Automatic cleaning machine for Teflon dragon boat

Abstract

An automatic cleaning machine for a Teflon dragon boat comprises a conveying belt used for horizontally conveying a Teflon dragon boat carrier, and a positioning groove is formed in the upper surface of the carrier and matched with the bottom of the Teflon dragon boat; the first cleaning mechanism and the second cleaning mechanism are arranged on a conveying path of the conveying belt; each of the first cleaning mechanism and the second cleaning mechanism comprises a shielding cover, an execution unit and a spraying unit, wherein the execution unit is used for clamping the teflon boat from the left side and the right side, lifting the teflon boat to a designated position and then rotating the teflon boat front and back, and the spraying unit is used for spraying cleaning liquid to the rotating teflon boat. The shielding cover is provided with an inlet and an outlet for a carrier and a teflon boat on the carrier to pass through, the execution unit and the spraying unit are arranged in the shielding cover, the spraying unit is located above a designated position, the second cleaning mechanism is located on the front side of the first cleaning mechanism, and the shielding cover is further provided with a gas supply port for introducing hot nitrogen. The teflon dragon boat cleaning and drying device can automatically clean and dry a teflon dragon boat, saves labor cost and is high in safety.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor processing technology, and in particular relates to an automatic cleaning machine for Teflon boats. Background Technology

[0002] In the semiconductor industry, Teflon boats are used in chip manufacturing processes. As the operation time increases, Teflon boats can become contaminated with organic matter or dust. Semiconductor manufacturing plants clean Teflon boats regularly. However, during the cleaning process, operators need to put the Teflon boats into the cleaning tank, and after cleaning, they need to take them out and put them in an oven to dry. This process takes up manual time and poses safety hazards. Utility Model Content

[0003] Based on this, and in response to the aforementioned technical problems, an automatic cleaning machine for Teflon boats is provided.

[0004] The technical solution adopted in this utility model is as follows:

[0005] An automatic cleaning machine for Teflon boats, characterized in that it comprises:

[0006] A conveyor belt for horizontally transporting a Teflon boat carrier, the upper surface of which has a positioning groove that is adapted to the bottom of the Teflon boat;

[0007] A first cleaning mechanism and a second cleaning mechanism are provided on the conveyor belt's conveying path. Both the first and second cleaning mechanisms include a shield, an execution unit for clamping the Teflon boat from the left and right sides and raising it to a designated position before rotating the Teflon boat back and forth, and a spraying unit for spraying cleaning fluid onto the rotating Teflon boat. The shield has an inlet and an outlet for the carrier and the Teflon boat on it to pass through. The execution unit and the spraying unit are both located inside the shield. The spraying unit is located above the designated position. The second cleaning mechanism is located in front of the first cleaning mechanism along the conveyor belt's conveying direction. Its shield also has a gas supply port for introducing hot nitrogen.

[0008] This invention can automatically clean and dry Teflon boats, saving labor costs and ensuring high safety. Attached Figure Description

[0009] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments:

[0010] Figure 1 A schematic diagram of the structure of an automatic cleaning machine for Teflon boats provided in this embodiment of the present invention;

[0011] Figure 2 This is a schematic diagram of the internal structure of the first and second cleaning mechanisms according to an embodiment of the present utility model;

[0012] Figure 3 This is a schematic diagram of the structure of the execution unit of the first cleaning mechanism in an embodiment of the present utility model;

[0013] Figure 4 This is a schematic diagram of the canopy-shaped structure of the spray unit in an embodiment of the present invention. Detailed Implementation

[0014] The embodiments of this utility model will be described below with reference to the accompanying drawings. It should be noted that the embodiments described in this specification are not exhaustive and do not represent the only embodiments of this utility model. The following corresponding embodiments are only for clearly illustrating the utility model content of this patent and are not intended to limit its implementation. For those skilled in the art, different variations and modifications can be made based on the described embodiments. Any obvious variations or modifications that fall within the technical concept and utility model content of this utility model are also within the protection scope of this utility model.

[0015] like Figure 1 As shown in the figure, this application provides an automatic cleaning machine for Teflon boats, including a conveyor belt 1100, a first cleaning mechanism 1200, and a second cleaning mechanism 1300.

[0016] The conveyor belt 1100 is a belt conveyor used for horizontal transport of the Teflon boat carrier 1110.

[0017] The carrier 1110 includes a plate 1111, the upper surface of which has three positioning grooves 1111a, which can transport three Teflon boats 2 at the same time. The three positioning grooves 1111a are arranged front and rear, and each positioning groove 1111a is adapted to the bottom of the Teflon boat 2.

[0018] The first cleaning mechanism 1200 and the second cleaning mechanism 1300 are located on the conveying path of the conveyor belt 1100.

[0019] like Figure 1 and Figure 2 As shown, the first cleaning mechanism 1200 includes a shield 1210, an execution unit 1220, and a spray unit 1230.

[0020] The shield 1210 is used to shield the cleaning fluid and prevent it from splashing outward. It is made of PVC and has an inlet and an outlet for the carrier 1110 and the Teflon boat 2 on it to pass through.

[0021] Both the execution unit 1220 and the spraying unit 1230 are located inside the shield 1210.

[0022] The execution unit 1220 is used to clamp the Teflon boat 2 from the left and right sides and lift it to the designated position, and then rotate the Teflon boat 2 back and forth. The number of execution units 1220 is the same as the number of positioning slots 1111a of the carrier 1110, and the three execution units 1220 are arranged in front and behind.

[0023] Specifically, such as Figure 3 As shown, the execution unit 1220 includes two guide plates 1221, two mounting brackets 1222, two clamping cylinders 1223, two motors 1224 and two electric cylinders 1225.

[0024] The two guide plates 1221 and the two mounting brackets 1222 are located on the left and right sides of the conveyor belt 1100, and the mounting brackets 1222 slide vertically with the guide plates 1221 on the same side.

[0025] Two clamping cylinders 1223 are located on the left and right sides of the conveyor belt 1100, and are used to clamp the Teflon boat 2 from the left and right sides. The clamping cylinders 1223 have a horizontal drive shaft 1223a in the left and right direction. The drive shaft 1223a passes through the mounting bracket 1222 on the same side, and has a drive wheel on it.

[0026] Two motors 1224 are used to drive two clamping cylinders 1223 to rotate up and down respectively. The motors 1224 are arranged horizontally in the left and right direction and are fixed on the mounting bracket 1222 on the same side. A transmission wheel is provided on its output shaft. The transmission wheel and the transmission wheel of the transmission shaft 1223a are covered by a transmission belt to achieve indirect connection with the clamping cylinders 1223.

[0027] Two electric cylinders 1225 are used to lift two motors 1224 respectively. The two electric cylinders 1225 are fixed to the shield 1210 and connected to the mounting bracket 1222 on the same side to achieve indirect connection with the motors 1224.

[0028] The spray unit 1230 is used to spray cleaning fluid onto the rotating Teflon boat, and it is located above the specified position.

[0029] Specifically, the spray unit 1230 includes a canopy-like body 1231. The vertical cross-section of the canopy-like body 1231 in the left-right direction is arched, and it has a liquid supply jacket inside. Multiple spray nozzles 1231a are evenly distributed on the inner surface of the canopy-like body 1231. (See also...) Figure 4 .

[0030] The second cleaning mechanism 1300 is located in front of the first cleaning mechanism 1200 along the conveying direction of the conveyor belt 1100, that is... Figure 1 It is located to the right of the first cleaning unit 1200.

[0031] The structure of the second cleaning mechanism 1300 is the same as that of the first cleaning mechanism 1200, and will not be described in detail here. The difference is that the shield of the second cleaning mechanism 1300 also has a gas supply port for introducing hot nitrogen.

[0032] The working process of the automatic cleaning machine for Teflon boats in this embodiment is as follows:

[0033] 1. Place the Teflon boat 2 on the Teflon boat carrier 1110 on the conveyor belt 1100.

[0034] 2. The Teflon boat 2 on the carrier 1110 is first conveyed by the conveyor belt 1100 to the shield 1210 of the first cleaning mechanism 1200.

[0035] 3. The execution unit 1220 clamps the Teflon boat 2 from both sides and raises it to the designated position, then rotates the Teflon boat 2 back and forth at a uniform speed.

[0036] 4. While rotating, the spray unit 1230 sprays out cleaning fluid (acid) to remove organic matter and other dirt from the surface of the Teflon boat 2.

[0037] 5. After the first cleaning mechanism 1200 completes its operation, the conveyor belt 1100 transfers the Teflon boat 2 on the carrier 1110 to the shield of the second cleaning mechanism 1300. Similarly, the Teflon boat 2 is clamped from both sides and raised to the designated position. The Teflon boat 2 is then rotated back and forth at a uniform speed. While rotating, the Teflon boat 2 is first sprayed with cleaning fluid (pure water), and then hot nitrogen is introduced into the shield to remove the moisture from the surface of the Teflon boat 2.

[0038] 6. After the second cleaning mechanism 1300 completes its operation, the conveyor belt 1100 will send the Teflon boat 2 on the carrier 1110 out of the second cleaning mechanism 1300, and finally the operator will retrieve the Teflon boat.

[0039] As can be seen from the above, the automatic cleaning machine for Teflon boats provided in this application embodiment can automatically clean and dry Teflon boats, saving labor costs and ensuring high safety.

[0040] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the scope of this application. Therefore, if such modifications and variations fall within the scope of the claims of this application and their equivalents, this application also intends to include such modifications and variations.

Claims

1. A fluorine-containing hydrocarbon automatic cleaning machine characterized by comprising: The utility model relates to a kind of belt conveyor for horizontal transport of Teflon boat, the upper surface of the carrier has positioning slot, and the positioning slot is adapted to the bottom of the Teflon boat. First cleaning mechanism and second cleaning mechanism are arranged on the conveying path of the conveyor belt, the first cleaning mechanism and the second cleaning mechanism each include a shielding cover, an execution unit for clamping the Teflon boat from left and right sides and rotating the Teflon boat forward and backward after lifting to a specified position, and a spraying unit for spraying cleaning liquid on the rotating Teflon boat, the shielding cover has an inlet and an outlet for the carrier and the Teflon boat thereon to pass through, the execution unit and the spraying unit are arranged in the shielding cover, the spraying unit is above the specified position, and the second cleaning mechanism is located in front of the first cleaning mechanism along the conveying direction of the conveyor belt, and the shielding cover of the second cleaning mechanism also has a gas inlet for hot nitrogen. The conveyor belt is a belt conveyor.

2. The automatic cleaning machine for ferrofluorine dragon boats according to claim 1, characterized in that, The carrier includes a plate body, and the upper surface of the plate body has the positioning slot.

3. The automatic cleaning machine for ferrofluorine dragon boats according to claim 1, characterized in that, The number of the positioning slots is multiple, and multiple positioning slots are arranged front and back, and the number of the execution units of the first cleaning mechanism and the second cleaning mechanism is the same as the number of the positioning slots, and multiple execution units are arranged front and back.

4. The automatic cleaning machine for ferrofluorine dragon boats according to claim 1, characterized in that, The shielding cover is a PVC shielding cover.

5. The automatic cleaning machine for ferrofluorine dragon boats according to claim 1, characterized in that, The execution unit includes two guide plates, two mounting brackets, two clamping cylinders, two motors for driving the two clamping cylinders to rotate up and down, and two electric cylinders for lifting the two motors, the two guide plates are located on the left and right sides of the conveyor belt, the two mounting brackets are located on the left and right sides of the conveyor belt and are in sliding fit with the guide plates on the same side, the two clamping cylinders are located on the left and right sides of the conveyor belt, the clamping cylinders have horizontal transmission shafts in left-right direction, the transmission shafts pass through the mounting brackets on the same side and have transmission wheels thereon, the motors are arranged horizontally in left-right direction and are fixed on the mounting brackets on the same side, the output shafts of the motors are provided with transmission wheels, the transmission wheels are sleeved with transmission belts on the transmission wheels on the same side, and the two electric cylinders are fixed with the shielding cover and are connected with the mounting brackets on the same side.

6. The automatic cleaning machine for ferrofluorine dragon boats according to claim 1, characterized in that, The spraying unit includes a canopy-shaped body with an arched vertical cross section in left-right direction, the canopy-shaped body has a liquid sandwich layer therein, and the inner surface of the canopy-shaped body is uniformly provided with multiple spraying nozzles.

7. The automatic cleaning machine for ferrofluorine dragon boats according to claim 1, characterized in that, ​

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