Diaphragm valve suitable for high-pressure environment

Abstract

The diaphragm valve suitable for the high-pressure environment comprises a valve body and a pneumatic actuator, a fluid channel allowing fluid to pass through is formed in the valve body, the fluid channel extends to the other end of the valve body along one end of the valve body, and the pneumatic actuator is assembled at the end, away from an inlet and an outlet of the fluid channel, of the valve body. The diaphragm valve is characterized in that a pneumatic actuator is arranged in the valve body, one end, facing the valve body, of the pneumatic actuator is provided with an execution rod piece, and the execution rod piece is movably arranged in the valve body in a penetrating mode and extends into the fluid channel to be connected with a diaphragm. The ultimate compressive strength of a PFA valve body material is broken through, so that the PFA valve body does not deform in a high-pressure environment, and the stability of the whole structure is ensured; through cooperation of an electric actuator and a control unit, accurate control over the opening degree of the valve is achieved, the position and state of the diaphragm are collected, and the control accuracy of the next step is further optimized and adjusted according to data of the diaphragm.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of fluid control technology, especially suitable for diaphragm valve in high pressure environment. BACKGROUND

[0002] In the field of semiconductor manufacturing and photovoltaic industry, a large number of fluid transportation and fluid processing are involved, including chemical reagents, high-purity water, special gases, etc., however, these fluids are often in a high pressure state in different process links;

[0003] Among them, in the semiconductor etching process, the precise delivery and pressure control of etching liquid are extremely high; in the process of silicon wafer cleaning and diffusion in the photovoltaic industry, stable fluid pressure and flow control are required, and the existing valve is used in high pressure environment, facing many problems, such as poor sealing performance, insufficient adjustment accuracy, low reliability, etc.

[0004] Among them, the ordinary valve is prone to the problem of insufficient sealing in high pressure environment, and the poor sealing performance will lead to fluid leakage, affecting the control accuracy of the fluid and the delivery amount, pressure, service life, etc., so as to meet the needs of precise control and long-term stable operation of the fluid in high pressure condition. Therefore, a scheme is needed to solve the above problems.

[0005] It should be noted that the above content belongs to the technical cognition of the inventor and does not necessarily constitute the prior art. CONTENT OF THE UTILITY MODEL

[0006] In order to solve the above problems, the purpose of the utility model is to provide a diaphragm pump suitable for high pressure environment, which connects the gas cylinder module and the diaphragm valve through the rod piece, so as to control the movement of the diaphragm valve by the gas cylinder module to meet the air tightness and precise control ability of the diaphragm valve in high pressure environment.

[0007] In order to achieve the above purpose, the utility model provides a diaphragm valve suitable for high pressure environment, which comprises a valve body and a pneumatic actuator, a fluid passage for fluid passing through is formed in the valve body, the fluid passage extends from one end of the valve body to the other end, the pneumatic actuator is assembled at one end of the valve body away from the inlet and outlet of the fluid passage, the pneumatic actuator is provided with an execution rod piece at one end facing the valve body, and the execution rod piece is movably arranged in the valve body and extends into the fluid passage and is connected with the diaphragm.

[0008] In one example, the pneumatic actuator is also provided with an adjusting valve and a pressure sensor, the adjusting valve and the pressure sensor are respectively located at the air inlet and the air outlet of the pneumatic actuator, the stroke and the pressure of the execution rod piece can be accurately controlled through the adjusting valve and the pressure sensor, so as to accurately control the movement of the diaphragm and realize the accurate adjustment of the valve opening.

[0009] In one example, the execution rod is a connecting rod or a push rod, and a diaphragm is sleeved on the connection between the valve body top and the execution rod.

[0010] In one example, the pneumatic actuator is an air cylinder.

[0011] In one example, the valve body and the pneumatic actuator are fixedly connected through a connecting plate.

[0012] In one example, the valve body is made of PFA.

[0013] In one example, a hard seal and an elastic seal are sleeved on the connection between the valve body and the execution rod.

[0014] In one example, screw nuts and beads are arranged at both ends of the valve body for communication with other production components.

[0015] In one example, a valve body, a pneumatic actuator and an electric actuator are included, a fluid channel for fluid passing through is arranged in the valve body, the fluid channel extends from one end of the valve body to the other end, the pneumatic actuator and the electric actuator are fixed through a connecting plate and are installed on the valve body together, the pneumatic actuator is located between the electric actuator and the valve body, an execution rod is movably arranged in the electric actuator, the execution rod extends through the electric actuator and the valve body into the fluid channel and is connected with a diaphragm.

[0016] In one example, a control unit is arranged in the electric actuator.

[0017] The diaphragm valve suitable for a high-pressure environment can bring the following beneficial effects:

[0018] 1. By adopting a pneumatic actuator with a larger internal cavity area, the internal volume of the pneumatic actuator is larger, and a larger volume execution rod is correspondingly arranged, so that the limit compressive strength of the PFA valve body material is significantly improved, the PFA valve body is not deformed in a high-pressure environment, and the stability of the overall structure is ensured.

[0019] 2. The cooperation of the electric actuator and the control unit further accurately controls the deformation of the diaphragm, so as to realize the opening control of the valve, collect the position and state of the diaphragm, and further optimize and adjust the control accuracy of the next step according to the data.

[0020] 3. The combination of the hard seal and the elastic seal at the connection between the valve body and the execution rod can combine the high pressure resistance of the metal seal and the tightness of the elastic seal, so as to effectively improve the sealing effect and prevent high-pressure fluid from leaking from the valve rod. BRIEF DESCRIPTION OF DRAWINGS

[0021] The accompanying drawings, which are included to provide a further understanding of the present application and are incorporated in and constitute a part of this application, illustrate embodiments of the present application and together with the description serve to explain the present application. In the drawings:

[0022] Figure 1 An exploded view of the diaphragm valve suitable for high-pressure environment of the present application.

[0023] Figure 2 A side view of the diaphragm valve suitable for high-pressure environment of the present application.

[0024] Figure 3 A front view of the diaphragm valve suitable for high-pressure environment of the present application.

[0025] Figure 4 A side view of the diaphragm valve suitable for high-pressure environment of the present application.

[0026] Figure 5 An exploded view of another structure of the diaphragm valve suitable for high-pressure environment of the present application.

[0027] Figure 6 A side view of another structure of the diaphragm valve suitable for high-pressure environment of the present application.

[0028] Figure 7 A front view of another structure of the diaphragm valve suitable for high-pressure environment of the present application.

[0029] Figure 8 A side view of another structure of the diaphragm valve suitable for high-pressure environment of the present application. DETAILED DESCRIPTION

[0030] In order to more clearly illustrate the overall concept of the present application, the following will be described in detail with reference to the accompanying drawings.

[0031] In the description of the present application, it should be understood that the terms "center", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0032] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0033] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0034] In this invention, unless otherwise expressly specified and limited, the first feature "on" or "below" the second feature may be in direct contact with the first and second features, or indirect contact through an intermediate medium. In the description of this specification, references to terms such as "a solution," "some solutions," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that solution or example is included in at least one solution or example of this invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same solution or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more solutions or examples.

[0035] Example 1

[0036] like Figures 1-4 As shown in the figure, an embodiment of this utility model proposes a diaphragm valve suitable for high-pressure environments, including a valve body 1 and a pneumatic actuator 2. A fluid channel 11 for fluid passage is provided inside the valve body 1, extending from one end to the other. The pneumatic actuator 2 is mounted on the end of the valve body 1 away from the inlet and outlet of the fluid channel 11. An actuating rod 3 is provided on the end of the pneumatic actuator 2 facing the valve body 1. The actuating rod 3 movably passes through the valve body 1 and extends into the fluid channel 11 to connect with the diaphragm 12. By controlling the deformation of the diaphragm 12, the flow of fluid in the fluid channel 11 can be blocked or opened. By mounting the pneumatic actuator 2 on the valve body 1, the larger cavity area of ​​the pneumatic actuator 2 provides more force to the valve body 1, thus preventing deformation of the valve body 1 under high-pressure environments and ensuring the stability of the overall structure.

[0037] The pneumatic actuator can adopt a large cylinder, which has a larger cavity area, so that it has a larger volume inside, and a larger actuating rod can help the diaphragm to withstand a larger pressure when controlling the diaphragm, thereby improving the pressure resistance of the diaphragm valve in a high-pressure environment.

[0038] Specifically, the pneumatic actuator 2 is further provided with an adjusting valve 21 and a pressure sensor 22, which are respectively located at the air inlet and air outlet of the pneumatic actuator 2. The adjusting valve 21 and the pressure sensor 22 can accurately control the stroke and pressure of the actuating rod 3, and further accurately control the movement of the diaphragm 12, thereby realizing accurate adjustment of the valve opening.

[0039] Specifically, the actuating rod 3 can be a connecting rod or a push rod, and the actuating rod 3 is made of high-strength and low-friction material, which can ensure the stability and reliability of power transmission, and reduce energy loss and component wear caused by friction.

[0040] Specifically, the valve body 1 is provided with a diaphragm 4 at the connection between the top of the valve body 1 and the actuating rod 3,

[0041] At the connection between the diaphragm 12 and the valve body 1 and the valve cover, a multi-layer sealing structure is used, such as a combination of O-shaped sealing rings and lip-shaped sealing rings, to ensure the sealing performance under high pressure.

[0042] Specifically, the valve body 1 and the pneumatic actuator 2 are fixedly connected through a connecting plate 5.

[0043] Specifically, the valve body 1 is made of PFA, which has the characteristics of high strength and corrosion resistance, and can withstand high pressure without deformation, ensuring the stability of the overall structure.

[0044] Specifically, the valve body 1 and the actuating rod 3 are provided with a hard sealing element 6 and an elastic sealing element 7 at the connection therebetween. The metal sealing has high pressure resistance, and the elastic sealing ensures the tightness of the sealing, and the cooperation of the two can effectively improve the sealing effect, thereby preventing high-pressure fluid from leaking from the valve rod.

[0045] Specifically, the valve body 1 is provided with a screw nut 8 and a bead 9 at both ends thereof for communication with other production components.

[0046] The pneumatic actuator obtains pressure data through the pressure sensor, thereby controlling the stroke of the execution rod through the regulating valve, further controlling the deformation of the diaphragm, realizing the blockage and flow control of the fluid in the fluid passage, the valve body made of PFA material has the characteristics of high strength and corrosion resistance, is suitable for semiconductor manufacturing and photovoltaic industry, and is matched with the larger cavity area of the pneumatic actuator, so that a larger execution rod can be assembled, thereby helping the diaphragm to resist the high-pressure environment in production, providing more force value for the valve body, breaking through the high-pressure limit of the PFA material valve body, so that the valve body does not deform in the high-pressure environment, ensuring the stability of the overall structure, avoiding leakage in the extreme high-pressure environment, and being further suitable for semiconductor manufacturing and photovoltaic industry.

[0047] Embodiment 2

[0048] As Figures 5-8 shown, the embodiment of the utility model discloses a diaphragm valve suitable for high-pressure environment, including valve body 1, pneumatic actuator 2 and electric actuator 10, the fluid passage 11 that is set up in valve body 1 is used for fluid to pass through, fluid passage 11 extends to another end along the one end of valve body 1, pneumatic actuator 2 and electric actuator 10 are fixed through connecting plate 5, and are installed on valve body 1 together, and pneumatic actuator 2 is located between electric actuator 10 and valve body 1, the execution rod 3 of movable setting is arranged in electric actuator 10, and execution rod 3 extends to fluid passage 11 and is connected with diaphragm 12 through valve body 1 and electric actuator 10, through the electric motor of electric actuator 10, the rotation angle or linear displacement of accurate control is realized, the power of electric motor is transmitted to diaphragm 12, realizes the accurate drive of diaphragm 12, and utilize the larger cavity area of pneumatic actuator 2, provide more force value for valve body 1, so that valve body 1 does not deform in high-pressure environment, guarantee the stability of overall structure,

[0049] The pneumatic actuator can adopt a large cylinder, which has a larger cavity area and a larger volume, so that the larger execution rod can help the diaphragm to resist larger pressure when controlling the diaphragm, thereby improving the pressure resistance of the diaphragm valve in the high-pressure environment.

[0050] Specifically, the electric actuator 10 is provided with a control unit 101, which can receive external signals (such as analog signals and digital signals), accurately adjust the rotation speed, torque and stroke of the electric motor according to the preset control program or external instructions, and realize accurate control of the valve opening,

[0051] The control unit 101 also has a feedback function, which can monitor the position and state information of the valve in real time and feed it back to the control system for further adjustment and optimization.

[0052] The electric actuator transmits power to the diaphragm through the execution rod by the electric motor, makes the diaphragm deform to realize the block and flow control of the fluid in the fluid passage, cooperates with the control unit to receive external signals, programs preset instructions, controls the execution rod in real time and has other functions, further realizes the accurate control of the valve opening degree, optimizes the adjustment of each instruction, further provides more force values for the PFA valve body through the larger cavity area of the actuator, breaks through the high pressure limit of the PFA material valve body, so that the valve body does not deform in the high pressure environment, ensures the stability of the overall structure, avoids the leakage in the extreme high pressure environment, is further applicable to the semiconductor manufacturing and photovoltaic industry.

[0053] Each of the embodiments in the specification is described in a progressive manner, and the same and similar parts between the embodiments can be referred to each other, and each embodiment mainly explains the difference from other embodiments. Especially, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the related parts can be referred to the part of the method embodiment.

[0054] The above only describes the embodiments of the utility model and does not limit the utility model. The utility model can be changed and varied in various ways for those skilled in the art. Any modification, equivalent replacement, improvement and the like within the spirit and principle of the utility model shall be included in the scope of claims of the utility model.

Claims

1. A diaphragm valve suitable for use in a high pressure environment, characterized in that, The valve body is provided with a fluid channel for fluid to pass through, the fluid channel extends from one end of the valve body to the other end, the pneumatic actuator is arranged at the end of the valve body away from the inlet and outlet of the fluid channel, the pneumatic actuator is provided with an actuating rod towards one end of the valve body, the actuating rod is movably arranged in the valve body and extends into the fluid channel and is connected with a diaphragm.

2. The diaphragm valve according to claim 1, wherein The pneumatic actuator is further provided with a regulating valve and a pressure sensor.

3. The diaphragm valve suitable for high pressure environment according to claim 1, characterized in that, The actuating rod is a connecting rod or a push rod, a diaphragm is arranged at the connection between the top of the valve body and the actuating rod.

4. The diaphragm valve suitable for high pressure environment according to claim 1, wherein, The pneumatic actuator is an atmospheric cylinder.

5. The diaphragm valve suitable for high pressure environment according to claim 1, wherein, The valve body and the pneumatic actuator are fixedly connected through a connecting plate.

6. The diaphragm valve suitable for high pressure environment according to claim 1, wherein, The valve body is made of PFA.

7. The diaphragm valve suitable for high pressure environment according to claim 1, wherein, Hard sealing elements and elastic sealing elements are arranged at the connection between the valve body and the actuating rod.

8. The diaphragm valve suitable for high pressure environment according to claim 1, wherein, Screw nuts and beads are arranged at both ends of the valve body for communication with other production components.

9. The diaphragm valve suitable for high pressure environment according to claim 1, wherein, The valve body, the pneumatic actuator and the electric actuator are fixed through a connecting plate and are installed on the valve body together, the pneumatic actuator is located between the electric actuator and the valve body, the electric actuator is movably provided with an actuating rod, the actuating rod extends through the electric actuator and the valve body and extends into the fluid channel and is connected with a diaphragm.

10. A diaphragm valve suitable for use in a high pressure environment according to claim 9, wherein, The electric actuator is provided with a control unit.

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