Uniform coating equipment for magnetron sputtering coating process

Abstract

The uniform coating equipment comprises a coating box, a vacuum pump is fixedly arranged on the upper surface of the coating box, the output end of the vacuum pump is fixedly communicated with a vacuum pipe, the bottom end of the vacuum pipe is communicated with the upper surface of the coating box, and the bottom end of the vacuum pipe is communicated with the lower surface of the coating box. Symmetrical first bearings are fixedly embedded in the inner wall of the coating box, the inner rings of the two first bearings are jointly and fixedly connected with an unwinding roller, and a second bearing is fixedly embedded in the inner wall of the coating box. According to the device, a to-be-processed coiled material can be placed through cooperation of a first bearing and an unwinding roller, the coiled material subjected to film coating can be stored through cooperation of a second bearing and a winding roller, a vacuum space can be formed in a film coating box through cooperation of a vacuum pump and a vacuum pipe, and through cooperation of a driving motor, a third bearing and a threaded rod, the coiled material can be subjected to film coating; and the height of the adjusting table can be adjusted, so that the distance between the target body and the to-be-processed coiled material is adjusted, and the film coating effect of the coiled material is stabilized.

Description

TECHNICAL FIELD

[0001] The utility model relates to magnetron sputtering coating technology field especially even coating equipment for magnetron sputtering coating process. BACKGROUND

[0002] Magnetron sputtering coating is a kind of technology that uses argon ion to bombard target material, produces cathode sputtering, and sputters target material atom to workpiece to form deposition layer, in this process, coating material keeps solid state all the time, does not form molten pool, and magnetron sputtering coating is usually applied in microelectronic field, decoration field, mechanical processing industry, medical field and optical field.

[0003] The existing magnetron sputtering coating device, when using, target material will be consumed constantly, makes target material gradually thin, causes the distance between target material and the roll to be processed to gradually increase, with the increasing distance between target material and roll, causes the effect of roll coating to be more and more unstable, to this end, we provide even coating equipment for magnetron sputtering coating process to solve the above problems. UTILITY MODEL CONTENT

[0004] The utility model discloses a kind of even coating equipment for magnetron sputtering coating process, to solve the problem raised in above background technology.

[0005] To achieve the above object, the utility model provides the following technical scheme:

[0006] An even coating equipment for magnetron sputtering coating process, including coating box, the upper surface of the coating box is fixedly installed with vacuum pump, the output of the vacuum pump is fixedly communicated with vacuum pipe, the bottom end of the vacuum pipe is communicated with the upper surface of the coating box, the inner wall of the coating box is fixedly embedded with the first bearing of relative symmetry, the inner ring of two first bearings is fixedly connected with unwinding roller, the inner wall of the coating box is fixedly embedded with second bearing, the inner ring of two second bearings is fixedly connected with winding roller, the inner wall of the coating box is fixedly embedded with the auxiliary rod of relative symmetry, the bottom surface of the coating box is fixedly installed with drive motor, the inner bottom wall of the coating box is fixedly embedded with third bearing, the inner ring of the third bearing is fixedly connected with threaded rod, the output of the drive motor is connected with the bottom end of threaded rod through third bearing and threaded rod, the outer surface of the threaded rod is screw-connected with adjusting table, the upper surface of the adjusting table is equipped with target body.

[0007] In further embodiments, the left side of the coating box is hingedly connected with a first box door, and the right side of the coating box is hingedly connected with a second box door.

[0008] In further embodiments, the coating box is fixedly connected with two symmetrical partitions inside, and each of the two partitions has an opening on its outer surface.

[0009] In further embodiments, the inner walls of the two active ports are fixedly embedded with two groups of fourth bearings, and the inner rings of the four groups of fourth bearings are fixedly connected with rotating rollers.

[0010] In further embodiments, the side faces of the two baffles that are close to each other are fixedly connected with a limiting plate, and the outer surface of the adjusting table is fixedly connected with two symmetrical sliding plates, and the two sliding plates and the adjusting table are located inside the limiting plate.

[0011] In further embodiments, the inside of the adjusting table is provided with a cavity, the top end of the threaded rod penetrates through the adjusting table and extends into the inside of the cavity, and the top end of the threaded rod is fixedly connected with a circular plate.

[0012] Compared with the prior art, the device has the following advantages:

[0013] The device can place the coil material to be processed through the cooperation of the first bearing and the unwinding roller, can store the coil material after the film plating is completed through the cooperation of the second bearing and the winding roller, can form a vacuum space in the film plating box through the cooperation of the vacuum pump and the vacuum pipe, and can adjust the height of the adjusting table through the cooperation of the driving motor, the third bearing and the threaded rod, so as to adjust the distance between the target body and the coil material to be processed, thereby stabilizing the film plating effect of the coil material. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a front view structural schematic diagram of the uniform film plating equipment for the magnetron sputtering film plating process.

[0015] Figure 2 It is a front view structural schematic diagram of the uniform film plating equipment for the magnetron sputtering film plating process.

[0016] Figure 3 It is a front view structural schematic diagram of the uniform film plating equipment for the magnetron sputtering film plating process.

[0017] Figure 4 It is a front view structural schematic diagram of the uniform film plating equipment for the magnetron sputtering film plating process.

[0018] Figure 5 It is a front view structural schematic diagram of the uniform film plating equipment for the magnetron sputtering film plating process.

[0019] In the figure: 1, coating box; 2, first box door; 3, vacuum pump; 4, vacuum tube; 5, second box door; 6, first bearing; 7, unwinding roller; 8, second bearing; 9, winding roller; 10, adjusting platform; 11, target body; 12, auxiliary rod; 13, partition plate; 14, driving motor; 15, third bearing; 16, threaded rod; 17, limiting plate; 18, sliding plate; 19, movable port; 20, fourth bearing; 21, rotating roller; 22, cavity; 23, circular plate. DETAILED DESCRIPTION

[0020] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" and the like are only for the purpose of description and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features limited by "first", "second" and the like can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specified.

[0021] In the description of the present application, it should be noted that, unless otherwise specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0022] The technical solutions in the embodiments of the present application will be described clearly and completely in the following description of the embodiments of the present application, obviously, the described embodiments are only a part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary skilled in the art without creative labor belong to the scope of protection of the present application.

[0023] Please refer to Figures 1-5The utility model discloses a kind of uniform coating equipment of magnetron sputtering coating process, including coating box 1, the upper surface of coating box 1 is fixedly installed with vacuum pump 3, the output of vacuum pump 3 is fixedly communicated with vacuum tube 4, the bottom end of vacuum tube 4 is communicated with the upper surface of coating box 1, the inner wall of coating box 1 is fixedly embedded with relatively symmetrical first bearing 6, the inner ring of two first bearings 6 is fixedly connected with unwinding roller 7, the inner wall of coating box 1 is fixedly embedded with second bearing 8, the inner ring of two second bearings 8 is fixedly connected with winding roller 9, the inner wall of coating box 1 is fixedly embedded with relatively symmetrical auxiliary rod 12, the bottom surface of coating box 1 is fixedly installed with driving motor 14, the inner bottom wall of coating box 1 is fixedly embedded with third bearing 15, the inner ring of third bearing 15 is fixedly connected with threaded rod 16, the output of driving motor 14 is connected with the bottom end of threaded rod 16 through third bearing 15, the outer surface of threaded rod 16 is screw-connected with adjusting table 10, the upper surface of adjusting table 10 is equipped with target body 11, by the cooperation of vacuum pump 3 and vacuum tube 4, the inside of coating box 1 can be easily formed vacuum state, by the cooperation of first bearing 6 and unwinding roller 7, it can be easily placed to be coated roll material, by the cooperation of second bearing 8 and winding roller 9, it can be easily received after processing finished roll material, by the cooperation of driving motor 14, third bearing 15, threaded rod 16 and adjusting table 10, the spacing of target body 11 and roll material can be easily adjusted, so as to keep the effect of roll material coating.

[0024] The left side of coating box 1 is hinged with first box door 2 through hinge, can be easily placed to be processed roll material, the right side of coating box 1 is hinged with second box door 5 through hinge, can be easily taken out after processing finished roll material, the inside of coating box 1 is fixedly connected with relatively symmetrical baffle 13, can be easily separated the space in the inside of coating box 1, the outer surface of two baffles 13 is all equipped with movable mouth 19, can be easily moved roll material, the inner wall of two movable mouths 19 is all fixedly embedded with two groups of fourth bearing 20, the inner ring of four groups of fourth bearing 20 is all fixedly connected with rotating roller 21, can be positioned and protected to roll material.

[0025] The side of two baffles 13 mutually close is fixedly connected with limit plate 17, the outer surface of adjusting table 10 is fixedly connected with relatively symmetrical sliding plate 18, two sliding plates 18 and adjusting table 10 all are located in the inside of limit plate 17, can be positioned to adjusting table 10, prevent adjusting table 10 from rotating with threaded rod 16, the inside of adjusting table 10 is equipped with cavity 22, the top end of threaded rod 16 penetrates adjusting table 10 and extends to the inside of cavity 22, the top end of threaded rod 16 is fixedly connected with circular plate 23, can be positioned to adjusting table 10, limit the height of adjusting table 10 lifting.

[0026] The working principle of the utility model is:

[0027] In use, the user first places the to-be-coated roll on the unwinding roller 7, the roll extends to the winding roller 9 through the rotating roller 21 and the auxiliary rod 12, the winding roller 9 winds the roll after coating, when coating, the driving motor 14 drives the threaded rod 16 to rotate through the third bearing 15, the threaded rod 16 drives the adjusting table 10 to ascend, thereby adjusting the distance between the target body 11 and the roll, thereby maintaining the coating effect of the roll.

[0028] It is obvious for those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and the present application can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be regarded as exemplary and non-limiting, the scope of the present application is defined by the appended claims rather than the above description, and all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application. Any reference signs in the claims should not be regarded as limiting the claims involved.

[0029] In addition, it should be understood that, although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description manner of the specification is only for the sake of clarity, those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be properly combined to form other embodiments that those skilled in the art can understand.

Claims

1. A uniform coating equipment for magnetron sputtering coating process, characterized in that: The utility model relates to a coating box, including the coating box (1), the upper surface fixed mounting of coating box (1) has vacuum pump (3), the output of vacuum pump (3) fixed communication has vacuum pipe (4), the bottom of vacuum pipe (4) with the upper surface of coating box (1) is linked together, the inner wall fixed inlay of coating box (1) has the first bearing (6) of relative symmetry, the inner ring of two first bearing (6) is fixedly connected with unwinding roller (7) in common, the inner wall fixed inlay of coating box (1) has second bearing (8), the inner ring of two second bearing (8) is fixedly connected with winding roller (9) in common, the inner wall fixed inlay of coating box (1) has the auxiliary rod (12) of relative symmetry, the bottom surface fixed mounting of coating box (1) has drive motor (14), the inner bottom wall fixed inlay of coating box (1) has third bearing (15), the inner ring of third bearing (15) is fixedly connected with threaded rod (16), the output of drive motor (14) is connected with the bottom end of threaded rod (16) through third bearing (15), the outer surface screw thread connection of threaded rod (16) has adjustment platform (10), the upper surface of adjustment platform (10) is equipped with target body (11).

2. The uniform coating device for magnetron sputtering coating process according to claim 1, characterized in that: The left side of coating box (1) is hinged with first box door (2) through hinge, the right side of coating box (1) is hinged with second box door (5) through hinge.

3. The uniform coating device for magnetron sputtering coating process according to claim 1, characterized in that: The inside fixed connection of coating box (1) has relative symmetry baffle (13), and the outer surface of two baffles (13) is all provided with movable mouth (19).

4. The uniform coating device for magnetron sputtering coating process according to claim 3, characterized in that: The inner wall of two movable mouth (19) is all fixed inlay with two groups of fourth bearing (20), and the inner ring of four groups of fourth bearing (20) is all fixedly connected with rotating roller (21).

5. The uniform coating device for magnetron sputtering coating process according to claim 3, wherein: The side of two baffles (13) close to each other is fixedly connected with limit board (17) in common, the outer surface of adjustment platform (10) is fixedly connected with relative symmetry sliding plate (18), and two sliding plates (18) and adjustment platform (10) are all located in the inside of limit board (17).

6. The uniform coating device for magnetron sputtering coating process according to claim 1, characterized in that: The inside of adjustment platform (10) is provided with cavity (22), the top of threaded rod (16) penetrates through adjustment platform (10) and extends to the inside of cavity (22), and the top of threaded rod (16) is fixedly connected with circular plate (23).

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