Chip packaging air tightness detection equipment

Abstract

The utility model discloses chip packaging airtightness detection equipment, and relates to the field of airtightness detection equipment. The chip packaging air tightness detection equipment comprises an air tightness tester and a display instrument, and two sides of an air exhaust seat are respectively provided with a pushing unit and an extruding unit. According to the chip packaging air tightness detection equipment, when the sliding seat moves to drive the threaded rod to move, the threaded rod drives the contact cushions to move, the contact cushions on the two sides of the air exhaust seat move oppositely, a chip on the air exhaust seat is pushed to the center position of the air exhaust seat, sealing of the chip at the center position is facilitated, air exhaust is performed through the air pump, and the air tightness of the chip is detected. The chip is attached to the air exhaust seat, and the air tightness of the chip is detected through the display instrument, so that the sealing stability is improved, the air tightness detection precision is improved, and the air tightness detection data is accurate.

Description

Technical Field

[0001] This utility model relates to the technical field of airtightness testing equipment, specifically a chip packaging airtightness testing equipment. Background Technology

[0002] Air tightness testing equipment is used to test the air tightness of chips, ensuring their stability and long-term reliability.

[0003] Chip packaging airtightness testing equipment removes air from the chip cavity, sets a certain pressure difference between the inside and outside of the chip, and observes the pressure changes to determine whether there is air leakage.

[0004] In the current technology for testing the airtightness of chip packaging, the chip is placed on a vacuum seat and pressure is applied by an air pump on an airtightness tester. Existing technology involves placing the chip on the vacuum seat and using a pressure block to tightly seal the chip and the vacuum seat, ensuring airtightness. However, the chip's position is often manually adjusted, making it impossible to guarantee consistent and centered placement each time. This leads to deviations in the accuracy and consistency of the vacuuming process, resulting in inaccurate airtightness test results. Therefore, we propose a chip packaging airtightness testing device. Utility Model Content

[0005] To address the shortcomings of existing technologies, this utility model provides a chip packaging airtightness testing device, which solves the problem that when placing the chip on the vacuum holder, the chip's position is manually arranged, making it impossible to guarantee that the chip will always be placed in the same position and in the center. This results in certain deviations in the accuracy and consistency of the vacuuming, leading to inaccurate airtightness test results.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a chip packaging airtightness testing device, comprising an airtightness tester and a display, wherein the airtightness tester and the display are connected via a data cable, and an air extraction base is mounted on the airtightness tester, characterized in that: both sides of the air extraction base are provided with:

[0007] The pushing unit includes a fixed base fixedly connected to the air tightness tester, a guide rod fixedly connected to the outer wall of the fixed base, the other end of the guide rod fixedly connected to the air extraction base, and a sliding seat slidably connected to the outer peripheral wall of the guide rod.

[0008] The extrusion unit includes a threaded rod slidably connected to a sliding seat, and a contact pad is fixedly connected to the end of the threaded rod.

[0009] Preferably, a support frame is fixedly connected to the top end face of the airtightness tester, and a cylinder is installed on the support frame.

[0010] Preferably, the output end of the cylinder is connected to a contact seat, and a compression pad is fixedly connected to the bottom end face of the contact seat.

[0011] Preferably, a slide rod is fixedly connected to the top end face of the contact seat, and the slide rod is slidably connected to the inner wall of the support frame.

[0012] Preferably, a sliding rod is slidably connected to the inner wall of the fixed base, and a rotating rod is rotatably connected to the outer wall of the sliding rod.

[0013] Preferably, the rotating rod is rotatably connected to the sliding seat.

[0014] Preferably, a spring is fixedly connected to the outer wall of the sliding seat, and the end of the spring away from the sliding seat is fixedly connected to the push seat.

[0015] Preferably, a nut seat is rotatably connected to the outer wall of the push seat, and the nut seat is threadedly connected to the threaded rod.

[0016] This utility model discloses a chip packaging hermeticity testing device, which has the following beneficial effects:

[0017] This chip-packaged airtightness testing device works by moving the sliding seat, which in turn moves the threaded rod, causing the threaded rod to move the contact pads. This causes the contact pads on both sides of the suction seat to move towards each other, pushing the chip on the suction seat to the center position. This ensures that the chip's seal is in the center, improving the stability of the seal, increasing the accuracy of the airtightness test, and making the airtightness test data accurate. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the cylinder connection of this utility model;

[0021] Figure 3 This is a schematic diagram of the pushing unit and the extrusion unit of this utility model.

[0022] In the diagram: 1. Air tightness tester; 2. Display instrument; 3. Support frame; 4. Cylinder; 401. Slide rod; 402. Contact seat; 403. Compression pad; 5. Vacuum seat; 6. Pushing unit; 601. Fixed seat; 602. Slide rod; 603. Rotating rod; 604. Slide seat; 605. Guide rod; 7. Compression unit; 701. Contact pad; 702. Threaded rod; 703. Nut seat; 704. Pushing seat; 705. Spring. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model are described clearly and completely. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0024] This application provides a chip packaging airtightness testing device, which solves the problem that when placing the chip on the vacuum seat 5, the chip's position is manually arranged, making it impossible to guarantee that the chip is always placed in the same position and in the center. This results in deviations in the accuracy and consistency of the vacuuming, leading to inaccurate airtightness test results. The device achieves this by moving the sliding seat 604, which drives the threaded rod 702 to move. This causes the threaded rod 702 to move the contact pads 701 on both sides of the vacuum seat 5, pushing the chip on the vacuum seat 5 to the center position. This ensures that the chip is sealed in the center, improving the stability of the seal, increasing the accuracy of the airtightness test, and making the airtightness test data accurate.

[0025] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0026] This utility model discloses a chip packaging airtightness testing device.

[0027] According to the appendix Figure 1-3 As shown, the device includes an airtightness tester 1 and a display 2, which are connected by a data cable. The airtightness tester 1 has an air extraction port connected to an air pump. An air extraction base 5 is mounted on the airtightness tester 1. By placing a chip on the air extraction base 5 and using the air pump to extract air, the chip is brought into contact with the air extraction base 5. The display 2 then tests the airtightness of the chip. The air extraction base 5 has the following on both sides:

[0028] The pushing unit 6 includes a fixed base 601 fixedly connected to the air tightness tester 1. A guide rod 605 is fixedly connected to the outer wall of the fixed base 601. The other end of the guide rod 605 is fixedly connected to the suction base 5. A sliding seat 604 is slidably connected to the outer peripheral wall of the guide rod 605. When the cylinder 4 drives the contact seat 402 to move, the contact seat 402 pushes the rotating rod 603 to rotate, causing the sliding seat 604 to move along the guide rod 605, and causing the extrusion unit 7 on the sliding seat 604 to move.

[0029] The extrusion unit 7 includes a threaded rod 702 slidably connected to the sliding seat 604. A contact pad 701 is fixedly connected to the end of the threaded rod 702. When the sliding seat 604 moves, it drives the threaded rod 702 to move, which in turn drives the contact pad 701 to move. This causes the contact pads 701 on both sides of the suction seat 5 to move towards each other, pushing the chip on the suction seat 5 to the center position on the suction seat 5. This ensures that the chip is sealed in the center, improves the stability of the seal, enhances the accuracy of the airtightness test, and makes the airtightness test data accurate.

[0030] A support frame 3 is fixedly connected to the top end face of the air tightness tester 1, and a cylinder 4 is installed on the support frame 3.

[0031] The output end of the cylinder 4 is connected to a contact seat 402. A compression pad 403 is fixedly connected to the bottom end face of the contact seat 402. The cylinder 4 drives the contact seat 402 to move, so that the compression pad 403 moves to contact and compress the chip, making it easier for the chip to fit tightly with the vacuum seat 5.

[0032] A slide rod 401 is fixedly connected to the top end face of the contact seat 402. The slide rod 401 is slidably connected to the inner wall of the support frame 3. Under the action of the slide rod 401, the movement of the contact seat 402 is relatively stable.

[0033] A sliding rod 602 is slidably connected to the inner wall of the fixed base 601, and a rotating rod 603 is rotatably connected to the outer wall of the sliding rod 602.

[0034] The rotating rod 603 is rotatably connected to the sliding seat 604. When the contact seat 402 contacts and presses against the sliding rod 602, the sliding rod 602 moves, causing the rotating rod 603 to rotate, which in turn pushes the sliding seat 604 to slide along the guide rod 605.

[0035] A spring 705 is fixedly connected to the outer wall of the sliding seat 604, and the end of the spring 705 away from the sliding seat 604 is fixedly connected to the push seat 704.

[0036] A nut seat 703 is rotatably connected to the outer wall of the push seat 704. The nut seat 703 is threadedly connected to the threaded rod 702. When the sliding seat 604 drives the threaded rod 702 and the contact pad 701 to move, the contact pad 701 contacts and squeezes the chip. At this time, the contact pad 701 drives the threaded rod 702 to slide along the sliding seat 604. At this time, the threaded rod 702 drives the nut seat 703 and the push seat 704 to move, compressing the spring 705.

[0037] Under the rebound of the spring 705, the contact pad 701 is pushed to contact and squeeze the chip, pushing the chip to the center position of the air extraction seat 5, so that the chip seal is in the center position, which facilitates the stability of the seal and improves the detection accuracy of air tightness.

[0038] By rotating the nut seat 703 along the threaded rod 702, the position of the push seat 704 on the threaded rod 702 can be adjusted, so that the push seat 704 compresses the spring 705, which facilitates the adjustment of the contact pad 701's pressure on the chip, so that the chip is in the center position.

[0039] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A chip packaging airtightness testing device, comprising an airtightness tester (1) and a display (2), wherein the airtightness tester (1) and the display (2) are connected by a data cable, and an air extraction base (5) is installed on the airtightness tester (1), characterized in that, Both sides of the air extraction base (5) are provided with: The pushing unit (6) includes a fixed base (601) fixedly connected to the air tightness tester (1), a guide rod (605) fixedly connected to the outer wall of the fixed base (601), the other end of the guide rod (605) fixedly connected to the suction seat (5), and a sliding seat (604) slidably connected to the outer peripheral wall of the guide rod (605). The extrusion unit (7) includes a threaded rod (702) slidably connected to a sliding seat (604), and a contact pad (701) is fixedly connected to the end of the threaded rod (702).

2. The chip packaging hermeticity testing device according to claim 1, characterized in that, The top end face of the air tightness tester (1) is fixedly connected to a support frame (3), and a cylinder (4) is installed on the support frame (3).

3. The chip packaging hermeticity testing device according to claim 2, characterized in that, The output end of the cylinder (4) is connected to a contact seat (402), and a compression pad (403) is fixedly connected to the bottom end face of the contact seat (402).

4. The chip packaging hermeticity testing device according to claim 3, characterized in that, The top end face of the contact seat (402) is fixedly connected to a slide rod (401), which is slidably connected to the inner wall of the support frame (3).

5. The chip packaging hermeticity testing device according to claim 1, characterized in that, A sliding rod (602) is slidably connected to the inner wall of the fixed base (601), and a rotating rod (603) is rotatably connected to the outer wall of the sliding rod (602).

6. The chip packaging hermeticity testing device according to claim 5, characterized in that, The rotating rod (603) is rotatably connected to the sliding seat (604).

7. The chip packaging hermeticity testing device according to claim 6, characterized in that, A spring (705) is fixedly connected to the outer wall of the sliding seat (604), and the end of the spring (705) away from the sliding seat (604) is fixedly connected to the push seat (704).

8. The chip packaging hermeticity testing device according to claim 7, characterized in that, A nut seat (703) is rotatably connected to the outer wall of the push seat (704), and the nut seat (703) is threadedly connected to the threaded rod (702).

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