Substrate defect detection system
By designing a substrate defect detection system and combining various detection devices with a robotic arm, simultaneous detection of internal and external defects in the substrate is achieved. This solves the problem of single detection in existing devices, improves detection efficiency, and saves manpower.
Patent Information
- Application Number
- CN202520512610.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-21
- Publication Date
- 2026-02-27
- Estimated Expiration
- 2035-03-21
AI Technical Summary
Existing quality inspection equipment can only detect one of the surface defects or internal defects of the substrate, and cannot detect both surface and internal defects at the same time, resulting in low inspection efficiency and labor fatigue for workers.
A substrate defect detection system was designed, including a detection platform, a rotating disk, a positioning mold and a rotating mechanism. It is combined with an industrial camera, a light source, a heating mechanism, an infrared thermal imaging camera and a robotic arm to realize the internal and external detection of the substrate. The robotic arm then sorts the detected substrates into different boxes.
It enables simultaneous detection of defects inside and outside the substrate, improving detection efficiency, saving manpower, and facilitating the classification and recycling of substrates.
Smart Images
Figure CN223955481U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of substrate defect detection, and particularly relates to a substrate defect detection system. BACKGROUND
[0002] Circuit board substrate, semiconductor substrate and the like need to be inspected before being shipped or installed, and the existing inspection devices have single inspection items, such as some inspection devices that can only detect appearance defects and cannot detect internal pores, impurities and other defects of the substrate, and some other inspection devices that can only detect internal defects of the substrate and cannot detect appearance defects of the substrate.
[0003] This results in workers needing to first take the substrate to an inspection device to detect appearance defects of the substrate, and then take the substrate to another inspection device to detect internal defects of the substrate, which affects detection efficiency and also causes workers to be tired. UTILITY MODEL CONTENT
[0004] The utility model discloses a substrate defect detection system that can detect internal and external defects of the substrate and classify and recycle the substrate according to substrate defects to solve the problem of single inspection items of the existing inspection devices.
[0005] To achieve the above object, the utility model adopts the following technical scheme:
[0006] A substrate defect detection system comprises a detection platform, a rotating disc, positioning molds and a rotating mechanism, the rotating disc is rotationally connected to the detection platform and is driven by the rotating mechanism, three positioning molds are evenly arranged around the rotating disc, the detection platform is provided below the three positioning molds with an upper and lower material loading station, an internal detection station and an external detection station; the detection system further comprises an industrial camera, a light source, a heating mechanism, an infrared thermal imaging camera, a mechanical arm and a plurality of boxes, the industrial camera and the light source are arranged above the external detection station, the heating mechanism is arranged on the external detection station and can heat the corresponding positioning mold upward, the infrared thermal imaging camera is arranged above the internal detection station, the plurality of boxes are arranged on one side of the upper and lower material loading station and are used for placing the substrate, and the mechanical arm can grasp the substrate and move the substrate from the box to the positioning mold or from the positioning mold to the box.
[0007] Through the above arrangement, the substrate can be internally and externally detected in sequence, the mechanical arm can classify the detected substrate and place it in different boxes after detection, which facilitates substrate recycling, improves detection efficiency and saves manpower.
[0008] Further, the rotating disc comprises a center circular plate and three support plates, the center circular plate is rotationally connected with the detection platform through a rotating mechanism, the three support plates are fixedly connected on the center circular plate in a circumferential direction and extend in a radial direction, and the positioning mold is arranged on the outer end of the support plate and on the upper side.
[0009] Further, the positioning mold comprises a rectangular frame and a connecting plate fixedly connected on the outer side of the rectangular frame, the rectangular frame is matched with the shape of the to-be-detected substrate, the thickness of the rectangular frame is less than the thickness of the substrate, the connecting plate is provided with a connecting hole, and a bolt penetrates through the connecting hole to lock the connecting plate on the rotating disc.
[0010] Through the above arrangement, the positioning mold is convenient to replace, so as to detect different specifications of substrates.
[0011] Further, the heating mechanism comprises a hot air blower, an air pipe and a broken air plate, the air pipe is arranged between the detection platform and the rotating disc, the air outlet of the air pipe is upward, and the broken air plate is installed on the air outlet, the broken air plate is provided with a plurality of air outlets, and the downward projection of the positioning mold above the outer detection station is located in the broken air plate.
[0012] Through the above arrangement, the heating mechanism uniformly heats the substrate, so as to detect the substrate.
[0013] Further, the box is provided with five boxes, which are a first box for placing the to-be-detected substrate, a second box for placing the qualified substrate, a third box for placing the unqualified substrate detected outside, a fourth box for placing the unqualified substrate detected inside, and a fifth box for placing the unqualified substrate detected inside and outside.
[0014] Further, the mechanical arm comprises a guide rail, a transverse driver, a sliding seat, a vertical driver and a suction cup, the guide rail is installed on the detection platform, the five boxes are arranged in sequence on one side of the guide rail along the length direction of the guide rail, the sliding seat is slidingly connected on the guide rail, the transverse driver can drive the sliding seat to slide along the guide rail, the suction cup is installed on the sliding seat through the vertical driver, the suction cup is arranged above the positioning mold on the loading and unloading station and can adsorb the substrate, and the vertical driver is used to drive the suction cup to move up and down.
[0015] Further, the transverse driver comprises a screw rod and a servo motor, the screw rod is rotationally connected above the guide rail and is threadedly connected with the sliding seat, and the servo motor is fixedly connected on one end of the guide rail and is in transmission connection with the screw rod.
[0016] Through the above arrangement, the servo motor drives the sliding seat to move through the screw rod. BRIEF DESCRIPTION OF DRAWINGS
[0017] Figure 1A schematic view of a detection system of an embodiment.
[0018] Figure 2 A close-up view of A of Figure 1
[0019] Figure 3 A top view of a detection system of an embodiment. DETAILED DESCRIPTION
[0020] The technical scheme of the present application will be further described in detail below with reference to the embodiments and the accompanying drawings.
[0021] As shown in Figures 1 to 3 A substrate defect detection system includes a detection platform 3, a rotating disc 4, positioning molds 5, and a rotating mechanism (not shown in the figure). The rotating disc 4 is rotationally connected to the detection platform 3 and is driven by the rotating mechanism. Three positioning molds 5 are evenly arranged circumferentially along the rotating disc 4. The detection platform 3 is provided with an upper and lower material loading and unloading station 6, an inner detection station 7, and an outer detection station 8 below the three positioning molds 5.
[0022] The detection system further includes an industrial camera 9, a light source 10, a heating mechanism 11, an infrared thermal imaging camera 12, a mechanical arm 13, and a plurality of boxes 14. The industrial camera 9 and the light source 10 are arranged above the outer detection station 8. The heating mechanism 11 is arranged on the outer detection station 8 and can heat the corresponding positioning mold 5 upward. The infrared thermal imaging camera 12 is arranged above the inner detection station 7. The plurality of boxes 14 are arranged on one side of the upper and lower material loading and unloading station 6 and are used to place the substrate. The mechanical arm 13 can grasp the substrate and move it from the box 14 to the positioning mold 5 or from the positioning mold 5 to the box 14.
[0023] Through the above arrangement, the substrate can be subjected to inner detection and outer detection in sequence. After detection, the mechanical arm 13 can categorically place the detected substrate in different boxes 14, which facilitates substrate recycling, improves detection efficiency, and saves manpower.
[0024] The detection platform 3 of the present application is a horizontally arranged steel plate supported by multiple steel bars on the lower side; the rotating disc 4 is horizontally connected above the detection platform 3, and three positioning molds 5 are evenly installed on the edge of the rotating disc 4, one every 120°, one of which is located above the feeding and discharging station 6, another is located above the inner detection station 7, and the last one is located above the outer detection station 8, the three positioning molds 5 are used to position the substrate to be detected, which is placed on the positioning mold 5 and will not shake left and right, so as to be detected; the box 14 is adapted to the shape of the substrate, and the substrate can be horizontally placed in the box 14 and will not shake left and right in the box 14; initially, the substrates to be detected are stacked on top of each other in one of the boxes 14; the mechanical arm 13 grabs the uppermost substrate and places it on the positioning mold 5 above the feeding and discharging station 6, the rotating mechanism specifically adopts a servo system, which can accurately control the rotating angle of the rotating disc 4, the rotating mechanism drives the rotating disc 4 to rotate 120°, and the substrate rotates to the outer detection station 8 with the rotating disc 4, while the other positioning mold 5 rotates to the feeding and discharging station 6, the mechanical arm 13 places the next substrate to be detected on the positioning mold 5, the light source 10 above the outer detection station 8 irradiates the substrate, and the industrial camera 9 photographs the substrate to obtain a first image, the detection system further comprises a computer, the first image is transmitted to the computer, the computer analyzes the first image to determine whether the appearance of the substrate has defects, if there are defects, the appearance of the substrate is marked as unqualified, if there are no defects, the appearance of the substrate is marked as qualified; when the substrate is detected, the heating mechanism 11 heats the substrate; the rotating mechanism continues to drive the rotating disc 4 to rotate 120 degrees, the substrate after the outer detection rotates to the inner detection station 7, while the substrate on the feeding and discharging station 6 rotates to the outer detection station 8 by inertia and continues to be heated and detected; after the substrate moves to the inner detection station 7, the infrared thermal imaging camera 12 photographs the substrate to obtain a second image, after the second image is transmitted to the computer, the computer analyzes the second image to determine whether the substrate has internal defects, if there are internal defects, the substrate is marked as unqualified for internal detection, if there are no internal defects, the substrate is marked as qualified for internal detection; after the rotating mechanism continues to rotate 120 degrees, the substrate after the internal detection moves to the feeding and discharging station 6, the mechanical arm 13 takes the substrate after the internal and outer detection from the positioning mold 5, and according to the detection result, the substrate is classified and placed in different boxes 14, the detected substrate is divided into four categories: the first category is the substrate qualified for both internal and outer detection; the second category is the substrate qualified for internal detection but unqualified for outer detection; the third category is the substrate unqualified for internal detection but qualified for outer detection; the fourth category is the substrate unqualified for both internal and outer detection; the substrates are classified and placed in different boxes 14, which is convenient for repairing the substrate according to the specific defects of the substrate in the later stage; finally, the mechanical arm 13 places a new substrate on the positioning mold 5 on the feeding and discharging station 6 for the next round of detection.
[0025] As an implementation form, the rotating disc 4 comprises a center circular plate 41 and three supporting plates 42, the center circular plate 41 is rotationally connected with the detection platform 3 through a rotating mechanism, the three supporting plates 42 are fixedly connected on the center circular plate 41 in a circumferential direction and extend in a radial direction, and the positioning mold 5 is arranged on the outer end of the supporting plate 42.
[0026] The rotating disc 4 of the application is cut from a steel plate and comprises the center circular plate 41 and the three supporting plates 42, so that the rotating disc 4 is convenient to process; the width of the supporting plate 42 is slightly greater than that of the positioning mold 5, so that the supporting plate 42 can stably support the positioning mold 5; and the supporting plates 42 form gaps therebetween, so that the rotating disc 4 does not block the box 14 and the mechanical arm 13 can conveniently put the substrate into the box 14.
[0027] As an implementation form, the positioning mold 5 comprises a rectangular frame 51 and a connecting plate 52 fixedly connected to the outer side of the rectangular frame 51, the rectangular frame 51 is matched with the shape of the substrate to be detected, the thickness of the rectangular frame 51 is less than that of the substrate, and the connecting plate 52 is provided with connecting holes through which bolts are penetrated to lock the connecting plate 52 on the rotating disc 4.
[0028] Through the above arrangement, the positioning mold 5 can be conveniently replaced to detect substrates of different specifications.
[0029] The detection system of the application is suitable for rectangular substrates, the rectangular frame 51 conveniently limits the rectangular substrate, the connecting plate 52 is fixed on four corners of the rectangular frame 51, the bolts pass through the connecting holes on the four corners of the rectangular frame 51 to fix the rectangular frame 51 on the rotating disc 4, the rectangular frame 51 is tightly attached to the rotating disc 4, and after the substrate is put into the rectangular frame 51, the upper side of the substrate protrudes on the upper side of the rectangular frame 51, so that the substrate is convenient to detect.
[0030] As an implementation form, the heating mechanism 11 comprises a hot air blower (not shown in the figure), an air pipe 111 and a broken air plate 112, the air pipe 111 is arranged between the detection platform 3 and the rotating disc 4, the air outlet of the air pipe 111 is upward and is provided with the broken air plate 112, a plurality of air outlets are arranged on the broken air plate 112, and the downward projection of the positioning mold 5 above the outer detection station 8 is located in the broken air plate 112.
[0031] Through the above arrangement, the heating mechanism 11 uniformly heats the substrate, so that the substrate is conveniently detected.
[0032] The support plate 42 of the application has a small thickness, and the thickness of the support plate 42 is less than 3 mm, which facilitates heat conduction, so that the heating mechanism 11 can well heat the substrate on the upper side of the rotating disc 4; the air pipe 111 is a rectangular pipe, and the broken air plate 112 is a rectangle with an area greater than or equal to the substrate, that is, the air outlet area of the air pipe 111 is greater than or equal to the substrate, covering the entire lower side of the substrate, and the air heater blows hot air upward through the air pipe 111 and the broken air plate 112, and the broken air plate 112 uniformly blows air through the densely distributed air outlets to uniformly heat the substrate. After the substrate is uniformly heated, it is convenient for subsequent infrared thermal imaging camera 12 to take a thermal imaging photograph for detection, thereby improving the detection accuracy.
[0033] As an implementation manner, the five boxes 14 are respectively a first box for placing the substrate to be detected, a second box for placing the qualified substrate, a third box for placing the substrate that fails in the external detection, a fourth box for placing the substrate that fails in the internal detection, and a fifth box for placing the substrate that fails in both the internal detection and the external detection.
[0034] As an implementation manner, the mechanical arm 13 includes a guide rail 131, a transverse driver, a sliding seat 132, a vertical driver 133 and a suction cup 134, the guide rail 131 is installed on the detection platform 3, and the five boxes 14 are arranged in sequence along the length direction of the guide rail 131 on one side of the guide rail 131, the sliding seat 132 is slidably connected to the guide rail 131, the transverse driver can drive the sliding seat 132 to slide along the guide rail 131, the suction cup 134 is installed on the sliding seat 132 through the vertical driver 133, the suction cup 134 is arranged above the positioning mold 5 on the feeding and discharging station 6 and can adsorb the substrate, and the vertical driver 133 is used to drive the suction cup 134 to move up and down.
[0035] The mechanical arm 13 of the application adsorbs the substrate by the suction cup 134 to grasp the substrate, the transverse driver drives the suction cup 134 to move transversely through the sliding seat 132, so that the suction cup 134 moves back and forth between the feeding and discharging station 6 and above the five different boxes 14, and the vertical driver 133 specifically adopts an electric cylinder and can drive the suction cup 134 to move vertically on the sliding seat 132 to achieve the purpose of carrying the substrate.
[0036] As an implementation manner, the transverse driver includes a lead screw 135 and a servo motor 136, the lead screw 135 is rotatably connected above the guide rail 131 and is threadedly connected with the sliding seat 132, and the servo motor 136 is fixedly connected to one end of the guide rail 131 and is in transmission connection with the lead screw 135.
[0037] Through the above arrangement, the servo motor 136 drives the sliding seat 132 to move through the lead screw 135.
[0038] The servo motor 136 of the present application has high precision characteristics, thereby improving the motion precision of the sliding seat 132 and the suction cup 134. When the servo motor 136 drives the screw rod 135 to rotate, the screw rod 135 rotates relative to the sliding seat 132, and the sliding seat 132 moves laterally along the guide rail 131 to drive the suction cup 134 to move laterally.
[0039] It should be understood that, for those skilled in the art, improvements or changes can be made according to the above description, and all these improvements and changes shall belong to the protection scope of the appended claims of the present application.
Claims
1. A substrate defect detection system, comprising: Including detection platform, rotating disc, positioning mold and rotating mechanism, the rotating disc is rotatably connected on the detection platform and is driven by the rotating mechanism, three positioning molds are evenly arranged along the circumference of the rotating disc, the detection platform is provided with an upper and lower material loading and unloading station, an inner detection station and an outer detection station below the three positioning molds respectively; The detection system further comprises an industrial camera, a light source, a heating mechanism, an infrared thermal imaging camera, a mechanical arm and a plurality of boxes, the industrial camera and the light source are arranged above the outer detection station, the heating mechanism is arranged on the outer detection station and can heat the corresponding positioning mold upward, the infrared thermal imaging camera is arranged above the inner detection station, a plurality of boxes are arranged on one side of the upper and lower material loading and unloading station for placing the substrate, the mechanical arm can grasp the substrate and move it from the box to the positioning mold or from the positioning mold to the box.
2. The system of claim 1, wherein The rotating disc comprises a center circular plate and three supporting plates, the center circular plate is rotatably connected with the detection platform through the rotating mechanism, the three supporting plates are fixedly connected on the center circular plate along the circumference and extend along the radial direction, and the positioning mold is arranged on the outer end of the supporting plate.
3. The system of claim 1, wherein The positioning mold comprises a rectangular frame and a connecting plate fixedly connected to the outer side of the rectangular frame, the rectangular frame is matched with the shape of the substrate to be detected, the thickness of the rectangular frame is less than the thickness of the substrate, and the connecting plate is provided with a connecting hole through which a bolt is penetrated to lock the connecting plate on the rotating disc.
4. The system of claim 1, wherein The heating mechanism comprises a hot air blower, an air pipe and a broken air plate, the air pipe is arranged between the detection platform and the rotating disc, the air outlet of the air pipe is upward and is provided with the broken air plate, the broken air plate is provided with a plurality of air outlets, and the downward projection of the positioning mold above the outer detection station is located in the broken air plate.
5. The system of claim 1, wherein The box is provided with five boxes, respectively, a first box for placing the substrate to be detected, a second box for placing the qualified substrate, a third box for placing the outer detection unqualified substrate, a fourth box for placing the inner detection unqualified substrate, and a fifth box for placing the inner detection and outer detection unqualified substrate.
6. The system of claim 1, wherein The mechanical arm comprises a guide rail, a transverse driver, a sliding seat, a vertical driver and a suction cup, the guide rail is installed on the detection platform, the five boxes are arranged on one side of the guide rail along the length direction of the guide rail, the sliding seat is slidably connected to the guide rail, the transverse driver can drive the sliding seat to slide along the guide rail, the suction cup is installed on the sliding seat through the vertical driver, the suction cup is arranged above the positioning mold on the upper and lower material loading and unloading station and can adsorb the substrate, and the vertical driver is used for driving the suction cup to move up and down.
7. The system of claim 6, wherein the system is configured to: The transverse driver comprises a screw rod and a servo motor, the screw rod is rotatably connected above the guide rail and is threadedly connected with the sliding seat, and the servo motor is fixedly connected with the screw rod at one end of the guide rail.