moves directionally toward the fan blades.

[0015] In one embodiment of this utility model, the air supply direction of the pneumatic pipeline is parallel to the tangential direction of the circular motion of the rotating support.

[0016] In one embodiment of the present invention, the rotary growth device further includes at least one fixing member, wherein at least one fixing member is disposed on the same side as the pneumatic pipeline, one end of which is connected to the external fixing surface and the other end is connected to the housing.

[0017] Secondly, this utility model also provides a growth system, which includes the above-mentioned rotary growth device, tray and gas supply device. The tray is used to hold the sample to be grown, and is disposed on the rotating support of the rotary growth device and rotates synchronously with the rotating support. The gas supply device is connected to the pneumatic pipeline to provide driving gas to the accommodating cavity of the rotary growth device through the pneumatic pipeline.

[0018] The above-mentioned technical solution of this utility model has the following advantages compared with the prior art:

[0019] This invention provides a rotary growth device and system. The housing provides a mounting platform for the rotary support assembly, and the rotary support assembly drives the supported tray and the sample to be grown to rotate synchronously. This ensures more uniform and sufficient contact between the sample and the growth gas during the growth process, thereby improving growth quality. Furthermore, the pneumatic piping and the rotary tray in this invention allow for controllable rotation speed. Compared to conventional growth technologies, the solution provided by this invention offers advantages such as simple structure, low cost, strong controllability, and stable processing quality. Attached Figure Description

[0020] To make the content of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0021] Figure 1 This is a three-dimensional structural diagram of the rotary growth device in a preferred embodiment of the present invention;

[0022] Figure 2 yes Figure 1 A schematic diagram of the internal structure of the rotary growth device is shown.

[0023] Figure 3 yes Figure 2 Enlarged structural diagram at point A in the middle;

[0024] Figure 4 yes Figure 1 A three-dimensional structural diagram of the rotating support in the rotary growth device shown.

[0025] Figure 5 yes Figure 4 The bottom view of the rotating support shown;

[0026] Figure 6 yes Figure 1 A schematic diagram of the support structure in the rotary growth device shown.

[0027] Figure 7 yes Figure 6 Schematic diagram of the cross-sectional structure at point BB;

[0028] Figure 8 yes Figure 1 A schematic diagram of the substrate structure in the rotary growth apparatus shown.

[0029] Figure 9 yes Figure 8 A schematic diagram of the cross-sectional structure at point CC in the substrate shown.

[0030] Explanation of reference numerals in the accompanying drawings: 100, housing; 110, receiving cavity; 120, base plate; 121, connecting through hole; 122, first embedding groove; 123, second embedding groove; 130, fixing member; 200, rotating bearing assembly; 210, pneumatic pipeline; 220, rotating support; 221, fan blade; 222, rotating assembly; 2221, connecting rod; 2222, rotating bearing; 230, support member; 231, connecting plate; 232, support column. Detailed Implementation

[0031] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention.

[0032] This utility model provides a rotary growth device, which includes: a shell and a rotary support component.

[0033] The shell has an internal accommodating cavity.

[0034] The rotating support assembly includes a pneumatic pipeline, a rotating tray, and a support member. The support member is positioned above the rotating tray to support a fixed tray, which in turn supports the sample to be grown. The rotating tray includes a rotating assembly and multiple fan blades connected to the rotating assembly. The multiple fan blades are located inside the accommodating cavity and extend outward from the rotating assembly. The rotating assembly is rotatably connected to the housing, with one end connected to the multiple fan blades and the other end extending to the outside of the housing and connecting to the support member. The pneumatic pipeline extends into the accommodating cavity and faces the fan blades to generate driving gas to rotate the multiple fan blades, thereby causing the sample to be grown in the tray on the support member to rotate.

[0035] Furthermore, in the rotating support assembly, the pneumatic pipeline is used to supply air to the rotating support to achieve rotational drive of the rotating support. It is connected to the side wall of the housing, and its air supply end can supply air to the fan blade in the horizontal direction, thereby driving the fan blade to rotate, which in turn drives the rotating support, the support component, the tray supported on it, and the sample to be grown to rotate synchronously.

[0036] Furthermore, the pneumatic pipeline includes a main body, an air inlet, and an air supply. The air inlet and the air supply are connected to both ends of the main body, respectively. The air inlet is connected to an external air supply device, and the air supply is positioned towards the fan blades, thereby causing the driving airflow to flow directionally from the air supply device towards the fan blades.

[0037] In some implementations, the pneumatic tubing can be bent according to factors such as the size and shape of the space in the actual application scenario, thereby increasing its flexibility of use. Correspondingly, the pneumatic tubing can also be configured as a plug-in sleeve structure with quick-change function.

[0038] Furthermore, the diameter of the air supply section gradually narrows towards the fan blades, so that the driving gas moves directionally toward the fan blades. This not only improves the gas utilization rate, but also enables precise adjustment of the rotating speed by controlling the specific air supply volume and gas flow rate.

[0039] Furthermore, the air supply direction of the pneumatic pipeline is parallel to the tangential direction of the rotating fan's circular motion. This ensures that the fan blades always face the wind at the optimal angle, thereby improving the gas utilization rate of the pneumatic pipeline. On the other hand, it also fundamentally avoids phenomena such as stopping or even reversing due to the instability of the force point of the rotating fan blades caused by the influence of wind direction.

[0040] Furthermore, the rotary growth equipment also includes at least one fixing component, which is located on the same side as the pneumatic pipeline. One end of the fixing component is connected to the external fixing surface, and the other end is connected to the housing, thereby preventing the rotary growth equipment as a whole from moving under the action of the driving airflow.

[0041] In some embodiments, one end of the fastener is fixedly connected to an external fixing surface, and the other end extends into the interior of the housing and is configured as a bent structure to achieve mutual contact and limiting between it and the inner wall of the housing.

[0042] Furthermore, the rotating assembly includes a connecting rod and a rotating bearing. The rotating bearing is located at the top of the housing, and the connecting rod passes through and connects to the rotating bearing. The connecting rod is used to connect and install the fan blades, and the rotating bearing is used to achieve a rotational connection between the rotating support and the housing.

[0043] Furthermore, the multiple fan blades are preferably arranged in a uniformly spaced configuration. This uniformly spaced configuration can comprehensively improve the performance and reliability of the rotating machinery. On the one hand, it ensures the balance of the rotating support during rotation and effectively improves the energy conversion efficiency. On the other hand, the uniformly spaced fan blades help reduce noise, reduce vibration and wear caused by uneven airflow, thereby extending the service life of the equipment.

[0044] In some implementations, the fan blades can be configured as flat, sheet-like structures to simplify the manufacturing process, or as curved structures to improve gas utilization.

[0045] Furthermore, the support is used to connect and fix the tray containing the sample to be grown, so as to transmit the rotational driving force of the rotating tray to the sample to be grown.

[0046] Furthermore, the support includes a connecting plate and multiple support columns. The connecting plate is connected to the rotary bearing, and the multiple support columns are disposed on the connecting plate to support and fix the tray. The connecting plate is used to expand the driving range of the rotary bearing, thereby making it suitable for trays of different sizes of samples to be grown; the support columns can provide multi-point support, which helps to evenly distribute the load on the tray and facilitates cooperation with the tray of samples to be grown.

[0047] In some implementations, multiple support columns are evenly spaced apart, and their specific number and installation positions can be adjusted adaptively according to actual usage requirements.

[0048] Furthermore, the housing serves as a connection platform and accommodating space for the rotating bearing assembly, thereby achieving a stable connection structure between the pneumatic pipeline, the rotating support, and the support member. Specifically, the pneumatic pipeline is connected to the side wall of the housing, which also includes a base plate disposed at the top opening of the accommodating cavity, and the rotating bearing assembly is connected to the base plate.

[0049] In some implementations, the substrate is soldered to the top of the accommodating space to improve the overall stability of the housing, or it is configured as a removable structure to facilitate the inspection and replacement of the internal structure.

[0050] Furthermore, the substrate includes a concentrically arranged connecting through hole, a first embedding groove, and a second embedding groove. The connecting rod passes through the connecting through hole, the first embedding groove is arranged around the connecting through hole, the rotary bearing is embedded in the first embedding groove, the second embedding groove is arranged around the first embedding groove, and the connecting disk is arranged in the second embedding groove.

[0051] Furthermore, the connecting through hole, the first embedding groove, and the second embedding groove are all located at the center of the substrate, thereby ensuring that the rotating bearing assembly can move at the center of the substrate, thus improving the connection stability of the rotating bearing assembly.

[0052] Furthermore, both the first and second embedding grooves are recessed downwards from the upper surface of the substrate, thereby forming a limiting structure for the rotary bearing and the connecting disc in the horizontal direction, which can further improve the stability of the rotary bearing assembly during rotation.

[0053] This utility model also provides a growth system, which includes the above-mentioned rotary growth device, tray and gas supply device. The tray is used to hold the sample to be grown. It is set on the rotating tray of the rotary growth device and rotates synchronously with the rotating tray. The gas supply device is connected to a pneumatic pipeline to provide driving gas to the accommodating cavity of the rotary growth device through the pneumatic pipeline.

[0054] Furthermore, during the rotary processing, the tray must first be connected to the growth equipment, and the air supply equipment must be connected to the air inlet of the pneumatic pipeline. Pre-air supply is then performed to observe whether it can drive the rotating support component in the rotary growth equipment to rotate. After confirmation, the sample to be grown is placed on the tray and then enters the growth space for growth processing. During this process, the operator can precisely control the rotational speed of the tray by adjusting the air supply volume in the air supply pipeline, thereby enabling this growth system to be used for different growth processing needs. Example 1

[0055] See also Figures 1 to 9 This embodiment provides a rotary growth device, which includes a housing 100 and a rotary support assembly 200.

[0056] The housing 100 has an accommodating cavity 110 inside.

[0057] The rotating support assembly 200 includes a pneumatic pipeline 210, a rotating support 220, and a support member 230. The support member 230 is disposed above the rotating support 220 and is used to support a fixed tray (not shown in the figure). The tray is used to support the sample to be grown, and the material of the sample to be grown can be gallium nitride, aluminum nitride, or other materials. Figure 5 As shown, the rotating support 220 includes a rotating assembly 222 and multiple fan blades 221; combined with Figure 3 and Figure 5 Multiple fan blades 221 are disposed inside the receiving cavity 110, extending outward from the rotating assembly 222 as the center; such as Figure 3 As shown, the rotating assembly 222 is rotatably connected to the housing 100, with one end connected to multiple fan blades 221 and the other end extending to the outside of the housing 100 and connected to the support member 230.

[0058] Further, see Figure 5 As shown, the multiple fan blades 221 are preferably arranged at uniform intervals, and each fan blade 221 is configured as an inclined plate-like structure with an angle between it and the connecting rod 2221.

[0059] Furthermore, combined Figure 1 , Figure 2 as well as Figure 3The pneumatic pipeline 210 passes through the accommodating cavity 110 and is positioned toward the fan blade 221 to generate driving gas to drive the multiple fan blades 221 to rotate, thereby causing the sample to be grown in the tray on the support member 230 to rotate.

[0060] See Figure 3 As shown, in this embodiment, the pneumatic pipeline 210 is connected to the side wall of the housing 100, with its air supply end facing the fan blade 221, thereby driving the fan blade 221 to rotate. Further, the pneumatic pipeline 210 in this embodiment includes a main body, an air inlet, and an air supply (not shown in the figure). The air inlet and air supply are respectively connected to both ends of the main body. The air inlet connects to an external air supply device (not shown in the figure), and the air supply faces the fan blade 221.

[0061] Furthermore, in this embodiment, the diameter of the air supply section gradually narrows in the direction close to the fan blade 221, and its air supply direction is parallel to the tangential direction of the circumferential motion of the rotating support 220. This allows for improved utilization of the driving gas while ensuring that the driving gas moves directionally toward the fan blade 221.

[0062] See also Figure 1 and Figure 4 As shown, the rotating assembly 222 includes a connecting rod 2221 and a rotating bearing 2222. The rotating bearing 2222 is disposed on the top of the housing 100, and the connecting rod 2221 passes through and is connected to the rotating bearing 2222.

[0063] It should be noted that during the actual growth process, the tray used to support the sample to be grown is easily damaged under prolonged high temperature conditions and sample contamination. To ensure the quality of growth and processing, the tray needs to be disassembled and replaced periodically. Based on this, a support member 230 is provided in this embodiment. (See also...) Figure 4 , Figure 6 and Figure 7 As shown, the support member 230 in this embodiment includes a connecting plate 231 and multiple support columns 232. The connecting plate 231 is connected to the rotary bearing 2222, and the multiple support columns 232 are disposed on the connecting plate 231 to support and fix the tray, thereby facilitating disassembly and replacement after the tray is found to be damaged. Furthermore, the multiple support columns 232 are evenly spaced, and their specific number and installation position can be adaptively adjusted according to actual usage requirements.

[0064] See also Figure 1 , Figure 8 and Figure 9As shown, the housing 100 in this embodiment also includes a substrate 120, which is disposed at the top opening of the accommodating cavity 110. The rotating bearing assembly 200 is connected to the substrate 120, and a gap for venting gas is provided between the substrate 120 and the accommodating cavity 110 to realize the discharge of driving gas. The substrate 120 is welded to the top of the accommodating space, and its upper surface is provided with a concentrically arranged connecting through hole 121, a first embedding groove 122, and a second embedding groove 123. The connecting rod 2221 passes through the connecting through hole 121. The first embedding groove 122 is arranged around the connecting through hole 121. The rotating bearing 2222 is embedded in the first embedding groove 122. The second embedding groove 123 is arranged around the first embedding groove 122. The connecting disk 231 is disposed in the second embedding groove 123.

[0065] Furthermore, the connecting through hole 121, the first embedding groove 122 and the second embedding groove 123 are all disposed at the center of the substrate 120, and the first embedding groove 122 and the second embedding groove 123 are both recessed downward from the upper surface of the substrate 120, thereby forming a limiting structure for the rotary bearing 2222 and the connecting disk 123 in the horizontal direction respectively.

[0066] See Figure 1 As shown in this embodiment, the rotary growth apparatus further includes at least one fixing member 130, which is disposed on the same side as the pneumatic pipeline 210. One end of the fixing member 130 is connected to an external fixing surface (not shown in the figure), and the other end is connected to the housing 100. Based on the fixing member 130, on the one hand, the problem of instability of the sample to be grown due to shaking of the rotary growth apparatus under the action of the driving airflow can be avoided; on the other hand, it can also ensure the stability of the flow direction of the driving gas, thereby improving gas utilization and driving effect.

[0067] Specifically, one end of the fastener 130 is fixedly connected to the flange on the external fixing surface by a rubber ring and a lock nut, and the other end extends into the interior of the housing 100 and is configured as a bent structure to achieve mutual contact and limiting between it and the inner wall of the housing 100.

[0068] The rotary growth apparatus of this embodiment enables the sample to achieve more uniform and sufficient contact with the growth gas during the growth process, thereby effectively improving the quality of the grown sample. Simultaneously, the synergistic effect of the pneumatic piping and the rotating tray in this invention achieves controllable rotation speed.

[0069] It is worth noting that the growth gas is the gas required to grow the same material as the sample to be grown; for example, if the sample to be grown is gallium nitride, the growth gas can be GaCl, GaCl3, or NH3, etc. Example 2

[0070] This embodiment provides a growth system, which includes the rotary growth device, tray, and gas supply device as described in Embodiment 1. The tray is used to hold the sample to be grown and is disposed on the rotating support of the rotary growth device and rotates synchronously with the rotating support. The gas supply device is connected to a pneumatic pipeline to provide driving gas to the accommodating cavity of the rotary growth device through the pneumatic pipeline.

[0071] In existing fixed substrate holders for gallium nitride (GaN) growth, gas cannot be uniformly distributed on the GaN surface. This uneven gas distribution creates dead zones or low-flow areas that the gas cannot reach. These areas exhibit significant differences in deposition rate and crystal quality compared to areas with sufficient gas contact during growth. The growth system provided by this invention, however, allows for uniform and sufficient contact between the sample and the reaction gas through rotation. Furthermore, the increased contact area between the sample and the reaction gas improves growth uniformity and product stability. Operators can precisely control the rotation speed of the holder by adjusting the gas supply, finding the optimal speed for different samples and adapting the system to various growth requirements. In addition, compared to conventional rotary drive structures such as magnetohydrodynamic seals and servo drives, this invention achieves stable drive of the rotating holder solely through gas delivery, offering advantages such as simple structure, low cost, and ease of manufacturing.

[0072] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A rotary growth device, characterized in that: include: The housing (100) has an internal cavity (110). A rotating support assembly (200) includes a pneumatic pipeline (210), a rotating tray (220), and a support member (230). The support member (230) is disposed above the rotating tray (220) and is used to support a fixed tray, which is used to support the sample to be grown. The rotating tray (220) includes multiple fan blades (221) and a rotating assembly (222) connected to the multiple fan blades (221). The multiple fan blades (221) are disposed inside the accommodating cavity (110) and extend outward with the rotating assembly (222) as the center. The rotating assembly (222) is rotatably connected to the housing (100), with one end connected to the multiple fan blades (221) and the other end extending to the outside of the housing (100) and connected to the support member (230). The pneumatic pipeline (210) extends into the accommodating cavity (110) and is positioned toward the fan blades (221) to generate driving gas to drive the plurality of fan blades (221) to rotate, thereby causing the sample to be grown in the tray on the support member (230) to rotate.

2. The rotary growth apparatus according to claim 1, characterized in that: The rotating assembly (222) includes a connecting rod (2221) and a rotating bearing (2222). The rotating bearing (2222) is disposed on the top of the housing (100), and the connecting rod (2221) is inserted and connected to the rotating bearing (2222).

3. The rotary growth apparatus according to claim 2, characterized in that: The support member (230) includes a connecting plate (231) and a plurality of support columns (232). The connecting plate (231) is connected to the rotary bearing (2222), and the plurality of support columns (232) are disposed on the connecting plate (231) to support and fix the tray.

4. The rotary growth apparatus according to claim 3, characterized in that: The housing (100) further includes a substrate (120), which is disposed at the top opening of the accommodating cavity (110), and the rotating bearing assembly (200) is connected to the substrate (120).

5. The rotary growth apparatus according to claim 4, characterized in that: The substrate (120) includes a concentrically arranged connecting through hole (121), a first embedding groove and a second embedding groove. The connecting rod (2221) passes through the connecting through hole (121). The first embedding groove is arranged around the connecting through hole (121). The rotary bearing (2222) is embedded in the first embedding groove. The second embedding groove is arranged around the first embedding groove. The connecting disk (231) is arranged in the second embedding groove.

6. The rotary growth apparatus according to claim 1, characterized in that: The pneumatic pipeline (210) includes a main body, an air inlet, and an air supply. The air inlet and the air supply are respectively connected to the two ends of the main body. The air inlet is connected to an external air supply device, and the air supply is positioned towards the fan blade (221).

7. The rotary growth apparatus according to claim 6, characterized in that: The plurality of fan blades (221) are evenly spaced; And / or, the diameter of the air supply unit gradually narrows in the direction close to the fan blade (221) so that the driving gas moves directionally toward the fan blade (221).

8. The rotary growth apparatus according to claim 1 or 6, characterized in that: The air supply direction of the pneumatic pipeline (210) is parallel to the tangential direction of the circular motion of the rotating support (220).

9. The rotary growth apparatus according to claim 1, characterized in that: The rotary growth device also includes at least one fixing member (130), which is disposed on the same side as the pneumatic pipeline (210), with one end connected to the external fixing surface and the other end connected to the housing (100).

10. A growth system, characterized in that: The device includes a rotary growth apparatus, a tray, and a gas supply device as described in any one of claims 1 to 9. The tray is used to hold the sample to be grown and is disposed on the rotary support (220) of the rotary growth apparatus and rotates synchronously with the rotary support (220). The gas supply device is connected to the pneumatic pipeline (210) to provide driving gas to the receiving cavity (110) of the rotary growth apparatus through the pneumatic pipeline (210).

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