Gluing equipment for wafer jig
By combining a screw-type dispensing valve with a vision inspection unit, the problem of inaccurate dispensing during the coating process of wafer fixtures was solved, improving coating accuracy and production efficiency while reducing costs and time consumption.
Patent Information
- Application Number
- CN202423274912.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2026-02-27
- Estimated Expiration
- 2034-12-30
AI Technical Summary
The inaccurate glue dispensing during the current wafer fixture coating process leads to frequent production downtime, material waste, and low production efficiency.
A screw-type dispensing valve is used to measure the amount of adhesive A and B applied. Visual inspection and a weighing unit are used to judge the application effect, ensuring the accuracy of the dispensing rate and amount.
This improved the accuracy and efficiency of the adhesive application process, avoided frequent downtime and adjustments during production, reduced labor and material costs, and shortened the production cycle.
Smart Images
Figure CN223946023U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the technical field of gluing equipment, and relates to a gluing equipment for wafer fixtures. BACKGROUND
[0002] A wafer is the basis of semiconductor devices, and is covered with thousands or even millions of tiny integrated circuits. Any tiny contamination or damage can cause a large number of chips to fail. A wafer fixture is a precision bearing device designed specifically for semiconductor wafers, also known as a wafer carrier or semiconductor carrier. Its design purpose is to meet the strict clean room standards and ensure the physical safety and chemical purity of the wafer during the entire manufacturing process.
[0003] The wafer fixture can ensure firm connection between the wafer chip and the substrate after gluing, thereby improving the reliability and stability of the product. The shrinkage rate is low during the gluing process, which helps to reduce the stress impact on the chip and substrate and reduce the risk of chip damage. Gluing can provide good moisture resistance and chemical resistance to protect the chip from the external environment.
[0004] Currently, the glue output during the gluing of the wafer fixture is not accurate, which can cause frequent shutdown and adjustment during the production process, resulting in material waste and increased rework rate. Due to the inaccurate gluing amount, re-gluing or repair is required, which not only increases the labor and material costs, but also prolongs the production cycle and reduces the production efficiency. SUMMARY
[0005] In view of the above problems existing in the prior art, the present application provides a gluing equipment for a wafer fixture.
[0006] The technical scheme of the utility model is as follows:
[0007] A gluing equipment for a wafer fixture, comprising a gluing frame and a support frame, the support frame is assembled with an A agent glue supply pump through a first support, the A agent glue supply pump is connected with a screw type glue injection valve through an A agent glue supply pipeline, the support frame is assembled with a B agent glue supply pump through a second support, the B agent glue supply pump is connected with a screw type glue injection valve through a B agent glue supply pipeline, the screw type glue injection valve is installed on a gantry type three-axis module, a weighing unit is arranged below the screw type glue injection valve, the weighing unit is assembled with a visual detection unit and a barcode gun, a control cabinet is arranged at the bottom of the gluing frame, and a display screen is connected to the right side of the gluing frame through a hanging arm.
[0008] As a preferred embodiment of the utility model: a workbench is arranged below the display screen.
[0009] As a preferred embodiment of the utility model: a warning light is installed at the top of the gluing frame.
[0010] As a preferred embodiment of the utility model: the glue applying frame body is provided with a control cabinet, and the control cabinet is provided with control buttons through a control panel.
[0011] As a preferred embodiment of the utility model: the bottom of the glue applying frame body is provided with supporting legs.
[0012] As a preferred embodiment of the utility model: the bottom end of the supporting frame is provided with universal casters.
[0013] The utility model has the advantages of:
[0014] The screw type glue injection valve can respectively measure the glue applying amount of A agent and B agent, can guarantee the accuracy of glue flow rate and glue amount, the bar code gun scans and inputs information to the wafer fixture, the weighing unit can weigh the wafer fixture before glue applying, the screw type glue injection valve starts glue applying operation, automatically opens the visual detection unit after completing glue applying, can quickly judge the glue applying effect, finally weighs the wafer fixture after glue applying through the weighing unit, thereby judging whether the glue applying amount is accurate, avoids frequent shutdown and adjustment in the production process, does not need to reapply glue or repair, is efficient and reliable. BRIEF DESCRIPTION OF DRAWINGS
[0015] Figure 1 It is a structural schematic view of the utility model for a wafer fixture glue applying equipment.
[0016] In the figure: 1-supporting frame;2-A agent glue supply pump;3-first support;4-A agent glue supply pipeline;5-B agent glue supply pipeline;6-glue applying frame body;7-warning light;8-screw type glue injection valve;9-gantry type three-axis module;10-visual detection unit;11-bar code gun;12-weighing unit;13-display screen;14-hanging arm;15-operation table;16-control cabinet;17-control panel;18-control button;19-supporting leg;20-B agent glue supply pump;21-second support;22-universal caster. DETAILED DESCRIPTION
[0017] The utility model will be specifically described below in connection with the drawings and examples. Obviously, the described examples are only a part of the utility model examples, not all examples. Based on the examples in the utility model, all other examples obtained by those skilled in the art without creative labor belong to the scope of the utility model protection.
[0018] As Figure 1As shown, a kind of glue coating equipment for wafer fixture, including glue coating frame body 6 and support frame 1, support frame 1 is equipped with A agent glue supply pump 2 by first support 3, A agent glue supply pump 2 is communicated screw type glue injection valve 8 by A agent glue supply pipeline 4, support frame 1 is equipped with B agent glue supply pump 20 by second support 21, B agent glue supply pump 20 is communicated screw type glue injection valve 8 by B agent glue supply pipeline 5, screw type glue injection valve 8 is installed in gantry three-axis module 9, weighing unit 12 is provided below screw type glue injection valve 8, weighing unit 12 is equipped with visual detection unit 10 and bar code gun 11, the bottom of glue coating frame body 6 is equipped with control cabinet 16, the right side of glue coating frame body 6 is connected display screen 13 by suspension arm 14.
[0019] Operating platform 15 is provided below display screen 13;Warning light 7 is installed on the top of glue coating frame body 6, warning light 7 can pass through the way of sound or flashing to deliver control signal, ensure that surrounding personnel can receive early warning signal in time;Glue coating frame body 6 is provided with control cabinet 16, control cabinet 16 is installed with control button 18 by control panel 17, improve the convenience of operation;Support foot 19 is provided at the bottom of glue coating frame body 6;Universal castor 22 is installed at the bottom end of support frame 1, it is convenient to move flexibly.
[0020] In conclusion, the utility model discloses a kind of glue coating equipment for wafer fixture, screw type glue injection valve 8 can respectively measure the glue coating amount of A agent and B agent, can guarantee the accuracy of glue flow rate and glue output, bar code gun 11 scans and enters information to wafer fixture, weighing unit 12 can weigh the weight of wafer fixture before glue coating, screw type glue injection valve 8 starts glue coating operation, automatically opens visual detection unit 10 after completing glue coating, can quickly judge glue coating effect, finally, weighing unit 12 weighs the weight of wafer fixture after glue coating, to judge whether the glue coating amount is accurate, avoid frequent shutdown and adjustment in production process.
[0021] Although the embodiments of the utility model have been disclosed as above, it is not limited to the application listed in the specification and embodiments, it can be fully applied to various fields suitable for the utility model, for those skilled in the art, for ordinary skilled person in the art, can make various changes, modification, replacement and modification to these embodiments without departing from the principles and spirits of the utility model, therefore, the utility model is not limited to specific details under the general concept defined by the claims and equivalent range.
Claims
1. A coating device for wafer fixtures, characterized in that: Including the frame (6) and support frame (1) of gluing, the support frame (1) is equipped with A agent glue supply pump (2) through the first support (3), the A agent glue supply pump (2) is communicated with screw type glue injection valve (8) through A agent glue supply pipeline (4), the support frame (1) is equipped with B agent glue supply pump (20) through the second support (21), the B agent glue supply pump (20) is communicated with screw type glue injection valve (8) through B agent glue supply pipeline (5), the screw type glue injection valve (8) is installed in gantry type three-axis module (9), the screw type glue injection valve (8) is provided with weighing unit (12) below, the weighing unit (12) is equipped with visual detection unit (10) and bar code gun (11), the bottom of the frame (6) is equipped with control cabinet (16), the right side of the frame (6) is connected display screen (13) through suspension arm (14).
2. The glue coating apparatus for wafer jigs according to claim 1, wherein: The lower side of the display screen (13) is provided with an operation table (15).
3. The glue coating apparatus for wafer jigs as claimed in claim 1, wherein: The top of the frame (6) is provided with a warning light (7).
4. The glue coating apparatus for wafer jigs as claimed in claim 1, wherein: The frame (6) is provided with a control cabinet (16), and the control cabinet (16) is provided with a control button (18) through a control panel (17).
5. The glue coating apparatus for wafer jigs as claimed in claim 1, wherein: The bottom of the frame (6) is provided with a support leg (19).
6. The glue coating apparatus for wafer jigs according to any one of claims 1 to 5, wherein: The bottom end of the support frame (1) is provided with a universal castor (22).