Safety protection device of single crystal furnace

Abstract

A safety protection device of a single crystal furnace comprises a bottom plate, an L-shaped support and a single crystal furnace safety protection assembly are fixedly arranged on the upper side of the bottom plate, and a lifting assembly is arranged between the support and the single crystal furnace safety protection assembly; the single crystal furnace safety protection assembly further comprises a cooling assembly and a protection assembly, the cooling assembly is arranged in the protection assembly, and the interior of the cooling assembly is used for placing the single crystal furnace body; one end of the arranged lifting assembly is fixedly mounted on the single crystal furnace body, the other end of the lifting assembly opposite to the single crystal furnace body is fixedly mounted on the bracket, and the third end of the lifting assembly far away from the single crystal furnace body needs to be fixedly mounted on the bracket at the same time; the device can effectively reduce the temperature of the single crystal furnace, ensures that the single crystal furnace operates in a safe range, and prevents damage or deformation caused by overheating.

Description

TECHNICAL FIELD

[0001] The utility model relates to smelting equipment field, in particular to a safety device of single crystal furnace. BACKGROUND

[0002] Single crystal furnace is an important smelting equipment, is mainly used for producing single crystal silicon, sapphire, gallium boride etc. single crystal material, is widely used in semiconductor, optoelectronic, optical communication, photovoltaic etc. field, single crystal furnace is in inert gas environment with graphite heater and polycrystalline material such as polycrystalline silicon is melted, and through the straight drawing method is grown without dislocation single crystal equipment, to ensure safety, stable, efficient operation, single crystal furnace is usually equipped with multiple safety protection system, such as cooling protection, hot field fixed anti-deviation protection, gas leakage monitoring etc. to single crystal furnace.

[0003] And in the prior art, the measure that cooling protection is carried out to single crystal furnace is usually directly to the surface of single crystal furnace with cold source cooling protection, this process can lead to the surface of single crystal furnace sharp cooling, to produce greater thermal stress and thermal deformation, if the cold source spraying is uneven or the cold source spraying amount is too large, single crystal furnace can also be washed and corroded, and there is greater security risk. UTILITY MODEL CONTENT

[0004] To solve the problem that the single crystal furnace in the process of cooling protection is caused by the unreasonable cold source spraying and leads to thermal deformation, thermal stress, easy to wash and corrode single crystal furnace, improve the protection ability to single crystal furnace, the utility model provides a safety device of single crystal furnace to avoid producing greater thermal stress and thermal deformation, prevent potential security risk, the utility model is realized through the following technical scheme:

[0005] A safety device of single crystal furnace, including the bottom plate, the upside of bottom plate is fixedly provided with the L-shaped support and single crystal furnace safety protection assembly, be provided with lifting assembly between support and single crystal furnace safety protection assembly, single crystal furnace safety protection assembly includes cooling assembly and protection assembly, the inside of protection assembly is provided cooling assembly, the inside of cooling assembly is used for placing single crystal furnace body, one end of lifting assembly is fixedly installed with single crystal furnace body, the other end of lifting assembly opposite with single crystal furnace body is fixedly installed with support, the third end of lifting assembly away from single crystal furnace body is also fixedly installed on support.

[0006] Preferably, the lifting assembly includes an electric cylinder fixedly mounted on a bracket. The electric cylinder is connected to a first connecting plate via an output shaft. A slider is fixedly connected to the other end of the first connecting plate. A slide rail is slidably provided on the side of the slider via a rectangular slide groove. A second connecting plate is rotatably provided at the lower end of the slider. A rotating plate is suspended at the other end of the second connecting plate via a rotating rod. A plate is fixedly provided on the lower side of the slide rail. An arc-shaped slide groove is provided on the plate. One end of the rotating rod is nested through the second connecting plate and the plate. The other end of the rotating rod is nested with the arc-shaped slide groove to achieve a sliding connection.

[0007] Preferably, the upper top of the slide rail is fixedly connected to the bracket, the lower side of the rotating plate is fixedly connected to the single crystal furnace body, and the rotating plate is disposed on the outside of the second connecting plate.

[0008] Preferably, the protection component includes a barrel body fixedly connected to the base plate, and the outer surface of the barrel body is provided with a water inlet, a water outlet, an air inlet pipe and an air outlet pipe, and the air inlet pipe is connected to the air cooler.

[0009] Preferably, the air inlet pipe and water outlet are located on the upper side of the barrel, the water inlet and air outlet pipe are located on the lower side of the barrel, the air inlet pipe is located below the water outlet, the air outlet pipe is located above the water inlet, and the air cooler is fixed to the base plate; the air inlet pipe and water outlet are arranged opposite to the water inlet and air outlet pipe.

[0010] Preferably, the cooling assembly includes a first fixing ring and a second fixing ring, and a plurality of first baffles, a plurality of second baffles, and a plurality of tubes are disposed between the first fixing ring and the second fixing ring.

[0011] Preferably, the first baffle and the second baffle are both located on one side of the cooling assembly and are arranged in a linear array in the vertical direction; the first baffle, the second baffle and the first fixing ring are all fixedly connected to the inner surface of the barrel, and the second fixing ring is fixedly connected to the inner bottom surface of the barrel; multiple tubes are sequentially inserted through and fixed to the first baffle, the second baffle, the first fixing ring and the second fixing ring.

[0012] Preferably, the first baffle and the second baffle are arranged alternately and interspersed in the vertical direction of the cooling assembly.

[0013] Preferably, the tube is hollow inside and open on both the top and bottom sides.

[0014] Preferably, the tube body is made of high-temperature resistant material, and both the first baffle and the second baffle are semi-circular rings.

[0015] The beneficial effects of this utility model are:

[0016] 1. The safety protection device of the utility model, abandon the use of cold source directly to spray realize the strategy of cooling to single crystal furnace, and further effectively avoid the problem of large thermal stress and thermal deformation caused by cold source spraying, prevent potential safety hazard from happening, reduce the erosion and corrosion risk to single crystal furnace;

[0017] 2. The utility model discloses a cooling of single crystal furnace is realized to protection subassembly and cooling subassembly, through the pipe body of close adhesion with single crystal furnace delivery cold source and through the mode of delivery cold wind, avoid the partial area of single crystal furnace because of insufficient cooling or surface sharp cooling, and further lead to produce large thermal stress and thermal deformation, the setting can produce heat in time and send out, keep single crystal furnace stable and safe operation;

[0018] 3. The utility model discloses a lifting assembly lifting furnace cover and overturning furnace cover, need not lifting furnace cover to very high position to avoid shielding other parts of single crystal furnace, reduce the risk of personnel direct contact high temperature furnace cover simultaneously, protect the safety of operator. ACCURACY

[0019] Figure 1 It is the three-dimensional structure schematic diagram of the utility model safety protection device;

[0020] Figure 2 It is the three-dimensional sectional structure diagram of the utility model safety protection device after removing part protection subassembly;

[0021] Figure 3 It is the three-dimensional structure schematic diagram of the utility model lifting assembly;

[0022] Figure 4 It is the three-dimensional structure schematic diagram of the utility model protection subassembly;

[0023] Figure 5 It is the three-dimensional structure schematic diagram of the utility model cooling subassembly.

[0024] In the drawing: 1, bottom plate;2, support;3, lifting assembly;4, protection subassembly;5, single crystal furnace body;6, cooling subassembly;

[0025] 31, electric cylinder;32, first connecting plate;33, slide rail;34, sliding block;35, second connecting plate;36, rotating plate;37, rotating rod;38, plate body;39, arc-shaped sliding groove;

[0026] 41, barrel;42, water outlet;43, water inlet;44, air inlet pipe;45, air outlet pipe;46, air cooler;

[0027] 61, first fixed ring;62, pipe body;63, first baffle;64, second baffle;65, second fixed ring. DETAILED DESCRIPTION

[0028] In order to facilitate the understanding of the present application, the present application will be described more fully below with reference to the accompanying drawings. The preferred embodiments of the present application are shown in the drawings, but the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0029] Next, the present application will be further described in conjunction with the drawings and specific embodiments:

[0030] Embodiment 1:

[0031] As shown in Figures 1 to 2 , a safety protection device of a single crystal furnace, comprising a bottom plate 1, an L-shaped support 2 and a single crystal furnace safety protection assembly are fixedly arranged on the upper side of the bottom plate 1, and a lifting assembly 3 is further arranged between the support 2 and the single crystal furnace safety protection assembly; the single crystal furnace safety protection assembly of the present application further comprises a cooling assembly 6 and a protection assembly 4, the cooling assembly 6 is arranged in the protection assembly 4, and the single crystal furnace body 5 is arranged in the cooling assembly 6; and one end of the lifting assembly 3 is fixedly installed with the single crystal furnace body 5, the other end of the lifting assembly 3 opposite to the single crystal furnace body 5 is fixedly installed with the support 2, and the third end of the lifting assembly 3 away from the single crystal furnace body 5 also needs to be fixedly installed on the support 2, so as to better realize the fixation of the lifting assembly 3.

[0032] As shown in Figure 3 , more specifically, the lifting assembly 3 of the present application comprises an electric cylinder 31 fixedly installed on the support 2, the electric cylinder 31 is connected with a first connecting plate 32 through an output shaft, and the other end of the first connecting plate 32 is fixedly connected with a sliding block 34; a slide rail 33 is slidably arranged on the side surface of the sliding block 34 through a rectangular sliding groove, and the lower end of the sliding block 34 is rotatably provided with a second connecting plate 35, and the other end of the second connecting plate 35 is rotatably hung with a rotating plate 36 through a rotating rod 37; a plate body 38 is fixedly arranged on the lower side of the slide rail 33, and an arc-shaped sliding groove 39 is formed in the plate body 38, one end of the rotating rod 37 is nested and penetrates through the second connecting plate 35 and the plate body 38, and the other end of the rotating rod 37 is nested in the arc-shaped sliding groove 39 to realize sliding connection; and the upper top end of the slide rail 33 needs to be fixedly connected with the support 2, the lower side of the rotating plate 38 is fixedly connected with the single crystal furnace body 5, and the rotating plate 38 is arranged on the outer side surface of the second connecting plate 35.

[0033] The lifting assembly 3 in the actual use process of the safety protection device, when the furnace cover of the single crystal furnace body 5 needs to be lifted, the first connecting plate 32 is pushed upward by the electric cylinder 31, the first connecting plate 32 drives the sliding block 34 to move upward on the sliding rail 33, the sliding block 34 drives the second connecting plate 35, the rotating rod 37 and the furnace cover to move upward, in the process of moving upward on the rotating plate 36, the rotating rod 37 slides in the sliding groove 39, drives the rotating plate 36 and the furnace cover to overturn in the process of moving upward, without lifting the furnace cover to a high position, the other parts of the single crystal furnace can be avoided to be blocked; the lifting assembly 3 is tightly connected with the furnace cover, which ensures that the furnace cover will not fall off in the process of lifting and overturning, avoids causing safety accidents, and can also reduce the risk of directly contacting the high-temperature furnace cover by personnel, protects the safety of the operator.

[0034] As shown in Figure 4 More specifically, the practical protection assembly 4 includes a barrel 41 fixedly connected to the bottom plate 1, and the outer surface of the barrel 41 is further provided with a water inlet 43, a water outlet 42, an air inlet pipe 44 and an air outlet pipe 45, and the air inlet pipe 44 is in communication with a cold air fan 46, and the cold air fan 46 is fixed on the bottom plate 1. Among them, the water inlet 43, the water outlet 42, the air inlet pipe 44 and the air outlet pipe 45 are further arranged, the air inlet pipe 44 and the water outlet 42 are arranged on the upper side of the barrel 41, the water inlet 43 and the air outlet pipe 44 are arranged on the lower side of the barrel 41, and the air inlet pipe 44 is arranged on the lower side of the water outlet 42, and the air outlet pipe 45 is arranged on the upper side of the water inlet 43, and the air inlet pipe 44 and the water outlet 42 need to be arranged relative to the water inlet 43 and the air outlet pipe 45 and be located on the same plane.

[0035] As shown in Figure 5 The cooling assembly 6 includes a first fixed ring 61 and a second fixed ring 65, and a plurality of semicircular first baffles 63, a plurality of semicircular second baffles 64 and a plurality of pipe bodies 62 are arranged between the first fixed ring 61 and the second fixed ring 65. Among them, the first baffles 63 and the second baffles 64 are sequentially and spaced arranged in the vertical direction of the cooling assembly 6. The pipe body 62 is designed as a hollow structure with openings on the upper and lower sides. Since the pipe body 62 is cast according to the size of the single crystal furnace body 5, all the pipe bodies 62 are in contact with the outer surface of the single crystal furnace body 5. Since the single crystal furnace body 5 works in a high temperature environment, the temperature usually reaches thousands of degrees Celsius, so the pipe body 62 needs to be made of high temperature resistant materials, such as high temperature alloy, stainless steel, ceramic, etc. Further, the first baffles 63 and the second baffles 64 arranged on one side of the cooling assembly 6 are linearly arrayed in the vertical direction; the first baffles 63, the second baffles 64 and the first fixed ring 61 need to be fixedly connected with the inner surface of the barrel 41, and the second fixed ring 65 is fixedly connected with the inner bottom surface of the barrel 41; a plurality of pipe bodies 62 sequentially penetrate the first baffles 63, the second baffles 64, the first fixed ring 61 and the second fixed ring 65.

[0036] The first baffle plate 63 used in the device is used to change the flow direction of the cold air and reduce the speed of the cold air, and is usually composed of solid plates or sheets, which can increase the contact time and contact area of the cold air with the surface of the pipe body 62, thereby improving the heat dissipation efficiency. When the cold air passes through the baffle plate, the flow direction of the cold air will change, forming a vortex or turbulent flow. This flow state is conducive to the transfer of heat from the heat dissipation surface to the air flow and the removal of heat with the air flow.

[0037] In addition, the single crystal furnace body 5 is a device for growing single crystal silicon and works in a high temperature environment, with a temperature usually reaching thousands of degrees Celsius. High temperature can cause thermal expansion of the device itself, degradation of material performance, and possible failure. The cooling assembly 6 can help the device to operate stably in a high temperature environment. It can also prevent the single crystal furnace body 5 from overheating due to long-term high-temperature operation, absorb and remove the heat generated inside the single crystal furnace body 5, thereby reducing the temperature of the device and ensuring its operation within a safe range to prevent damage or safety accidents caused by overheating.

[0038] In the actual use of the device, when the single crystal furnace body 5 needs to be cooled, the cold source is transported into the barrel body 41 through the water inlet 43, enters the pipe body 62, and is then transported to the upper side of the first fixed ring 61 through the pipe body 62, and finally flows out through the water outlet 42. The continuous supply of cold source can cool the single crystal furnace body 5, and at the same time, the cooling fan 46 transports cold air into the barrel body 41 through the air inlet pipe 44. The cold air flows through the first baffle plate 63 and the second baffle plate 64, and finally flows out through the air outlet pipe 45, thereby cooling the single crystal furnace body 5 by air cooling.

[0039] In the prior art, the cooling is achieved by directly spraying cold source on the surface of the single crystal furnace, which can quickly remove the heat on the surface of the single crystal furnace. However, the cooling effect can be affected by factors such as water pressure, water volume, water temperature, etc. If the water is not sprayed uniformly or the water volume is insufficient, it can cause insufficient cooling in some areas of the single crystal furnace, and can also cause rapid cooling of the surface of the single crystal furnace, thereby generating a large thermal stress and thermal deformation. If the water is not sprayed uniformly or the water volume is too large, it can also cause erosion and corrosion of the single crystal furnace, which poses a safety hazard. By closely fitting the pipe body 62 with the single crystal furnace body 5, the cold source can be directly and effectively transferred to the heat generating components of the single crystal furnace body 5, achieving targeted cooling. The cold source in the pipe body 62 can be a low-temperature liquid or gas, and its cooling effect is usually more significant than that of water at room temperature. Since the direct contact area between the cold source and the single crystal furnace body 5 is limited, and the flow and temperature of the cold source can be accurately controlled to achieve gentle cooling of the single crystal furnace body 5, the influence on the thermal stress and thermal deformation of the single crystal furnace is small. In addition, the protection assembly 4 can cool the single crystal furnace body 5 by air cooling, and the protection assembly 4 and the cooling assembly 6 can work together to achieve better cooling effect.

[0040] The utility model discloses a working principle is: when the need promotes single crystal furnace body 5's furnace cover, through electric jar 31 and promotes first connecting plate 32, first connecting plate 32 drive slider 34 on slide rail 33 and move upwards, slider 34 drive second connecting plate 35 and the rotation rod 37 and the furnace cover and move upwards, in the process of moving on the rotation plate 36, the rotation rod 37 slide in the slide groove 39, drive rotation plate 36 and the furnace cover in the process of moving upwards and overturn, need not to promote the furnace cover to the very high position to avoid the shelter single crystal furnace other parts;When the need of single crystal furnace body 5 cooling, through the water inlet 43 and send the cold source in the bucket body 41, the cold source enters the pipe body 62, again through the pipe body 62 and sends to the first fixed ring 61 upside, finally through the water outlet 42 and flow out, the cold source of unceasingly sending can to single crystal furnace body 5 cooling, simultaneously through the cold -blast machine 46 and send the cold wind in the bucket body 41 through the air inlet pipe 44, the cold wind flows through a plurality of first baffle 63 and a plurality of second baffle 64, finally through the air outlet pipe 45 and flow out, to single crystal furnace body 5 and carry out the air cooling cooling.

[0041] For those skilled in the art, according to the above-mentioned technical solutions and the conception, other various corresponding changes and deformation can be made, and all these changes and deformation should belong to the protection scope of the utility model claim.

Claims

1. A safety protection device for a single crystal furnace comprising a base plate, characterized in that, The upper side of the bottom plate is fixedly provided with an L-shaped support and a single crystal furnace safety protection assembly, and a lifting assembly is arranged between the support and the single crystal furnace safety protection assembly; the single crystal furnace safety protection assembly comprises a cooling assembly and a protection assembly, the cooling assembly is arranged in the protection assembly, and the cooling assembly is used for placing a single crystal furnace body; one end of the lifting assembly is fixedly installed with the single crystal furnace body, the other end of the lifting assembly opposite to the single crystal furnace body is fixedly installed with the support, and the third end of the lifting assembly away from the single crystal furnace body is also fixedly installed on the support.

2. The safety protection device for a single crystal furnace according to claim 1, wherein The lifting assembly comprises an electric cylinder fixedly installed on the support, the electric cylinder is connected with a first connecting plate through an output shaft, and the other end of the first connecting plate is fixedly connected with a sliding block; the side surface of the sliding block is slidably provided with a slide rail through a rectangular slide groove, the lower end of the sliding block is rotatably provided with a second connecting plate, and the other end of the second connecting plate is rotatably hung with a rotating plate through a rotating rod; the lower side of the slide rail is fixedly provided with a plate body, the plate body is provided with an arc-shaped slide groove, one end of the rotating rod is nested and penetrates through the second connecting plate and the plate body, and the other end of the rotating rod is nested with the slide groove to achieve sliding connection.

3. The safety protection device for a single crystal furnace according to claim 2, wherein The upper top end of the slide rail is fixedly connected with the support, the lower side of the rotating plate is fixedly connected with the single crystal furnace body, and the rotating plate is arranged on the outer side of the second connecting plate.

4. The safety protection device for a single crystal furnace according to claim 1, wherein The protection assembly comprises a barrel fixedly connected to the bottom plate, the outer surface of the barrel is provided with a water inlet, a water outlet, an air inlet pipe and an air outlet pipe, and the air inlet pipe is in communication with a cold air fan.

5. The safety protection device for a single crystal furnace according to claim 4, wherein The air inlet pipe and the water outlet are arranged on the upper side of the barrel, the water inlet and the air outlet pipe are arranged on the lower side of the barrel, the air inlet pipe is arranged on the lower side of the water outlet, the air outlet pipe is arranged on the upper side of the water inlet, and the cold air fan is fixed on the bottom plate; the air inlet pipe and the water outlet are arranged opposite to the water inlet and the air outlet pipe.

6. The safety protection device for a single crystal furnace according to claim 1, wherein The cooling assembly comprises a first fixed ring and a second fixed ring, and a plurality of first baffles, a plurality of second baffles and a plurality of pipe bodies are arranged between the first fixed ring and the second fixed ring.

7. The safety protection device for a single crystal furnace according to claim 6, wherein The first baffles and the second baffles are arranged on one side of the cooling assembly and are linearly arranged in the vertical direction; the first baffles, the second baffles and the first fixed ring are fixedly connected with the inner surface of the barrel, and the second fixed ring is fixedly connected with the inner bottom surface of the barrel; the plurality of pipe bodies penetrate through the first baffles, the second baffles, the first fixed ring and the second fixed ring in sequence.

8. The safety protection device of a single crystal furnace according to claim 7, wherein The first baffles and the second baffles are sequentially and spacedly arranged in the vertical direction of the cooling assembly.

9. The safety protection device for a single crystal furnace according to claim 7, wherein The pipe body is hollow and open on the upper and lower sides.

10. The safety protection device for a single crystal furnace according to claim 6, wherein The pipe body is made of high-temperature resistant material, and the first baffles and the second baffles are semicircular rings.

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