Chip sputtering jig

Abstract

The utility model discloses a chip sputtering jig, including jig main part, chip main part, exhaust hood, anode plate, sputtering plate and cathode plate, said jig main part top end middle part is provided with exhaust hood, said jig main part two sides are respectively provided with anode plate and cathode plate, jig main part inner cavity both sides are provided with sputtering plate, said jig main part top end middle part is provided with the exhaust hood, said jig main part top end middle part is provided with the sputtering plate. A supporting sleeve is arranged in the middle of the bottom end of the jig body, and a supporting base is arranged at the bottom of the supporting sleeve. According to the utility model, the jig main body is arranged, the anode plate and the cathode plate are respectively arranged at the middle parts of the two sides of the jig main body, the sputtering plates are arranged at the end parts of the anode plate and the cathode plate, and double sputtering control can be carried out through the double sputtering plates, so that the sputtering efficiency is greatly improved; a chip inserting opening is formed in the middle of the jig material opening, a chip can be inserted conveniently through the chip inserting opening, an exhaust hood is arranged on the top of the jig body, and an air adding head is arranged on the top of the exhaust hood.

Description

TECHNICAL FIELD

[0001] The utility model relates to chip sputtering jig related field, concretely is a chip sputtering jig. BACKGROUND

[0002] Chip sputtering jig is used to control sputtering of chips, in a vacuum environment, appropriate inert gas is introduced as a medium, and the inert gas is accelerated to impact the target material, so that the surface atoms of the target material are impacted out and a coating film is formed on the surface, sputtering, usually referred to as magnetron sputtering, belongs to high-speed low-temperature sputtering method. The process requires that the vacuum degree is about 1*10-3Torr, that is, the vacuum state of 1.3*10-3Pa is filled with inert gas argon (Ar), and high-voltage direct current is applied between the plastic substrate (anode) and the metal target (cathode). The inert gas is excited by the electrons generated by glow discharge (glow discharge), and plasma is generated, which bombards the atoms of the metal target and deposits them on the plastic substrate;

[0003] For example, the authorized patent with publication number CN105154824B (chip sputtering jig and method for sputtering chip using the jig): it includes a base paper layer and a double-sided adhesive layer, the base paper layer includes an upper base paper and a lower base paper, the double-sided adhesive layer is arranged between the upper base paper and the lower base paper, the base paper layer and the double-sided adhesive layer are both provided with square through holes, each through hole corresponds to a chip placement area, the size of the through hole corresponds to the size of the chip, and the base paper layer and the double-sided adhesive layer are both provided with positioning holes. The present application does not need to dissolve the metal film during sputtering, realizes a new process of five-face sputtering of chips, and is more environmentally friendly for chip production, greatly reduces the production cost, avoids the complex process of cleaning chips, and greatly improves the sputtering efficiency;

[0004] The chip mounting and fixing of the above-mentioned prior art is not convenient enough, the chip sputtering control is not uniform enough, the power connection control is not enough, the bidirectional simultaneous sputtering cannot be performed, the sputtering efficiency is low, the sputtering control is not comprehensive enough, the sputtering gas injection efficiency is low, and the injection is not convenient enough. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a chip sputtering jig to solve the problems of chip mounting and fixing not being convenient enough, chip sputtering control not being uniform enough, power connection control not being enough, bidirectional simultaneous sputtering being unable to be performed, sputtering efficiency being low, sputtering control not being comprehensive enough, sputtering gas injection efficiency being low, and injection not being convenient enough in the above-mentioned background art.

[0006] To achieve the above object, the utility model provides the following technical scheme: a chip sputtering fixture, including fixture main part, chip main part, exhaust hood, anode plate, sputtering plate and cathode plate, the middle part of the top of fixture main part is equipped with exhaust hood, both sides of fixture main part are equipped with anode plate and cathode plate respectively, both sides of the inner chamber of fixture main part are equipped with sputtering plate, the middle part of the bottom of fixture main part is equipped with support sleeve, the bottom of support sleeve is equipped with support base.

[0007] In further embodiments, the middle part of the both ends of the fixture main body is equipped with a fixture material port, and the middle part of the fixture material port is equipped with a chip insertion port.

[0008] In further embodiments, the middle part of the top of the exhaust hood is equipped with a gas inlet head, and the bottom of the exhaust hood is equipped with a gas outlet head.

[0009] In further embodiments, the middle part of one side of the anode plate and the cathode plate is equipped with an electricity connection head, and the end of the electricity connection head is equipped with a wire hole.

[0010] In further embodiments, the middle part of both sides of the inner chamber of the fixture main body is equipped with a sputtering plate, and the sputtering plate is arranged on both sides of the chip main body.

[0011] In further embodiments, the inner part of the fixture main body is equipped with a chip groove, and the chip main body is located in the chip groove.

[0012] Compared with the prior art, the utility model has the advantages that:

[0013] The utility model is equipped with a fixture main body, anode plates and cathode plates are arranged on the middle part of both sides of the fixture main body, sputtering plates are arranged on the ends of the anode plates and the cathode plates, double sputtering plates can be used for double sputtering control, and the sputtering efficiency is greatly improved.

[0014] The utility model is equipped with a fixture main body, anode plates and cathode plates are arranged on the middle part of both sides of the fixture main body, sputtering plates are arranged on the ends of the anode plates and the cathode plates, double sputtering plates can be used for double sputtering control, and the sputtering efficiency is greatly improved. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a structural schematic view of the utility model's chip sputtering fixture.

[0016] Figure 2 It is a top view of the utility model's fixture main body.

[0017] Figure 3 It is a front view of the utility model's fixture main body.

[0018] Figure 4The utility model discloses an exhaust cover's front view.

[0019] In the drawing: 1, jig main body; 2, chip main body; 3, exhaust cover; 4, electricity connection head; 5, anode plate; 6, sputtering plate; 7, cathode plate; 8, support sleeve; 9, support base; 10, chip socket; 11, jet head; 12, gas filling head; 13, jig material port. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments.

[0021] Please refer to Figures 1-4 An embodiment provided by the utility model: a chip sputtering jig, including jig main body 1, chip main body 2, exhaust cover 3, anode plate 5, sputtering plate 6 and cathode plate 7, the top middle part of jig main body 1 is equipped with exhaust cover 3, the both sides of jig main body 1 are equipped with anode plate 5 and cathode plate 7 respectively, the both sides of the inner chamber of jig main body 1 are equipped with sputtering plate 6, the bottom middle part of jig main body 1 is equipped with support sleeve 8, the bottom of support sleeve 8 is equipped with support base 9, exhaust cover 3 is used to exhaust control, anode plate 5 and cathode plate 7 are used to electricity connection, sputtering plate 6 is used to electroplating control, sputtering control is carried out, support sleeve 8 is used to facilitate the installation of support base 9.

[0022] The both ends of jig main body 1 are equipped with jig material port 13, the middle part of jig material port 13 is equipped with chip socket 10, chip main body 2 is inserted into through jig material port 13, the both sides of the inner chamber of jig main body 1 are equipped with sputtering plate 6, sputtering plate 6 is arranged at the both sides of chip main body 2, sputtering plate 6 is used to sputtering control, the inside of jig main body 1 is equipped with chip groove, and chip main body 2 is located in the chip groove.

[0023] The top middle part of exhaust cover 3 is equipped with gas filling head 12, the bottom of exhaust cover 3 is equipped with jet head 11, gas is filled through gas filling head 12, and sputtering gas is sprayed out through jet head 11.

[0024] The middle part of one side of anode plate 5 and cathode plate 7 is equipped with electricity connection head 4, the end of electricity connection head 4 is equipped with wiring hole, and electricity connection head 4 is used to electricity connection.

[0025] Working principle: when using, the top of the supporting base 9 is embedded with the supporting sleeve 8, the chip body 2 is inserted into the jig body 1 through the chip socket 10, the electricity is connected through the electricity connecting head 4, the electricity is discharged through the anode plate 5 and the cathode plate 7, so that the sputtering plate 6 can be controlled, the gas is filled into the exhaust cover 3 through the gas filling head 12, and the gas is sprayed through the gas spraying head 11, so that the sputtering gas is added into the jig body 1, the chip body 2 is sputtered on the outside through the sputtering plate 6, and the jig body 1 is stably supported and placed through the supporting sleeve 8 and the supporting base 9.

[0026] It is obvious for those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and the present application can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be regarded as exemplary and non-limiting, and the scope of the present application is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application. Any reference signs in the claims should not be regarded as limiting the claims involved.

Claims

1. A chip sputtering fixture, comprising a fixture body (1), a chip body (2), an exhaust cover (3), an anode plate (5), a sputtering plate (6) and a cathode plate (7), characterized in that: The middle part of the top end of the jig body (1) is provided with an exhaust hood (3), both sides of the jig body (1) are respectively provided with an anode plate (5) and a cathode plate (7), both sides of the inner cavity of the jig body (1) are provided with sputtering plates (6), and the middle part of the bottom end of the jig body (1) is provided with a supporting sleeve (8), and the bottom of the supporting sleeve (8) is provided with a supporting base (9).

2. The sputtering fixture of claim 1, wherein: The middle part of the top end of the jig body (1) is provided with an exhaust hood (3), both sides of the jig body (1) are respectively provided with an anode plate (5) and a cathode plate (7), both sides of the inner cavity of the jig body (1) are provided with sputtering plates (6), and the middle part of the bottom end of the jig body (1) is provided with a supporting sleeve (8), and the bottom of the supporting sleeve (8) is provided with a supporting base (9).

3. The sputtering fixture of claim 1, wherein: The middle part of the top end of the jig body (1) is provided with an exhaust hood (3), both sides of the jig body (1) are respectively provided with an anode plate (5) and a cathode plate (7), both sides of the inner cavity of the jig body (1) are provided with sputtering plates (6), and the middle part of the bottom end of the jig body (1) is provided with a supporting sleeve (8), and the bottom of the supporting sleeve (8) is provided with a supporting base (9).

4. The sputtering fixture of claim 1, wherein: The middle part of the top end of the jig body (1) is provided with an exhaust hood (3), both sides of the jig body (1) are respectively provided with an anode plate (5) and a cathode plate (7), both sides of the inner cavity of the jig body (1) are provided with sputtering plates (6), and the middle part of the bottom end of the jig body (1) is provided with a supporting sleeve (8), and the bottom of the supporting sleeve (8) is provided with a supporting base (9).

5. The sputtering fixture of claim 1, wherein: The middle part of the top end of the jig body (1) is provided with an exhaust hood (3), both sides of the jig body (1) are respectively provided with an anode plate (5) and a cathode plate (7), both sides of the inner cavity of the jig body (1) are provided with sputtering plates (6), and the middle part of the bottom end of the jig body (1) is provided with a supporting sleeve (8), and the bottom of the supporting sleeve (8) is provided with a supporting base (9).

6. The sputtering fixture of claim 1, wherein: The middle part of the top end of the jig body (1) is provided with an exhaust hood (3), both sides of the jig body (1) are respectively provided with an anode plate (5) and a cathode plate (7), both sides of the inner cavity of the jig body (1) are provided with sputtering plates (6), and

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