Single crystal growth crucible and crucible plug

Abstract

The utility model relates to the field of semiconductor manufacturing equipment, and discloses a single crystal growth crucible and a crucible plug, the single crystal growth crucible comprises a column body and a seat body, the seat body comprises an accommodating cavity, and the accommodating cavity is used for accommodating and limiting a seed crystal; the side, away from the opening of the containing cavity, of the base is fixedly connected with the column. The outer diameter of the seat body is smaller than the inner diameter of a seed crystal well and larger than the inner diameter of a crucible small nozzle, and the outer diameter of the column body is smaller than the inner diameter of the crucible small nozzle; the column body penetrates through the seed crystal well from the inner side of the crucible and is inserted into the small nozzle of the crucible, so that the seat body is limited in the seed crystal well; according to the utility model, the seat body of the plug can be limited in a seed crystal well of the crucible and cannot fall off by setting the outer diameters and the appearance structures of the seat body and the column body and changing the mode that the plug is inserted into the crucible, so that the problems of abnormal crystallization rate and reduced single crystal forming rate caused by falling off of the plug are further avoided; and the crystal forming rate of the single crystal is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment manufacturing, and in particular to a single crystal growth crucible and a crucible plug. Background Technology

[0002] In the actual production process of single crystals, the seed crystal in the seed well at the lower end of the crucible needs to be sealed. Therefore, the crucible is equipped with a plug that matches the inner diameter of the seed well. Currently, the plugs used in traditional solutions are mostly inserted into the seed well from the outside of the crucible. When using the vertical gradient solidification method for single crystal growth, the plug at the small opening at the end of the seed well of the crucible is prone to falling off. The falling off of the plug can cause a sudden change in the single crystal crystallization rate, resulting in crystallization abnormalities and crystal defects, thereby reducing the crystallization rate of single crystals and keeping the actual production cost of enterprises high. Utility Model Content

[0003] The technical problem to be solved by this utility model is: how to prevent the plug from falling off. In order to solve the above technical problem, this utility model provides a crucible plug for supporting the seed crystal in the seed crystal well of the crucible, including a pillar and a seat. The seat includes a receiving cavity for receiving and limiting the seed crystal. The side of the seat away from the opening of the receiving cavity is fixedly connected to the pillar.

[0004] The outer diameter of the base is smaller than the inner diameter of the seed crystal well and larger than the inner diameter of the crucible nozzle, and the outer diameter of the column is smaller than the inner diameter of the crucible nozzle; the column passes through the seed crystal well from the inside of the crucible and is inserted into the crucible nozzle so that the base is confined within the seed crystal well.

[0005] Preferably, a first positioning post is provided in the accommodating cavity along the axial direction of the seat body, and the first positioning post is used to restrict the horizontal movement of the seed crystal.

[0006] Preferably, one first positioning stake is provided, and the first positioning stake is coaxially arranged with the base body.

[0007] Preferably, the length of the first positioning stake is 3mm to 8mm.

[0008] Preferably, the base is provided with a through hole that extends radially through the side wall of the base; a second positioning post is provided in the through hole, which is used to pass through the seed crystal and the base to restrict the rotation of the seed crystal within the accommodating cavity.

[0009] Preferably, the radius of the through hole is 1.5 mm to 2 mm, and the distance from the center of the through hole to the bottom surface of the accommodating cavity is 11 mm to 14 mm.

[0010] Preferably, the distance between the end of the column away from the base and the end of the crucible nozzle away from the seed crystal well is 4mm to 7mm.

[0011] This utility model also provides a single crystal growth crucible, including a crucible body, a seed crystal well, and a crucible nozzle from top to bottom, wherein the seed crystal well and the crucible nozzle are respectively used to accommodate a base and a column.

[0012] Compared with the prior art, the single crystal growth crucible and crucible plug provided in this embodiment of the invention have the following advantages:

[0013] In this invention, by setting the outer diameter and shape of the base and the column, and changing the way the plug is inserted into the crucible, the base of the plug can be confined within the seed crystal well of the crucible and will not fall off. This avoids the problems of abnormal crystallization rate and decreased single crystal formation rate caused by plug falling off, and improves the single crystal formation rate. Attached Figure Description

[0014] Figure 1 This is a cross-sectional view of the present invention;

[0015] Figure 2 This is a utility model Figure 1 A partial view at point A in the middle.

[0016] In the diagram: 1. Column; 2. Base; 3. Receptacle; 4. Seed crystal; 5. First positioning post; 6. Second positioning post; 7. Through hole; 8. Crucible body; 9. Seed crystal well; 0. Crucible spout. Detailed Implementation

[0017] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0018] like Figure 1 and Figure 2 As shown, a preferred embodiment of the present invention provides a crucible plug for supporting the seed crystal 4 in the seed crystal well 9 of the crucible. It includes a pillar 1 and a seat 2. The seat 2 includes a receiving cavity 3 for receiving and limiting the seed crystal 4. The side of the seat 2 away from the opening of the receiving cavity 3 is fixedly connected to the pillar 1.

[0019] The outer diameter of the base 2 is smaller than the inner diameter of the seed crystal well 9 and larger than the inner diameter of the crucible nozzle 0. The outer diameter of the pillar 1 is smaller than the inner diameter of the crucible nozzle 0. The pillar 1 passes through the seed crystal well 9 from the inside of the crucible and is inserted into the crucible nozzle 0 so that the base 2 is confined within the seed crystal well 9.

[0020] Specifically, in traditional technical solutions, the crucible plug is inserted into the crucible from the side furthest from the seed well 9 at the crucible nozzle 0. This leads to the plug easily detaching from the crucible during actual use, resulting in abnormal crystallization rate and decreased crystal formation rate. In this application, by changing the structure and installation method of the crucible plug, the plug comprises two parts: a base 2 and a pillar 1. The outer diameter of the base 2 is larger than the inner diameter of the seed well 9. The plug is inserted into the seed well 9 from the inside of the crucible, thus preventing the plug from detaching from the crucible nozzle 0 and improving the single crystal formation rate. Furthermore, in this embodiment, the base 2 also has a receiving cavity 3 for accommodating the seed crystal 4. The receiving cavity 3 can limit the position of the seed crystal 4, initially preventing its movement and ensuring its stability, further improving the single crystal formation rate.

[0021] In some embodiments, a first positioning post 5 is provided in the accommodating cavity 3 along the axial direction of the seat 2. The first positioning post 5 is used to restrict the horizontal movement of the seed crystal 4. Specifically, a first positioning hole is provided at the bottom of the seed crystal 4 corresponding to the first positioning post 5. The cooperation between the first positioning post 5 and the first positioning hole can further restrict the horizontal movement of the seed crystal 4, improve the stability of the seed crystal 4 position, thereby improving the crystallization rate of the single crystal and the yield of the crystallized product.

[0022] In some embodiments, a single first positioning post 5 is used, and the first positioning post 5 is coaxially arranged with the base 2. A single first positioning post 5 can limit the horizontal movement of the seed crystal 4, making the structure simpler and more reliable, and better guiding the growth of the crystal. In other embodiments, multiple first positioning posts 5 can be used, thereby limiting the horizontal movement of the seed crystal 4 as well as limiting the rotation of the seed crystal 4, further improving the stability of the seed crystal 4.

[0023] In some embodiments, the length of the first positioning post 5 is 3mm to 8mm. This data range is used to adapt to the size of the seed crystal 4. If the length of the first positioning post 5 is too long, it is easy to cause the proportion of the first positioning hole inside the seed crystal 4 to be large, resulting in fewer crystals, which is not conducive to the growth of the seed crystal 4. If the length of the first positioning post 5 is too short, it is difficult to limit the seed crystal 4, and the upper end of the seed crystal 4 is prone to shaking, resulting in the instability of the end position of the seed crystal 4. The crystallization rate and yield of single crystal will decrease.

[0024] In some embodiments, the base 2 is provided with a through hole 7, which penetrates the side wall of the base 2 radially. A second positioning post 6 is provided inside the through hole 7. The second positioning post 6 is used to pass through the seed crystal 4 and the base 2 to restrict the rotation of the seed crystal 4 within the receiving cavity 3. Specifically, the seed crystal 4 is provided with a second positioning hole corresponding to the second positioning post 6. The second positioning post 6 can limit the seed crystal 4 and the base 2 together, which can prevent the rotation of the seed crystal 4 and ensure the stability of the seed crystal 4, thereby improving the crystallization rate and yield of single crystals. On the other hand, the second positioning post 6 can also prevent the seed crystal 4 from falling out of the crucible during transportation, ensuring the safety of the seed crystal 4.

[0025] In some embodiments, the radius of the through hole 7 is 1.5mm to 2mm, and the distance from the center of the through hole 7 to the bottom surface of the accommodating cavity 3 is 11mm to 14mm. The diameters of the through hole 7 and the second positioning hole should not be too large to avoid excessive void ratio and insufficient crystal ratio, which could affect the normal crystallization process of the single crystal. The distance limitation between the through hole 7 and the bottom surface of the accommodating cavity 3 is to avoid the intersection of the first positioning hole and the second positioning hole, that is, to avoid interference between the first positioning post 5 and the second positioning post 6, preventing installation.

[0026] In some embodiments, the distance between the end of the pillar 1 away from the base 2 and the end of the crucible nozzle 0 away from the seed well 9 is 4mm to 7mm. The distance between the pillar 1 and the bottom opening of the crucible nozzle 0 is to prevent the pillar 1 from protruding to the outside of the crucible nozzle 0, and to protect the pillar 1 and the entire crucible plug from external impacts that could damage the structure and stability of the crucible plug.

[0027] This invention also provides a single crystal growth crucible, comprising, from top to bottom, a crucible body 8, a seed well 9, and a crucible nozzle 0. The seed well 9 and the crucible nozzle 0 are respectively used to accommodate the base 2 and the pillar 1. This single crystal growth crucible is used in conjunction with the crucible plug described above, thereby preventing the crucible plug from falling off during the crystal growth process.

[0028] In summary, this utility model embodiment provides a single crystal growth crucible and a crucible plug. By inserting the crucible plug into the seed crystal well 9 from the inside of the crucible and limiting the position of the base 2 by making the outer diameter of the base 2 larger than the inner diameter of the crucible nozzle 0, the problem of the crucible plug detaching from the crucible during crystal growth is avoided, ensuring the stability of the crystal growth process. In addition, the position of the seed crystal 4 is limited by the accommodating cavity 3 in conjunction with the first positioning post 5 and the second positioning post 6, further ensuring the stability of the crystal growth process and thus improving the crystallization rate of the single crystal.

[0029] The above are merely preferred embodiments of this utility model. It should be noted that, for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of this utility model, and these improvements and substitutions should also be considered within the protection scope of this utility model.

Claims

1. A crucible plug for supporting a seed crystal within a seed well of a crucible, characterized by, The seat body includes a containing cavity for containing and limiting the seed crystal; and a side of the seat body away from the containing cavity opening is fixedly connected with the column body; The outer diameter of the seat body is smaller than the inner diameter of the seed crystal well and larger than the inner diameter of the crucible spout, and the outer diameter of the column body is smaller than the inner diameter of the crucible spout; the column body is inserted into the crucible spout through the seed crystal well from the inner side of the crucible, so that the seat body is limited in the seed crystal well.

2. The crucible plug of claim 1, wherein A first positioning stake is arranged in the containing cavity along the axial direction of the seat body, and is used for limiting the horizontal movement of the seed crystal.

3. The crucible plug of claim 2, wherein The first positioning stake is arranged coaxially with the seat body.

4. The crucible plug of claim 3, wherein The length of the first positioning stake is 3mm to 8mm.

5. The crucible plug of claim 1, wherein The seat body is provided with a through hole penetrating through the side wall of the seat body along the radial direction of the seat body; a second positioning stake is arranged in the through hole, and is used for penetrating through the seed crystal and the seat body to limit the rotation of the seed crystal in the containing cavity.

6. The crucible plug of claim 5, wherein The radius of the through hole is 1.5mm to 2mm, and the distance from the center of the through hole to the inner bottom surface of the containing cavity is 11mm to 14mm.

7. The crucible plug of claim 1, wherein The distance from the end of the column body away from the seat body to the end of the crucible spout away from the seed crystal well is 4mm to 7mm.

8. A single crystal growth crucible comprising, from top to bottom, a crucible body, a seed well, and a crucible mouth, characterized in that, The seat body and the column body are arranged at the seed crystal well and the crucible spout respectively, and are the seat body and the column body according to any one of claims 1 to 7.

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