Auxiliary tool for charging planar target into furnace

Abstract

The utility model provides an auxiliary tool for charging a planar target into a furnace, which comprises a positioning plate which is a tool main body and is provided with at least one planar structure, a plurality of placing holes, an adjusting groove and a supporting plate, the positioning plate is vertically arranged on the planar structure of the positioning plate and is used for placing gaskets, the adjusting groove is arranged on the positioning plate in a penetrating manner and is communicated with the placing holes, and the supporting plate is arranged in the adjusting groove. The positioning plate, the placing holes and the supporting plate are arranged and used for supporting the gaskets placed in the placing holes, the gaskets are prevented from falling off from the placing holes, the gaskets can be rapidly installed in the placing holes through the positioning plate, the placing holes and the supporting plate, preparatory work before machining is saved, the height of the gaskets can be conveniently adjusted, and machining efficiency is improved. Different batches of production and gasket grinding are facilitated, and the mounting and grinding speed is increased.

Description

TECHNICAL FIELD

[0001] The utility model relates to technical target material production field, concretely relates to a plane target loading furnace auxiliary tool. BACKGROUND

[0002] In ITO (indium tin oxide) plating film process, the plane target is one of the target material forms commonly used in sputtering plating film technology, and the structure is flat plate, and the plane target needs to use the gasket to buffer support the plane target material when sintering preparation, reduces the direct friction of the target blank and the supporting plate, avoids the shrinkage obstruction leading to the crack, and can make the target blank can be heated uniformly.

[0003] When the gasket needs to be used, it needs to be evenly laid in a rectangular array on the supporting plate, and in the prior art, the gasket is directly placed on the supporting plate by an automatic material laying device (a laying mechanism with a suction cup is used for laying), which can ensure accurate position and uniform array.

[0004] However, the main problem is that when the laying mechanism is used to place the gasket, the gasket is placed in the area required to be adsorbed by the suction cup, so a lot of time is consumed, and the secondary problem is that the surface of the gasket is worn to different degrees after being used for a certain period of time.

[0005] In the prior art, the gasket will be worn or deformed due to various factors (such as high temperature environment, friction with the target material and the clamp, etc.) after being used for a certain period of time, so the upper surface of the gasket needs to be polished, however, in the prior art, the polishing of the gasket is relatively complex according to the loading condition and large quantity, and a large number of gaskets need to be taken down and placed on a professional equipment (the gaskets are placed on a gear-shaped placement disc in sequence) for polishing, so the polishing rate is reduced, and the time is further wasted. UTILITY MODEL CONTENTS

[0006] Therefore, the utility model provides a plane target loading furnace auxiliary tool, which can quickly install the gasket into the plurality of placement holes through the positioning plate, the plurality of placement holes and the supporting plate, save the preparation work before processing, conveniently adjust the height of the gasket, be beneficial to the production of different batches and the polishing of the gasket, and improve the installation and polishing rate.

[0007] To solve the above technical problems, the utility model provides a plane target loading furnace auxiliary tool, which comprises a positioning plate, the positioning plate is set as a cuboid structure, it is the tool body, the upper and lower surfaces of the positioning plate are two mutually parallel plane structures, a plurality of placement holes are vertically penetrated and arranged on the two plane structures of the positioning plate and are communicated with the placement holes, the plurality of placement holes can be opened on the positioning plate by a punch, so that both sides of the positioning plate can be used when placing the gasket.

[0008] The adjusting groove is transversely arranged on the positioning plate, and the adjusting groove is fixedly connected by two concave plates during manufacturing; the supporting plate is arranged in the adjusting groove and is slidably connected in the adjusting groove, so that the supporting plate of different thicknesses can be quickly replaced, and the height of the gasket is adjusted.

[0009] The opposite inner walls of the adjusting groove are provided with sliding grooves, the sliding grooves are arranged in the direction of the adjusting groove, the sliding grooves are blind groove structures, and the sliding grooves are used for limiting one end of the supporting plate, so that the supporting plate is prevented from sliding out of one side of the adjusting groove during installation of the supporting plate; the sliding grooves are arranged in an isosceles right triangle structure, both ends of the supporting plate are arranged in a structure matched with the sliding grooves, that is, both ends of the supporting plate are arranged in an isosceles right triangle structure, and both ends of the supporting plate in the isosceles right triangle structure are slidably connected in the sliding grooves.

[0010] The positioning plate is provided with a limiting assembly on the vertical surface of one end of the supporting plate, the limiting assembly is used for limiting one end of the supporting plate, and the supporting plate is prevented from falling off during use; the limiting assembly comprises a rotating rod rotatably connected to the vertical surface of one side of the positioning plate through a bearing, and a blocking plate is fixedly connected to the outer side wall of the rotating rod.

[0011] A handle is arranged on the vertical surface of one side of the positioning plate perpendicular to the limiting assembly, the handle is fixedly connected to the vertical surface of one side of the positioning plate, and the handle is made of a metal alloy.

[0012] The beneficial effects of the above technical scheme of the utility model are as follows:

[0013] 1. The gasket installation rate is improved: a plurality of vertical through holes are arranged on the positioning plate, a large number of gaskets can be poured on the upper surface of the positioning plate and then pressed into the through holes, the gaskets can be accurately placed without the aid of other external devices, and the preparation time before plane target processing is greatly saved.

[0014] 2. The height of the gasket is easily adjusted: the supporting plate is detachably and slidably connected in the adjusting groove, the height of the gasket can be adjusted by replacing the supporting plate of different thicknesses, on the one hand, the height of the gasket can be quickly adjusted according to the size of the target material without frequent replacement of the gasket, and on the other hand, when the gasket needs to be polished due to wear, a large number of gaskets can be adjusted to the appropriate height and polished at the same time, so that the upper surface of the gasket is polished to the same height, and the convenience and rate of polishing are improved.

[0015] 3. The applicability of the positioning plate is improved: the positioning plate has through holes on both sides, so that the front and back surfaces are not distinguished during use, and the other side can still be used normally when one side surface is damaged due to high temperature or long-term use, thereby providing a buffer time for re-manufacturing or purchase.

[0016] 4、Conveniently support plate installation and limit: the sliding groove of the adjusting groove relative to the inner wall is an equilateral right triangle blind groove structure, which is matched with the equilateral right triangle structure at both ends of the support plate, and can limit both sides of the support plate when replacing support plates of different thicknesses; the limiting assembly provided on the positioning plate can limit one end of the support plate after installation through the rotating rod and the blocking plate, prevent the support plate from falling off, and can be quickly disassembled and assembled when the support plate needs to be replaced.

[0017] 5、Guarantee the stability of the sintering of the plane target: the transition fit is adopted between the placement hole and the gasket, the friction between the gasket and the inner wall of the placement hole is increased, the plane target is effectively prevented from falling off from the gasket due to vibration during the sintering process, the plurality of placement holes are arranged in a rectangular or diamond grid, and the density of the placement holes near the edge of the positioning plate is greater than that in the middle, so that the edge of the thin target material can be reinforced and supported to prevent edge warping. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 It is a schematic diagram of the overall structure of the utility model; Figure 1 It is a partial enlarged structure schematic diagram;

[0020] Figure 3 It is a schematic diagram of the positioning plate structure of the utility model;

[0021] Figure 4 It is a schematic diagram of the overall structure of the utility model; Figure 3 It is a partial enlarged structure schematic diagram;

[0022] Figure 5 It is a schematic diagram of the limiting assembly structure of the utility model;

[0023] Figure 6 It is a schematic diagram of the local part structure of the utility model.

[0024] In the drawing: 101, positioning plate; 102, placement hole; 103, adjusting groove; 104, support plate; 105, sliding groove;

[0025] 201, rotating rod; 202, blocking plate; 203, handle. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the following will be combined with the drawings of the embodiments of the utility model to further describe the technical scheme of the embodiments of the utility model. Figures 1-6 The technical scheme of the embodiments of the utility model is described clearly and completely. Obviously, the described embodiments are part of the embodiments of the utility model, not all the embodiments. Based on the described embodiments of the utility model, all other embodiments obtained by those skilled in the art belong to the scope of protection of the utility model. A kind of plane target furnace auxiliary tool, as shown in

[0027] 、 Figure 1 、 3 Positioning plate 101 is set to cuboid structure, and setting to cuboid structure can be suitable for commonly used sintering furnace on market to use, positioning plate 101 is tool body, the upper and lower two surfaces of positioning plate 101 are two parallel plane structures, so that the upper surface of gasket can be kept parallel with the upper surface of positioning plate 101 when gasket is supported on positioning plate 101, and the plane target needing processing can be placed stably on multiple gaskets.

[0028] Multiple placing holes 102 are vertically arranged on the two plane structures of positioning plate 101 and are in communication with placing hole 102, multiple placing holes 102 are arranged to enable a large number of gaskets to be limited in placing hole 102, when gasket is placed in placing hole 102, workers can pour a large number of gaskets on the upper surface of positioning plate 101, and press the gaskets into placing hole 102, so that a large number of gaskets can be placed in the required placing hole 102 without the need for other external devices, further improving the installation rate and reducing the preparation time before processing the plane target.

[0029] Placing hole 102 and gasket can be connected by transition fit, the inner side wall of placing hole 102 is in contact with the outer side wall of gasket to improve the friction force, and prevent the plane target from falling off from the gasket due to vibration caused by the release of thermal stress and internal stress during sintering process or the operation of mechanical parts of sintering furnace.

[0030] Multiple placing holes 102 are arranged in a rectangular or diamond grid on positioning plate 101, the spacing can be adjusted according to the size and thickness of the target material, and the density of placing hole 102 near the edge of positioning plate 101 is greater than that of placing hole 102 in the middle of positioning plate 101, which is suitable for strengthening the support of the edge of thin target material (thickness <10 mm) to prevent edge warping.

[0031] Multiple placing holes 102 are arranged on positioning plate 101, so that both sides of positioning plate 101 can be used when placing gasket, so that there is no need to distinguish the front and back surfaces when using, improving the preparation work before installing gasket, and if the side of positioning plate 101 with placing hole 102 is damaged due to high temperature or long time use, the side with placing hole 102 can still be used normally, improving the applicability of positioning plate 101, and providing buffer time for re-production or purchase.

[0032] As shown in Figure 2 、 3, 4, 6: the adjusting groove 103 is transversely arranged on the positioning plate 101, the adjusting groove 103 is fixedly connected with the two concave-shaped plates during manufacturing, the supporting plate 104 is arranged in the adjusting groove 103, the supporting plate 104 is slidingly connected in the adjusting groove 103, and the supporting plate 104 is used for quickly replacing the supporting plates 104 of different thicknesses, so that the height of the gasket is adjusted.

[0033] The opposite inner walls of the adjusting groove 103 are provided with sliding grooves 105, the sliding grooves 105 are arranged along the direction of the adjusting groove 103, when the supporting plate 104 slides into the sliding groove 105, the upper surface of the supporting plate 104 is parallel to the upper and lower ends of the gasket inserted into the placement hole 102, the supporting plate 104 inserted into the sliding groove 105 can support the gasket, the sliding groove 105 is in a blind groove structure, and one end of the supporting plate 104 is limited, so that the supporting plate 104 is prevented from sliding out of one side of the adjusting groove 103 during installation of the supporting plate 104, and further prevented from falling off from one end of the adjusting groove 103 and being damaged on the ground.

[0034] The sliding groove 105 is in an equilateral right triangle structure, both ends of the supporting plate 104 are provided with a structure matched with the sliding groove 105, that is, both ends of the supporting plate 104 are provided with an equilateral right triangle structure, both ends of the supporting plate 104 in the equilateral right triangle structure are slidingly connected in the sliding groove 105, so that both sides of the supporting plate 104 can be limited when the supporting plate 104 of different thicknesses is replaced, (that is, when the thickness of the supporting plate 104 increases, the lengths of both sides of the upper and lower parallel surfaces are shortened, and the included angle of both ends of the supporting plate 104 is always kept unchanged at 90°), therefore, the supporting plate 104 of various thicknesses can slide in the sliding groove 105, and both ends of the supporting plate 104 can be limited in the sliding groove 105.

[0035] The height of the gasket needs to be adjusted according to the size of the target material before the planar target is sintered, the height of the gasket is adjusted by replacing the supporting plates 104 of different thicknesses, so that the height of the gasket can be adjusted quickly without frequently replacing the gasket during production of different batches.

[0036] The gasket will be worn due to high-temperature environment, friction with the target material and the clamp and the like after being used for a period of time, so that the height of the gasket can be adjusted to an appropriate height by replacing the supporting plates 104 of different thicknesses, the upper surface of the gasket is polished, a large number of gaskets can be simultaneously adjusted in height, the upper surfaces of the large number of gaskets are polished to the same height during polishing, the polishing convenience of the large number of gaskets is improved, and the polishing rate is also improved.

[0037] When the two ends of the support plate 104 are matched with the sliding groove 105, the equal right triangle structure can increase the contact area of the two ends of the support plate 104 and the sliding groove 105, thereby improving the friction between the support plate 104 and the sliding groove 105. Further, the equal right triangle structure can further avoid the vibration caused by the release of thermal stress and internal stress during the sintering process, the vibration caused by the operation of the mechanical parts of the sintering furnace, and the like, thereby preventing the planar target from falling off the gasket.

[0038] As shown in Figure 2 , 5 : the limiting assembly is arranged on the vertical surface of one end of the support plate 104, and is used for limiting one end of the support plate 104, thereby preventing the support plate 104 from falling off from one side of the adjusting groove 103 due to various external factors (such as vibration caused by the release of thermal stress and internal stress, vibration caused by the operation of mechanical parts of the sintering furnace, and the like) during use.

[0039] The limiting assembly comprises a rotating rod 201 rotatably connected to the vertical surface of one side of the positioning plate 101 through a bearing. The outer side wall of the rotating rod 201 is fixedly connected with a blocking plate 202. When the blocking plate 202 is not operated, the blocking plate 202 will naturally droop due to its own gravity, thereby limiting the support plate 104 in the adjusting groove 103. When the support plate 104 needs to be pulled out of the adjusting groove 103, the blocking plate 202 is pushed to one side, and the support plate 104 can be pulled out, thereby preventing the support plate 104 from being laterally displaced during work. In addition, when the support plate 104 needs to be replaced, the support plate 104 can be quickly disassembled and assembled.

[0040] As shown in Figure 1 , 3 : the handle 203 is arranged on the vertical surface of one side of the positioning plate 101, thereby facilitating the worker to hold the handle 203 to support the positioning plate 101 when polishing the upper surface of the gasket, preventing the positioning plate 101 from shaking due to friction when polishing the gasket, and further improving the stability during polishing of the gasket. The handle 203 is made of metal alloy material, which can save cost, increase durability, and prolong service life.

[0041] In use, the blocking plate 202 is moved to one side, the support plate 104 with appropriate thickness is selected and the two ends of the support plate 104 are inserted into the two sliding grooves 105, so that the support plate 104 can be stably supported in the sliding grooves 105, the blocking plate 202 is loosened after the installation of the support plate 104, one end of the blocking plate 202 is vertically downward due to gravity, so that the one end of the support plate 104 is limited, a large number of gaskets are poured on the positioning plate 101, then the staff puts the gaskets into the placing holes 102 in sequence and slightly presses, so that the gaskets can be stably fixed in the placing holes 102 and fixed, the gaskets do not need to be placed according to specific positions for many times, thereby the time for laying the gaskets can be saved and the preparation time of the plane target before sintering can be saved.

[0042] When the upper surfaces of the gaskets need to be polished, the support plate 104 with appropriate thickness is selected and the above content is operated again, then the positioning plate 101 and various components thereon are installed on the polishing device, so that the upper surfaces of the gaskets in the plurality of placing holes 102 can be quickly polished, the upper surfaces of the plurality of gaskets can be polished to the same height, and the plurality of gaskets can be simultaneously polished, that is, the polishing time is saved and the stability of the gaskets for supporting the plane target is improved.

[0043] In addition, it should be noted that, in the description of the present application, unless otherwise specified and limited, the terms "installation", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the communication between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0044] The above is the preferred embodiment of the present application, it should be pointed out that, for those skilled in the art, without departing from the principle of the present application, some improvements and refinements can be made, these improvements and refinements should also be regarded as the protection scope of the present application.

Claims

1. A planar target loading furnace aid characterized by: Comprise; The positioning plate (101) is a tool body, which has at least one flat structure; A plurality of placement holes (102) are vertically arranged on the flat structure of the positioning plate (101) and used for placing gaskets; An adjusting groove (103) is arranged through the positioning plate (101) and communicates with the placement hole (102), and a support plate (104) is arranged in the adjusting groove (103) and used for supporting the gasket placed in the placement hole (102) to prevent the gasket from falling out of the placement hole (102).

2. The planar target loading furnace assist tool of claim 1, wherein: The support plate (104) is detachably connected in the adjusting groove (103), which is used for replacing support plates (104) of different thicknesses to adjust the height of the gasket.

3. The planar target loading furnace assist tool of claim 2, wherein: The support plate (104) is slidingly connected in the adjusting groove (103), which is used for quickly replacing support plates (104) of different thicknesses.

4. The planar target loading furnace assist tool of claim 3, wherein: The opposite inner walls of the adjusting groove (103) are provided with sliding grooves (105), the sliding grooves (105) are arranged in an isosceles right triangle structure, both ends of the support plate (104) are provided with structures matched with the sliding grooves (105), and both ends of the support plate (104) are slidingly connected in the sliding grooves (105).

5. The planar target loading furnace assist tool of claim 4, wherein: The sliding groove (105) is arranged in a blind groove structure, which is used for limiting one end of the support plate (104) to prevent the support plate (104) from sliding out of one side of the adjusting groove (103) during installation.

6. The planar target loading furnace assist tool of claim 1, wherein: The positioning plate (101) is inserted into the vertical surface of one end of the support plate (104) and is provided with a limiting assembly, which is used for limiting one end of the support plate (104) to prevent the support plate (104) from falling off during use.

7. The planar target loading furnace assist tool of claim 6, wherein: The limiting assembly comprises a rotating rod (201) rotatingly connected to the vertical surface on one side of the positioning plate (101), and a blocking plate (202) is arranged on the outer side wall of the rotating rod (201).

8. The planar target loading furnace assist tool of claim 1, wherein: The positioning plate (101) has two flat structures arranged in parallel with each other, and a plurality of the placement holes (102) are vertically arranged through the two flat structures, so that both sides of the positioning plate (101) can be used when the gasket is placed.

9. The planar target loading furnace assist tool of claim 8, wherein: The positioning plate (101) is provided with a handle (203) on the vertical surface of the side perpendicular to the limiting assembly.

10. The planar target loading furnace assist tool of claim 9, wherein: The handle (203) is made of metal alloy.

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