Movable lens adjusting device, projection objective lens system and exposure equipment

Abstract

The utility model provides a movable lens adjusting device, a projection objective system and exposure equipment. The movable lens adjusting device comprises a position adjusting unit; the position adjusting unit comprises a transmission piece, a driving assembly, a mechanical connecting piece and a plugging piece; the transmission part is at least partially arranged at the inner side of the lens cone and is connected with the lens group located at the inner side of the lens cone; the output end of the driving assembly is at least partially arranged in a mounting groove in the lens cone in a penetrating manner and is connected with the transmission piece through a mechanical connecting piece; the driving assembly is detachably connected with the lens cone and further covers the outer opening of the mounting groove, and the driving assembly is provided with an operation hole which is communicated with the mounting groove and corresponds to the mechanical connecting piece; the plugging piece is used for plugging the operation hole. Therefore, an operator can operate the mechanical connecting piece through the operation hole to release the connection of the mechanical connecting piece to the driving assembly and the transmission piece, so that the operator can conveniently detach the driving assembly from the lens cone for maintenance.

Description

Technical Field

[0001] This utility model belongs to the field of integrated circuit manufacturing equipment technology, specifically relating to a movable lens adjustment device, a projection lens system, and an exposure device. Background Technology

[0002] In projection lenses of exposure equipment, image quality is affected by manufacturing and assembly errors, as well as changes in the internal and external environment such as temperature, humidity, and pressure. Movable lenses are needed for position adjustment to compensate for or supplement optical errors. However, existing movable lens adjustment mechanisms generally suffer from inconvenient maintenance of the drive mechanism. Utility Model Content

[0003] The purpose of this invention is to provide a movable lens adjustment device, a projection lens system, and an exposure device, aiming to reduce the maintenance difficulty of the drive components of the movable lens adjustment device.

[0004] To achieve the above objectives, this utility model provides a movable lens adjustment device, characterized in that it includes a position adjustment unit, which comprises a transmission component, a drive assembly, a mechanical connector, and a sealing component; wherein:

[0005] The transmission component is at least partially disposed inside a lens barrel and is used to connect with a lens assembly located inside the lens barrel.

[0006] The output end of the drive assembly can at least partially pass through a mounting groove located on the lens barrel and extending radially through the lens barrel, and is connected to the transmission member via the mechanical connector; the drive assembly is used to generate a driving force radially along the lens barrel to drive the transmission member to move the lens assembly; the drive assembly is used to be detachably connected to the lens barrel and also covers the outer opening of the mounting groove, and the drive assembly is provided with an operating hole that can communicate with the mounting groove and corresponds to the mechanical connector;

[0007] The sealing element is used to seal the operating hole.

[0008] Optionally, the mechanical connector is a threaded connector, and an operating groove is provided on the end face of the threaded connector away from the transmission member;

[0009] When the sealing member releases the seal on the operating hole, the operating groove becomes visible to the outside through the operating hole.

[0010] Optionally, the drive assembly includes a drive body, a first adapter, and a second adapter; the drive body includes a power unit and an output shaft; the power unit is disposed on the outside of the lens barrel and is detachably connected to the lens barrel via the first adapter; the first adapter covers the outer opening of the mounting groove, and the operating hole is at least partially located on the first adapter; the output shaft extends radially along the lens barrel and passes at least partially through the mounting groove, and the end of the output shaft away from the power unit is connected to the second adapter, such that the second adapter constitutes at least a portion of the output end of the drive assembly.

[0011] Optionally, the second adapter is provided with a first connecting hole; the transmission member includes an input part and a flexible transmission block, the flexible transmission block having a lever mechanism formed thereon, the lever mechanism connecting the mirror assembly and the input part, the input part being at least partially configured to be flexible, and the input part having a second connecting hole, the second connecting hole being alignable with the first connecting hole; one end of the mechanical connector is used to pass through the first connecting hole and extend to the second connecting hole aligned with the first connecting hole, so as to connect the input part and the second adapter;

[0012] The transmission component is configured such that the input part drives the lever mechanism to move under the driving force generated by the drive assembly, thereby driving the mirror assembly to move.

[0013] Optionally, the second adapter is further provided with a first engagement hole, which is coaxial with the output shaft; the axis of the first connecting hole is inclined relative to the axis of the output shaft, and the first connecting hole communicates with the first engagement hole;

[0014] The input section includes a flexible connecting rod extending radially along the lens barrel, the flexible connecting rod having a second connecting hole, the axis of the second connecting hole being inclined relative to the axis of the flexible connecting rod; one end of the flexible connecting rod near the lens barrel can pass through the first connecting hole, such that the second connecting hole is aligned with the first connecting hole.

[0015] Optionally, at least a portion of the hole wall of the second connecting hole is provided with threads; the mechanical connector includes a rod and a head, the rod is provided with threads, the head is disposed at one end of the rod, and the outer diameter of the head is larger than the outer diameter of the rod;

[0016] The head is positioned outside the first connecting hole at the end away from the second connecting hole, and the rod portion at the end away from the head passes through the first connecting hole and extends to the second connecting hole, and is threaded into the second connecting hole.

[0017] Optionally, the second connecting hole includes a first hole segment and a second hole segment connected axially. When the second connecting hole is aligned with the first connecting hole, the second hole segment is closer to the first connecting hole than the first hole segment. The hole wall of the first hole segment is provided with threads, and the hole wall of the second hole segment is smooth. The portion of the rod for insertion into the first hole segment is provided with threads, and the threads on the rod match the threads on the hole wall of the first hole segment.

[0018] The position adjustment unit further includes an elastic element disposed between the head and the second adapter; the elastic element is configured to store elastic potential energy when the mechanical connector connects the flexible connecting rod and the second adapter, and the elastic element is also configured to release the elastic potential energy after the rod part disengages from the first hole segment and drive the mechanical connector to move in the direction from the first hole segment to the second hole segment so that the rod part exits the first engagement hole.

[0019] Optionally, the second adapter is provided with a plurality of first connecting holes, the plurality of first connecting holes being arranged at intervals around the axis of the output shaft, and the axis of the first connecting holes being parallel to the axis of the output shaft;

[0020] The input section includes a flexible connecting rod and a docking block; the flexible connecting rod extends radially along the lens barrel, the end of the flexible connecting rod away from the lens barrel is connected to the lever mechanism, and the end of the flexible connecting rod near the lens barrel is connected to the docking block; the docking block is provided with a plurality of second connecting holes, the axis of the second connecting holes is parallel to the axis of the flexible connecting rod, and each second connecting hole can be aligned with a first connecting hole.

[0021] Optionally, the second adapter further includes a second engagement hole, a clamping hole, a first groove, and a second groove; the axis of the second engagement hole extends radially along the lens barrel and allows the output shaft to pass through at one end away from the power unit; there are multiple clamping holes, which are spaced apart on the outer periphery of the second engagement hole, and the axis of the clamping hole is perpendicular to the axis of the second engagement hole; the first groove is parallel to the axis of the second engagement hole and perpendicular to the axis of the clamping hole, and the first groove also intersects the second engagement hole and the clamping hole respectively; there are multiple second grooves, each second groove is arranged on the side of the clamping hole away from the second engagement hole, and includes a first sub-groove and a second sub-groove, the first sub-groove is parallel to the first groove, and the second sub-groove is connected at an angle to the end of the first sub-groove near the clamping hole and extends in a direction away from the first groove;

[0022] The position adjustment unit also includes a plurality of clamping pins, each clamping pin being partially inserted into a clamping hole and applying a compressive force to the portion of the second adapter located between the clamping hole and the second engagement hole, so that the second adapter clamps the output shaft.

[0023] Optionally, the flexible transmission block includes a first base and a second base; the first base is connected to the lens barrel; the second base is connected to the first base, and the connection point between the second base and the first base forms the fulcrum of the lever mechanism, the second base forms the lever of the lever mechanism, and is connected to the input part and the lens assembly.

[0024] Optionally, the second base includes a rod body, a cantilever, a first connector, a joint, and a second connector; the rod body is connected to the first base, and the connection point between the rod body and the first base forms the fulcrum; the rod body is also connected to the input part; the cantilever is arranged parallel to and spaced apart from the rod body on the side of the rod body away from the input part; the cantilever is connected to the end of the rod body near the fulcrum via the first connector; the joint is spaced apart on the side of the cantilever away from the rod body; the joint is connected to the end of the cantilever away from the first connector via the second connector; and the joint is connected to the lens assembly.

[0025] Optionally, the flexible connecting rod has a hinge portion extending radially along the lens barrel, the hinge portion having a circular cross-section, and the outer diameter of the hinge portion first decreasing and then increasing in the direction away from the lens barrel.

[0026] To achieve the above objectives, this utility model also provides a projection lens system, comprising:

[0027] The lens barrel has a mounting groove that extends radially through it;

[0028] The lens assembly is disposed inside the lens tube; and,

[0029] As described above, the movable lens adjustment device.

[0030] To achieve the above objectives, this utility model also provides an exposure device, including the projection lens system as described above.

[0031] Compared with the prior art, the movable lens adjustment device, projection lens system and exposure equipment of this utility model have the following advantages:

[0032] The aforementioned movable lens adjustment device includes a position adjustment unit comprising a transmission component, a drive assembly, a mechanical connector, and a sealing component. The transmission component is at least partially disposed inside a lens barrel and connected to a lens assembly located inside the lens barrel. The output end of the drive assembly is at least partially inserted into a mounting groove located on the lens barrel and extending radially through it, and is connected to the transmission component via the mechanical connector. The drive assembly generates a driving force radially through the lens barrel to drive the transmission component to move the lens assembly. The drive assembly is detachably connected to the lens barrel and also covers the outer opening of the mounting groove. The drive assembly has an operating hole that communicates with the mounting groove and corresponds to the mechanical connector. The sealing component seals the operating hole. Thus, the operator can operate the mechanical connector through the operating hole to disconnect the mechanical connector from the drive assembly and the transmission component, facilitating the removal of the drive assembly from the lens barrel for maintenance. Attached Figure Description

[0033] The accompanying drawings are provided to better understand this utility model and do not constitute an undue limitation thereof. Wherein:

[0034] Figure 1 This is a schematic diagram of the structure of an exposure device;

[0035] Figure 2 This is a schematic diagram of the structure of a projection lens system including a movable lens adjustment device according to an embodiment of the present invention;

[0036] Figure 3 yes Figure 2 A cross-sectional view (AA) of the projection lens system shown.

[0037] Figure 4 yes Figure 3 A BB cross-sectional view of the projection lens system shown;

[0038] Figure 5 This is a schematic diagram of the transmission component of the movable lens adjustment device according to an embodiment of the present invention;

[0039] Figure 6 This is a schematic diagram of the structure of a projection lens system including a movable lens adjustment device according to another embodiment of the present invention;

[0040] Figure 7 yes Figure 6 A CC cross-sectional view of the projection lens system shown.

[0041] Figure 8 yes Figure 7The diagram shows a DD cross-sectional view of the projection lens system.

[0042] Figure 9 yes Figure 7 The EE cross-sectional view of the projection lens system shown.

[0043] [The reference numerals in the attached drawings are explained as follows]: 10-lens, 11-inner cavity, 12-mounting groove, 20-lens assembly, 30-position adjustment unit, 310-transmission component, 311-input part, 3111-flexible connecting rod, 31101-second connecting hole, 31111-hinge part, 3112-positioning body, 3113-connecting block, 312-flexible transmission block, 3121-first base, 3122-second base, 31221-rod body, 31222-cantilever, 31223-jointing part, 31224-first connecting body, 31225-second connecting body, 320-drive assembly, 321-drive body, 3211-power unit, 3212-output shaft, 322-first adapter, 323-second adapter, 3231-first connecting hole, 3232-first joining hole, 3233-sealing wall. 3234-Second mating hole, 3235-First groove, 3236-Clamping hole, 3237-Second groove, 32371-First sub-groove, 32372-Second sub-groove, 330-Mechanical connector, 331-Rod, 332-Head, 3301-Operating groove, 340-Sealing component, 341-Sealing plug, 342-Sealing ring, 350-Elastic component, 360-Clamping pin, 301-Operating hole, 40-Centering spring. Detailed Implementation

[0044] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the drawings only show components related to this utility model and are not drawn according to the actual number, shape, and size of the components in implementation. In actual implementation, the type, quantity, and proportion of each component can be arbitrarily changed, and the component layout may also be more complex.

[0045] Furthermore, while each embodiment described below possesses one or more technical features, this does not imply that users of this utility model must simultaneously implement all technical features in any embodiment, or can only separately implement some or all technical features in different embodiments. In other words, provided it is feasible, those skilled in the art can selectively implement some or all technical features in any embodiment, or selectively implement a combination of some or all technical features in multiple embodiments, based on the disclosure of this utility model and depending on design specifications or implementation requirements, thereby increasing the flexibility in implementing this utility model.

[0046] As used herein, the singular forms “a,” “an,” and “the” include plural objects, and the plural form “multiple” includes two or more objects, unless otherwise expressly indicated. As used herein, the term “or” is generally used to include the meaning of “and / or,” unless otherwise expressly indicated, and the terms “installed,” “connected,” and “linked” should be interpreted broadly, for example, as a fixed connection, a detachable connection, or an integral connection. Connections can be mechanical or electrical. Connections can be direct or indirect through an intermediate medium, and can be internal communication between two elements or an interaction between two elements. Relational terms such as “first,” “second,” etc., are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor do they indicate or imply relative importance or implicitly specify the number of indicated technical features. It should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0047] To make the objectives, advantages, and features of this utility model clearer, the following detailed description is provided in conjunction with the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to conveniently and clearly illustrate the objectives of the embodiments of this utility model. The same or similar reference numerals in the drawings represent the same or similar parts.

[0048] The purpose of this invention is to provide a movable lens adjustment device that can be applied to exposure equipment.

[0049] Figure 1 A schematic diagram of the exposure apparatus is shown. Figure 1 As shown, the exposure apparatus includes: an illumination system IL for adjusting the beam B to a suitable illumination beam; a mask stage RS for supporting a mask R and precisely moving the mask R to a working position, the mask R being used to adjust the beam B into the desired pattern; a workpiece stage WS for supporting a substrate W and precisely moving the substrate W to the working position; and a projection lens system PO for projecting the pattern of the beam B onto the substrate W.

[0050] The lighting system IL can include various optical elements, optomechanical components, and adjustment and control mechanisms to adjust and control the lighting beam through transmission, reflection, and blocking.

[0051] The mask stage RS is used to support and clamp the mask plate R. The clamping method can be mechanical, vacuum adsorption, etc. Depending on the needs of the exposure process, the mask stage RS can be fixed or movable. For structures that support multiple mask plates R, their pose can be controlled independently.

[0052] The mask R can adjust the beam into the desired pattern. The mask R can be transmissive, reflective, or arranged in an array.

[0053] The workpiece stage WS typically holds and fixes the substrate W using a vacuum adsorption method. The workpiece stage WS is usually movable, moving to the corresponding position to complete processes such as loading / unloading the substrate W, measurement, and exposure.

[0054] The substrate W typically needs to be coated with a photosensitive material to chemically react with a light beam and distinguish between patterns that need to be retained or removed. The substrate W can be composed of silicon wafers or compound materials.

[0055] The projection lens system PO may include various optical elements, optomechanical components, and adjustment and control mechanisms for transferring a pattern on a mask R onto a substrate W. The pattern on the mask R may differ from the pattern on the substrate W, and its size is typically reduced. The optical elements can project the pattern onto the substrate W through transmission or reflection, and the medium between the optical elements can be air, water, or other light-transmitting media.

[0056] The exposure equipment may have two or more workpiece stages WS to simultaneously complete multiple exposure processes; it may have multiple illumination systems IL, mask plates R, and projection lens systems PO, which are spliced ​​together to form a complete pattern.

[0057] The exposure equipment can have at least one of two working modes. One is the stepping mode, in which the mask R and the substrate W remain stationary during pattern projection, and the beam projects the pattern onto the substrate W in one go. The second is the scanning mode, in which the mask R and the substrate W are moved by the mask stage RS and the workpiece stage WS respectively during the pattern projection process. The pattern projected at each moment is a part of the complete pattern, and a complete scan forms a complete pattern.

[0058] The movable lens adjustment device provided in this embodiment of the present invention is part of the projection lens system PO, specifically at least a part of the adjustment control mechanism of the projection lens system PO, and is used to adjust the position of the lens of the projection lens system PO. It should be understood that the lens of the projection lens system PO is at least a part of the aforementioned optical elements of the projection lens system PO.

[0059] Figure 2 This diagram shows a schematic representation of a projection lens system including a movable lens adjustment device according to an embodiment of the present invention. Figure 3 and Figure 4 yes Figure 2 Different cross-sectional views of the projection lens system in the image; Figure 6 This diagram illustrates the structure of a projection lens system including a movable lens adjustment device according to another embodiment of the present invention. Figures 7 to 9 yes Figure 6 Different cross-sectional views of the projection lens system in the image.

[0060] Please refer to Figures 2 to 4 , Figures 6 to 9 The projection lens system includes a lens barrel 10, a lens group 20, and a movable lens adjustment device, the movable lens adjustment device including a position adjustment unit 30.

[0061] The lens barrel 10 is a hollow cylindrical structure with an inner cavity 11, both axial ends of which are open. A mounting groove 12 extends radially through the lens barrel 10. Here, "extending radially through the lens barrel 10" means that the inner opening of the mounting groove 12 is located on the inner circumferential surface of the lens barrel 10 and communicates with the inner cavity 11, while the outer opening of the mounting groove 12 is located on the outer circumferential surface of the lens barrel 10 and communicates with the external space of the lens barrel 10. It is worth noting that the lens barrel 10 is the outer shell of the projection lens system PO.

[0062] The lens group 20 is disposed inside the lens barrel 10. The position of the lens group 20 is adjusted by the position adjustment unit 30 to adjust the beam path passing through the projection lens system PO. Here, "the lens group 20 is disposed inside the lens barrel 10" means that when the movable lens adjustment device is projected onto a plane perpendicular to the axis of the lens barrel 10, the projection of the lens group 20 is located inside the projection of the lens barrel 10. That is, the lens group 20 is located inside the projection lens system PO. In fact, the lens group 20 includes the lens.

[0063] The position adjustment unit 30 includes a transmission component 310, a drive assembly 320, a mechanical connector 330, and a sealing component 340.

[0064] The transmission member 310 is at least partially disposed inside the lens barrel 10 and connected to the lens assembly 20. Here, "the transmission member 310 is at least partially disposed inside the lens 10" means that when the movable lens adjustment device is projected onto a plane perpendicular to the axis of the lens barrel 10, the projection of the transmission member 310 is at least partially located inside the projection of the lens barrel 10.

[0065] The output end of the drive assembly 320 is at least partially inserted into the mounting groove 12 and connected to the transmission member 310 via the mechanical connector 330. Thus, when the drive assembly 320 generates a radial driving force along the lens barrel 10, it can drive the transmission member 310 to move the lens assembly 20. The drive assembly 320 is also detachably connected to the lens barrel 10 and covers the outer opening of the mounting groove 12. The drive assembly 320 also has an operating hole 301 that communicates with the mounting groove 12 and corresponds to the mechanical connector 330.

[0066] The sealing member 340 is used to selectively seal or release the operation hole 301. Specifically, when the exposure equipment using the movable lens adjustment device is operating normally, the sealing member 340 seals the operation hole 301 to seal the gas environment inside the movable lens adjustment device. When maintenance is required on the drive assembly 320, the operator releases the sealing member 340 from the operation hole 301.

[0067] After the sealing member 340 is released from the operating hole 301, the operator can operate the mechanical connector 330 through the operating hole 301 to disconnect the drive assembly 320 from the transmission member 310. Thus, after disconnecting the drive assembly 320 from the lens barrel 10, the operator can disassemble the drive assembly 320 for maintenance.

[0068] In this embodiment of the present invention, the mechanical connector 330 is, for example, a threaded connector, so that the output end of the drive assembly 320 is fixedly connected to the transmission member 310 through the threaded connector. The advantages of this approach are that the transmission component 310 and the drive assembly 320 remain relatively stationary at their connection point. This prevents frictional loss during the process where the drive assembly 320 drives the transmission component 310 to move the mirror assembly 20, thereby improving transmission stiffness, enhancing the structural modes during transmission, reducing dynamic response time, and increasing productivity. Furthermore, it avoids frictional contamination. It also avoids the nonlinear characteristics introduced by frictional drive, achieving linear drive, which facilitates improved control performance of the drive assembly 320 and reduces control difficulty. Additionally, it allows for complete separation of the position adjustment unit 30 from the mirror barrel 10 and the mirror assembly 20 during disassembly. This prevents vibration of the mirror barrel 10 and / or the mirror assembly 20 due to incomplete separation, which could lead to excessive movement of the transmission component 310 and damage, or interference with the mirror assembly 20.

[0069] It should be understood that when the mechanical connector 330 is a threaded connector, the output end of the drive assembly 320 is provided with a first connection hole 3231, and the flexible transmission member 310 is provided with a second connection hole 31101. The mechanical connector achieves the connection between the drive assembly 320 and the flexible transmission member 310 by passing through the first connection hole 3231 and the second connection hole 3201. Furthermore, the end face of the mechanical connector 330 away from the transmission member 310 is provided with an operating groove 3301 (e.g., ...). Figure 4 As shown, when the sealing member 340 releases the seal on the operating hole 301, the operating groove 3301 becomes visible to the outside through the operating hole 301. At this time, the operator can operate the mechanical connector 330 by using a tool in conjunction with the operating groove 3301. The cross-section of the operating groove 3301 can be hexagonal.

[0070] It is understood that there are multiple position adjustment units 30, such as three, four or more, and the multiple position adjustment units 30 are arranged at equal intervals along the circumference of the lens barrel 10.

[0071] It should be understood that, based on Figure 2The coordinate system is defined as follows: X / Y directions are horizontal radial, Z is vertical, and the X, Y, and Z directions are orthogonally related. Here, the vertical direction refers to the optical axis direction when the exposure equipment is actually operating. Thus, through multiple position adjustment units 30, the lens assembly 20 can be driven to move with three degrees of freedom (X / Y / Z), achieving adjustment of the vertical translation and tilt relative to the optical axis of the lens assembly 20.

[0072] Preferably, the lens assembly 20 is also flexibly connected to the lens barrel 10 via a centering spring 40. The centering spring 40 has a C-shaped cross-section in a plane parallel to the axis of the lens barrel 10. The centering spring 40 can limit the center offset of the lens assembly 20 during its movement, reducing eccentric crosstalk.

[0073] Furthermore, this embodiment of the invention does not particularly limit the sealing member 340, as long as it can seal the operating hole 301. In an optional example, the sealing member 340 includes a sealing plug 341 and a sealing ring 342. The sealing plug 341 is used to cover the operating hole 301, and the sealing ring 342 is used, for example, to be disposed between the sealing plug 341 and the hole wall of the operating hole 301.

[0074] The specific structure of the position adjustment unit 30 will be described next through several embodiments.

[0075] <Example 1>

[0076] Please refer to Figures 2 to 4 The drive assembly 320 includes a drive body 321, a first adapter 322, and a second adapter 323. The drive body 321 is a linear motor and includes a power unit 3211 and an output shaft 3212. The power unit 3211 is disposed on the outside of the lens barrel 10 and is detachably connected to the lens barrel 10 via the first adapter 322. The first adapter 322 covers the outer opening of the mounting groove 12 and has the operating hole 301. The second adapter 323 is connected to the end of the output shaft 3212 away from the power unit 3211 and constitutes the output end of the drive assembly 320; that is, the second adapter 323 is connected to the transmission member 310 via the mechanical connector 330.

[0077] In this embodiment, the second adapter 323 is provided with a first engagement hole 3232, which is coaxial with the output shaft 3212. Specifically, the end of the first engagement hole 3232 away from the output shaft 3212 is an open end, and the end closer to the output shaft 3212 is blocked by a sealing wall 3233. The second adapter 323 is connected to the output shaft 3212 at the sealing wall 3233 by a screw.

[0078] The first connecting hole 3231 is disposed on the second adapter 323. The axis of the first connecting hole 3231 is inclined relative to the axis of the first connecting hole 3232, and the first connecting hole 3231 communicates with the first connecting hole 3232.

[0079] Please refer to Figure 5 The transmission component 310 includes an input portion 311, which includes a flexible connecting rod 3111 extending radially along the lens barrel 10. The flexible connecting rod 3111 has a second connecting hole 31101, the axis of which is inclined relative to the axis of the flexible connecting rod 3111. One end of the flexible connecting rod 3111 near the lens barrel 10 can pass through the first engagement hole 3232, aligning the second connecting hole 31101 with the first connecting hole 3231, allowing the mechanical connector 330 to pass through.

[0080] In one example, both the second connecting hole 31101 and the first connecting hole 3231 are threaded holes, so that the mechanical connector 330 is threaded into both the second connecting hole 31101 and the first connecting hole 3231. With this configuration, when disconnecting the flexible connecting rod 3111 from the second adapter 323, the operator needs to continuously rotate the mechanical connector 330 until the mechanical connecting rod 330 is completely disengaged from the first engagement hole 3232.

[0081] In another example, a portion of the wall of the second connecting hole 31101 is threaded. The mechanical connector 330 is a screw and includes a shank 331 and a head 332. The shank 331 is threaded, and the head 332 is connected to one end of the shank 331, with the outer diameter of the head 332 being larger than the outer diameter of the shank 331. When the mechanical connector 330 is used to connect the second adapter 323 and the transmission member 310, the head 332 is located outside the end of the first connecting hole 3231 away from the second connecting hole 31101, and the end of the shank 331 away from the head 332 passes through the first connecting hole 3231 and extends to the second connecting hole 31101, where it is threadedly engaged with the second connecting hole 31101. Further, the second connecting hole 31101 includes a first hole segment and a second hole segment (not shown in the figure) connected axially. When the second connecting hole 31101 is aligned with the first connecting hole 3231, the second hole segment is closer to the first connecting hole 3231 than the first hole segment. The first hole segment has threads on its hole wall, while the second hole segment has a smooth hole wall. The outer circumferential surface of the portion of the rod 331 that extends into the first hole segment is threaded for threaded engagement with the first hole segment. Figure 4As shown, the position adjustment unit 30 further includes an elastic element 350, which is disposed between the head 332 and the second adapter 323. Specifically, the second adapter 323 has a stepped surface (not shown in the figure), which is located at the end of the second hole segment away from the first hole segment and opposite to the first hole segment. One axial end of the elastic element 350 abuts against the stepped surface, and the other axial end abuts against the head 332. The elastic element 350 is configured to store elastic potential energy when the mechanical connector 330 connects the flexible connecting rod 3111 and the second adapter 323. The elastic element 350 is also configured to release the elastic potential energy after the rod 331 disengages from the first hole segment and drive the mechanical connector 330 to move along the direction from the first hole segment to the second hole segment so that the rod 331 exits the first engagement hole 3232. That is, in this configuration, when disconnecting the flexible connecting rod 3111 from the second adapter 323, the operator only needs to rotate the mechanical connector 330 until the rod 331 exits from the first hole. Then, the elastic element 350 drives the rod 331 to move until it exits from the first engagement hole 3232. The elastic element 350 is, for example, a spring. As a further preferred embodiment, the wall of the first connecting hole 3231 is also threaded, and the threads on the wall of the first connecting hole 3231 engage with the threads on the rod 331. This prevents the mechanical connector 330 from detaching from the first connecting hole 3231 and falling into the interior of the lens barrel 10 under the elastic potential energy released by the elastic element 350.

[0082] Corresponding to the orientation of the second connecting hole 31101 and the first connecting hole 3231, the axis of the operating hole 301 can also be inclined relative to the axis of the output shaft 3212 and coaxial or parallel to the first connecting hole 3231.

[0083] Optionally, the transmission component 310 further includes a flexible transmission block 312, on which a lever mechanism is formed, connecting the mirror assembly 20 and the flexible connecting rod 3111. Specifically, as... Figure 3 and Figure 5 As shown, the flexible transmission block 312 includes a first base 3121 and a second base 3122. The second base 3122 is connected to the first base 3121, and the connection point between the second base 3122 and the first base 3121 forms the fulcrum of the lever mechanism. The second base 3122 forms the lever of the lever mechanism and is connected to the end of the flexible connecting rod 3111 away from the lens barrel 10 and to the lens assembly 20. In addition, the first base 3121 is also connected to the lens barrel 10.

[0084] by Figure 5 Taking the indicated orientation as an example, when the driving component 320 generates a driving force in the left-right direction, the driving component 320 drives the flexible connecting rod 3111 to move in the left-right direction. The flexible connecting rod 3111 then drives the second substrate 3122 to rotate around the fulcrum, thereby moving the lens assembly 20. During this process, both the flexible connecting rod 3111 and the second substrate 3122 undergo deformation.

[0085] In this embodiment, the flexible connecting rod 3111 and the second substrate 3122 are an integral structure, or the flexible connecting rod 3111 and the second substrate 3122 are separately formed and then fixed together by bonding or other suitable methods. Furthermore, the second substrate 3122 can be connected to the lens assembly 20 by screws.

[0086] Preferably, the flexible connecting rod 3111 has a hinge portion 31111 extending radially along the lens barrel 10, and the outer diameter of the hinge portion 31111 first decreases and then increases in the direction away from the lens barrel 10. One advantage of this arrangement is that the flexible connecting rod 3111 is more likely to deform at the hinge portion 31111 during the rotation of the second base 3122 around the fulcrum, reducing the damage to the flexible connecting rod 3111 and the drive assembly 320 caused by the component of the force between the flexible connecting rod 3111 and the second base 3122 in the non-working direction. Another advantage is that it can absorb the stress caused by assembly errors during assembly of the drive assembly 320. The non-working direction refers to the direction deviating from the axial direction of the flexible connecting rod 3111, such as the axial direction of the lens barrel 10.

[0087] Preferably, the hinge portion 31111 has a circular cross-section perpendicular to the axial direction of the flexible connecting rod 3111, so that the hinge portion 31111 has the same deformation capacity at all positions in its circumferential direction. Furthermore, it is also preferable that the hinge portion 31111 is located at the end of the flexible connecting rod 3111 away from the lens barrel 10.

[0088] Preferably, the input part 311 further includes a positioning body 3112, which is disposed on the flexible connecting rod 3111 and located between the hinge part 31111 and the second connecting hole 31101. The positioning body 3112 is a structure that protrudes radially outward along the flexible connecting rod 3111. During the insertion of the flexible connecting rod 3111 near the end of the lens barrel 10 into the first engagement hole 3231, when the positioning body 3112 abuts against the second adapter 323 and prevents the flexible connecting rod 3111 from further penetrating into the first engagement hole 3231, the second connecting hole 31101 is aligned with the first connecting hole 3231.

[0089] Further, the second base 3122 includes a rod body 31221, a cantilever 31222, a joint 31223, a first connector 31224, and a second connector 31225. The rod body 31221 is connected to the first base 3121, and the connection point between the two constitutes the fulcrum. The rod body 31221 is also connected to the end of the flexible connecting rod 3111 away from the lens barrel 10. The cantilever 31222 is arranged parallel to and spaced apart from the rod body 31221. The cantilever 31222 is located on the side of the rod body 31221 away from the flexible connecting rod 3111, and the cantilever 31222 is connected to the end of the rod body 31221 near the fulcrum through the first connector 31224, forming a hinge structure. The joints 31223 are spaced apart on the side of the cantilever 31222 away from the rod body 31221, and are connected to the end of the cantilever 31222 away from the first connector 31224 via the second connector 31225, forming a hinge structure. The joints 31223 are also connected to the lens assembly 20. The structure of the second base 3122 reduces its radial stiffness in the lens barrel 10, thereby reducing the radial force on the lens assembly 20 and thus reducing radial crosstalk on the lens assembly 20. It also helps to reduce jamming and damage to the second base 3122 caused by excessive structural stress.

[0090] It can also be understood that the lever mechanism is preferably configured as a force-saving lever structure, specifically, when viewed in the extension direction of the rod body 31221, the distance from the fulcrum to the flexible connecting rod 3111 is greater than the distance from the fulcrum to the joint 31223. In this way, the power arm L1 of the lever mechanism is longer than the resistance arm L2, so that the lever mechanism is formed as the force-saving lever structure.

[0091] <Example 2>

[0092] Please refer to Figures 6 to 9The difference between this embodiment and Embodiment 1 lies in the construction of the second adapter 323. Specifically, the second adapter 323 in this embodiment does not have the first connecting hole 3232, and the second adapter 323 can be a plate-like structure. The second adapter plate 323 has a plurality of first connecting holes 3231, which are distributed, for example, spaced apart around the output shaft 3212, and the axis of the first connecting holes 3231 is parallel to the axis of the output shaft 3212.

[0093] Accordingly, the input section 311 includes not only the flexible connecting rod 3111, but also a docking block 3113. The docking block 3113 is connected to the end of the flexible connecting rod 3111 near the lens barrel 10, and the docking block 3113 is also a plate-shaped structure. In this embodiment, the second connecting hole 31101 is not provided on the flexible connecting rod 3111, but on the docking block 3113. The docking block 3113 is provided with a plurality of second connecting holes 31101, the axis of each second connecting hole 31101 is parallel to the axis of the flexible connecting rod 3111, and each second connecting hole 31101 can be aligned with a first connecting hole 3231 for a mechanical connector 330 to pass through.

[0094] In this embodiment, the second connecting hole 31101 is a threaded hole, and the first connecting hole 3231 can be a through hole with a smooth inner wall and two segments. The diameter of the segment of the first connecting hole 3231 closest to the second connecting hole 31101 is smaller. The head of the mechanical connector 323 is at least partially located within the segment of the first connecting hole 3231 furthest from the second connecting hole 31101, and presses against the connection point of the two segments of the first connecting hole 3231. The rod portion of the mechanical connector 323 extends into the second connecting hole 31101 after passing through the segment of the first connecting hole 3231 closest to the second connecting hole 31101, and is threaded into the second connecting hole 31101. The operating hole 301 can penetrate radially through the housing of the power unit 3211 and the first adapter 322 of the lens barrel 10. Furthermore, in this embodiment, the positioning body 3112 is not required on the flexible connecting rod 3111.

[0095] In this embodiment, the second adapter 323 and the output shaft 3212 can be connected in any suitable manner. In a specific example, the second adapter 323 is further provided with a second engagement hole 3234, a first groove 3235, a clamping hole 3236, and a second groove 3237. The axis of the second engagement hole 3234 extends radially along the lens barrel 10 and allows one end of the output shaft 3212 away from the power unit 3211 to pass through. The first groove 3234 is parallel to the axis of the second engagement hole 3234 and intersects with the second engagement hole 3234. The axis of the clamping hole 3236 is perpendicular to both the axis of the second engagement hole 3234 and the first groove 3234. There are multiple clamping holes 3236, for example, two, which are spaced apart on the outer periphery of the second engagement hole 3234. There are multiple second grooves 3237, each corresponding to one of the clamping holes 3236. Each second groove 3237 is located on the side of the corresponding clamping hole 3236 away from the second engagement hole 3234. Each second groove 3237 includes a first sub-groove 32371 and a second sub-groove 32372. The first sub-groove 32371 is parallel to the first groove 3234, and the second sub-groove 32372 is connected to the end of the first sub-groove 32371 near the corresponding clamping hole 3236 and extends in a direction away from the first groove 3234. The position adjustment unit 30 further includes clamping pins 360, the number of which is the same as the number of clamping holes 3236. Each clamping pin 360 is partially inserted into one of the clamping holes 3236 and applies a radially outward compressive force to the corresponding hole wall of the clamping hole 3236. This causes the hole wall of the clamping hole 3236 near the second engagement hole 3234 to apply a compressive force to the output shaft 3212, so that the second adapter 323 clamps the output shaft 3212, thereby achieving a fixed connection between the output shaft 3212 and the second adapter 323.

[0096] It is understood that the wall of the clamping hole 3236 is threaded, and the clamping pin 360 is a screw.

[0097] For other undescribed structures of the position adjustment unit 30 in this embodiment, please refer to Embodiment 1.

[0098] Compared to Embodiment 1, the connection between the input section and the second adapter 323 in this embodiment is more stable, and when the drive assembly 320 is removed from the lens barrel 10, no accident will occur due to the mechanical connector 330 not being disengaged from the second connection hole 31101. In other words, the maintenance of the drive assembly 320 is more reliable.

[0099] Furthermore, this utility model embodiment also provides a projection lens system, which includes the aforementioned movable lens adjustment device, the lens barrel 10 and the lens group 20. The assembly method of the movable lens adjustment device, the lens barrel 10 and the lens group 20 is as described above, and will not be repeated here.

[0100] Furthermore, this embodiment of the invention also provides an exposure device, including the aforementioned projection lens system.

[0101] While the present invention has been disclosed above, it is not limited thereto. Those skilled in the art can make various modifications and variations to the present invention without departing from its spirit and scope. Therefore, if such modifications and variations fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include such modifications and variations.

Claims

1. A movable lens adjustment device, characterized in that, The system includes a position adjustment unit, which comprises a transmission component, a drive assembly, a mechanical connector, and a sealing component; wherein: The transmission component is at least partially disposed inside a lens barrel and is used to connect with a lens assembly located inside the lens barrel. The output end of the drive assembly can at least partially pass through a mounting groove located on the lens barrel and extending radially through the lens barrel, and is connected to the transmission member via the mechanical connector; the drive assembly is used to generate a driving force radially along the lens barrel to drive the transmission member to move the lens assembly; the drive assembly is used to be detachably connected to the lens barrel and also covers the outer opening of the mounting groove, and the drive assembly is provided with an operating hole that can communicate with the mounting groove and corresponds to the mechanical connector; The sealing element is used to seal the operating hole.

2. The movable lens adjustment device according to claim 1, characterized in that, The mechanical connector is a threaded connector, and an operating groove is provided on the end face of the threaded connector away from the transmission component. When the sealing member releases the seal on the operating hole, the operating groove becomes visible to the outside through the operating hole.

3. The movable lens adjustment device according to claim 1 or 2, characterized in that, The drive assembly includes a drive body, a first adapter, and a second adapter; the drive body includes a power unit and an output shaft; the power unit is disposed on the outside of the lens barrel and is detachably connected to the lens barrel via the first adapter; the first adapter covers the outer opening of the mounting groove, and the operating hole is at least partially located on the first adapter; the output shaft extends radially along the lens barrel and passes at least partially through the mounting groove, and the end of the output shaft away from the power unit is connected to the second adapter, such that the second adapter constitutes at least a portion of the output end of the drive assembly.

4. The movable lens adjustment device according to claim 3, characterized in that, The second adapter is provided with a first connection hole; the transmission component includes an input part and a flexible transmission block, the flexible transmission block is formed with a lever mechanism, the lever mechanism connects the mirror assembly and the input part, the input part is at least partially configured to be flexible, and the input part is provided with a second connection hole, the second connection hole being able to align with the first connection hole; One end of the mechanical connector is used to pass through the first connection hole and extend to the second connection hole aligned with the first connection hole, so as to connect the input part and the second adapter. The transmission component is configured such that the input part drives the lever mechanism to move under the driving force generated by the drive assembly, thereby driving the mirror assembly to move.

5. The movable lens adjustment device according to claim 4, characterized in that, The second adapter is also provided with a first engagement hole, which is coaxial with the output shaft; the axis of the first connecting hole is inclined relative to the axis of the output shaft, and the first connecting hole communicates with the first engagement hole; The input section includes a flexible connecting rod extending radially along the lens barrel, the flexible connecting rod having a second connecting hole, the axis of the second connecting hole being inclined relative to the axis of the flexible connecting rod; one end of the flexible connecting rod near the lens barrel can pass through the first connecting hole, such that the second connecting hole is aligned with the first connecting hole.

6. The movable lens adjustment device according to claim 5, characterized in that, At least a portion of the wall of the second connecting hole is provided with threads; the mechanical connector includes a rod and a head, the rod is provided with threads, the head is disposed at one end of the rod, and the outer diameter of the head is larger than the outer diameter of the rod; The head is positioned outside the first connecting hole at the end away from the second connecting hole, and the rod portion at the end away from the head passes through the first connecting hole and extends to the second connecting hole, and is threaded into the second connecting hole.

7. The movable lens adjustment device according to claim 6, characterized in that, The second connecting hole includes a first hole segment and a second hole segment connected axially. When the second connecting hole is aligned with the first connecting hole, the second hole segment is closer to the first connecting hole than the first hole segment. The hole wall of the first hole segment is provided with threads, and the hole wall of the second hole segment is smooth. The portion of the rod for insertion into the first hole segment is provided with threads, and the threads on the rod portion match the threads on the hole wall of the first hole segment. The position adjustment unit further includes an elastic element disposed between the head and the second adapter; the elastic element is configured to store elastic potential energy when the mechanical connector connects the flexible connecting rod and the second adapter, and the elastic element is also configured to release the elastic potential energy after the rod part disengages from the first hole segment and drive the mechanical connector to move in the direction from the first hole segment to the second hole segment so that the rod part exits the first engagement hole.

8. The movable lens adjustment device according to claim 4, characterized in that, The second adapter is provided with a plurality of first connection holes, which are arranged at intervals around the axis of the output shaft, and the axis of the first connection holes is parallel to the axis of the output shaft. The input section includes a flexible connecting rod and a docking block; the flexible connecting rod extends radially along the lens barrel, the end of the flexible connecting rod away from the lens barrel is connected to the lever mechanism, and the end of the flexible connecting rod near the lens barrel is connected to the docking block; the docking block is provided with a plurality of second connecting holes, the axis of the second connecting holes is parallel to the axis of the flexible connecting rod, and each second connecting hole can be aligned with a first connecting hole.

9. The movable lens adjustment device according to claim 8, characterized in that, The second adapter also includes a second engagement hole, a clamping hole, a first groove, and a second groove. The axis of the second engagement hole extends radially along the lens barrel and allows the output shaft to pass through at one end away from the power unit. There are multiple clamping holes, spaced apart on the outer periphery of the second engagement hole, with the axis of each clamping hole perpendicular to the axis of the second engagement hole. The first groove is parallel to the axis of the second engagement hole and perpendicular to the axis of the clamping hole, and also intersects with both the second engagement hole and the clamping hole. There are multiple second grooves, each arranged on the side of the clamping hole away from the second engagement hole, and includes a first sub-groove and a second sub-groove. The first sub-groove is parallel to the first groove, and the second sub-groove is angled to the end of the first sub-groove near the clamping hole and extends in a direction away from the first groove. The position adjustment unit also includes a plurality of clamping pins, each clamping pin being partially inserted into a clamping hole and applying a compressive force to the portion of the second adapter located between the clamping hole and the second engagement hole, so that the second adapter clamps the output shaft.

10. The movable lens adjustment device according to claim 4, characterized in that, The flexible transmission block includes a first base and a second base; the first base is connected to the lens barrel; the second base is connected to the first base, and the connection point between the second base and the first base forms the fulcrum of the lever mechanism, the second base forms the lever of the lever mechanism, and is connected to the input part and the lens assembly.

11. The movable lens adjustment device according to claim 10, characterized in that, The second base includes a rod body, a cantilever, a first connector, a joint, and a second connector; the rod body is connected to the first base, and the connection point between the rod body and the first base forms the fulcrum; the rod body is also connected to the input part; the cantilever is arranged parallel to and spaced apart from the rod body on the side of the rod body away from the input part; the cantilever is connected to the end of the rod body near the fulcrum via the first connector; the joint is spaced apart on the side of the cantilever away from the rod body; the joint is connected to the end of the cantilever away from the first connector via the second connector; and the joint is connected to the lens assembly.

12. The movable lens adjustment device according to claim 5 or 8, characterized in that, The flexible connecting rod has a hinge portion extending radially along the lens barrel. The cross-section of the hinge portion is circular, and the outer diameter of the hinge portion first decreases and then increases in the direction away from the lens barrel.

13. A projection lens system, characterized in that, include: The lens barrel has a mounting groove that extends radially through it; The lens assembly is disposed inside the lens tube; and, The movable lens adjustment device as described in any one of claims 1-12.

14. An exposure apparatus, characterized in that, Includes the projection lens system as described in claim 13.

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