Ionic membrane assembly mounting device

Abstract

The utility model provides an ionic membrane assembly mounting device, the ionic membrane assembly comprises an ionic membrane and an ionic membrane skeleton, the mounting device comprises a supporting structure, the supporting structure comprises a first supporting part arranged above the ionic membrane, and a second supporting part arranged above the ionic membrane, the first supporting part penetrates through a gap of the ionic membrane framework and is supported on the surface of the ionic membrane; the first matching part is positioned above the first supporting part; the plurality of supporting rods are connected between the first supporting part and the first matching part; and the first fixing part is positioned on the outer side of the first matching part and is fixed with the outer side of the ionic membrane framework. According to the invention, gas in the ionic membrane and skeleton installation process is completely removed, bubbles in the ionic membrane are prevented from being generated, the installation process of the ionic membrane assembly is efficiently carried out, and the recovery time is shortened.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of electroplating equipment, in particular to an ion membrane assembly installation device. BACKGROUND

[0002] In the prior art, in the copper electroplating machine, the ion membrane is installed on the ion membrane skeleton. Its role is to allow the anode copper ions to flow to the cathode for replenishment, and the chemical additive components of the cathode are blocked in the cathode area and cannot pass through the ion membrane to the anode. In preventive maintenance, the anode copper block and the ion membrane need to be cleaned or replaced to ensure the stability of the ion concentration in the electroplating process, so the ion membrane and its ion membrane skeleton need to be disassembled and installed many times.

[0003] The ion membrane will appear upward bulging phenomenon in the gap between the ion membrane skeleton due to pressure. This part is also the site where small bubbles formed by not completely excluding gas during the installation process will eventually stay. The existence of bubbles will make the solution flow unstable, the local resistance will increase, the voltage will be unstable, and it will affect the electroplating quality. Therefore, during the installation process of the ion membrane skeleton, the bubbles in the anode area need to be completely discharged, and then the ion membrane skeleton is fixed to realize the isolation of the anode and the cathode. The current installation method is low in efficiency and difficult to ensure that the bubbles are completely excluded. CONTENT OF THE UTILITY MODEL

[0004] In view of the problems in the prior art, the purpose of the present application is to provide an ion membrane assembly installation device, which can completely exclude gas during the installation process of the ion membrane and its skeleton, prevent the generation of bubbles in the ion membrane, and make the ion membrane assembly installation process efficient and shorten the machine recovery time.

[0005] The ion membrane assembly installation device provided by the embodiment of the present application includes an ion membrane and an ion membrane skeleton, and the installation device includes a support structure, which includes:

[0006] A first support part is arranged above the ion membrane, and the first support part supports the surface of the ion membrane through the gap of the ion membrane skeleton;

[0007] A first matching part is located above the first support part;

[0008] A plurality of support rods are connected between the first support part and the first matching part;

[0009] A first fixing part is located outside the first matching part and is fixed with the outside of the ion membrane skeleton.

[0010] In some embodiments, the ion membrane frame comprises a second fixing portion on the outer side and a second matching portion in the center of the second fixing portion, the first supporting portion passes through the gap of the second matching portion, and the first fixing portion is fixed with the second fixing portion.

[0011] In some embodiments, the first supporting portion is a supporting surface facing one side surface of the ion membrane, and the supporting surface is a downwardly concave arc surface.

[0012] In some embodiments, the height of the supporting rod is adjustable.

[0013] In some embodiments, the installation structure comprises:

[0014] a plurality of second supporting portions supporting the outer side of the ion membrane frame;

[0015] a moving mechanism for moving the second supporting portions to support or separate the ion membrane frame;

[0016] a fixing portion arranged below the moving mechanism.

[0017] In some embodiments, the second supporting portion is provided with a supporting protrusion protruding towards the inner side, the supporting protrusion supports the outer side of the ion membrane frame, the supporting protrusion is located at the bottom end in the height direction of the second supporting portion, and the moving mechanism is connected to the top end in the height direction of the second supporting portion.

[0018] In some embodiments, the moving mechanism comprises:

[0019] a transverse moving mechanism for moving the second supporting portions in the radial direction;

[0020] a longitudinal moving mechanism for moving the second supporting portions in the height direction.

[0021] In some embodiments, the second supporting portions are arranged one by one with the moving mechanism.

[0022] In some embodiments, the fixing portion is annular, and the plurality of second supporting portions are uniformly installed on the fixing portion by the moving mechanism.

[0023] In some embodiments, the ion membrane assembly further comprises a dust cover, and the fixing portion is fixed above the dust cover.

[0024] The ion membrane assembly installation device provided in the present application has the following advantages:

[0025] The application provides a support structure, which supports the surface of the ion exchange membrane through the gap of the ion exchange membrane skeleton, avoids the upward protrusion of the ion exchange membrane due to the upward pressure, and prevents the residual small bubbles. The device completely removes the gas during the installation of the ion exchange membrane and its skeleton, effectively prevents the generation of bubbles in the ion exchange membrane, shortens the machine installation time, reduces the time spent from the start of the installation of the ion exchange membrane assembly to the normal operation of the equipment after the installation is completed, improves the production efficiency, and reduces the loss caused by the equipment downtime. BRIEF DESCRIPTION OF DRAWINGS

[0026] Other features, objects and advantages of the application will become more apparent after reading the detailed description of non-limiting embodiments with reference to the following drawings.

[0027] Figure 1 is a structure diagram of the ion exchange membrane skeleton and the ion exchange membrane;

[0028] Figure 2 is a schematic diagram of the generation of bubbles in the ion exchange membrane;

[0029] Figure 3 is a structure diagram of the ion exchange membrane skeleton and the support structure of an embodiment of the application;

[0030] Figure 4 is a partial enlarged view of Figure 3 ;

[0031] Figure 5 is a structure diagram of the ion exchange membrane skeleton and the installation structure of an embodiment of the application;

[0032] Figure 6 is a partial enlarged view of Figure 5 ;

[0033] Figure 7 is a structure diagram of the installation structure of an embodiment of the application.

[0034] LIST OF REFERENCE NUMBERS

[0035] 1 ion exchange membrane skeleton 4 dust cover

[0036] 11 second fixing part 5 installation structure

[0037] 12 second matching part 51 second support part

[0038] 2 ion exchange membrane 511 support protrusion

[0039] 3 support structure 52 longitudinal movement mechanism

[0040] 31 first support part 53 transverse movement mechanism

[0041] 32 support rod 54 fixing portion

[0042] 33 first fitting portion 6 O-ring

[0043] 34 first fixing portion 7 anode region DETAILED DESCRIPTION

[0044] Example embodiments now will be described more fully hereinafter with reference to the accompanying drawings. Example embodiments, may, however, be implemented in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. Like reference numerals refer to like elements throughout the specification. Any of the terms "and", "or", and "and / or" as used herein may encompass both conjunctive and disjunctive applications of such terms (e.g., A and / or B can cover A alone, B alone, or A and B). Although the terms "upper", "lower", "between", and the like can be used in this specification to describe different example features and elements of the application, these terms are used in this context solely for convenience, e.g., based on the example examples illustrated in the figures. Nothing in this specification should be construed as requiring a specific three dimensional orientation of structures as falling within the scope of the application. Although the terms "first" or "second" can be used herein to describe certain features, these terms are used only for convenience and do not limit the number or the order of the features.

[0045] The embodiment of the present application provides an ion membrane assembly installation device for quickly and efficiently installing an ion membrane assembly in an electroplating device. As shown in Figure 1 and Figure 2 , the ion membrane assembly includes an ion membrane 2 and an ion membrane skeleton 1. The ion membrane skeleton 1 forms a plurality of gap regions similar to a fan shape. At the position of the gap region, the ion membrane skeleton 1 does not support the upper surface of the ion membrane 2. The ion membrane 2 can appear as shown in Figure 2 upward bulging due to pressure. This part is also the position where small gas bubbles formed during the installation process will eventually stay. Figure 3 As shown in , the ion membrane skeleton 1 includes a second fixing portion 11 on the outer side and a second fitting portion 12 located at the center of the second fixing portion 11. The second fitting portion 12 forms a plurality of gap regions.

[0046] Figure 3 and Figure 4As shown, in order to solve the problem of bubbles in the installation process of ion membrane assembly, an ion membrane assembly installation device is provided, which comprises a support structure 3, the support structure 3 comprises: a first support part 31, which is arranged above the ion membrane 2, the first support part 31 is supported on the surface of the ion membrane 2 through the gap of the second matching part 12 of the ion membrane skeleton 1; a first matching part 33 located above the first support part 31; a plurality of support rods 32 connected between the first support part 31 and the first matching part 33; and a first fixing part 34 located outside the first matching part 33 and fixed with the second fixing part 11 outside the ion membrane skeleton 1. Therefore, the first support part 31 is formed as a support surface towards one side surface of the ion membrane 2, the support surface covers the upper surface of the part of the ion membrane 2 corresponding to the gap area of the ion membrane skeleton 1, and forms a certain downward pressure on the upper surface of the ion membrane 2, so that the ion membrane 2 will not produce bubbles due to the upward pressure. The material of the support surface can be transparent organic material, which is convenient for observing bubbles during use, or the support surface can also be made of rubber, ceramic and other materials, as long as it does not react with copper sulfate solution.

[0047] The length of the support rod 32 can be fixed, and the height of the support rod 32 is adapted to the height difference between the second fixing part 11 and the second matching part 12 of the ion membrane skeleton 1, so that the first support part 31 can be supported above the ion membrane 2, and the upper surface of the matching part and the upper surface of the first fixing part 34 are basically flush. In other alternative embodiments, the support rod 32 can also be made into an adjustable height structure, for example, the support rod 32 adopts the form of telescopic rod, the height of which can be adapted to different types of ion membrane skeleton 1, improving the universality of the support structure 3. The first fixing part 34 and the second fixing part 11 can be fixed by bolts. For example, a plurality of fixing holes are formed on the first fixing part 34, and the first fixing part 34 is fixed with the second fixing part 11 by using bolts passing through the fixing holes.

[0048] Therefore, by making the first support part 31 support the surface of the ion membrane 2 through the gap of the ion membrane skeleton 1, the situation that the ion membrane 2 is raised upward to cause residual small bubbles due to upward pressure is avoided, the device realizes complete exclusion of gas in the installation process of the ion membrane 2 and its skeleton, effectively prevents the generation of bubbles in the ion membrane 2, makes the ion membrane assembly installation process efficient, shortens the machine reinstallation time, reduces the time spent from the start of installation of the ion membrane assembly to the normal operation of the equipment after the installation is completed, is beneficial to improve the production efficiency, and reduces the loss caused by equipment downtime.

[0049] As shown in the drawings, Figure 4As shown, the support surface is a concave arc surface. The support surface supports the ion membrane 2, keeping the ion membrane 2 with a slightly concave arc, preventing the ion membrane 2 from bulging due to upward pressure, which could lead to small air bubbles remaining in the anode area during installation.

[0050] like Figures 5-7 As shown, to assist in the installation of the ion exchange membrane module and further improve the alignment accuracy and installation efficiency, the installation device also includes an installation structure 5. To clearly illustrate the structure of the installation structure 5 in conjunction with the ion exchange membrane frame 1, Figure 5 and Figure 6 The example only shows the assembly of the ion exchange membrane framework 1, the anode region 7, and the mounting structure 5. After installation, the cathode region 7 is located below the ion exchange membrane assembly, and an O-ring 6 is provided on its outer lower side. The mounting structure 5 includes: a plurality of second support portions 51, supporting the outer side of the ion exchange membrane framework 1; a moving mechanism for moving the second support portions 51 so that the second support portions 51 support the ion exchange membrane framework 1 or separate from the ion exchange membrane framework 1; and a fixing portion 54 disposed below the moving mechanism. The number of second support portions 51 is not limited, as long as they can stably support the ion exchange membrane framework 1, and two, three, or more can be used.

[0051] In this embodiment, the second support portion 51 is provided with a support protrusion 511 protruding inward, the support protrusion 511 supporting the outer side of the ion membrane framework 1. The moving mechanism includes: a lateral moving mechanism 53, used to move the second support portion 51 radially, i.e., in a plane, shortening or increasing the distance between the second support portions 51; and a longitudinal moving mechanism 52, used to move the second support portion 51 in the height direction, i.e., in... Figure 5 and Figure 6 The second support portion 51 moves vertically. The support protrusion 511 is located at the bottom end of the second support portion 51 in the height direction, and the lateral movement mechanism 53 is connected to the top end of the second support portion 51 in the height direction. The lateral movement mechanism 53 and the longitudinal movement mechanism 52 can adopt existing structures that can achieve linear movement, such as gear and rack structures, slider and slide rail structures, etc., which can change the longitudinal height and lateral position of the second support portion 51 and can be fixed in the current position after movement.

[0052] like Figure 7 As shown, the second support portion 51 is arranged in a one-to-one correspondence with the moving mechanism. The fixed portion 54 is annular, and the plurality of second support portions 51 are evenly installed on the fixed portion 54 through their corresponding moving mechanisms. Figure 1 and Figure 7As shown, the ion membrane assembly further comprises a dust cover 4, and the fixing part 54 is fixed above the dust cover 4. Specifically, the dust cover 4 has a ring-shaped edge, the fixing part 54 is sleeved outside the dust cover 4, and the fixing part 54 and the dust cover 4 can be further fixed by the bolts arranged on the dust cover 4, so as to avoid displacement of the mounting structure 5 relative to the dust cover 4. The structure and shape of the fixing part 54 are only examples and do not limit the protection scope of the present application. The cooperation mode of the fixing part 54 and the second supporting part 51 is not limited to the structure shown herein.

[0053] The process of installing the ion membrane assembly on the electroplating equipment by using the mounting device will be described in detail below. First, the ion membrane assembly is combined with the supporting structure 3, the first supporting part 31 of the supporting structure 3 is supported above the ion membrane 2, and the first fixing part 34 of the supporting structure 3 is fixed with the second fixing part 11 of the ion membrane framework 1. The ion membrane assembly and the supporting structure 3 are installed on the mounting structure 5 together, so that the second supporting part 51 is supported below the second fixing part 11 of the ion membrane framework 1. The ion membrane assembly, the supporting structure 3 and the mounting structure 5 are installed on the dust cover 4 together, then the ion membrane assembly is lowered to the appropriate position and kept by adjusting the longitudinal moving mechanism 52, the bubble removing step is performed (the bubbles are removed by knocking, adjusting the position, etc.), then the ion membrane assembly is lowered by adjusting the longitudinal moving mechanism 52, so that the ion membrane assembly is placed at the specified position of the electroplating equipment, then the second supporting part 51 is retracted outwardly by using the transverse moving mechanism 53, the mounting structure 5 is removed from the ion membrane assembly, then the supporting structure 3 is separated from the ion membrane assembly, and the installation of the ion membrane assembly on the electroplating equipment is completed. By using the mounting structure 5, the alignment of the ion membrane assembly during installation can be quickly and accurately realized.

[0054] The ion membrane assembly mounting device provided by the present application has the following advantages:

[0055] By providing the supporting structure, the supporting part thereof passes through the gap of the ion membrane framework and supports the surface of the ion membrane, so that the ion membrane is prevented from being raised upwardly due to the upward pressure and causing residual small bubbles. The device realizes complete removal of the gas during the installation process of the ion membrane and the framework thereof, effectively prevents the generation of bubbles in the ion membrane, makes the installation process of the ion membrane assembly efficient, shortens the machine restarting time, reduces the time spent from the start of installation of the ion membrane assembly to the normal operation of the equipment after the installation is completed, is beneficial to improving the production efficiency, and reduces the loss caused by the equipment downtime. By using the mounting device for installation of the ion membrane assembly, only one person is needed to complete all the steps, which saves manpower. Meanwhile, the mounting device can realize continuous and stable horizontal support during the installation process by using the mounting structure, facilitates the bubble removing step, and improves the installation speed and quality.

[0056] The above description is further detailed in combination with specific preferred embodiments of the present application, and cannot be deemed to limit the specific implementation of the present application to these descriptions. For those of ordinary skill in the art to which the present application belongs, several simple deductions or replacements can be made without departing from the concept of the present application, and all of them shall be deemed to fall within the protection scope of the present application.

Claims

1. An ion membrane assembly mounting device, characterized by, The ion membrane assembly comprises an ion membrane and an ion membrane skeleton, the mounting device comprises a support structure, the support structure comprises: a first support part arranged above the ion membrane, the first support part being supported on the surface of the ion membrane through a gap of the ion membrane skeleton; a first matching part located above the first support part; a plurality of support rods connected between the first support part and the first matching part; a first fixing part located outside the first matching part and fixed with the outside of the ion membrane skeleton.

2. The ion membrane assembly mounting device of claim 1, wherein, The ion membrane skeleton comprises a second fixing part on the outside and a second matching part located at the center of the second fixing part, the first support part passes through the gap of the second matching part, and the first fixing part is fixed with the second fixing part.

3. The ion membrane assembly mounting device of claim 1, wherein, The side surface of the first support part towards the ion membrane is a support surface, and the support surface is a downwardly concave arc surface.

4. The ion membrane assembly mounting device of claim 1, wherein, The height of the support rod is adjustable.

5. The ion membrane assembly mounting device of claim 1, wherein, Further comprising a mounting structure, the mounting structure comprises: a plurality of second support parts supported on the outside of the ion membrane skeleton; a moving mechanism for moving the second support parts to support or separate the ion membrane skeleton; a fixing part arranged below the moving mechanism.

6. The ion membrane assembly mounting device of claim 5, wherein, The second support part is provided with a support protrusion protruding towards the inside, the support protrusion is supported on the outside of the ion membrane skeleton, the support protrusion is located at the bottom end in the height direction of the second support part, and the moving mechanism is connected to the top end in the height direction of the second support part.

7. The ion membrane assembly mounting device of claim 5, wherein, The moving mechanism comprises: a transverse moving mechanism for moving the second support parts in the radial direction; a longitudinal moving mechanism for moving the second support parts in the height direction.

8. The ion membrane assembly mounting device of claim 5, wherein, The second support part is arranged one-to-one with the moving mechanism.

9. The ion membrane assembly mounting device of claim 8, wherein, The fixing part is annular, and the plurality of second support parts are evenly mounted on the fixing part by the moving mechanism.

10. The ion membrane assembly mounting device of claim 5, wherein, The ion membrane assembly further comprises a dust cover, and the fixing part is fixed above the dust cover.

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