Piece feeding and arranging system of vertical furnace

Abstract

The utility model discloses a wafer feeding and arranging system of a vertical furnace, and aims to provide the wafer feeding and arranging system of the vertical furnace, which is matched with a wafer arranging device for use, and is characterized in that the wafer feeding and arranging system comprises a frame body, a lifting device is arranged on the frame body, the wafer arranging device is arranged on the lifting device, and a wafer box fixing device is arranged at the top end of the frame body. The wafer box fixing device comprises a flower basket seat of which the two sides are rotatably connected with the frame body, the flower basket seat is also provided with a wafer box matched with the wafer arranging device, and the bottom of the flower basket seat is also provided with a clamping device for clamping the wafer box; the flower basket seat is of a hollow structure, a plurality of openings aligned with the sheet arranging devices are formed in the flower basket seat, the clamping device comprises a front pushing air cylinder and a rear pushing air cylinder which are located on the two sides of the openings and fixed to the inner wall of the flower basket seat, an outlet of the front pushing air cylinder penetrates through the flower basket seat and is fixedly connected through an arranged front clamping plate, and a jacking block is further arranged on the front clamping plate; the rear pushing air cylinder penetrates through the flower basket base and is fixedly connected through rear clamping plates, and the rear clamping plates are provided with pressing blocks abutting against the wafer box.

Description

Technical Field

[0001] This utility model relates to the field of vertical oven equipment, specifically to a vertical oven feeding system for sliced ​​food. Background Technology

[0002] A vertical oxidation furnace is a heat treatment device used in semiconductor manufacturing, primarily for growing silicon dioxide (SiO2) thin films on silicon wafers. Its core features and working principle are as follows: The basic structure is a vertical design, with the furnace body placed upright and the wafers vertically loaded onto a quartz boat, saving space and making it suitable for cleanroom environments. Its heating zone uses multi-temperature resistance heating to ensure uniform temperature within the furnace (typically 800°C~1200°C), while the gas system includes the introduction of oxygen (dry oxygen) or oxygen + water vapor (wet oxygen), thereby controlling the oxidation reaction. It offers the following advantages during production, including space saving; the vertical structure is suitable for high-density production lines; good overall uniformity; optimized airflow and temperature distribution, suitable for large-scale processing; and automation integration: it can be used in conjunction with robotic arms to achieve fully automated loading and unloading.

[0003] Currently, Chinese patent CN119121198A discloses a vertical chemical vapor deposition furnace, which includes a vertical furnace tube, a liftable furnace door located below the furnace tube, a crystal boat assembly, a turnover table assembly, a lifting table assembly, a storage area, a temporary storage area, a wafer transport box robot assembly, and a wafer fork assembly; the turnover table assembly includes a turnover table and a turnover drive mechanism for driving the turnover table to rotate; the turnover table is provided with at least one storage position for fixing the wafer transport box; the lifting table assembly includes a lifting table located below the turnover table, a roller horizontally located on the lifting table, a rotation drive mechanism for driving the roller to rotate, and a lifting drive mechanism.

[0004] Although this type of vertical chemical vapor deposition furnace can achieve automatic edge leveling and automatic assembly line operation, which improves production efficiency, the wafer cassette positioning accuracy is often poor. During the flipping process, the wafer cassette is prone to slipping, causing wafer loss. In addition, there is no safety interlock in the control, and misoperation can easily cause equipment failure and shutdown, affecting the stability of the equipment. Summary of the Invention

[0005] The purpose of this invention is to provide a vertical furnace wafer feeding system, which has the advantages of ensuring that the wafer cassette is firmly and reliably clamped and positioned throughout the wafer feeding and flipping process in actual operation, preventing wafer cassette displacement and slippage, and avoiding equipment safety failures by adding a safety interlock for control signals.

[0006] The above-mentioned technical objective of this utility model is achieved through the following technical solution:

[0007] A vertical oven feeding slice system includes a frame, a lifting device on the frame, a slice feeder on the lifting device, a wafer box fixing device at the top of the frame, a basket seat on both sides rotatably connected to the frame, a wafer box matching the slice feeder on the basket seat, and a clamping device for holding the wafer box at the bottom of the basket seat.

[0008] The basket holder has a hollow structure and several openings for aligning the wafer arrangers. The clamping device includes a front-pushing cylinder and a rear-pushing cylinder located on both sides of the openings and fixed to the inner wall of the basket holder. The outlet of the front-pushing cylinder passes through the basket holder and is fixedly connected through a front clamping plate. The front clamping plate is also provided with a pressing block. The rear-pushing cylinder passes through the basket holder and is fixedly connected through a rear clamping plate. The rear clamping plate is provided with a pressing block that abuts against the wafer cassette.

[0009] By adopting the above technical solution, the wafer box can be placed on the basket holder and fixed by the clamping device, which facilitates the wafer sorter below to sort the wafers in the wafer box, and then proceed to the next process.

[0010] Further configuration: The lifting device includes a lifting cylinder located on the frame, and a sheet-sorting support frame is provided at the outlet of the lifting cylinder, with the sheet sorter fixed on the sheet-sorting support frame.

[0011] By adopting the above technical solution, the lifting device can effectively help the film handler move up and down, thereby ensuring the normal operation of the entire equipment.

[0012] Further configuration: A flipping device is provided on one side of the frame. The flipping device includes a flipping cylinder located on the inner wall of the frame. The outlet of the flipping cylinder is provided with a fisheye connector. A swing shaft that is rotatably connected to the fisheye connector is also provided on one side of the flower basket seat.

[0013] By adopting the above technical solution, the provided flipping device can effectively flip the entire flower basket base, thereby achieving the purpose of switching the wafer box between horizontal and vertical states, facilitating the entry of the next process.

[0014] Further configuration: A controller is also provided at the bottom of the frame.

[0015] By adopting the above technical solution, the controller can effectively help users control various electrical equipment.

[0016] Further feature: A lifting handle is also provided on one side of the wafer box.

[0017] By adopting the above technical solution, it is convenient for users to manually lift it.

[0018] Further configuration: The flower basket seat is also equipped with heat sinks located above the front push cylinder and the rear push cylinder.

[0019] By adopting the above technical solution, the heat sink can effectively dissipate the heat of the motor, thereby ensuring the operation of the entire equipment.

[0020] In summary, this utility model has the following beneficial effects: by simultaneously clamping the positioning wafer box with clamping cylinders on both the front and rear sides, positioning accuracy and clamping firmness and reliability are ensured. At the same time, it adds detection of whether the wafer box is in place and whether the wafer inside the wafer box is detected, and it is interlocked with the limit signal of the lifting mechanism and the detection signal of the wafer sorting mechanism for safety. If the control system detects the absence of the corresponding signal, it will issue an alarm and will be unable to perform the next action, thus ensuring the safety of the equipment. Attached Figure Description

[0021] The present invention will be further described below with reference to the accompanying drawings.

[0022] Figure 1 This is a schematic diagram of the overall structure of the vertical oven's food preparation system;

[0023] Figure 2 This is a schematic diagram of the internal structure of the vertical oven's food preparation system.

[0024] Figure 3 This is a schematic diagram of the vertical oven's food preparation system from another angle.

[0025] In the diagram: 1. Frame; 2. Lifting device; 21. Lifting cylinder; 22. Wafer support frame; 3. Wafer sorter; 4. Wafer box fixing device; 41. Basket holder; 42. Wafer box; 43. Clamping device; 431. Front push cylinder; 432. Rear push cylinder; 433. Front clamping plate; 434. Tightening block; 435. Rear clamping plate; 436. Pressing block; 5. Opening; 6. Tilting device; 61. Tilting cylinder; 62. Fisheye connector; 63. Swing shaft; 7. Controller; 8. Lifting handle; 9. Heat sink. Detailed Implementation

[0026] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings.

[0027] The technical solution adopted in this utility model is: a vertical oven-feeding sliced ​​food system, such as... Figure 1 , Figure 2 and Figure 3As shown, the device includes a frame 1, a lifting device 2, and a wafer sorter 3. The lifting device 2 includes a lifting cylinder 21 located on the frame 1. A wafer sorting support frame 22 is located at the outlet of the lifting cylinder 21, and the wafer sorter 3 is fixed on the wafer sorting support frame 22. A wafer box fixing device 4 is also provided at the top of the frame 1. The wafer box fixing device 4 includes a basket seat 41 that is rotatably connected to the frame 1 on both sides. A wafer box 42 that matches the wafer sorter 3 is also provided on the basket seat 41. A lifting handle 8 is also provided on one side of the wafer box 42. A clamping device 43 for clamping the wafer box 42 is also provided at the bottom of the basket seat 41. A heat sink 9 is also provided above the front push cylinder 431 and the rear push cylinder 432 of the basket seat 41.

[0028] The basket holder 41 has a hollow structure and is provided with several openings 5 ​​for aligning the wafer arrangers. The clamping device 43 includes a front push cylinder 431 and a rear push cylinder 432 located on both sides of the openings 5 ​​and fixed to the inner wall of the basket holder 41. The outlet of the front push cylinder 431 passes through the basket holder 41 and is fixedly connected through a front clamping plate 433. The front clamping plate 433 is also provided with a pressing block 434. The rear push cylinder 432 passes through the basket holder 41 and is fixedly connected through a rear clamping plate 435. The rear clamping plate 435 is provided with a pressing block 436 that abuts against the wafer cassette 42.

[0029] A flipping device 6 is also provided on one side of the frame 1. The flipping device 6 includes a flipping cylinder 61 located on the inner wall of the frame 1. The outlet of the flipping cylinder 61 is provided with a fisheye connector 62. A swing shaft 63 that is rotatably connected to the fisheye connector 62 is also provided on one side of the flower basket seat 41. A controller 7 is also provided at the bottom of the frame 1.

[0030] Its main working principle is as follows: During use, the user manually places the wafer into the wafer box 42, and then lifts the wafer box 42 onto the workstation of the basket holder 41 by pulling the handle 8. Then, the controller 7 works together to clamp the wafer box 42 by pushing the front cylinder 431 and pushing the rear cylinder 432. Then, the lifting cylinder 21 is activated to lift the wafer sorter to the opening 5 of the basket holder 41, so that the wafer sorter rotates. Since there are clips on the wafer, the rotation of the wafer sorter can rotate the wafer in the wafer box 42 to a uniform angle and position. After the wafer is sorted, it can be lifted by the flipping cylinder, so that the swing shaft 63 and the fisheye connector 62 can be flipped. Since the wafer box may slide out of the wafer box due to inertia during the process of flipping from vertical to horizontal, in actual use, the wafer box needs to be flipped at a certain angle to prevent the wafer box from flipping too much and prevent the wafer from sliding out.

[0031] The above are merely preferred embodiments of this utility model and are not intended to limit the utility model in any way. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of this utility model shall fall within the scope of the utility model's technical solution.

Claims

1. A vertical furnace piece feeding system comprising a frame (1), characterized in that: The frame (1) is further provided with a lifting device (2), the lifting device (2) is provided with a wafer sorting device (3), the frame (1) is further provided with a wafer box fixing device (4), the wafer box fixing device (4) comprises a basket seat (41) rotatably connected with the frame (1) on both sides, the basket seat (41) is further provided with a wafer box (42) matched with the wafer sorting device (3), the basket seat (41) is further provided with a clamping device (43) clamping the wafer box (42) on the bottom; The basket seat (41) is a hollow structure, the basket seat (41) is provided with a plurality of openings (5) aligned with the wafer sorting device (3), the clamping device (43) comprises a front push cylinder (431) and a rear push cylinder (432) located on both sides of the opening (5) and fixed on the inner wall of the basket seat (41), the outlet of the front push cylinder (431) penetrates the basket seat (41) and is fixedly connected through the front clamping plate (433), the front clamping plate (433) is further provided with a top pressing block (434), the rear push cylinder (432) penetrates the basket seat (41) and is fixedly connected through the rear clamping plate (435), the rear clamping plate (435) is further provided with a pressing block (436) abutting against the wafer box (42).

2. A system for feeding a vertical furnace with pieces according to claim 1, characterized in that: The lifting device (2) comprises a lifting cylinder (21) provided on the frame (1), the lifting cylinder (21) is provided with a wafer sorting support frame (22) at the outlet, and the wafer sorting device (3) is fixed on the wafer sorting support frame (22).

3. A system for feeding a vertical furnace with pieces according to claim 2, characterized in that: The frame (1) is further provided with a turnover device (6) on one side, the turnover device (6) comprises a turnover cylinder (61) provided on the inner wall of the frame (1), the turnover cylinder (61) is provided with a fish eye joint (62) at the outlet, and the basket seat (41) is further provided with a swing shaft (63) rotatably connected with the fish eye joint (62) on one side.

4. A system for feeding a vertical furnace with pieces according to claim 3, characterized in that: The frame (1) is further provided with a controller (7) on the bottom.

5. A vertical furnace loading system according to claim 4, wherein: The wafer box (42) is further provided with a lifting handle (8) on one side.

6. A system for feeding a vertical furnace with pieces according to claim 5, characterized in that: The basket seat (41) is further provided with a cooling fin (9) above the front push cylinder (431) and the rear push cylinder (432).

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