Clamping mechanism applied to magnetron sputtering coating

Abstract

The clamping mechanism comprises a fixing plate, a strip-shaped groove is formed in the upper surface of the fixing plate, a fixing frame is fixedly connected to the bottom face of the fixing plate, two adjusting frames are placed on the upper surface of the fixing plate, and electric push rods are fixedly installed on the left side face and the right side face of the fixing frame. A rubber pad on the bottom face of a pressing plate makes flexible contact with a workpiece, damage to the surface of the workpiece in a traditional mechanical clamping mode is avoided, meanwhile, an electric push rod is used for pushing an adjusting block to move along a guide groove, an adjusting frame is driven to conduct position adjustment in the horizontal direction, and therefore the device adapts to workpieces of different sizes; through cooperation of a first pressing screw, a first threaded hole and a bearing and the fixing effect of a second pressing screw and a second threaded hole, the stability of a workpiece in the clamping process is enhanced, through cooperation of a sliding hole and a sliding rod, a guiding effect is provided for movement of an adjusting block, and stable movement of an adjusting frame is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to magnetron sputtering technical field especially a clamping mechanism for magnetron sputtering coating. BACKGROUND

[0002] Magnetron sputtering is a kind of physical vapor deposition, general sputtering method can be used to prepare metal, semiconductor and insulator and other multi-material, and has the advantages such as simple equipment, easy control, large coating area and strong adhesion, and the magnetron sputtering method developed in the 70s of last century realizes high speed, low temperature and low damage, because it is carried out under low pressure high speed sputtering, must effectively improve the ionization rate of gas, magnetron sputtering introduces magnetic field on the surface of target cathode, and the plasma density is improved to increase the sputtering rate by using the constraint of magnetic field to charged particles.

[0003] Magnetron sputtering coating is an advanced thin film deposition technology widely used in material surface modification, optical thin film preparation, electronic device manufacturing and other fields. In the magnetron sputtering process, the stable clamping of the workpiece is one of the key factors to ensure the quality of the coating. The traditional clamping mechanism usually adopts mechanical clamping, which may cause damage to the surface of the workpiece, resulting in a decrease in the quality of the coating and the inability to meet the needs of the user. Therefore, we propose a clamping mechanism for magnetron sputtering coating to solve the above problems. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a clamping mechanism for magnetron sputtering coating to solve the problems raised in the background art.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0006] A clamping mechanism for magnetron sputtering coating, comprising a fixed plate, a strip-shaped groove is formed on the upper surface of the fixed plate, a fixed frame is fixedly connected to the bottom surface of the fixed plate, two adjusting frames are placed on the upper surface of the fixed plate, an electric push rod is fixedly installed on the left and right side surfaces of the fixed frame, an adjusting block is fixedly connected to the extension end of each electric push rod, a connecting block is fixedly connected to the upper surface of each adjusting block, the upper surface of each connecting block is fixedly connected with the bottom surface of the adjusting frame, and the strip-shaped groove is slidingly connected with the connecting block, two first threaded holes are formed on the upper surface of each adjusting frame, a first compression screw is threadedly connected to the inner ring of each first threaded hole, a compression plate is arranged in each adjusting frame, a bearing is fixedly embedded on the upper surface of each compression plate, the outer surface of the bottom end of each first compression screw is rotatably connected with the inner ring of the bearing, and a rubber pad is fixedly connected to the bottom surface of each compression plate.

[0007] In further embodiments, the left and right ends of the fixed frame are fixedly connected with mounting plates, the upper surfaces of each mounting plate are provided with two mounting holes, and the inner circles of each mounting hole are provided with threads.

[0008] In further embodiments, the outer surfaces of each electric push rod are fixedly connected with reinforcing rings, and the mutually close side faces of the two reinforcing rings are fixedly connected with the left and right side faces of the fixed frame.

[0009] In further embodiments, the inner side walls of the fixed frame are provided with two guide grooves, the inner side walls of each guide groove are slidably connected with a guide block, and the mutually close side faces of the two guide blocks are fixedly connected with the front face of the adjusting block and the back face of the adjusting block.

[0010] In further embodiments, the upper surfaces of each adjusting frame are provided with two second threaded holes, the inner circles of each second threaded hole are threadedly connected with a second compression screw, the upper surfaces of each compression plate are fixedly connected with two wear-resistant discs, and the upper surfaces of each wear-resistant disc are in contact with the bottom ends of the second compression screws.

[0011] In further embodiments, the right side faces of each adjusting block are provided with two sliding holes, and the interiors of the two sliding holes are commonly slidably connected with two sliding rods.

[0012] Compared with the prior art, the device has the following beneficial effects:

[0013] The device avoids damage to the workpiece surface caused by the traditional mechanical clamping mode through the flexible contact of the rubber pad on the bottom surface of the compression plate with the workpiece, simultaneously uses the electric push rod to drive the adjusting block to move along the guide groove, drives the adjusting frame to adjust the position in the horizontal direction to adapt to workpieces of different sizes, and further enhances the stability of the workpiece in the clamping process through the cooperation of the first compression screw, the first threaded hole and the bearing and the fixing effect of the second compression screw and the second threaded hole, and the cooperation of the sliding hole and the sliding rod provides a guiding effect for the movement of the adjusting block and ensures the smooth movement of the adjusting frame. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a fixing plate three-dimensional structure schematic view of a clamping mechanism applied to magnetron sputtering film coating.

[0015] Figure 2 It is a side sectional structure schematic view of a fixed frame in a clamping mechanism applied to magnetron sputtering film coating.

[0016] Figure 3 It is a side view structure schematic view of an adjusting frame in a clamping mechanism applied to magnetron sputtering film coating.

[0017] Figure 4The application is applied to the adjusting frame of the clamping mechanism of the magnetron sputtering coating machine.

[0018] In the figure: 1, fixed plate; 2, strip-shaped groove; 3, fixed frame; 4, mounting plate; 5, mounting hole; 6, adjusting frame; 7, electric push rod; 8, reinforcing ring; 9, adjusting block; 10, connecting block; 11, guide groove; 12, guide block; 13, sliding hole; 14, sliding rod; 15, first threaded hole; 16, first compression screw; 17, bearing; 18, compression plate; 19, rubber pad; 20, second threaded hole; 21, second compression screw; 22, wear-resistant disc. DETAILED DESCRIPTION

[0019] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second" and the like are only for the purpose of description and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features limited by "first", "second" and the like can be explicitly or implicitly included one or more. In the description of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0020] In the description of the present application, it should be noted that, unless otherwise specified and limited, the terms "mounting", "connecting" and "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0021] The technical scheme in the embodiments of the present application will be described clearly and completely in the following with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary skilled in the art without creative labor belong to the scope of protection of the present application.

[0022] Please refer to Figures 1-4The utility model discloses a kind of clamping mechanisms applied to magnetron sputtering coating, including fixed plate 1, the upper surface of fixed plate 1 is equipped with strip groove 2, the bottom surface of fixed plate 1 is fixedly connected with fixed frame 3, the upper surface of fixed plate 1 is placed with two adjusting frame 6, the left and right sides of fixed frame 3 are all fixedly installed with electric push rod 7, the telescopic end of each electric push rod 7 is all fixedly connected with adjusting block 9, the upper surface of each adjusting block 9 is all fixedly connected with connecting block 10, the upper surface of each connecting block 10 is all fixedly connected with the bottom surface of adjusting frame 6, and strip groove 2 is slidably connected with connecting block 10, the upper surface of each adjusting frame 6 is equipped with two first threaded holes 15, the inner ring of each first threaded hole 15 is all threadedly connected with first compression screw 16, the inside of each adjusting frame 6 is equipped with compression plate 18, the upper surface of each compression plate 18 is fixedly embedded with bearing 17, the outer surface of the bottom end of each first compression screw 16 is all rotationally connected with the inner ring of bearing 17, the bottom surface of each compression plate 18 is all fixedly connected with rubber pad 19, and the rubber pad 19 on the bottom surface of compression plate 18 is flexibly contacted with workpiece, avoid the damage caused to the surface of workpiece by traditional mechanical clamping mode, simultaneously, adjusting block 9 is moved along guide groove 11 by electric push rod 7, drive adjusting frame 6 to carry out position adjustment in horizontal direction, to adapt to workpiece of different sizes, the cooperation of first compression screw 16, first threaded hole 15 and bearing 17, and the fixing effect of second compression screw 21 and second threaded hole 20, further enhance the stability of workpiece in clamping process, the cooperation of sliding hole 13 and sliding rod 14 provides guiding effect for the movement of adjusting block 9, ensure the smooth movement of adjusting frame 6.

[0023] The left and right ends of fixed frame 3 are all fixedly connected with mounting plate 4, the upper surface of each mounting plate 4 is equipped with two mounting holes 5, the inner ring of each mounting hole 5 is equipped with thread, the cooperation of the mounting plate 4 and mounting hole 5 provided with, facilitate the installation of fixed frame 3, the outer surface of each electric push rod 7 is fixedly connected with reinforcing ring 8, the side face of two reinforcing rings 8 close to each other is respectively fixedly connected with the left and right side faces of fixed frame 3, the reinforcing ring 8 provided with, facilitate the reinforcement of electric push rod 7, the inner side wall of fixed frame 3 is equipped with two guide grooves 11, the inner side wall of each guide groove 11 is slidably connected with guide block 12, the side face of two guide blocks 12 close to each other is respectively fixedly connected with the front face of adjusting block 9 and the back face of adjusting block 9, the cooperation of the guide groove 11 and guide block 12 provided with, facilitate the positioning of adjusting block 9.

[0024] The upper surface of each adjusting frame 6 is provided with two second threaded holes 20, the inner circle of each second threaded hole 20 is threadedly connected with a second compression screw 21, the upper surface of each compression plate 18 is fixedly connected with two wear-resistant discs 22, the upper surface of each wear-resistant disc 22 is in contact with the bottom end of the second compression screw 21, the wear-resistant disc 22 is arranged to facilitate the protection of the compression plate 18, and the right side surface of each adjusting block 9 is provided with two sliding holes 13, and the interiors of the two sliding holes 13 are jointly and slidably connected with two sliding rods 14, and the sliding hole 13 and the sliding rod 14 are matched to facilitate the limiting of the adjusting block 9.

[0025] The working principle of the utility model is:

[0026] In use, first, the electric push rod 7 is communicated with the power supply, and is controlled through the control switch, then the workpiece is placed at the adjusting frame 6, and the first compression screw 16, the first threaded hole 15 and the bearing 17 are matched to press down the compression plate 18, so that the compression plate 18 is in flexible contact with the workpiece through the rubber pad 19 on the bottom surface, so that the workpiece is fixed in the adjusting frame 6, and damage of the workpiece is avoided, at this time, the electric push rod 7 drives the adjusting block 9 to move along the guide groove 11 through the telescopic end, and then drives the connecting block 10 and the adjusting frame 6 to adjust the position in the horizontal direction, so as to adapt to workpieces of different sizes, meanwhile, the sliding hole 13 and the sliding rod 14 are matched to guide the adjusting block 9, ensure the stable movement of the adjusting frame 6, and the second compression screw 21 and the second threaded hole 20 are matched to further fix the position of the compression plate 18, and ensure the stability when the workpiece is fixed.

[0027] For those skilled in the art, it is obvious that the utility model is not limited to the details of the above-mentioned exemplary embodiments, and can be realized in other specific forms without departing from the spirit or basic characteristics of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-limiting, the scope of the utility model is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the utility model. Any reference signs in the claims should not be regarded as limiting the claims involved.

[0028] In addition, it should be understood that, although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the specification is described in this way only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that those skilled in the art can understand.

Claims

1. A clamping mechanism for magnetron sputtering coating, characterized in that: The system includes a fixed plate (1), the upper surface of which has a strip groove (2), a fixed frame (3) fixedly connected to the bottom surface of the fixed plate (1), two adjusting frames (6) placed on the upper surface of the fixed plate (1), electric push rods (7) fixedly installed on the left and right sides of the fixed frame (3), an adjusting block (9) fixedly connected to the telescopic end of each electric push rod (7), a connecting block (10) fixedly connected to the upper surface of each adjusting block (9), and the upper surface of each connecting block (10) fixedly connected to the bottom surface of the adjusting frame (6), and the strip groove (2) is fixedly connected to the bottom surface of the fixed plate (1). The groove (2) is slidably connected to the connecting block (10). Each adjustment frame (6) has two first threaded holes (15) on its upper surface. The inner ring of each first threaded hole (15) is threaded with a first clamping screw (16). Each adjustment frame (6) has a clamping plate (18) inside. Each clamping plate (18) has a bearing (17) fixedly embedded on its upper surface. The outer surface of the bottom end of each first clamping screw (16) is rotatably connected to the inner ring of the bearing (17). Each clamping plate (18) has a rubber pad (19) fixedly connected to its bottom surface.

2. The clamping mechanism for magnetron sputtering coating according to claim 1, characterized in that: The left and right ends of the fixed frame (3) are fixedly connected to mounting plates (4). Each mounting plate (4) has two mounting holes (5) on its upper surface, and each mounting hole (5) has a threaded inner ring.

3. The clamping mechanism for magnetron sputtering coating according to claim 1, characterized in that: Each of the electric push rods (7) has a reinforcing ring (8) fixedly connected to its outer surface. The two reinforcing rings (8) are fixedly connected to the left and right sides of the fixed frame (3) respectively on their sides that are close to each other.

4. The clamping mechanism for magnetron sputtering coating according to claim 1, characterized in that: The inner sidewall of the fixed frame (3) has two guide grooves (11), and each guide groove (11) has a guide block (12) slidably connected to its inner sidewall. The two guide blocks (12) are fixedly connected to the front and back sides of the adjusting block (9) respectively on their sides that are close to each other.

5. The clamping mechanism for magnetron sputtering coating according to claim 1, characterized in that: Each of the adjustment frames (6) has two second threaded holes (20) on its upper surface. The inner ring of each second threaded hole (20) is threaded with a second clamping screw (21). Each of the clamping plates (18) has two wear-resistant discs (22) fixedly connected to its upper surface. The upper surface of each wear-resistant disc (22) is in contact with the bottom end of the second clamping screw (21).

6. The clamping mechanism for magnetron sputtering coating according to claim 1, characterized in that: Two sliding holes (13) are provided on the right side of each of the adjustment blocks (9), and two sliding rods (14) are slidably connected inside the two sliding holes (13).

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