Drying device for aluminum nitride ceramic substrate

Abstract

The utility model is suitable for the technical field of aluminum nitride ceramic substrate drying, and provides an aluminum nitride ceramic substrate drying device which comprises a drying assembly and a conveying assembly. The drying assembly is used for drying the aluminum nitride ceramic substrate and comprises four sets of supporting rods, two sets of side plates vertically arranged on the supporting rods, a support transversely arranged at the top ends of the two sets of side plates and two sets of drying modules installed on the support. The conveying assembly is used for conveying the aluminum nitride ceramic substrate needing to be dried and comprises two sets of supporting frames arranged in the vertical direction, four sets of supporting legs arranged in the horizontal direction, a conveying belt arranged in the horizontal direction and a driving module connected to the conveying belt. According to the device, the problem that in the drying process of the aluminum nitride ceramic substrate, if the temperature change is too fast, internal stress concentration can be caused, cracks are caused, and the ceramic substrate is broken is solved, and the purposes that high drying efficiency is guaranteed through two times of drying and continuous drying, and cracks are avoided are achieved.

Description

Technical Field

[0001] This utility model relates to the field of aluminum nitride ceramic substrate drying technology, and more specifically, to an aluminum nitride ceramic substrate drying device. Background Technology

[0002] Aluminum nitride ceramic substrates are high-performance ceramic materials renowned for their excellent thermal conductivity, superior electrical insulation, and high mechanical strength. Their thermal conductivity typically ranges from 180 to 230 W / (m·K), significantly higher than that of alumina ceramics, making them an ideal choice for electronic packaging, power modules, and LED heat dissipation. Aluminum nitride ceramic substrates not only effectively dissipate heat and extend the lifespan of electronic components, but also maintain stable performance in high-frequency and high-power applications. Furthermore, their low coefficient of thermal expansion and good chemical stability allow them to maintain excellent performance even in high-temperature and harsh environments.

[0003] Currently, aluminum nitride ceramic substrates on the market require drying during manufacturing. Drying is a crucial step in the manufacturing process, primarily aimed at removing moisture and organic matter from the substrate to ensure its quality and performance. However, various problems may arise during the drying process. For example, if the temperature changes too rapidly during drying, it can lead to internal stress concentration, causing cracks that render the aluminum nitride ceramic substrate unusable.

[0004] Therefore, an aluminum nitride ceramic substrate drying device is needed to solve the above problems. Utility Model Content

[0005] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide an aluminum nitride ceramic substrate drying device.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] An aluminum nitride ceramic substrate drying apparatus includes a drying component and a conveying component;

[0008] The drying assembly is used to dry the aluminum nitride ceramic substrate. The drying assembly includes four sets of support rods, two sets of side plates vertically arranged on the support rods, a bracket horizontally arranged at the top of the two sets of side plates, and two sets of drying modules installed on the bracket.

[0009] The conveying assembly is used to convey aluminum nitride ceramic substrates that need to be dried. The conveying assembly includes two sets of support frames arranged vertically, four sets of legs arranged horizontally, a conveyor belt arranged horizontally, and a drive module connected to the conveyor belt.

[0010] The present invention is further configured such that: the drying module includes two sets of drying drives that pass through the holes of the bracket, the two sets of drying drives are symmetrically arranged at a distance from each other, and a top fan is installed at the bottom of each set of drying drives.

[0011] The present invention is further configured such that: a mounting plate is provided at the bottom of the top fan, and a circular hole is provided on the mounting plate, and the shape of the top fan is adapted to the circular hole of the mounting plate.

[0012] The present invention is further configured such that: a grid plate is installed on the side plate, the grid plate is configured as a rectangular grid structure, a circular hole is opened in the middle of the grid plate, and a side fan is installed in the circular hole in the middle of the grid plate.

[0013] By adopting the above technical solution, this utility model performs two drying processes by setting two sets of drying drives and two sets of top fans. Therefore, when the aluminum nitride ceramic substrate to be dried passes the drying drive and top fan near the starting end, the drying drive drives the top fan to rotate for a pre-drying. The drying drive power is set to a low power (800W) to avoid deformation due to excessive cooling. After the pre-drying is completed, the drying drive and top fan near the tail end are started, and the drying drive power is set to a higher power (1200W) to ensure drying efficiency, thereby completing the second drying. At the same time, the side fan on the side plate is started to continuously dry the side wall of the aluminum nitride ceramic substrate and ensure air circulation inside the drive assembly. By setting two sets of drying drives and two sets of top fans, uneven drying caused by a single drying process is avoided. It also avoids cracks in the aluminum nitride ceramic substrate caused by the lack of drying in the first drying process, and cracks caused by the side wall of the aluminum nitride ceramic substrate not being dried synchronously are also avoided.

[0014] The present invention is further configured such that: the two sets of support frames are configured as H-shaped structures, the two sets of support frames are spaced apart by a certain distance, a connecting rod is connected between the two sets of support frames, and two sets of legs are installed at the bottom of each set of support frames, the two sets of legs being symmetrically arranged.

[0015] The present invention is further configured such that: the conveyor belt includes a conveyor belt rotating rod disposed near the drive module, the connecting rod includes a steering block connected to one side of the conveyor belt rotating rod, and a drive motor is disposed at the end of the steering block away from the conveyor belt rotating rod.

[0016] In summary, this application includes at least one of the following beneficial technical effects:

[0017] 1. This utility model employs two sets of drying drives and two sets of top fans for a two-stage drying process. When the aluminum nitride ceramic substrate to be dried passes the drying drive and top fan near the starting end, the drying drive rotates the top fan for a pre-drying. The drying drive power is set to a lower power (800W) to avoid deformation due to excessively rapid cooling. After pre-drying, the drying drive and top fan near the tail end are activated, with the drying drive power set to a higher power (1200W) to ensure drying efficiency, thus completing the second drying. Simultaneously, the side fan on the side plate is activated to continuously dry the sidewalls of the aluminum nitride ceramic substrate and ensure airflow within the drive assembly. The use of two sets of drying drives and two sets of top fans avoids uneven drying caused by a single drying cycle, prevents cracks in the aluminum nitride ceramic substrate due to insufficient drying in the first cycle, and also prevents cracking caused by the sidewalls of the aluminum nitride ceramic substrate not being dried synchronously.

[0018] 2. The grid plate allows moisture from the aluminum nitride ceramic substrate inside the drying assembly to escape through the grid plate, reducing the internal humidity of the drying assembly and ensuring airflow, thereby further accelerating the drying efficiency. A circular hole is opened in the center of the grid plate, and a side fan is installed in this hole. This side fan design ensures that the top and sides can be dried simultaneously during the drying process, preventing deformation and cracking of the aluminum nitride ceramic substrate caused by simultaneous drying of the top and sides. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of an aluminum nitride ceramic substrate drying device according to the present invention.

[0020] Figure 2 This is a schematic diagram of the drying component in this utility model.

[0021] Figure 3 This is a schematic diagram of the transmission component in this utility model.

[0022] Figure 4 This is an exploded view of the drying component in this utility model.

[0023] Explanation of reference numerals in the attached drawings: 1. Drying assembly; 11. Support frame; 12. Drying module; 121. Drying drive; 122. Top fan; 123. Mounting plate; 13. Side plate; 131. Mesh plate; 132. Side fan; 14. Support rod;

[0024] 2. Conveying assembly; 21. Drive module; 211. Steering block; 212. Drive motor; 22. Support frame; 23. Support leg; 24. Conveyor belt; 241. Conveyor belt rotating rod; 25. Connecting rod. Detailed Implementation

[0025] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0026] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0027] Example 1, please refer to Figures 1-4 The present invention provides the following technical solution:

[0028] A drying device for aluminum nitride ceramic substrates includes a drying component 1 and a conveying component 2. The drying component 1 is used to dry the aluminum nitride ceramic substrates, removing moisture and organic matter from the substrates to ensure the quality and performance of the aluminum nitride ceramic substrates. The conveying component 2 is used to convey the aluminum nitride ceramic substrates to be dried to the corresponding drying area of ​​the drying component 1, ensuring stable transportation without damage during the transmission process.

[0029] See Figure 2 , Figure 4 The drying assembly 1 includes four sets of support rods 14, which ensure that the drying assembly 1 is stably set in the vertical direction, preventing it from shaking or shifting during operation. Two sets of side plates 13 are mounted on the top of the four sets of support rods 14. The two sets of side plates 13 are symmetrically arranged and face each other. A bracket 11 is horizontally mounted on the top of the two sets of side plates 13. The bracket 11 has a cuboid structure, and two sets of drying modules 12 are mounted on it. The bracket 11 provides an installation environment for the two sets of drying modules 12, ensuring stable operation of the two sets of drying modules 12 during actual use.

[0030] See Figure 4The drying module 12 includes two sets of drying drives 121 passing through holes in the bracket 11. The two sets of drying drives 121 are symmetrically arranged at a distance from each other. A top fan 122 is mounted at the bottom of each set of drying drives 121. The two sets of drying drives 121 provide power to the top fan 122. When drying is required, the rotation of the drying drives 121 drives the top fan 122 to rotate, allowing the aluminum nitride ceramic substrate to be dried at the bottom of the top fan 122. A mounting plate 123 is provided at the bottom of the top fan 122, and a circular hole is formed on the mounting plate 123. The shape of the circular hole in the mounting plate 123 is adapted to the top fan 122. The mounting plate 123 ensures that the air blown by the top fan 122 can directly contact the aluminum nitride ceramic substrate, ensuring drying efficiency. Furthermore, the mounting plate 123 also ensures that the top fan 122 can operate stably during actual operation.

[0031] In this embodiment, specifically: a grid plate 131 is installed on the side plate 13. The grid plate 131 is configured as a rectangular grid structure. The grid plate 131 allows moisture in the aluminum nitride ceramic substrate inside the drying assembly 1 to overflow from the grid plate 131, reducing the air humidity inside the drying assembly 1 and ensuring the air circulation rate inside the drying assembly 1, thereby further accelerating the drying efficiency. A circular hole is opened in the middle of the grid plate 131, and a side fan 132 is installed in the circular hole in the middle of the grid plate 131. The design of the side fan 132 ensures that the top surface and the side surface can be dried simultaneously during the drying process. Furthermore, the side fan 132 continuously dries the side wall of the aluminum nitride ceramic substrate that needs to be dried, thereby ensuring that the aluminum nitride ceramic substrate does not deform or crack due to simultaneous drying of the top surface and the side surface.

[0032] See Figure 3 The conveying component 2 includes two sets of support frames 22 arranged vertically. The two sets of support frames 22 are configured in an H-shape and are spaced apart. Each set of support frames 22 has two sets of legs 23 at the bottom. The two sets of legs 23 are arranged symmetrically. A connecting rod 25 connects the two sets of support frames 22, and the connecting rod 25 ensures that the two sets of support frames 22 are spaced apart vertically.

[0033] In this embodiment, specifically: conveyor belts 24 are installed on the top of the two sets of support frames 22. The conveyor belts 24 are used to transport the aluminum nitride ceramic substrates that need to be dried to the drying assembly 1 for drying, and to transfer the dried aluminum nitride ceramic substrates away from the drying assembly 1. The conveyor belt 24 includes a conveyor belt rotating rod 241 disposed near the drive module 21. The connecting rod 25 includes a steering block 211 connected to one side of the conveyor belt rotating rod 241. A drive motor 212 is disposed at the end of the steering block 211 away from the conveyor belt rotating rod 241.

[0034] Specifically, the drive motor 212 starts and drives the steering block 211 to rotate. As the steering block 211 rotates, it drives the conveyor belt rotating rod 241 to rotate, thereby driving the conveyor belt 24 to run and driving the aluminum nitride ceramic substrate on top of it to run.

[0035] Specifically, in this embodiment, the end furthest from the drive module 21 is designated as the starting end of the conveying component 2, and the section furthest from the drive module 21 is designated as the tail end of the conveying component 2. In this embodiment, since two sets of drying drives 121 and two sets of top fans 122 are sequentially arranged from the starting end to the tail end, when the aluminum nitride ceramic substrate to be dried is conveyed past the drying drive 121 and top fan 122 near the starting end, the drying drive 121 drives the top fan 122 to rotate for a pre-drying. The power of the drying drive 121 is set to a low power (800W) to avoid deformation due to excessively rapid cooling. After the pre-drying is completed, the set of drying drives 121 and top fans 122 near the tail end are started, and the power of the drying drive 121 is set to a higher power (1200W) to ensure drying efficiency, thereby completing the second drying. At the same time, the side fan 132 on the side plate 13 is started to continuously dry the sidewall of the aluminum nitride ceramic substrate and ensure air circulation inside the drying component 1.

[0036] Obviously, the embodiments described above are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

Claims

1. A drying apparatus for aluminum nitride ceramic substrates, characterized in that: Includes a drying assembly (1) and a conveying assembly (2); The drying assembly (1) is used to dry the aluminum nitride ceramic substrate. The drying assembly (1) includes four sets of support rods (14), two sets of side plates (13) vertically arranged on the support rods (14), a bracket (11) horizontally arranged at the top of the two sets of side plates (13), and two sets of drying modules (12) installed on the bracket (11). The conveying assembly (2) is used to convey aluminum nitride ceramic substrates that need to be dried. The conveying assembly (2) includes two sets of support frames (22) arranged vertically, four sets of legs (23) arranged horizontally, a conveyor belt (24) arranged horizontally, and a drive module (21) connected to the conveyor belt (24).

2. The aluminum nitride ceramic substrate drying apparatus according to claim 1, characterized in that: The drying module (12) includes two sets of drying drives (121) arranged through the holes of the bracket (11). The two sets of drying drives (121) are symmetrically arranged at a distance from each other, and a top fan (122) is installed at the bottom of each set of drying drives (121).

3. The aluminum nitride ceramic substrate drying apparatus according to claim 2, characterized in that: The top fan (122) has a mounting plate (123) at its bottom. The mounting plate (123) has a circular hole, and the top fan (122) is adapted to the shape of the circular hole in the mounting plate (123).

4. The aluminum nitride ceramic substrate drying apparatus according to claim 1, characterized in that: A grid plate (131) is installed on the side plate (13). The grid plate (131) is configured as a rectangular grid structure. A circular hole is opened in the middle of the grid plate (131). A side fan (132) is installed in the circular hole in the middle of the grid plate (131).

5. The aluminum nitride ceramic substrate drying apparatus according to claim 1, characterized in that: The two sets of support frames (22) are configured as H-shaped structures. The two sets of support frames (22) are set at a distance apart. A connecting rod (25) is connected between the two sets of support frames (22). Two sets of legs (23) are installed at the bottom of each set of support frames (22). The two sets of legs (23) are symmetrically arranged.

6. The aluminum nitride ceramic substrate drying apparatus according to claim 5, characterized in that: The conveyor belt (24) includes a conveyor belt rotating rod (241) located near the drive module (21), and the connecting rod (25) includes a steering block (211) connected to one side of the conveyor belt rotating rod (241). A drive motor (212) is provided at the end of the steering block (211) away from the conveyor belt rotating rod (241).

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