Bubbling cabinet

Abstract

The utility model relates to a bubbling cabinet which comprises a bubbling bottle, an air blowing pipeline, an air outlet pipeline, a purging air inlet pipeline, a purging exhaust pipeline, a liquid supplementing pipeline and a weighing device, the bubbling bottle is arranged on the weighing device; one end of the air-blowing pipeline is a carrier gas inlet, and the other end is communicated to the bottom of the bubbling bottle through a bottom insertion pipe; one end of the gas outlet pipeline is a chemical gas outlet, and the other end is communicated to the top of the bubbling bottle; the other end of the liquid supplementing pipeline is communicated to the bottom of the bubbling bottle through a bottom inserting pipe; the purging gas inlet pipeline is respectively communicated with the venturi components of the gas blowing pipeline, the gas outlet pipeline, the liquid supplementing pipeline and the purging gas exhaust pipeline through a diaphragm valve, and the other end of the purging gas inlet pipeline is a purging gas inlet; and the venturi assembly is communicated with the purge gas outlet. The weighing device has the advantages that the weighing device can bear the weight of the tank body, the accuracy of the liquid level of the TCS solution is improved, and the weighing device is matched with the liquid supplementing pipeline to achieve automatic liquid supplementing.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic silicon wafer / cell technology in the photovoltaic industry, and in particular to a bubbling cabinet. Background Technology

[0002] The bubbling process involves introducing a carrier gas into a bubbling bottle containing special chemicals using a bubbling device to vaporize the gas, forming bubbles containing liquid source vapor, which are then output to the processing equipment. TCS bubbling technology is widely used in the semiconductor and photovoltaic industries for the TCS film growth stage of epitaxial wafers (EPI). This involves bubbling a carrier gas (usually H2) through a specific liquid medium (typically silane or a silicon compound) to form bubbles and mix them in the liquid.

[0003] In the aforementioned bubbling process, the liquid medium inside the bubbling bottle is continuously consumed as production progresses. Therefore, it is necessary to monitor the consumption level of the liquid medium in the bubbling bottle and replenish it when the consumption exceeds a set threshold. Currently, there are generally two monitoring methods in the industry:

[0004] 1. A float level sensor is installed inside the bubbling bottle to monitor the liquid level of the internal liquid medium, thereby determining the degree of consumption of the liquid medium. However, this type of float level sensor has poor accuracy and is prone to failure, and cannot guarantee that the liquid level in the bubbling bottle is within the ideal range, thus failing to guarantee the stability of the TCS vapor concentration.

[0005] 2. By installing a weighing device at the bottom of the bubbling bottle to weigh the bottle in real time, the degree of consumption of the liquid medium inside can be determined. However, in practice, relying solely on the weight of the scale to determine the liquid level is affected by multiple factors such as stress and signal interference, which can lead to deviations in the liquid level inside the bubbling bottle, and thus cannot guarantee the stability of the TCS vapor concentration.

[0006] Therefore, it is necessary to improve and optimize existing bubbling equipment to better meet user needs. Utility Model Content

[0007] The purpose of this utility model embodiment is to address the shortcomings of the existing technology structure by proposing a bubble chamber to solve the defects in the existing technology.

[0008] To achieve the aforementioned objectives, the present invention provides a bubble chamber through the following technical solution:

[0009] A bubbling cabinet, characterized in that: the bubbling cabinet includes a bubbling bottle, a bubbling pipe, a gas outlet pipe, a purge inlet pipe, a purge exhaust pipe, a liquid replenishment pipe, and a weighing device; the bubbling bottle is mounted on the weighing device and configured to be weighed in real time by the weighing device; a liquid level sensor for monitoring changes in the liquid level of the chemical is installed inside the bubbling bottle; one end of the bubbling pipe is a carrier gas inlet, and the other end is connected to the bottom of the bubbling bottle via a bottom-inserting tube; one end of the gas outlet pipe is a chemical gas outlet, and the other end is connected to the top of the bubbling bottle; one end of the liquid replenishment pipe is a liquid replenishment port, and the other end is connected to the bottom of the bubbling bottle via a bottom-inserting tube; the purge inlet pipe is connected to a Venturi assembly in the bubbling pipe, the gas outlet pipe, the liquid replenishment pipe, and the purge exhaust pipe, and its other end is a purge gas inlet; the Venturi assembly is connected to the purge gas outlet, and the purge gas outlet is also connected to the top of the bubbling bottle via a one-way valve.

[0010] The bubbling cabinet also includes a cabinet body, the weighing device is directly or indirectly located at the bottom of the cabinet body, and the carrier gas inlet, chemical gas outlet, liquid replenishment port, purge gas inlet and purge gas outlet are respectively provided with interfaces on the outside of the cabinet body.

[0011] The weighing device is mounted on the bottom of the cabinet via a bracket, and the cabinet below the bottom of the weighing device forms a cavity capable of holding 110% of the maximum capacity of the bubbling bottle containing chemicals.

[0012] The liquid level sensor is a float level gauge, and the float level gauge is configured to have at least two liquid level control points.

[0013] The blower pipe is equipped with a diaphragm valve, a pressure regulating valve, a pressure sensor, and a check valve; the outlet pipe is equipped with a diaphragm valve and a pressure sensor; the replenishment pipe is equipped with a diaphragm valve; and the purging inlet pipe is equipped with a diaphragm valve, a pressure sensor, and a check valve.

[0014] The bubbling bottle includes an outer liner and an inner liner for containing chemical substances, with a sandwich layer between the inner and outer liner. The sandwich layer contains a liquid heat exchange substance and has a liquid outlet and a liquid inlet.

[0015] The bubbling chamber also includes a controller, which controls the pressure sensor, weighing device, diaphragm valve and liquid level sensor connected to it.

[0016] The Venturi assembly includes a Venturi tube, a Venturi gas inlet, and a micro-leakage valve and a check valve located between the two.

[0017] Compared with the prior art, the beneficial effects of this utility model are:

[0018] 1. A weighing device is installed to support the weight of the tank. At the same time, a liquid level sensor is installed inside the bubble bottle. The weighing device is calibrated by the liquid level sensor to improve the accuracy of monitoring the liquid level of TCS solution. It also works with the replenishment pipeline to automatically replenish the bubble bottle.

[0019] 2. A cavity is installed at the bottom of the cabinet to hold 110% of the maximum capacity of the bubbling bottle containing chemicals, preventing chemicals from overflowing the cabinet and causing greater danger in case of leakage.

[0020] 3. Configure purging pipelines for pipeline purging and nitrogen protection. By purging nitrogen and vacuuming in a reciprocating manner, it can not only prevent residual TCS in the pipeline from directly entering the air when the liquid tank is replaced, but also prevent environmental substances from entering the pipeline. Attached Figure Description

[0021] The above features and advantages of the present invention will become clearer and easier to understand from the following description of exemplary embodiments thereof in conjunction with the accompanying drawings.

[0022] Figure 1 This is a front view of the bubbling cabinet according to an embodiment of the present utility model;

[0023] Figure 2 This is a side view of the bubbling cabinet according to an embodiment of the present utility model;

[0024] Figure 3 This is a schematic diagram of the internal structure of the bubbling cabinet in an embodiment of this utility model;

[0025] Figure 4 This is a schematic diagram of the system structure of the bubbling cabinet according to an embodiment of the present utility model;

[0026] Figure 5 This is a schematic diagram of the piping structure of the bubbling cabinet according to an embodiment of the present utility model. Detailed Implementation

[0027] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0028] The terms "front," "rear," "left," "right," "inner," and "outer" used in this specification are merely for clarity of description and are not intended to limit the scope of implementation of this utility model. Any changes or adjustments to their relative relationships, without substantially altering the technical content, shall also be considered within the scope of implementation of this utility model.

[0029] In the description of the following embodiments, unless otherwise expressly specified and limited, the term "connection" and other such terms should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an indirect connection through an intermediate medium; it can be the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0030] See Figure 1-5 As shown in the figure, this utility model embodiment proposes a bubbling cabinet, which includes a cabinet body 22, a bubbling bottle 23, a bubbling pipe 24, an exhaust pipe 25, a purging inlet pipe 26, a purging exhaust pipe 27, a liquid replenishment pipe 28, and a weighing device 29.

[0031] The weighing device 29 is located at the bottom of the cabinet 22, and the bubbling bottle 23 is located on the weighing device 29 and is configured to be weighed in real time by the weighing device 29 to monitor the weight of the chemicals in the bubbling bottle 23. When the weight is low, the chemicals in the bubbling bottle 23 are replenished through the replenishment pipeline 28, and the replenishment stops when the set weight value is reached.

[0032] In a specific embodiment, the weighing device 29 is mounted on the bottom of the cabinet 22 via a bracket 56. Below the bottom of the weighing device 29, the interior of the cabinet 22 undergoes surface treatment, forming a cavity capable of holding 110% of the maximum capacity of the bubbling bottle containing chemicals. To ensure the cavity capacity at the bottom of the cabinet 22, a leak-proof baffle 49 is installed below the cabinet door opening. The upper edge of the leak-proof baffle 49 is approximately flush with or slightly lower than the upper end of the bracket 56. The cavity is formed by a leak-proof baffle and a sealed connection to the cabinet side wall, and its volume is calculated based on 1.1 times the maximum liquid level of the bubbling bottle. This structure prevents chemicals from overflowing the cabinet 22 and causing greater danger in case of leakage. Simultaneously, a leak sensor 48 is installed at the bottom of the cabinet 22. When the leak sensor 48 detects liquid, the equipment stops all operations and an audible and visual alarm sounds. Preferably, there are multiple leakage sensors installed at symmetrical positions at the bottom of the cabinet 22, so that they can still be effectively detected when a small amount of liquid leaks.

[0033] The bubbling bottle 23 includes an outer liner 30 and an inner liner 31 for containing chemical substances. A jacket is provided between the inner liner 31 and the outer liner 30, containing a liquid heat exchange medium. In this embodiment, the liquid heat exchange medium is cooling water. A cooling water outlet connector 32 (to chiller) is provided at the upper part of the outer liner 30, and a cooling water inlet connector 33 (from chiller) is provided at the lower part of the outer liner 30. Cooling water enters the jacket through the cooling water inlet connector 33 below the outer liner 30 and exits through the cooling water outlet connector 32 above, circulating for cooling. Compared to cooling methods using cooling pipes, this jacketed cooling structure increases the contact area between the heat exchange medium and the chemicals, resulting in better temperature control of the chemicals in the inner liner and maintaining a stable vapor pressure. The corresponding cabinet 22 is provided with a reserved cooling water outlet connector 34 and a reserved cooling water inlet connector 35, which are connected to the cooling water inlet connector 33 and the cooling water outlet connector 32, respectively, and are used to connect to an external water source.

[0034] A liquid level sensor 36 is installed inside the inner tank 31 to monitor changes in the chemical liquid level. In this embodiment, the liquid level sensor is a float level gauge with four liquid level control points. Before use, the bubbling chamber in this embodiment is calibrated using the liquid level sensor 36 to the weighing device 29. During production, whenever the liquid in the inner tank 31 reaches one of the liquid level control points of the liquid level sensor 36, a signal is sent to the controller. The controller calculates the weight of the chemical based on this signal and compares it with the data from the weighing device 29. When the deviation exceeds a threshold, an alarm signal is issued. In short, in this solution, the weighing of chemicals is mainly achieved through continuous weight measurement using the weighing device 29, while the liquid level sensor 36 serves as a calibration and redundant safety backup for the weighing device 29.

[0035] Of course, the selection of liquid level sensors mentioned above is not limited to float level gauges; other types of liquid level sensors, such as magnetostrictive level sensors, can also be used.

[0036] One end of the gas inlet pipe 24 is a carrier gas inlet 37. Starting from the carrier gas inlet 37, a two-way manual diaphragm valve 5, a pressure regulating valve 6, a pressure sensor 7, a one-way valve 8, and a two-way pneumatic diaphragm valve 9 are sequentially installed. The other end is connected to the bottom of the bubbling bottle 23 via a bottom insertion pipe 38. Through the above structure, the gas inlet pipe 24 can regulate the pressure of the carrier gas, ensuring that the carrier gas pressure input to the bubbling tank is the required pressure.

[0037] One end of the gas outlet pipe 25 is a chemical carrier gas outlet 39. Starting from the chemical carrier gas outlet 39, a two-way manual diaphragm valve 10, a pressure sensor 11, and a two-way pneumatic diaphragm valve 12 are sequentially installed. The other end of the pipe is connected to the top of the bubbling bottle 23. The pressure sensor 11 can monitor the gas pressure in the output pipe.

[0038] With the above structure, the carrier gas is sent into the bottom of the bubble bottle 23 through the gas blowing pipe 24, the liquid source evaporates and vaporizes, and the evaporated gas is transported out through the gas outlet pipe 25.

[0039] One end of the replenishment line 28 is connected to the replenishment port 40. Starting from the replenishment port 40, there are sequentially a two-way manual diaphragm valve 13, a two-way pneumatic diaphragm valve 14, and a two-way pneumatic diaphragm valve 15. The other end is connected to the bottom of the bubbling bottle 23 via the bottom insertion tube 41, which is used to replenish chemicals to the bubbling bottle 23 through the replenishment port 40. The replenishment line 28 is used in conjunction with the weighing device 29 for replenishment. During replenishment, the diaphragm valves of the venting line 24 and the venting line 25 are in the closed state.

[0040] One end of the purge inlet pipe 26 is a purge gas inlet 51. From this purge gas inlet 51, a two-way manual diaphragm valve 1, a one-way valve 2, a two-way pneumatic diaphragm valve 3, and a pressure sensor 4 are sequentially installed. The other end of the purge inlet pipe 26 is connected to:

[0041] The pipeline connecting the two-way pneumatic diaphragm valve 19 to the bubbling bottle 23 in the blotting pipeline 24 is connected via the two-way pneumatic diaphragm valve 19.

[0042] The pipeline connecting the two-way pneumatic diaphragm valve 12 and the bubbling bottle 23 to the outlet pipeline 25 is connected through the two-way pneumatic diaphragm valve 18.

[0043] The pipeline connecting the two-way pneumatic diaphragm valve 15 and the bubble bottle 23 to the replenishment pipeline 28 is connected via the two-way pneumatic diaphragm valve 17.

[0044] The two-way pneumatic diaphragm valve 16 is connected to the Venturi assembly of the purge exhaust line 27.

[0045] The purge exhaust line 27 is equipped with a Venturi assembly 21, which connects to the purge gas outlet 42. The purge gas outlet 42 is also connected to the top of the bubbling bottle 23 via a one-way valve. Specifically, the Venturi assembly includes a Venturi tube, a Venturi gas inlet 55, and a pneumatic vent valve and a one-way valve located between the two. The GN2 supplied by the Venturi gas inlet 55 provides airflow for the Venturi effect. The gas in the pipeline is discharged through the Venturi tube and discharged through the purge gas outlet 42, creating a negative pressure.

[0046] By purging the intake pipe 26 and the exhaust pipe 27 as described above, the pipe fittings can be purged with PN2 to ensure that the pipes are clean and free of contamination.

[0047] A control box 43 is installed on the top of the cabinet 22. The PLC in the control box 43 controls the opening and closing of the solenoid valves through the PLC program, and controls the pressure sensor and weighing device connected to it. By opening and closing the solenoid valves, the pneumatic diaphragm valves in the air blowing pipe 24, air outlet pipe 25, purge air inlet pipe 26, purge exhaust pipe 27, and liquid replenishment pipe 28 can be activated to achieve automatic bubbling and automatic liquid replenishment functions.

[0048] The cabinet 22 is also equipped with safety components. These safety components include a flame sensor 44, a high-temperature sensor 45, a leakage sensor, and other safety sensors. When the safety device is triggered, the equipment will stop operating automatically and issue an alarm.

[0049] The flame sensor 44 is installed on the top inner side of the main housing. When a flame is detected inside the cabinet, the equipment stops operating automatically and an alarm is triggered. The high temperature sensor 45 is also installed on the top inner side of the main housing. When a high temperature is detected inside the cabinet, the equipment stops operating automatically and an alarm is triggered. A carbon dioxide fire extinguisher interface 46 is provided on the side of the cabinet 22. When the safety device on the top inner side of the housing detects a flame / high temperature, it will trigger an external CO2 fire extinguisher via the control box 43 to extinguish the fire inside the cabinet.

[0050] In addition, an exhaust system 50 is designed at the top inside the cabinet 22 to draw air from the interior and discharge it through a pipe installed on the exhaust system interface 51. The exhaust system can maintain a slight negative pressure inside the housing 1 to ensure that hazardous gases do not escape. When the safety device at the top inside the housing detects a flame / high temperature, the control box 43 will activate the exhaust system 50 to shut down, preventing sparks from entering the exhaust pipe and causing greater danger.

[0051] The cabinet door of cabinet 22 is equipped with a door sensor 52. If the door opening action is detected during normal operation of the equipment, an alarm is triggered and a safety prompt is issued. This alarm can be remotely monitored.

[0052] The cabinet door of unit 22 is also equipped with an emergency stop button 53 and a tri-color indicator light 54. The emergency stop button 53 is located on the right side of the touchscreen on the front of the equipment. Pressing the emergency stop button 53 will stop the equipment from operating automatically and an alarm will be displayed. The equipment is equipped with a remote shutdown input point. When a remote shutdown signal is sent to the control unit, the equipment will stop supplying liquid and an alarm will be displayed. The tri-color indicator light 54 is located on the left side of the touchscreen on the front of the equipment to visually display the equipment's operating status. When a program alarm occurs, the tri-color indicator light 54 will display the alarm level: a green light indicates normal operation, a yellow light indicates an alarm requiring inspection, and a red light indicates a serious problem requiring immediate shutdown.

[0053] Compared with the prior art, the beneficial effects of this utility model are:

[0054] 1. A weighing device is installed to support the weight of the tank. At the same time, a liquid level sensor is installed inside the bubble bottle. The weighing device is calibrated by the liquid level sensor to improve the accuracy of monitoring the liquid level of TCS solution. It also works with the replenishment pipeline to automatically replenish the bubble bottle.

[0055] 2. A cavity is installed at the bottom of the cabinet to hold 110% of the maximum capacity of the bubbling bottle containing chemicals, preventing chemicals from overflowing the cabinet and causing greater danger in case of leakage.

[0056] 3. Configure purging pipelines for pipeline purging and nitrogen protection. By purging nitrogen and vacuuming in a reciprocating manner, it can not only prevent residual TCS in the pipeline from directly entering the air when the liquid tank is replaced, but also prevent environmental substances from entering the pipeline.

[0057] The present invention has been described in detail above through embodiments. However, those skilled in the art will understand that the above embodiments are only one of the preferred embodiments of the present invention. Due to space limitations, not all embodiments can be listed here. Any implementation that can embody the technical solution of the claims of the present invention is within the protection scope of the present invention.

[0058] It should be noted that the above content is a further detailed description of the present utility model in conjunction with specific embodiments, and it should not be considered that the specific embodiments of the present utility model are limited to this. Under the guidance of the above embodiments, those skilled in the art can make various improvements and modifications based on the above embodiments, and these improvements or modifications fall within the protection scope of the present utility model.

Claims

1. A bubble column, characterized by: The bubble cabinet comprises a bubble bottle, a gas blowing pipeline, a gas outlet pipeline, a purge gas inlet pipeline, a purge gas outlet pipeline, a liquid supplement pipeline and a weighing device; the bubble bottle is arranged on the weighing device and is configured to be weighed in real time by the weighing device; a liquid level sensor for monitoring the change of the liquid level of the chemical is arranged in the bubble bottle; one end of the gas blowing pipeline is a carrier gas inlet, and the other end is connected to the bottom of the bubble bottle through a bottom insertion pipe; one end of the gas outlet pipeline is a chemical gas outlet, and the other end is connected to the top of the bubble bottle; one end of the liquid supplement pipeline is a liquid supplement port, and the other end is connected to the bottom of the bubble bottle through a bottom insertion pipe; the purge gas inlet pipeline is connected to a Venturi component in the gas blowing pipeline, the gas outlet pipeline, the liquid supplement pipeline and the purge gas outlet pipeline respectively, and the other end of the purge gas inlet pipeline is a purge gas inlet; the Venturi component is connected to a purge gas outlet, and the purge gas outlet is further connected to the top of the bubble bottle through a one-way valve.

2. A bubble column according to claim 1, characterized in that: The bubble cabinet further comprises a cabinet body, and the weighing device is directly or indirectly arranged at the bottom of the cabinet body; the carrier gas inlet, the chemical gas outlet, the liquid supplement port, the purge gas inlet and the purge gas outlet are correspondingly provided with interfaces on the outside of the cabinet body.

3. A bubble column according to claim 2, characterised in that: The weighing device is arranged at the bottom of the cabinet body through a support, and the cabinet body below the bottom surface of the weighing device forms a cavity capable of accommodating 110% of the maximum configuration capacity of the chemical in the bubble bottle.

4. A bubble column according to claim 1, characterized in that: The liquid level sensor is a float ball liquid level meter, and the float ball liquid level meter is configured to have at least two liquid level control points.

5. A bubble cell according to any one of claims 1 to 4, wherein: A diaphragm valve, a pressure regulating valve, a pressure sensor and a one-way valve are arranged on the gas blowing pipeline; a diaphragm valve and a pressure sensor are arranged on the gas outlet pipeline; a diaphragm valve is arranged on the liquid supplement pipeline; a diaphragm valve, a pressure sensor and a one-way valve are arranged on the purge gas inlet pipeline.

6. A bubble cell according to claim 5, characterised in that: The bubble bottle comprises an outer shell and an inner shell for containing a chemical substance, a sandwich layer is arranged between the inner shell and the outer shell, a liquid heat exchange substance is arranged in the sandwich layer, and a liquid outlet and a liquid inlet are arranged.

7. A bubble cell according to claim 6, characterised in that: The bubble cabinet further comprises a controller, and the controller controls the pressure sensor, the weighing device, the diaphragm valve and the liquid level sensor.

8. A bubble cell according to claim 7, characterised in that: The Venturi component comprises a Venturi tube, a Venturi gas inlet and a micro leakage valve and a one-way valve arranged therebetween.

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