Device for strengthening heat transfer between pipeline and heater
By combining inner and outer metal tubes with thermally conductive silicone grease, the problems of particulate matter contamination and high cost in pipeline heating systems are solved, achieving efficient heat transfer and equipment reliability, and extending service life.
Patent Information
- Application Number
- CN202520824623.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-28
- Publication Date
- 2026-02-27
- Estimated Expiration
- 2035-04-28
AI Technical Summary
In existing pipeline heating systems, thermal grease generates particulate matter during the heating process, leading to equipment contamination and excessively high local temperatures in the heaters. Furthermore, the cost of fully filling with high thermal conductivity metal is too high.
It adopts a combination structure of inner and outer metal tubes and thermal grease. The inner and outer tubes are made of copper or aluminum foil and have an anti-oxidation layer. The transition plate between the inner and outer layers is corrugated to increase the heat transfer area. It utilizes the ductility of metal and the thermal conductivity of thermal grease to dynamically fill the gaps to enhance heat transfer.
It effectively avoids particulate matter generation, reduces costs, improves heat transfer efficiency, reduces heater dry burning, and extends equipment lifespan.
Smart Images
Figure CN223953509U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a pipeline technology in semiconductor process, especially a pipeline heating technology, in particular to a device for strengthening heat transfer between pipeline and heater. BACKGROUND
[0002] At present, in order to improve the heat transfer efficiency between pipeline and heater, heat-conducting silicone grease is usually added between the two in the pipeline heating system, but the heat-conducting silicone grease will adhere to the surface of the pipeline during the heating process, thereby generating particulate matter, which will pollute the pipeline system or the surrounding environment and affect the normal operation and service life of the equipment. If high-thermal-conductivity metal is filled between the pipeline and the heater, it will cause high cost. Therefore, a device is needed that can strengthen the heat transfer between the pipeline and the heater, avoid the generation of particulate matter during the heating process, and effectively reduce the cost. SUMMARY
[0003] The utility model aims at the problem that the existing heater and pipeline have poor contact, leading to local overheating of the heater, and even causing the heater to burn empty. A device for strengthening heat transfer between pipeline and heater in semiconductor equipment is designed, which can dynamically fill the gap between the pipeline and the heater during the heating process and avoid the generation of particulate matter during the heating process.
[0004] The technical scheme of the utility model is as follows:
[0005] A device for strengthening heat transfer between pipeline and heater, characterized in that it is composed of an inner tube 2, an outer tube 6 and heat-conducting silicone grease 4, the inner tube 2 tightly wraps the pipeline 1 to be heated, the heat-conducting silicone grease 4 is clamped between the inner tube 2 and the outer tube 6, and the heater 7 is sleeved and wrapped on the outer tube 6.
[0006] The inner tube 2 and the outer tube 6 are both metal tubes.
[0007] The inner tube 2 and the outer tube 6 are copper foil or aluminum foil metal tubes.
[0008] The copper foil or aluminum foil surface is provided with an oxidation-resistant layer, and the oxidation-resistant layer is preferably a nickel-plated or zinc-plated layer.
[0009] An inner layer transition sheet 3 for increasing the heat transfer area is additionally installed between the inner tube 2 and the heat-conducting silicone grease 4.
[0010] The inner layer transition sheet 3 is a corrugated sheet.
[0011] The side of the inner tube 2 opposite to the heat-conducting silicone grease 4 is provided with a groove for embedding the corrugated inner layer transition sheet 3.
[0012] The outer layer transition sheet 5 is arranged between the heat-conducting silicone grease 4 and the outer tube 6.
[0013] The outer layer transition sheet 5 is a corrugated sheet.
[0014] The outer tube 6 is provided with a groove on the side opposite to the heat-conducting silicone grease 4, in which the corrugated outer layer transition sheet 5 is embedded.
[0015] The device has the advantages that:
[0016] 1. The outer layer metal is wrapped around the heat-conducting silicone grease, which can effectively prevent the particles generated by the heat-conducting silicone grease during the heating process from adhering to the pipe wall.
[0017] 2. The outer layer metal can resist the heating film in the heater after being heated and expanded, which can effectively reduce the phenomenon of the heating film burning out.
[0018] 3. The entire device is a metal packaging composite structure, and when the heater is heated, the inner layer metal is heated and expanded, which can better fit the pipeline and reduce the gap.
[0019] 4. The inner tube and the outer tube of the device are made of metal materials with good flexibility, such as copper foil or aluminum foil, and the metal outer surface is subjected to oxidation resistance treatment, such as nickel plating or zinc plating, to improve the corrosion resistance and service life of the metal.
[0020] 5. The device ingeniously combines metal and heat-conducting silicone grease, which utilizes the ductility of metal and the good heat conductivity of heat-conducting silicone grease, and effectively reduces the cost.
[0021] 6. The inner surface of the outer layer metal and the outer surface of the inner layer metal have groove structures, which are respectively embedded with the outer layer corrugated sheet and the inner layer corrugated sheet, to increase the contact area of the metal and the heat-conducting silicone grease and strengthen the heat transfer.
[0022] 7. The device combines high-thermal-conductivity metal and heat-conducting silicone grease, which can reduce the cost and strengthen the heat transfer. BRIEF DESCRIPTION OF DRAWINGS
[0023] Figure 1 is a three-dimensional exploded view of the device in use.
[0024] Figure 2 is a three-dimensional structure schematic view of the device in use.
[0025] Figure 3 is a three-dimensional internal structure sectional view of the device in use.
[0026] Figure 4 is a structure schematic view of the device for strengthening the heat transfer between the pipeline and the heater. DETAILED DESCRIPTION
[0027] The utility model will be further described below in combination with the drawings and examples.
[0028] The structure, proportion, size and the like shown in the drawings of the specification are merely used to cooperate with the content disclosed in the specification, to enable those skilled in the art to understand and read, and are not used to limit the limiting conditions that can be implemented by the utility model, so they do not have substantial technical significance, any modification of structure, change of proportional relationship or adjustment of size, without affecting the effects that can be produced by the utility model and the purposes that can be achieved, should still fall within the scope covered by the technical content disclosed by the utility model. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and the like cited in the specification are merely for the convenience of clear understanding of the description, and are not used to limit the implementable range, the change or adjustment of the relative relationship, without substantially changing the technical content, is also regarded as the scope that can be implemented by the utility model.
[0029] As Figure 4 indicated.
[0030] A device for strengthening heat transfer between a pipeline and a heater, which is composed of an inner tube 2 made of metal material (preferably copper foil or aluminum foil as the inner tube material), an inner layer transition sheet 3, heat-conducting silicone grease 4, an outer layer transition sheet 5 and an outer tube 6 made of metal material (preferably copper foil or aluminum foil as the outer tube material), as shown in Figure 1 , 4 , the inner tube 2 is tightly wrapped around the pipeline 1 that needs to be heated, and the inner layer transition sheet 3 for increasing the heat transfer area is installed between the inner tube 2 and the heat-conducting silicone grease 4. The heat-conducting silicone grease 4 and the outer tube 6 are provided with the outer layer transition sheet 5. The heat-conducting silicone grease 4 is clamped between the inner layer transition sheet 3 and the outer layer transition sheet 5, and the inner layer transition sheet 3 and the outer layer transition sheet 5 are preferably designed in a corrugated structure to increase the heat transfer area. The heater 7 (the structure and heating principle are the same as the prior art) is sleeved and wrapped around the outer tube 6, as shown in Figure 2 , 3 . In order to increase the heat conduction area, the side of the inner tube 2 opposite to the heat-conducting silicone grease 4 is preferably provided with a groove for embedding the corrugated inner layer transition sheet 3. The side of the outer tube 6 opposite to the heat-conducting silicone grease 4 is provided with a groove for embedding the corrugated outer layer transition sheet 5. In specific implementation, in order to prolong the service life, the surface of the copper foil or aluminum foil is provided with an anti-oxidation layer, and the anti-oxidation layer is preferably a nickel plating layer or a zinc plating layer.
[0031] The utility model discloses a pipeline used in semiconductor equipment process, be used for reliable and controllable heating to pipeline, it can dynamic filling gap between pipeline and heater in heating process, can also avoid generating particulate matter in heating process. Figure 2 、 3 It can be seen that the utility model is composed of inner layer metal, inner layer corrugated sheet, high-temperature-resistant heat-conducting silicone grease, outer layer corrugated sheet and outer layer metal, and the inner layer metal and the outer layer metal are packaged on the inner layer corrugated sheet and the outer layer corrugated sheet, so that the structure is more compact.
[0032] The device (the utility model discloses a pipeline used in semiconductor equipment process, be used for reliable and controllable heating to pipeline, it can dynamic filling gap between pipeline and heater in heating process, can also avoid generating particulate matter in heating process. Figure 4 ) can be customized according to the size of the heater and the pipeline when in use, is pasted in the middle of the heater and the pipeline, is convenient to dismantle, and is convenient to replace.
[0033] The above examples are only preferred embodiments of the utility model, and it should be pointed out that: for ordinary skilled person in the art, on the premise of not departing from the principle of the utility model, a plurality of improvements and equivalent replacements can be made, and these technical schemes, which are improved and replaced equivalently, fall within the protection scope of the utility model.
[0034] The parts not involved in the utility model are the same as the prior art or can be realized by using the prior art.
Claims
1. An apparatus for enhancing heat transfer between a pipe and a heater, characterized by: It is composed of inner tube (2), outer tube (6) and heat-conducting silicone grease (4), the inner tube (2) is tightly wrapped on the pipeline (1) which needs to be heated, the heat-conducting silicone grease (4) is clamped between the inner tube (2) and the outer tube (6), and the heater (7) is wrapped on the outer tube (6).
2. The apparatus for enhancing heat transfer between a pipe and a heater of claim 1, wherein: The inner tube (2) and the outer tube (6) are metal tubes.
3. The apparatus for enhancing heat transfer between a pipe and a heater of claim 2, wherein: The inner tube (2) and the outer tube (6) are copper foil or aluminum foil metal tubes.
4. The apparatus for enhancing heat transfer between a pipe and a heater of claim 3, wherein: The copper foil or aluminum foil surface is provided with an anti-oxidation layer, and the anti-oxidation layer is a nickel plating or zinc plating layer.
5. The apparatus for enhancing heat transfer between a pipe and a heater of claim 1, wherein: The inner tube (2) and the heat-conducting silicone grease (4) are additionally provided with an inner layer transition sheet (3) for increasing the heat transfer area.
6. The apparatus for enhancing heat transfer between a pipe and a heater of claim 5, wherein: The inner layer transition sheet (3) is a corrugated sheet.
7. The apparatus for enhancing heat transfer between a pipe and a heater of claim 6, wherein: The inner tube (2) is provided with a groove on the side opposite to the heat-conducting silicone grease (4) for embedding the corrugated inner layer transition sheet (3).
8. The apparatus for enhancing heat transfer between a pipe and a heater of claim 1, wherein: The heat-conducting silicone grease (4) and the outer tube (6) are additionally provided with an outer layer transition sheet (5).
9. The apparatus for enhancing heat transfer between a pipe and a heater of claim 8, wherein: The outer layer transition sheet (5) is a corrugated sheet.
10. The apparatus for enhancing heat transfer between a pipe and a heater of claim 8, wherein: The outer tube (6) is provided with a groove on the side opposite to the heat-conducting silicone grease (4) for embedding the corrugated outer layer transition sheet (5).