Supporting structure of single-side polishing machine

Abstract

The supporting structure of the single-face polishing machine comprises a box body, the box body comprises a lower box body and an upper box body arranged on the lower box body, a supporting column is connected between the lower box body and the upper box body to form an up-down split type supporting structure, a lower polishing disc assembly is arranged in the middle of the lower box body, and a lower polishing disc assembly is arranged in the middle of the lower box body. An upper polishing head assembly is arranged above the lower polishing disc assembly, and the upper polishing head assembly is arranged on the upper box body and used for pressurizing and polishing a workpiece on the lower polishing disc assembly. The supporting structure of the single-face polishing machine adopts upper and lower split type supporting, can avoid an upper polishing head shaft system resonance point, eliminates equipment vibration, improves the perpendicularity of an upper polishing head system and a lower polishing disc, guarantees the machining precision, and meanwhile increases the equipment machining space.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of polishing equipment, in particular to a split support structure of a single-side polishing machine. BACKGROUND

[0002] The single-side polishing machine is the main equipment for processing hard and brittle materials such as single-crystal silicon, polycrystalline silicon, electronic-grade silicon, and sapphire. As the size of the workpiece is getting larger and larger, the size of the workpiece carrier is also getting larger and larger, and the processing precision requirement is getting higher and higher. The traditional support structure is difficult to guarantee high-precision processing. SUMMARY

[0003] The purpose of the present application is to overcome the problems existing in the prior art, provide a support structure of a single-side polishing machine, which can avoid the resonance point of the upper polishing head shaft system, eliminate the vibration of the equipment, improve the perpendicularity between the upper polishing head main shaft and the lower polishing disc, ensure the processing precision of the equipment, and improve the operation space of the equipment.

[0004] To achieve the above technical purposes and effects, the present application realizes the following technical solutions:

[0005] A support structure of a single-side polishing machine, comprising a box body, the box body comprising a lower box body and an upper box body arranged on the lower box body, a support column being connected between the lower box body and the upper box body to form an upper and lower split support structure, a lower polishing disc assembly being arranged at a middle position of the lower box body, an upper polishing head assembly being arranged above the lower polishing disc assembly and on the upper box body, and the upper polishing head assembly being used for pressurizing and polishing the workpiece on the lower polishing disc assembly.

[0006] Further, the support column is arranged on the outer side of the lower box body and the upper box body to form an outer support structure.

[0007] Further, the upper end of the upper polishing head assembly is provided with a corresponding pressurizing cylinder, and the lower end is provided with a corresponding upper polishing disc, an upper disc shaft assembly being arranged between the pressurizing cylinder and the upper polishing disc, and the pressurizing cylinder driving the upper polishing disc to pressurize through the upper disc shaft assembly.

[0008] Further, a gear is arranged on the upper disc shaft assembly, the gear being engaged with a corresponding upper disc driving assembly for transmission, the upper disc driving assembly being composed of a motor and a corresponding gear reduction assembly, and the motor driving the upper polishing disc to rotate through the gear reduction assembly.

[0009] Further, the upper disc driving assembly is arranged on the upper box body.

[0010] Further, a liquid receiving basin is arranged below the lower polishing disc assembly, the liquid receiving basin being fixedly connected to the lower box body and used for receiving the polishing liquid.

[0011] Furthermore, the inner edge of the liquid receiving basin is provided with several positioning guide wheels for limiting the edge of the lower throwing plate assembly.

[0012] The beneficial effects of this invention are:

[0013] The support structure of the single-sided polishing machine of this invention adopts an upper and lower split support, which can avoid the resonance point of the upper polishing head shaft system, eliminate equipment vibration, improve the perpendicularity of the upper polishing head system and the lower polishing plate, ensure processing accuracy, and increase the processing space of the equipment. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of the present invention.

[0015] The numbers in the diagram are as follows: 1. Upper box, 2. Lower box, 3. Lower throwing plate assembly, 4. Positioning guide wheel, 5. Liquid receiving basin, 6. Support column, 7. Upper plate drive assembly, 8. Upper throwing head assembly. Detailed Implementation

[0016] The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0017] like Figure 1 As shown, a support structure for a single-sided polishing machine includes a housing, which comprises a lower housing 2 and an upper housing 1 disposed on the lower housing 2. In this embodiment, the upper housing 1 and the lower housing 2 are castings made of HT350 casting material, with reinforcing ribs arranged in the casting structure, and the non-machined surfaces coated with polyurethane paint. A support column 6 connects the lower housing 2 and the upper housing 1 to form an upper and lower split support structure. A lower polishing disc assembly 3 is provided in the middle of the lower housing 2, and an upper polishing head assembly 8 is provided above the lower polishing disc assembly 3. The upper polishing head assembly 8 is disposed on the upper housing 1 and is used to pressurize and polish the workpiece on the lower polishing disc assembly 3.

[0018] The support column 6 is located on the outside of the lower box 2 and the upper box 1, forming an external support structure.

[0019] The upper polishing head assembly 8 is provided with a corresponding pressurizing cylinder at its upper end and a corresponding upper polishing disc at its lower end. An upper disc shaft assembly is provided between the pressurizing cylinder and the upper polishing disc. The pressurizing cylinder drives the upper polishing disc to apply pressure through the upper disc shaft assembly.

[0020] The upper disc shaft assembly is equipped with a gear, which meshes with the corresponding upper disc drive assembly 7 for transmission. The upper disc drive assembly 7 consists of a motor and a corresponding reduction gear set. The motor drives the upper polishing disc to rotate through the reduction gear set.

[0021] The upper drive assembly 7 is mounted on the upper housing 1.

[0022] The lower polishing disc assembly 3 is provided with a liquid receiving basin 5 which is fixed on the lower box 2 and used for receiving polishing liquid.

[0023] The inner side edge of the liquid receiving basin 5 is provided with a plurality of positioning guide wheels 4 which are used for limiting the edge of the lower polishing disc assembly 3.

[0024] The above merely describes the preferred embodiments of the present application and is not used to limit the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A support structure of a single-side polishing machine comprising a box, characterized by, The box comprises a lower box (2) and an upper box (1) arranged on the lower box (2), a support column (6) is connected between the lower box (2) and the upper box (1) to form an upper and lower split support structure, a lower polishing disc assembly (3) is arranged at a middle position of the lower box (2), an upper polishing head assembly (8) is arranged above the lower polishing disc assembly (3), the upper polishing head assembly (8) is arranged on the upper box (1) and is used for pressurizing and polishing workpieces on the lower polishing disc assembly (3), and the support column (6) is arranged outside the lower box (2) and the upper box (1) to form an outer support structure.

2. The support structure of a single-side polishing machine according to claim 1, wherein The upper end of the upper polishing head assembly (8) is provided with a corresponding pressurizing cylinder, the lower end is provided with a corresponding upper polishing disc, an upper disc shaft assembly is arranged between the pressurizing cylinder and the upper polishing disc, and the pressurizing cylinder drives the upper polishing disc to pressurize through the upper disc shaft assembly.

3. The support structure of a single-side polishing machine according to claim 2, wherein A gear is arranged on the upper disc shaft assembly, the gear is engaged with a corresponding upper disc driving assembly (7) to drive, the upper disc driving assembly (7) is composed of a motor and a corresponding gear reduction assembly, and the motor drives the upper polishing disc to rotate through the gear reduction assembly.

4. The support structure of a single-side polishing machine according to claim 3, wherein The upper disc driving assembly (7) is arranged on the upper box (1).

5. The support structure of a single-side polishing machine according to claim 1, wherein A liquid receiving basin (5) is arranged below the lower polishing disc assembly (3), the liquid receiving basin (5) is fixed to the lower box (2) and is used for receiving polishing liquid.

6. The support structure of a single-side polishing machine according to claim 5, wherein A plurality of positioning guide wheels (4) are arranged at the inner side edge of the liquid receiving basin (5) and are used for limiting the edge of the lower polishing disc assembly (3).

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