High-precision multi-position multi-angle chip moving mechanism

By combining the X, Y, and Z axis drive mechanism with magnetic springs, the problem of damage caused by chip equipment vibration or power failure is solved, realizing high-precision multi-position and multi-angle chip movement, improving work efficiency and reducing labor costs.

CN223957874UActive Publication Date: 2026-02-27WINGLONG EQUIP (DALIAN) CO LTD
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Patent Information

Application Number
CN202520395616.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-03-07
Publication Date
2026-02-27
Estimated Expiration
2035-03-07

AI Technical Summary

Technical Problem

Existing semiconductor chip mounting equipment is prone to chip damage during vibration or power outages, resulting in low work efficiency, high labor costs, difficulty in machine setup, and inability to accurately guarantee chip mounting precision.

Method used

The device employs an X-axis, Y-axis, and Z-axis drive mechanism combined with a magnetic spring and a flipping head mechanism. The magnetic spring provides constant force to prevent the chip from falling, while the flipping head mechanism enables multi-angle chip adsorption. The X, Y, and Z-axis drive mechanism controls the nozzle mechanism to move to any position.

Benefits of technology

It improves chip mounting efficiency, reduces labor costs, simplifies machine setup, and ensures chip safety and accuracy.

✦ Generated by Eureka AI based on patent content.

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    Figure CN223957874U_ABST
Patent Text Reader

Abstract

The utility model relates to the technical field of semiconductor chips, in particular to a high-precision multi-position multi-angle chip moving mechanism. The device comprises a bottom plate, an X-axis driving mechanism is arranged on the bottom plate, a Y-axis driving mechanism is arranged on the X-axis driving mechanism, the X-axis driving mechanism is in sliding fit with the Y-axis driving mechanism, a connecting plate is fixedly arranged on the Y-axis driving mechanism, a Z-axis driving mechanism is arranged on one side of the connecting plate, and a magnetic spring is arranged on the Z-axis driving mechanism. The Z-axis driving mechanism is slidably connected with an overturning head mechanism, the overturning head mechanism is provided with a suction nozzle mechanism used for adsorbing a chip, and the suction nozzle mechanism is rotatably matched with the overturning head mechanism. According to the technical scheme, the problems of product damage and low working efficiency caused by equipment vibration or power failure are solved.
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Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor chip technical field, specifically to a high accuracy multi -position multi -angle chip moving mechanism. BACKGROUND

[0002] At present, the semiconductor industry, patch machine is also called mounting machine, surface mounting system, in the production, it configures in the glue dispenser or silk screen printing machine after, is through moving mounting head accurately put surface mounting component on PCB welding tray, with the progress of science and technology, the popularization of chip, first have many types of chip, many chip mounting angle, conventional equipment can only stick chip, mounting position needs manual adjustment. If the type is changed frequently, this greatly reduces the work efficiency, improves the labor cost, greatly increases the difficulty of adjusting machine, cannot accurately ensure the precision of each debugging, leads to the output of defective products, and the existing technology Z axis is mostly cam driving mode, the vibration of equipment, sudden power failure can lead to insufficient Z height, or sudden drop leads to product damage. INVENTION CONTENTS

[0003] The utility model discloses a high accuracy multi -position multi -angle chip moving mechanism, which solves the problem of product damage caused by equipment vibration or power failure and low work efficiency.

[0004] To solve the above problems, the following technical scheme is provided:

[0005] The high-precision multi-position multi-angle chip moving mechanism of the utility model includes a bottom plate, an X-axis driving mechanism is arranged on the bottom plate, a Y-axis driving mechanism is arranged on the X-axis driving mechanism, the X-axis driving mechanism and the Y-axis driving mechanism are in sliding cooperation, a connecting plate is fixedly arranged on the Y-axis driving mechanism, a Z-axis driving mechanism is arranged on one side of the connecting plate, a magnetic spring is arranged on the Z-axis driving mechanism, a turnover head mechanism is slidably connected to the Z-axis driving mechanism, a suction nozzle mechanism for adsorbing chips is arranged on the turnover head mechanism, and the suction nozzle mechanism and the turnover head mechanism are in rotary cooperation.

[0006] In the above-mentioned scheme, the magnetic spring is provided, the magnetic spring always provides an upward constant force, prevents the chip from falling and being damaged when the equipment vibrates, suddenly powers off or suddenly drops, and solves the problem of chip damage caused by equipment vibration or power failure. By driving the X-axis driving mechanism, the Y-axis driving mechanism and the Z-axis driving mechanism in turn, the suction nozzle mechanism can be controlled to move to any position, and the chip can be adsorbed by combining the turnover head mechanism, which is beneficial to greatly improve the work efficiency, reduce the labor cost and greatly reduce the difficulty of adjusting the machine.

[0007] The X-axis driving mechanism comprises a first track and a first motor assembly, the first track is fixedly connected with the bottom plate, and the first track is arranged along the X-axis direction, the first motor assembly comprises a first screw rod motor, a first driving rod on the first screw rod motor is arranged in parallel with the first track, a limiting ring, a screw rod nut, a screw rod nut fixing piece, a spring, a limiting block and a motor fixing block are sequentially sleeved on the first driving rod, the screw rod nut and the screw rod nut fixing piece are perpendicular to each other, and the screw rod nut fixing piece is fixedly connected with the Y-axis driving mechanism.

[0008] In the above scheme, by arranging the X-axis driving mechanism, the first screw rod motor is started, the first screw rod motor drives the screw rod nut fixing piece to move along the length direction of the X-axis, thereby driving the Y-axis driving mechanism to move along the X-axis direction, the screw rod nut and the screw rod nut fixing piece are arranged to connect the Y-axis driving mechanism and the first screw rod motor, so that the mechanism can be kept stable during use, and the spring is used to eliminate the gap between the screw rod nut and the screw rod nut fixing piece.

[0009] The Y-axis driving mechanism comprises a Y-direction plate, a second track and a second motor assembly, the Y-direction plate is fixedly connected with the second track, the second track is arranged along the Y-axis direction, and the screw rod nut fixing piece is fixedly connected with the Y-direction plate; a sliding plate is arranged on the second track, the second motor assembly is used for driving the sliding plate to move along the Y-axis direction, the second motor assembly is identical in structure with the first motor assembly; the sliding plate is fixedly connected with a connecting plate, and the second motor assembly comprises a second screw rod motor.

[0010] In the above scheme, by arranging the Y-axis driving mechanism, the second screw rod motor is started, the second screw rod motor drives the sliding plate to move along the Y-axis direction, and by controlling the first screw rod motor and the second screw rod motor, the connecting plate can be driven to move along the X-axis and the Y-axis directions.

[0011] The Z-axis driving mechanism comprises a guide rail and a voice coil motor, the guide rail is located on the outer wall surface of the connecting plate and is arranged along the Z-axis direction, a sliding block matched with the guide rail is arranged on the guide rail, a horizontal plate is fixedly arranged on the voice coil motor, the horizontal plate is in fixed cooperation with the sliding block, the magnetic spring comprises a magnetic spring inner ring and a magnetic spring outer ring, the magnetic spring inner ring is fixedly connected with the connecting plate, the magnetic spring outer ring is sleeved with a first fixing ring, and the first fixing ring is connected with the horizontal plate.

[0012] In the above scheme, by arranging the Z-axis driving mechanism, the voice coil motor is started, the voice coil motor moves along the Z-axis direction, drives the horizontal plate to move vertically, so that the sliding block moves along the vertical direction, and drives the turnover head mechanism to move along the Z-axis direction.

[0013] The front end surface of the connecting plate is provided with two parallel and side-by-side arranged blocking columns, the front end surface of the sliding block is fixedly provided with a limiting block, and the protruding part of the limiting block extends to between the two blocking columns.

[0014] In the above scheme, through the arrangement of the limiting block, the limiting block is always located between the two blocking columns during the movement of the sliding block driven by the Z-axis driving mechanism along the Z-axis, so that the Z-axis driving mechanism will not be separated from the guide rail.

[0015] The overturning head mechanism comprises a rotary motor, the lower end of the output shaft of the rotary motor is fixedly connected with a suction nozzle mechanism, a coupling, a second fixed ring and an angular contact bearing are arranged in sequence on the section of the output shaft between the suction nozzle mechanism and the rotary motor, and a sensor and a sensor baffle are arranged between the coupling and the second fixed ring.

[0016] In the above scheme, through the arrangement of the overturning head mechanism, the output shaft is driven to rotate by the rotary motor, so that the suction nozzle mechanism is driven to rotate to a suitable position.

[0017] The suction nozzle mechanism comprises a connecting rod, the connecting rod is fixedly connected with the output shaft, a gas connection joint is arranged at the end of the connecting rod away from the output shaft, a suction nozzle pipe is communicated with the gas connection joint, a connecting block is arranged on the suction nozzle pipe, and a sensor angle baffle corresponding to the sensor is arranged on the connecting block.

[0018] In the above scheme, through the arrangement of the suction nozzle mechanism, the gas connection joint is connected with a vacuum device for vacuum suction, so that the chip is adsorbed.

[0019] The above scheme has the following advantages:

[0020] The high-precision multi-position and multi-angle chip moving mechanism comprises a bottom plate, an X-axis driving mechanism is arranged on the bottom plate, a Y-axis driving mechanism is arranged on the X-axis driving mechanism, the X-axis driving mechanism and the Y-axis driving mechanism are in sliding cooperation, a connecting plate is fixedly arranged on the Y-axis driving mechanism, a Z-axis driving mechanism is arranged on one side of the connecting plate, a magnetic spring is arranged on the Z-axis driving mechanism, an overturning head mechanism is slidably connected to the Z-axis driving mechanism, a suction nozzle mechanism for adsorbing chips is arranged on the overturning head mechanism, the suction nozzle mechanism and the overturning head mechanism are in rotary cooperation, the magnetic spring always provides an upward constant force, so that the chips are prevented from falling and being damaged due to equipment vibration, sudden power failure or sudden drop, thereby solving the problem of chip damage caused by equipment vibration or power failure; the X-axis driving mechanism, the Y-axis driving mechanism and the Z-axis driving mechanism are driven in sequence, so that the suction nozzle mechanism can be controlled to move to any position, and the chip adsorption is performed in combination with the overturning head mechanism, which is beneficial to greatly improving work efficiency, reducing labor cost and greatly reducing the difficulty of machine adjustment. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to make the content of the utility model more easily be clearly understood, the following according to the specific embodiment of the utility model and combining with the drawings, the utility model is further described in detail, wherein,

[0022] Figure 1 It is a structural schematic view of a high-precision multi-position multi-angle chip moving mechanism;

[0023] Figure 2 It is a structural schematic view of an X-axis driving mechanism in a high-precision multi-position multi-angle chip moving mechanism;

[0024] Figure 3 It is a structural schematic view of a Y-axis driving mechanism in a high-precision multi-position multi-angle chip moving mechanism;

[0025] Figure 4 It is a structural schematic view of a Z-axis driving mechanism in a high-precision multi-position multi-angle chip moving mechanism;

[0026] Figure 5 It is a structural schematic view of a turnover head mechanism and a suction nozzle mechanism in a high-precision multi-position multi-angle chip moving mechanism;

[0027] Figure 6 It is a sectional view of a turnover head mechanism in a high-precision multi-position multi-angle chip moving mechanism;

[0028] The drawing mark explanation: 1, bottom plate;2, X-axis driving mechanism;21, first track;22, first screw motor;23, first driving rod;24, limit ring;25, screw nut;26, screw nut fixing piece;27, spring;28, limit block;29, motor fixing block;3, Y-axis driving mechanism;31, Y direction plate;32, second track;33, second motor assembly;34, sliding plate;4, connecting plate;5, Z-axis driving mechanism;51, guide rail;52, voice coil motor;53, sliding block;54, cross plate;55, magnetic spring;56, first fixed ring;6, turnover head mechanism;62, rotary motor;63, output shaft;64, coupling;65, second fixed ring;66, angular contact bearing;67, sensor;68, sensor baffle;7, suction nozzle mechanism;71, connecting rod;72, gas joint;73, suction nozzle pipe;74, connecting block. DETAILED DESCRIPTION

[0029] The technical scheme in the utility model embodiment will be clearly and completely described below in combination with the drawings of the utility model embodiment, and apparently, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0030] In a specific embodiment 1, as Figure 1 The utility model discloses a high-precision multi-position multi-angle chip moving mechanism includes the bottom plate 1, be provided with X axle drive mechanism 2 on the bottom plate 1, be provided with Y axle drive mechanism 3 on X axle drive mechanism 2, and X axle drive mechanism 2 and Y axle drive mechanism 3 are in slidingly, Y axle drive mechanism 3 is fixed with connecting plate 4, and one side of connecting plate 4 is provided with Z axle drive mechanism 5, and be provided with magnetic force spring 55 on Z axle drive mechanism 5, and magnetic force spring 55 always provides a constant force upward, prevents the equipment vibration, suddenly power failure or suddenly drops, and the chip falls and produces damage, and the overturning head mechanism 6 is slidably connected on Z axle drive mechanism 5, and be provided with suction nozzle mechanism 7 for adsorbing chip on overturning head mechanism 6, and suction nozzle mechanism 7 and overturning head mechanism 6 are in rotationally, in turn drive X axle drive mechanism 2, Y axle drive mechanism 3 and Z axle drive mechanism 5, can control suction nozzle mechanism 7 to move to any position, and combine overturning head mechanism 6, carry out the adsorption of chip, be favorable to greatly improve work efficiency, reduce manual cost, greatly reduce the difficulty of tuning machine.

[0031] As Figure 2 X axle drive mechanism 2 contains first track 21 and first screw motor 22 assembly, and first track 21 is fixedly connected with the bottom plate 1, and first track 21 is arranged along the X axle direction, and the first motor assembly contains first screw motor 22, and the first driving rod 23 on first screw motor 22 is arranged in parallel with first track 21, and first driving rod 23 is successively connected with limiting ring 24, screw nut 25, screw nut fixed part 26, spring 27, limiting block 28 and motor fixed block 29, and screw nut 25 and screw nut fixed part 26 are perpendicular, and screw nut fixed part 26 is fixedly connected with Y axle drive mechanism 3, and first screw motor 22 is opened, and first screw motor 22 drives screw nut fixed part 26 to move along the length direction of X axle, to drive Y axle drive mechanism 3 to move along the X axle direction, and through the setting of screw nut 25 and screw nut fixed part 26, Y axle drive mechanism 3 is connected with first screw motor 22, to ensure that the mechanism remains stable during use, and spring 27 is used to eliminate the gap between screw nut 25 and screw nut fixed part 26.

[0032] As Figure 3As shown in the figure, the Y-axis driving mechanism 3 contains a Y-direction plate 31, a second rail 32 and a second motor assembly 33, the Y-direction plate 31 is fixedly connected with the second rail 32, the second rail 32 is arranged along the Y-axis direction, the screw nut fixing piece 26 is fixedly connected with the Y-direction plate 31; the second rail 32 is provided with a sliding plate 34, the second motor assembly 33 is used for driving the sliding plate 34 to move along the Y-axis direction, the second motor assembly 33 is consistent with the structure of the first motor assembly; the sliding plate 34 is fixedly connected with the connecting plate 4, the second screw motor is opened, the second screw motor drives the sliding plate 34 to move along the Y-axis direction, by controlling the first screw motor 22 and the second screw motor, the connecting plate 4 can be driven to move along the X-axis and Y-axis directions.

[0033] As shown in the figure, Figure 4 The Z-axis driving mechanism 5 contains a guide rail 51 and a voice coil motor 52, the guide rail 51 is located on the outer wall surface of the connecting plate 4, and the guide rail 51 is arranged along the Z-axis direction, the guide rail 51 is provided with a sliding block 53 matched with the guide rail 51, the voice coil motor 52 is fixedly provided with a horizontal plate 54, the horizontal plate 54 is fixedly matched with the sliding block 53, the magnetic force spring 55 contains a magnetic force spring inner ring and a magnetic force spring outer ring, the magnetic force spring inner ring is fixedly connected with the connecting plate 4, the magnetic force spring outer ring is sleeved with a first fixed ring 56, the first fixed ring 56 is connected with the horizontal plate 54, the voice coil motor 52 is opened, the voice coil motor 52 moves along the Z-axis direction, drives the horizontal plate 54 to move vertically, so that the sliding block 53 moves along the vertical direction, drives the turnover head mechanism 6 to move along the Z-axis direction.

[0034] As shown in the figure, Figure 5 The turnover head mechanism 6 contains a rotating motor 62, the output shaft 63 of the rotating motor 62 is fixedly connected with the suction nozzle mechanism 7, the output shaft 63 between the suction nozzle mechanism 7 and the rotating motor 62 is sequentially arranged with a shaft coupling 64, a second fixed ring 65 and an angular contact bearing 66, the shaft coupling 64 is provided with a sensor 67 and a sensor baffle 68 between the second fixed ring 65; the output shaft 63 is driven to rotate by the rotating motor 62, so as to drive the suction nozzle mechanism 7 to rotate to the appropriate position.

[0035] As shown in the figure, Figure 5 The suction nozzle mechanism 7 contains a connecting rod 71, the connecting rod 71 is fixedly connected with the output shaft 63, the end of the connecting rod 71 away from the output shaft 63 is provided with an airway connector 72, the airway connector 72 is communicated with a suction nozzle pipe 73, the suction nozzle pipe 73 is provided with a connecting block 74, the connecting block 74 is provided with a sensor angle baffle corresponding to the sensor 67, the airway connector 72 is connected with a vacuum equipment for vacuum suction, so as to realize the adsorption of the chip.

[0036] In the specific embodiment 2, as shown in the figure, Figure 1The difference between the embodiment and embodiment 1 is that two parallel and side-by-side arranged blocking columns are arranged on the front end surface of the connecting plate 4 in the embodiment, and a limiting block is fixedly arranged on the front end surface of the sliding block 53, the protruding part of the limiting block extends to between the two blocking columns, and the limiting block is always located between the two blocking columns during movement of the sliding block 53 driven by the Z-axis driving mechanism 5, so that the Z-axis driving mechanism 5 will not be separated from the guide rail 51.

[0037] In operation, first, the first screw rod motor 22 is started to drive the screw rod nut fixing piece 26 to move along the X-axis direction, so that the Y-direction plate 31 moves along the X-axis direction, the second screw rod motor is started to drive the sliding plate 34 to move along the Y-axis direction, the connecting plate 4 moves along the X-axis and Y-axis directions because the sliding plate 34 is fixedly connected with the connecting plate 4, the voice coil motor 52 is started to move along the Z-axis direction, the horizontal plate 54 vertically moves to drive the sliding block 53 to move along the vertical direction, the sliding block 53 will not be separated from the track because of the arrangement of the limiting block, the flip head mechanism 6 moves along the X-axis, Y-axis and Z-axis directions because the sliding block 53 is fixedly connected with the flip head mechanism 6, the rotary motor 62 is started to drive the output shaft 63 to rotate, the connecting rod 71 is rotated, and the vacuum equipment connected through the air path connector 72 is started to suck vacuum after the connecting rod 71 is rotated to the appropriate position, so that the chip is adsorbed, and the movement of the chip can be realized by controlling the first screw rod motor 22, the second screw rod motor and the voice coil motor 52.

[0038] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In the description of the present application, unless otherwise specified and limited, it should be noted that the terms "mounting", "connection" and "connection" should be understood in a broad sense, for example, they can be mechanical connection or electrical connection, or the communication between two elements, or direct connection, or indirect connection through an intermediate medium. For ordinary skilled persons in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0039] Obviously, the above embodiments are only examples for the purpose of clear illustration, and are not limited to the embodiments, and for ordinary skilled persons in the art, other different forms of changes or variations can be made on the basis of the above description, and it is not necessary or possible to enumerate all the embodiments, and the obvious changes or variations derived therefrom are still within the protection scope of the present application.

Claims

1. A high-precision multi-position, multi-angle chip moving mechanism, characterized in that, The utility model provides a chip adsorption device, including bottom plate (1), be provided with X axle drive mechanism (2) on bottom plate (1), be provided with Y axle drive mechanism (3) on X axle drive mechanism (2), X axle drive mechanism (2) with Y axle drive mechanism (3) are in the sliding cooperation, Y axle drive mechanism (3) is fixed with connecting plate (4), one side of connecting plate (4) is provided with Z axle drive mechanism (5), be provided with magnetic force spring (55) on Z axle drive mechanism (5), be connected with the turnover head mechanism (6) of sliding on Z axle drive mechanism (5), be provided with suction nozzle mechanism (7) for adsorbing chip on turnover head mechanism (6), suction nozzle mechanism (7) with turnover head mechanism (6) are in the cooperation of rotation.

2. The high-precision multi-position multi-angle chip moving mechanism according to claim 1, characterized in that, The X-axis drive mechanism (2) contains a first track (21) and a first motor assembly, the first track (21) is fixedly connected with the bottom plate (1), and the first track (21) is arranged along the X-axis direction, the first motor assembly contains a first screw rod motor (22), a first drive rod (23) on the first screw rod motor (22) is arranged in parallel with the first track (21), a limiting ring (24), a screw rod nut (25), a screw rod nut fixing part (26), a spring (27), a limiting block (28) and a motor fixing block (29) are sequentially sleeved on the first drive rod (23), the screw rod nut (25) and the screw rod nut fixing part (26) are perpendicular, the screw rod nut fixing part (26) is fixedly connected with the Y-axis drive mechanism (3).

3. The high-precision multi-position multi-angle chip moving mechanism according to claim 2, characterized in that, The Y-axis drive mechanism (3) contains a Y-direction plate block (31), a second track (32) and a second motor assembly (33), the Y-direction plate block (31) is fixedly connected with the second track (32), the second track (32) is arranged along the Y-axis direction, and the screw rod nut fixing part (26) is fixedly connected with the Y-direction plate block (31); the second track (32) is provided with a sliding plate (34), the second motor assembly (33) is used for driving the sliding plate (34) to move along the Y-axis direction, and the second motor assembly (33) is consistent with the structure of the first motor assembly; the sliding plate (34) is fixedly connected with the connecting plate (4).

4. The high-precision multi-position multi-angle chip moving mechanism according to claim 3, characterized in that, The Z-axis drive mechanism (5) contains a guide rail (51) and a voice coil motor (52), the guide rail (51) is located on the outer wall surface of the connecting plate (4), and the guide rail (51) is arranged along the Z-axis direction, the guide rail (51) is provided with a sliding block (53) matched with the guide rail (51), the voice coil motor (52) is fixedly provided with a horizontal plate (54), and the horizontal plate (54) is fixedly matched with the sliding block (53); the magnetic force spring (55) contains a magnetic force spring inner ring and a magnetic force spring outer ring, the magnetic force spring inner ring is fixedly connected with the connecting plate (4), the magnetic force spring outer ring is sleeved with a first fixed ring (56), and the first fixed ring (56) is connected with the horizontal plate (54).

5. The high-precision multi-position multi-angle chip moving mechanism according to claim 4, characterized in that, Two parallel and side-by-side arranged blocking columns are arranged on the front end face of the connecting plate (4), a limiting block is fixedly arranged on the front end face of the sliding block (53), and the protruding part of the limiting block extends to between the two blocking columns.

6. The high-precision multi-position multi-angle chip moving mechanism according to claim 4, characterized in that, The turnover head mechanism (6) contains a rotary motor (62), the lower end of the output shaft (63) of the rotary motor (62) is fixedly connected with the suction nozzle mechanism (7), the segment of the output shaft (63) between the suction nozzle mechanism (7) and the rotary motor (62) is sequentially arranged with a shaft coupling (64), a second fixed ring (65) and an angular contact bearing (66), the shaft coupling (64) and the second fixed ring (65) are provided with a sensor (67) and a sensor baffle (68) therebetween.

7. The high-precision multi-position multi-angle chip moving mechanism according to claim 6, characterized in that, The suction nozzle mechanism (7) contains a connecting rod (71), the connecting rod (71) is fixedly connected with the output shaft (63), one end of the connecting rod (71) away from the output shaft (63) is provided with an air path connector (72), the air path connector (72) is communicated with a suction nozzle pipe (73), the suction nozzle pipe (73) is provided with a connecting block (74), the connecting block (74) is provided with a sensor angle baffle corresponding to the sensor (67).