Conductor unit, conductor, power synthesis device and plasma equipment
By using a conductor unit structure design, heat is transferred to the device casing for heat dissipation, solving the problem of increased volume and weight in existing plasma devices, and achieving efficient heat dissipation and cost reduction.
Patent Information
- Application Number
- CN202520513777.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-24
- Publication Date
- 2026-03-03
- Estimated Expiration
- 2035-03-24
AI Technical Summary
Existing heat dissipation methods for plasma equipment increase the size and weight of the equipment and are costly, which may lead to decreased equipment performance or damage.
The design employs a conductor unit structure, comprising a first conductor, a second conductor, and a third conductor. The second and third conductors are coaxially fitted together, and the third conductor is connected to the equipment housing. The heat from the conductor unit is transferred to the housing for heat dissipation, thus avoiding the need for additional heat dissipation devices.
It achieves effective heat dissipation, reduces equipment size and weight, lowers costs, and maintains stable equipment performance.
Smart Images
Figure CN223968018U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of plasma technology, and more specifically, to a conductor unit, a conductor, a power combining device, and a plasma device. Background Technology
[0002] Plasma equipment is a device used to generate plasma, which is typically used in vacuum environments for processes such as surface treatment, material modification, and thin film deposition.
[0003] The power combining device is an important component of plasma equipment. The conductors in the power combining device generate a lot of heat. If it is not dissipated in time, it will affect the performance of the equipment or even burn it out.
[0004] Existing heat dissipation methods all require additional heat dissipation devices, which increases the size and weight of the equipment and the cost of the product. Utility Model Content
[0005] The purpose of this invention is to provide a conductor unit with a simple structure and good heat dissipation.
[0006] Another object of this utility model is to provide a conductor that includes the conductor unit.
[0007] Another objective of this invention is to provide a power combining device, which includes the conductor.
[0008] Another objective of this invention is to provide a plasma device that includes the conductor unit, and / or includes the conductor, and / or includes the power combining device.
[0009] The objective of this utility model is achieved through the following technical solution:
[0010] A conductor unit includes a first conductor, a second conductor, and a third conductor. The second conductor and the third conductor are coaxial with the first conductor and are connected to the first conductor. The second conductor is spaced apart and sleeved on the third conductor.
[0011] Furthermore, a step is provided between the first conductor and the second conductor.
[0012] A conductor includes the conductor unit and a fourth conductor, wherein the first conductor is connected to the fourth conductor, and the conductor unit comprises at least two units arranged in an array.
[0013] A conductor includes the conductor unit and a fifth conductor connected to the second conductor.
[0014] Furthermore, the fifth conductor consists of at least two pieces arranged in an array.
[0015] Furthermore, the fifth conductor is bent away from the first conductor.
[0016] A power combining device includes the conductor unit, wherein the second conductor is a power input terminal, the first conductor is a power output terminal, and the third conductor is grounded.
[0017] A power combining device includes the conductors, the second conductor being a power input terminal, the fourth conductor being a power output terminal, and the third conductor being grounded.
[0018] A power combining device includes the conductors, wherein the fifth conductor is a power input terminal, the first conductor is a power output terminal, the length of the second conductor is 1 / 4 of the wavelength of an electromagnetic wave, and the second conductor is grounded.
[0019] A plasma device includes the conductor unit, and / or includes the conductor, and / or includes the power combining device.
[0020] This utility model has the following advantages:
[0021] The conductor unit structure of this utility model is simple and does not require additional heat dissipation devices. Simply connecting the third conductor 3 to the housing of the device can transfer the heat of the conductor unit to the housing of the device and dissipate it. While achieving the heat dissipation effect, it also reduces the size and weight of the device and lowers the cost of the product. Attached Figure Description
[0022] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.
[0023] Figure 1 This is a schematic diagram of the conductor unit of this utility model;
[0024] Figure 2 This is a cross-sectional schematic diagram of the conductor unit of this utility model;
[0025] Figure 3 This is a cross-sectional schematic diagram of another embodiment of the conductor unit of this utility model;
[0026] Figure 4 This is a schematic diagram of the structure of the conductor in Embodiment 1 of this utility model;
[0027] Figure 5 This is a cross-sectional schematic diagram of the conductor embodiment of this utility model;
[0028] Figure 6 This is a schematic diagram of the structure of the conductor in embodiment two of this utility model;
[0029] Figure 7 This is a cross-sectional schematic diagram of the conductor embodiment two of this utility model;
[0030] In the diagram: 1-first conductor; 2-second conductor; 3-third conductor; 4-fourth conductor; 5-fifth conductor. Detailed Implementation
[0031] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0032] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0033] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0034] In this invention, unless otherwise expressly specified and limited, "above or below" the first feature may include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on" the first feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the first feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0035] A conductor unit includes a first conductor 1, a second conductor 2, and a third conductor 3. The second conductor 2 and the third conductor 3 are both coaxial with the first conductor 1 and connected to the first conductor 1. The second conductor 2 is spaced apart and sleeved on the third conductor 3. Specifically, as shown... Figure 1 , Figure 2 and Figure 3 As shown, a conductor unit includes a first conductor 1, a second conductor 2, and a third conductor 3. The first conductor 1 and the third conductor 3 are both circular rod-shaped structures, while the second conductor 2 is a cylindrical structure. Both the second conductor 2 and the third conductor 3 are coaxial with the first conductor 1. The end faces of the second conductor 2 and the third conductor 3 are connected to the end face of the first conductor 1. The second conductor 2 is sleeved on the third conductor 3, and the second conductor 2 and the third conductor 3 are spaced apart. In some embodiments, the first conductor 1 and / or the third conductor 3 can also be configured as cylindrical structures (see...). Figure 3 Compared with the prior art, the conductor unit structure of this utility model is simple and does not require additional heat dissipation devices. By simply connecting the third conductor 3 to the housing of the device, the heat of the conductor unit can be transferred to the housing of the device and dissipated. While achieving the heat dissipation effect, it also reduces the size and weight of the device and lowers the cost of the product.
[0036] Furthermore, a step is provided between the first conductor 1 and the second conductor 2; specifically, as shown in the example... Figure 1 , Figure 2 and Figure 3 As shown, the size of the first conductor 1 is larger than the size of the second conductor 2, so the step is formed at the connection between the first conductor 1 and the second conductor 2, and the step can match the impedance.
[0037] A conductor includes the conductor unit and a fourth conductor 4, wherein the first conductor 1 is connected to the fourth conductor 4, and the conductor unit comprises at least two units arranged in an array; specifically, as shown... Figure 4 and Figure 5As shown, a conductor includes the conductor unit and a fourth conductor 4. The fourth conductor 4 is a circular rod-shaped structure with a large end and a small end. The free end face of the first conductor 1 is connected to the side wall of the large end of the fourth conductor 4. The center line of the conductor unit is perpendicular to the center line of the fourth conductor 4. There are at least two conductor units, and the conductor units are arranged in a ring array around the center line of the fourth conductor 4.
[0038] A conductor includes the conductor unit and a fifth conductor 5 connected to the second conductor 2; specifically, as shown... Figure 6 and Figure 7 As shown, a conductor includes the conductor unit and a fifth conductor 5. The fifth conductor 5 is a circular rod-shaped structure. One end face of the fifth conductor 5 is connected to the side wall of the second conductor 2. The fifth conductor 5 is disposed close to the first conductor 1.
[0039] Furthermore, the fifth conductor 5 consists of at least two pieces arranged in an array; specifically, as shown... Figure 6 and Figure 7 As shown, there are at least two fifth conductors 5, which are arranged in a ring array around the center line of the conductor unit.
[0040] Furthermore, the fifth conductor 5 is bent away from the first conductor 1, as shown below. Figure 6 and Figure 7 As shown.
[0041] A power combining device, comprising Figure 1 ,or Figure 2 ,or Figure 3 The conductor unit shown has the second conductor 2 as the power input terminal, the first conductor 1 as the power output terminal, and the third conductor 3 as the ground. It should be noted that since the housing of electrical equipment is grounded, the above grounding is the connection to the equipment housing (the same applies below).
[0042] A power combining device, comprising Figure 4 or Figure 5 The conductors shown are: the second conductor 2 is the power input terminal, the fourth conductor 4 is the power output terminal, and the third conductor 3 is grounded.
[0043] A power combining device, comprising Figure 6 or Figure 7 The conductors shown are: the fifth conductor 5 is the power input terminal, the first conductor 1 is the power output terminal, the length of the second conductor 2 is 1 / 4 of the electromagnetic wave wavelength, and the second conductor 2 is grounded.
[0044] A plasma device includes the conductor unit, and / or includes the conductor, and / or includes the power combining device.
[0045] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.
Claims
1. A conductor unit, characterized by: The conductor unit comprises a first conductor (1), a second conductor (2) and a third conductor (3), the second conductor (2) and the third conductor (3) are coaxial with the first conductor (1), the second conductor (2) and the third conductor (3) are connected with the first conductor (1), and the second conductor (2) is spaced and sleeved on the third conductor (3).
2. The conductor unit according to claim 1, characterized in that: A step is arranged between the first conductor (1) and the second conductor (2).
3. A conductor characterized by: The conductor unit comprises a fourth conductor (4), the first conductor (1) is connected with the fourth conductor (4), and the conductor unit is at least two and is arranged in an array.
4. A conductor characterized by: The conductor unit comprises a fifth conductor (5), the fifth conductor (5) is connected with the second conductor (2).
5. The conductor of claim 4, wherein: The fifth conductor (5) is at least two and is arranged in an array.
6. The conductor of claim 5, wherein: The fifth conductor (5) is bent away from the first conductor (1).
7. A power combining apparatus, characterized by: The second conductor (2) is a power input end, the first conductor (1) is a power output end, and the third conductor (3) is grounded.
8. A power combining apparatus, characterized by: The second conductor (2) is a power input end, the fourth conductor (4) is a power output end, and the third conductor (3) is grounded.
9. A power combining apparatus, characterized by: The fifth conductor (5) is a power input end, the first conductor (1) is a power output end, the length of the second conductor (2) is 1 / 4 of the wavelength of an electromagnetic wave, and the second conductor (2) is grounded.
10. A plasma device, characterized by: The conductor unit comprises the conductor unit of any one of claims 1 or 2, and / or the conductor comprises the conductor of any one of claims 3 to 6, and / or the power combining device comprises the power combining device of any one of claims 7 to 9.