Bell furnace with rotatable material bearing table

Abstract

The utility model relates to the technical field of heat treatment equipment, in particular to a bell-type furnace with a rotatable material bearing table, a heating device and a gas circulation structure are arranged in the bell-type furnace, the bell-type furnace comprises a base and a bell-type furnace body, a furnace opening is formed in the bottom of the bell-type furnace body, and a liftable furnace bed is installed on the base. The hearth can be ensured to abut against the furnace opening in a sealed mode after being lifted, and a material bearing table and a driving assembly for driving the material bearing table to rotate in the bell-type furnace are installed on the hearth in a sealed mode. A through hole with the axis in the plumb direction is formed in the middle of the furnace hearth, and the driving assembly is located in the through hole and comprises a slewing bearing installed on the furnace hearth, a gear installed together with the slewing bearing in a matched mode, a rotating shaft driving the gear to rotate and a driving piece driving the rotating shaft to rotate. According to the bell jar furnace with the rotatable material bearing table, the material bearing table can rotate so that materials can be fully and evenly heated, and the contact efficiency of the protective atmosphere and the materials is improved.

Description

Technical Field

[0001] This utility model relates to the field of heat treatment equipment technology, and in particular to a bell-shaped furnace with a rotatable material support platform. Background Technology

[0002] A bell-shaped furnace is an intermittent industrial heating device widely used in processes such as semiconductor silicon annealing, semiconductor silicon carbide oxidation, and semiconductor nitride ceramic sintering. It gets its name from its unique structural design—the top of the furnace body is shaped like a bell. Bell-shaped furnaces are generally designed with a fixed furnace cover and a raised base that seals with the furnace cover to form a closed space; or a fixed base and a raised furnace cover that seals with the base to form a closed space. Bell-shaped furnaces are suitable for sintering materials that are easily damaged when moved.

[0003] Traditional bell-shaped furnaces with lifting bases have rectangular or square furnace hoods viewed from above. After a trolley horizontally delivers material to the bottom of the bell, the material support platform on the trolley rises to heat the material. Due to structural limitations of existing bell-shaped furnaces, uneven heating of the material occurs, leading to unstable product quality. This paper proposes a bell-shaped furnace with a rotatable material support platform to address the problems existing in the prior art. Utility Model Content

[0004] The purpose of this invention is to provide a bell-shaped furnace with a rotatable material support platform to solve the structural limitations of existing bell-shaped furnaces, which result in uneven heating of materials and unstable product quality.

[0005] The technical solution of this utility model is: a bell-shaped furnace with a rotatable material support platform, wherein the bell-shaped furnace is equipped with a heating device and a gas circulation structure. The bell-shaped furnace includes a movable base and a bell-shaped furnace body. The bottom of the bell-shaped furnace body has a furnace opening. A liftable furnace bed is installed on the base. After the furnace bed is raised, it is sealed against the furnace opening. A material support platform and a drive assembly for driving the material support platform to rotate inside the bell-shaped furnace are sealed on the furnace bed.

[0006] Preferably, the center of the furnace bed has a through hole with a vertical axis, and the drive assembly is located in the through hole;

[0007] The drive assembly includes a slewing bearing mounted on the furnace bed, a gear that mates with the slewing bearing, a rotating shaft that drives the gear to rotate, and a drive component that drives the rotating shaft to rotate.

[0008] The lower end of the through hole is sealed by a sealing plate, the rotating shaft passes through the sealing plate, and a first sealing element is provided between the rotating shaft and the sealing plate.

[0009] Preferably, the slewing bearing includes an inner ring with internal teeth and an outer ring fixed on the furnace bed, wherein the inner ring meshes with a gear; and the material support platform is fixed on the inner ring.

[0010] The driving component is a geared motor, and the first sealing component is a lip seal ring.

[0011] Preferably, the cross-section of the bell-shaped furnace body is circular;

[0012] The heating device includes heating rods that are vertically and evenly distributed along the circumference of the bell-shaped furnace body;

[0013] The gas circulation structure includes an inlet pipe that is vertically and evenly distributed along the circumference of the bell-shaped furnace body and an outlet pipe that is vertically arranged on the central axis of the bell-shaped furnace body.

[0014] Preferably, one end of each of the air inlet pipes is fixed to the top of the bell-shaped furnace body and connected to the air supply device. When the bell-shaped furnace body is closed with the furnace bed, the lowest point of the other end of the air inlet pipe is lower than the bottom surface of the material support platform. Each of the air inlet pipes has a plurality of equal-diameter first air holes evenly opened on the pipe wall of the portion of the air inlet pipe that extends into the furnace cavity of the bell-shaped furnace body.

[0015] One end of each heating rod is fixed to the top of the bell-shaped furnace body. When the bell-shaped furnace body is closed with the furnace bed, the lowest point of the other end of the heating rod is lower than the bottom surface of the material support platform.

[0016] The gas outlet pipe has multiple equal-diameter second gas holes evenly distributed on the wall of the portion of the pipe that extends into the furnace cavity of the bell-shaped furnace body.

[0017] Preferably, the plurality of heating rods and the plurality of air inlet pipes are located on the same circumference, and the circumference is concentric with the outer circumference of the bell-shaped furnace body; when the bell-shaped furnace body is closed with the furnace bed, the plurality of heating rods and the plurality of air inlet pipes are all located on the outer circumference of the product.

[0018] Preferably, the lower port of each of the air inlet pipes and each of the air outlet pipes is in a closed state.

[0019] Preferably, the furnace bed has an annular mounting groove at the contact position with the bell-shaped furnace body, and a second sealing ring is installed in the mounting groove.

[0020] Preferably, all of the inlet pipes and outlet pipes are ceramic pipes.

[0021] Preferably, the heating rod is a silicon molybdenum rod.

[0022] Compared with the prior art, the advantages of this utility model are:

[0023] (1) In this utility model, a bell-shaped furnace with a rotatable material support platform is provided. The furnace bed is sealed with a material support platform and a drive assembly for rotating the material support platform within the bell-shaped furnace. The drive assembly includes a slewing bearing mounted on the furnace bed, a gear fitted to the slewing bearing, a rotating shaft driving the gear, and a geared motor driving the rotating shaft. The rotating material support platform continuously rotates the material, causing various parts of the material to periodically approach the heating rod, effectively eliminating the heat radiation dead zone during static heating. This avoids localized overheating or underheating caused by traditional fixed heating. The material rotation action, combined with the circumferential vertical uniform distribution of the bell-shaped furnace body, accelerates the contact efficiency between the protective atmosphere and the material. When the geared motor transmits torque through the rotating shaft, the gear meshing accuracy error is small, ensuring that the material support platform rotates without jamming or shifting, reducing sintering defects caused by material vibration.

[0024] (2) In this utility model, the gas circulation structure includes an inlet pipe that is vertically and evenly distributed along the circumference of the bell-shaped furnace body and an outlet pipe that is vertically arranged on the central axis of the bell-shaped furnace body; each inlet pipe has a plurality of equal-diameter first air holes evenly opened on the pipe wall of the part of the inlet pipe that extends into the furnace cavity of the bell-shaped furnace body; the outlet pipe has a plurality of equal-diameter second air holes evenly opened on the pipe wall of the part of the outlet pipe that extends into the furnace cavity of the bell-shaped furnace body; the coordinated design of the air holes of the outlet pipe and the inlet pipe can enhance the gas circulation in the furnace, avoid local accumulation of waste gas, and thus improve the atmosphere uniformity and process controllability under high temperature environment.

[0025] (3) The cross-section of the bell-shaped furnace body in this utility model is circular. The circular cross-section allows heat to be transferred evenly from the circumference of the furnace chamber, avoiding the problem of heat accumulation or loss at the corners of the square furnace chamber, and significantly improving the uniformity of temperature distribution. The circular structure, combined with the multi-channel air intake design of the air inlet pipe, promotes the circulation of the protective atmosphere in the furnace and reduces local temperature differences. At the same time, the silicon molybdenum rod heating elements can be evenly and vertically arranged along the circumference of the circular furnace chamber, avoiding the heating blind spots in the corner areas of the square furnace chamber and ensuring full furnace chamber heat radiation coverage. Attached Figure Description

[0026] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0027] Figure 1 This is a schematic diagram of the structure of a bell-shaped furnace with a rotatable material support platform according to the present invention;

[0028] Figure 2 This is a schematic diagram of the structure of the base described in this utility model;

[0029] Figure 3 This is a schematic diagram of the arrangement of the air inlet pipe, air outlet pipe, and silicon molybdenum rod inside the bell-shaped furnace from a top-down perspective.

[0030] The components are: 1. bell-shaped furnace body, 2. furnace bed, 3. material support platform, 4. slewing bearing, 5. gear, 6. rotating shaft, 7. geared motor, 8. lip seal, 9. air inlet pipe, 10. air outlet pipe, 11. silicon molybdenum rod, 12. O-ring seal, 13. material, 14. sealing plate. Detailed Implementation

[0031] The present invention will be further described in detail below with reference to specific embodiments:

[0032] In the description of the utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the utility model.

[0033] As shown in Figure 1, a bell-shaped furnace with a rotatable material support platform 3 is provided. The bell-shaped furnace is equipped with heating devices and a gas circulation structure. The bell-shaped furnace includes a movable base and a bell-shaped furnace body 1. The bottom of the bell-shaped furnace body 1 has a furnace opening. A liftable furnace bed 2 is installed on the base (the furnace bed 2 is driven to lift by a hydraulic cylinder, which is not shown in the figure). After the furnace bed 2 is raised, it is sealed against the furnace opening. The material support platform 3 and a drive assembly for driving the material support platform 3 to rotate inside the bell-shaped furnace are sealed on the furnace bed 2.

[0034] The center of the furnace bed 2 has a through hole with a vertical axis, and the drive assembly is located in the through hole. The drive assembly includes a slewing bearing 4 mounted on the furnace bed 2, a gear 5 that mates with the slewing bearing 4, a rotating shaft 6 that drives the gear 5 to rotate, and a drive component that drives the rotating shaft 6 to rotate. In this embodiment, the drive component is a geared motor 7. The lower end of the through hole is sealed by a sealing plate 14. The rotating shaft 6 passes through the sealing plate 14, and a first sealing element, a lip seal ring 8, is provided between the rotating shaft 6 and the sealing plate 14. Since the bell-shaped furnace is an atmosphere furnace, the lip seal ring 8 ensures the sealing of the entire bell-shaped furnace. The slewing bearing 4 includes an inner ring with internal teeth and an outer ring fixed on the furnace bed 2. The inner ring meshes with the gear 5. The material support platform 3 is fixed on the inner ring.

[0035] The gas circulation structure includes an inlet pipe 9 that is vertically and evenly distributed along the circumference of the bell-shaped furnace body 1, and an outlet pipe 10 that is vertically arranged on the central axis of the bell-shaped furnace body 1. One end of each inlet pipe 9 is fixed to the top of the bell-shaped furnace body 1 and connected to the gas supply device. When the bell-shaped furnace body 1 is closed with the furnace bed 2, the lowest point of the other end of the inlet pipe 9 is lower than the bottom surface of the material support platform 3, forcing the protective atmosphere to pass through the material layer and improving gas utilization. Multiple equal-diameter first air holes are evenly opened on the pipe wall of the part of each inlet pipe 9 that extends into the furnace cavity of the bell-shaped furnace body 1. One end of each heating rod is fixed to the top of the bell-shaped furnace body 1. When the bell-shaped furnace body 1 is closed with the furnace bed 2, the lowest point of the other end of the heating rod is lower than the bottom surface of the material support platform 3. The end of the heating rod extends to the bottom of the material support platform 3, which can form a heat transfer path from bottom to top, reduce the temperature difference between the top and bottom of the bell-shaped furnace cavity, and ensure that each layer of material 13 is heated evenly. Multiple equal-diameter second air holes are evenly opened on the pipe wall of the part of the outlet pipe 10 that extends into the furnace cavity of the bell-shaped furnace body 1. The first vent, evenly distributed around the circumference of the inlet pipe 9, can create micro-disturbances in the gas flow, promoting the circulation of hot air within the furnace and reducing local temperature differences. This is especially suitable for uniform heating requirements in high-temperature environments. The second vent, evenly distributed around the circumference of the outlet pipe 10, can simultaneously adjust the exhaust rate in different areas, reducing local temperature fluctuations caused by uneven gas discharge. This makes the thermal field distribution within the furnace more stable, and the temperature difference controlled within a smaller range. The coordinated design of the vents on the outlet pipe 10 and the inlet pipe 9 can enhance gas circulation within the furnace, prevent local accumulation of waste gas, and thus improve the uniformity of the atmosphere and the controllability of the process in high-temperature environments.

[0036] Multiple heating rods and multiple air inlet pipes 9 are located on the same circumference, and this circumference is concentric with the outer circumference of the bell-shaped furnace body 1. The concentric circle layout ensures that the multiple heating rods and multiple air inlet pipes 9 are symmetrically distributed, reducing the radial temperature gradient. Combined with the circumferentially evenly distributed first air holes of the air inlet pipes 9, a surrounding heat flow circulation can be formed, ensuring the heating uniformity of different areas of the furnace cavity. When the bell-shaped furnace body 1 is closed with the furnace bed 2, the multiple heating rods and multiple air inlet pipes 9 are all located on the outer circumference of the product. The lower port of each air inlet pipe 9 and each air outlet pipe 10 is in a closed state. The heating device includes heating rods that are vertically and evenly distributed along the circumference of the bell-shaped furnace body 1; the heating rods are silicon molybdenum rods 11. Since the working temperature of the bell-shaped furnace in this embodiment is 1420℃, silicon molybdenum rods 11 are used.

[0037] The bell-shaped furnace body 1 has a circular cross-section. This circular cross-section allows for uniform heat transfer around the furnace chamber, avoiding heat accumulation or loss at the corners of a square furnace chamber, significantly improving temperature distribution uniformity. The circular structure, combined with the multi-channel air intake design of the inlet pipe 9, promotes the circulation of the protective atmosphere within the furnace, reducing localized temperature differences. Simultaneously, the silicon molybdenum rods 11 heating elements can be evenly and vertically arranged along the circumference of the circular furnace chamber, avoiding heating blind spots in the corners of a square furnace chamber and ensuring full thermal radiation coverage of the entire furnace chamber. The furnace bed 2 has an annular mounting groove at its contact point with the bell-shaped furnace body 1, in which a second sealing ring is installed. In this embodiment, the second sealing ring is an O-ring 12. Multiple air inlet pipes 9 and air outlet pipes 10 are all ceramic tubes to match the operating temperature of the bell-shaped furnace.

[0038] This invention relates to a bell-shaped furnace with a rotatable material support platform. The material 13 to be processed is evenly placed on the material support platform 3 of the furnace bed 2. The base moves horizontally to directly below the bell-shaped furnace body 1. A hydraulic cylinder drives the furnace bed 2 to rise, sealing it against the furnace opening. A reduction motor 7 is activated, driving a rotating shaft 6 to rotate. The rotating shaft 6 then drives a gear 5 to rotate, which in turn drives the inner ring of a slewing bearing 4 meshing with it to rotate. This, in turn, drives the material support platform 3 fixed on the inner ring to rotate, ultimately causing the material 13 to rotate. The heating elements and gas circulation structure are activated, ensuring the material 13 is heated evenly and that the protective atmosphere from the inlet pipe 9 fully contacts the product. The rotating material support platform 3 continuously rotates the material 13, periodically bringing different parts of the material 13 close to the heating rod, effectively eliminating heat radiation dead zones caused by static heating. This avoids localized overheating or underheating caused by traditional fixed heating. The rotation of the material 13 and the vertically uniform distribution of the inlet pipe 9 around the bell-shaped furnace body 1 work synergistically to accelerate the contact efficiency between the protective atmosphere and the material 13.

[0039] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. It is obvious to those skilled in the art that this utility model is not limited to the details of the above exemplary embodiments, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and therefore, all changes falling within the meaning and scope of the equivalents of the claims are intended to be included within this utility model.

Claims

1. A bell-shaped furnace with a rotatable material support platform, wherein the bell-shaped furnace is internally equipped with heating devices and a gas circulation structure, characterized in that: The bell-shaped furnace includes a movable base and a bell-shaped furnace body. The bottom of the bell-shaped furnace body has a furnace opening. A liftable furnace bed is installed on the base. After the furnace bed is raised, it is sealed against the furnace opening. A material support platform and a drive assembly for driving the material support platform to rotate inside the bell-shaped furnace are sealed on the furnace bed.

2. The bell-shaped furnace with a rotatable material support platform according to claim 1, characterized in that: The center of the furnace bed has a through hole with a vertical axis, and the drive assembly is located in the through hole; The drive assembly includes a slewing bearing mounted on the furnace bed, a gear that mates with the slewing bearing, a rotating shaft that drives the gear to rotate, and a drive component that drives the rotating shaft to rotate. The lower end of the through hole is sealed by a sealing plate, the rotating shaft passes through the sealing plate, and a first sealing element is provided between the rotating shaft and the sealing plate.

3. A bell-shaped furnace with a rotatable material support platform according to claim 2, characterized in that: The slewing bearing includes an inner ring with internal teeth and an outer ring fixed on the furnace bed. The inner ring meshes with a gear. The material support platform is fixed on the inner ring. The driving component is a geared motor, and the first sealing component is a lip seal ring.

4. A bell-shaped furnace with a rotatable material support platform according to claim 3, characterized in that: The cross-section of the bell-shaped furnace body is circular; The heating device includes heating rods that are vertically and evenly distributed along the circumference of the bell-shaped furnace body; The gas circulation structure includes an inlet pipe that is vertically and evenly distributed along the circumference of the bell-shaped furnace body and an outlet pipe that is vertically arranged on the central axis of the bell-shaped furnace body.

5. A bell-shaped furnace with a rotatable material support platform according to claim 4, characterized in that: One end of each of the air inlet pipes is fixed to the top of the bell-shaped furnace body and connected to the air supply device. When the bell-shaped furnace body is closed with the furnace bed, the lowest point of the other end of the air inlet pipe is lower than the bottom surface of the material support platform. Multiple equal-diameter first air holes are evenly opened on the pipe wall of the portion of each air inlet pipe that extends into the furnace cavity of the bell-shaped furnace body. One end of each heating rod is fixed to the top of the bell-shaped furnace body. When the bell-shaped furnace body is closed with the furnace bed, the lowest point of the other end of the heating rod is lower than the bottom surface of the material support platform. The gas outlet pipe has multiple equal-diameter second gas holes evenly distributed on the wall of the portion of the pipe that extends into the furnace cavity of the bell-shaped furnace body.

6. A bell-shaped furnace with a rotatable material support platform according to claim 4, characterized in that: Multiple heating rods and multiple air inlet pipes are located on the same circumference, and this circumference is concentric with the outer circumference of the bell-shaped furnace body; when the bell-shaped furnace body is closed with the furnace bed, multiple heating rods and multiple air inlet pipes are all located on the outer circumference of the product.

7. A bell-shaped furnace with a rotatable material support platform according to claim 4, characterized in that: The lower port of each of the air inlet pipes and each of the air outlet pipes is in a closed state.

8. A bell-shaped furnace with a rotatable material support platform according to claim 1, characterized in that: The furnace bed has an annular mounting groove at the contact position with the bell-shaped furnace body, and a second sealing ring is installed in the mounting groove.

9. A bell-shaped furnace with a rotatable material support platform according to claim 4, characterized in that: All of the aforementioned air inlet pipes and air outlet pipes are ceramic pipes.

10. A bell-shaped furnace with a rotatable material support platform according to claim 4, characterized in that: The heating rod is a silicon molybdenum rod.

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