Laser-induced drilling equipment

Abstract

The utility model provides laser-induced punching equipment which comprises a feeding bin and a punching bin, a moving manipulator and a turnover mechanism are arranged in the feeding bin, a product moving platform, a laser module, a positioning mechanism and a pressing mechanism are arranged in the punching bin, the pressing mechanism is erected above the product moving platform, and the laser module is arranged on the product moving platform. Comprising a synchronous moving mechanism and a pressing unit arranged on the synchronous moving mechanism, the pressing unit comprises a pressing plate, a connecting plate and a lifting driving mechanism, the pressing plate is arranged at the movable end of the lifting driving mechanism, the lifting driving mechanism is arranged on the connecting plate, and the connecting plate is arranged on the synchronous moving mechanism. The equipment can effectively improve the production quality and efficiency, reduce the reject ratio and save the cost.

Description

Technical Field

[0001] This utility model relates to the field of laser equipment, and in particular to a laser-induced drilling device. Background Technology

[0002] Laser-induced ablation (LAA) is a technique that uses laser energy to locally heat materials, thereby achieving material ablation and drilling. In the electronics industry, LEA is primarily used for the fabrication of through-glass vias (TGVs), mass production of glass wafers in the semiconductor industry, high-precision glass micromachining, and the miniaturization and functional integration of electronic devices. These applications demonstrate the versatility and importance of LEA in the electronics industry. TGV (Through Glass Via) three-dimensional interconnect technology uses laser-induced deformation to create TGV vias. The principle is that pulsed lasers induce continuous deformation zones in the glass. Compared to undeformed glass, the deformed glass has a faster etching rate in hydrofluoric acid. Based on this phenomenon, through-holes / blind holes can be fabricated on the glass.

[0003] With increasing production requirements, in-depth research has been conducted on the laser-induced drilling process for glass. It has been found that there are still problems such as low efficiency, low yield, and high cost in the laser processing. For example, uneven glass substrates or misaligned placement during processing affect drilling accuracy and repeatability, resulting in low yield and poor quality of finished products. The increased defect rate and risk will also lead to a surge in costs. Therefore, it is urgent to deepen technological reforms to solve the above problems and impacts. Utility Model Content

[0004] The purpose of this invention is to provide a laser-induced drilling device that can effectively improve production quality and efficiency, reduce defect rate, and save costs.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a laser-induced drilling device, comprising a feeding bin and a drilling bin, wherein a mobile robotic arm and a flipping mechanism are provided in the feeding bin, and a product moving platform, a laser module, a positioning mechanism and a pressing mechanism are provided in the drilling bin, wherein the pressing mechanism is mounted above the product moving platform and includes a synchronous moving mechanism and a pressing unit disposed on the synchronous moving mechanism, wherein the pressing unit includes a pressure plate, a connecting plate and a lifting drive mechanism, wherein the pressure plate is disposed at the movable end of the lifting drive mechanism, the lifting drive mechanism is disposed on the connecting plate, and the connecting plate is disposed on the synchronous moving mechanism.

[0006] As a further improvement of the present invention, the synchronous moving mechanism is mounted on the machine base via a support frame. The synchronous moving mechanism includes a synchronous belt, a synchronous motor, synchronous pulleys, and a guide rail. The guide rail is located at the top of the support frame, and the synchronous pulleys are located at both ends of the side of the support frame. The synchronous belt is fitted onto the synchronous pulleys at both ends. One end of the synchronous pulley is connected to the synchronous motor. The connecting plate is connected to the synchronous belt via a clamp. The bottom end of the connecting plate is provided with a slider, which is slidably connected to the guide rail.

[0007] As a further improvement of the present invention, the flipping mechanism includes two side plates, a clamping mechanism, and a rotation drive mechanism. The rotation drive mechanism is located on the outer side of the side plates, and the clamping mechanism is located on the inner side of the side plates. The clamping mechanism includes an upper clamping plate, a lower clamping plate, and a drive unit. The lower clamping plate is movably located below the upper clamping plate through the drive unit. The drive unit drives the lower clamping plate to move closer to or away from the upper clamping plate. The two ends of the upper clamping plate are connected to the rotation drive mechanism through a rotating shaft, and are driven by the rotation drive mechanism to rotate and flip.

[0008] As a further improvement of the present invention, the laser module is mounted on the machine platform via a frame. The laser module includes a laser, a laser galvanometer, and a laser cutting head. The laser is fixed on the frame, and the laser galvanometer and the laser cutting head are movably mounted on the frame via a lifting module. The positioning mechanism is a vision positioning unit, which is mounted on the lifting module and moves up and down synchronously with the laser cutting head.

[0009] As a further improvement of the present invention, the product moving platform includes a product adsorption platform, an X-axis linear motion module and a Y-axis linear motion module. The Y-axis linear motion module is disposed on the machine base, the X-axis linear motion module is disposed on the Y-axis linear motion module, and the product adsorption platform is disposed on the X-axis linear motion module via a mounting base.

[0010] As a further improvement of this utility model, the product adsorption platform includes a carrying frame, a receiving and lifting mechanism, and an adsorption platform. The receiving and lifting mechanism is movably disposed inside the carrying frame, and the adsorption platform is fixed to the top of the carrying frame. The receiving and lifting mechanism includes a lifting seat, a lifting motor, and multiple positioning columns. Through holes are opened on the adsorption platform corresponding to the positions of the positioning columns. The multiple positioning columns are disposed on the top of the lifting seat, and the lifting seat is disposed on the lifting motor. The lifting motor drives the lifting movement, causing the positioning columns to rise and fall within the through holes of the adsorption platform.

[0011] As a further improvement of this utility model, the positioning column is a hollow column, and a pad is provided on the top of the positioning column, and an adsorption hole is opened in the center of the pad.

[0012] As a further improvement of the present invention, the mobile robotic arm includes a first moving arm, a second moving arm, a translation mechanism, and a lifting mechanism. The translation mechanism is located at the bottom of the frame of the loading bin, and the lifting mechanism is located on the translation mechanism. The two moving arms are located on the lifting mechanism. The first moving arm includes a rotating arm and a first supporting arm, and the second moving arm includes a rotating arm and a second supporting arm. The first supporting arm and the second supporting arm are provided with suction cups.

[0013] As a further improvement of this utility model, the perforation chamber is also equipped with an ion air bar and a cleanliness measuring device, and the feeding chamber and the perforation chamber each have an independent and enclosed cover.

[0014] As a further improvement of this utility model, a height monitoring unit is also provided inside the punching chamber, which is arranged in parallel with the positioning mechanism.

[0015] The laser-induced drilling device of this invention has the following technical effects:

[0016] Improving processing accuracy and quality: A pressing mechanism is installed to press the product based on data from the adsorption platform or height detection unit, preventing drilling before the product is fully flat and adhered to the adsorption platform, thus avoiding deviations and improving processing accuracy and quality. Combined with the adsorption platform and material receiving lifting mechanism, during material receiving, the lifting mechanism rises, and its positioning pins first adsorb the product, providing space for the robot to enter and exit. Then, it stably lowers the product to the adsorption platform for fixation, while the lifting mechanism retracts below the platform, without occupying additional equipment space. This not only facilitates product loading and unloading, making the overall laser equipment structure simpler and more compact, but also prevents the external robot from shifting the product's position when it leaves, further ensuring positioning accuracy and improving the overall processing accuracy and repeatability of the equipment.

[0017] Improve efficiency and increase applicability: The flipping mechanism allows the equipment to process not only single-sided products but also double-sided processing operations. Combined with the alternating work of the two robotic arms, it coordinates the rapid flow of products, thereby improving overall efficiency and applicability.

[0018] Cost savings and waste avoidance: A height monitoring unit is set up to measure the height of multiple points on the product surface, analyze the flatness of the product, and determine whether the product is deformed. Deformation includes two situations: the product is raised and not flattened by adsorption, and the product itself is a deformed part. For products that are raised and not flattened by adsorption, flattening can be achieved with the help of a pressing mechanism, and processing can continue. For products that are deformed but cannot be flattened even with the help of a pressing mechanism, laser processing is not performed directly, and the product is marked and transferred out of the equipment to avoid misprocessing, waste of resources, and the generation of more defective products, which would increase the workload of subsequent inspection processes, thereby improving the overall processing efficiency and yield. Attached Figure Description

[0019] Figure 1 This is an overall view of the laser-induced drilling device of this utility model.

[0020] Figure 2 This is a schematic diagram of the internal structure of the laser-induced drilling device of this utility model.

[0021] Figure 3 This is a schematic diagram of the pressing mechanism of this utility model.

[0022] Figure 4 This is a schematic diagram of the flipping mechanism of this utility model.

[0023] Figure 5 This is a schematic diagram of the laser module of this utility model.

[0024] Figure 6 This is a schematic diagram of the mobile platform of the present invention.

[0025] Figure 7 This is a schematic diagram of the material receiving and lifting mechanism of this utility model.

[0026] Figure 8 This is a schematic diagram of the mobile robotic arm of this utility model. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments. It should also be noted that, for ease of description, only the parts relevant to the utility model are shown in the drawings, not the entire structure. Example 1

[0028] refer to Figures 1-2A laser-induced drilling device includes a feeding bin 100 and a drilling bin 200. The feeding bin 100 is equipped with a mobile robot 1 and a flipping mechanism 2. The drilling bin 200 is equipped with a product moving platform 3, a laser module 4, a positioning mechanism 5, and a pressing mechanism 6. The mobile robot 1 transfers the product between the feeding bin 300, the flipping mechanism 2, and the drilling bin 200. The pressing mechanism 6 is mounted above the product moving platform 3 and includes a synchronous moving mechanism 61 and a pressing unit 62 mounted on the synchronous moving mechanism 61. The pressing unit 62 includes a pressure plate 621, a connecting plate 622, and a lifting drive mechanism 623. The lifting drive mechanism 623 can be a servo screw motor. The pressure plate 621 is located at the movable end of the lifting drive mechanism 623. The lifting drive mechanism 623 is mounted on the connecting plate 622, and the connecting plate 622 is mounted on the synchronous moving mechanism 61.

[0029] Specific combination Figure 3 The synchronous moving mechanism 61 is mounted on the machine base via a support frame 63. The synchronous moving mechanism 61 includes a synchronous belt 611, a synchronous motor 612, a synchronous pulley 613, and a guide rail 614. The guide rail 614 is located at the top of the support frame 63, and the synchronous pulleys 613 are located at both ends of the side of the support frame 63. The synchronous belt 611 is fitted onto the synchronous pulleys 613 at both ends. One of the synchronous pulleys 613 is connected to the synchronous motor 612, which drives the synchronous belt 611. The bottom end of the connecting plate 622 is provided with a slider, which is slidably connected to the guide rail 614. The connecting plate 622 is clamped to the synchronous belt 611 by a clamping block 624 so that the connecting plate 622 moves along the guide rail 614 with the synchronous belt 611. During the transfer of product 400, the pressing unit 62 is located at one end of the support frame 63, and the lifting drive mechanism 623 retracts the pressing plate. When product 400 is placed on the product moving platform 3 and needs to be pressed, the synchronous motor is started to move the pressing plate 621 above product 400, and the lifting drive mechanism 623 lowers the pressing plate 621 to flatten product 400.

[0030] Reference Figure 4The flipping mechanism 2 includes two side plates 21, a clamping mechanism, and a rotary drive mechanism. The rotary drive mechanism is located on the outside of the side plates 21, and the clamping mechanism is located on the inside of the side plates 21. The clamping mechanism includes an upper clamping plate 22, a lower clamping plate 23, and a drive unit 24. The lower clamping plate 23 is movably located below the upper clamping plate 22 through the drive unit 24. The drive unit 24 drives the lower clamping plate 23 to move closer to or away from the upper clamping plate 22. The two ends of the upper clamping plate 22 are connected to the rotary drive mechanism through a rotating shaft 25, and are driven by the rotary drive mechanism to rotate and flip. Furthermore, the rotary drive mechanism includes rollers 26, belts 27, and a rotary motor 28. Two rollers 26 are provided on the outer side of each side plate 21. One roller 26 on one side is connected to the rotary motor 28. The roller 26 connected to the rotary motor 28 is connected to one roller 26 on the opposite side plate 21 via a coupling 29. Belts 27 are fitted onto the two rollers 26 on the same side. When the rotary motor 28 is activated, it drives all four rollers 26 to rotate simultaneously, thereby causing the clamping mechanism to flip between the two side plates 21, thus completing the flipping of product 400. The drive unit 24 uses a cylinder or electric cylinder. The lower clamping plate 23 is connected to the piston end of the cylinder, controlling the upper clamping plate 22 and the lower clamping plate 23 to release and clamp product 400, flipping the product 400 after clamping it. If product 400 needs to be flipped for punching during loading, the mobile robot will first transfer product 400 to the open upper clamping plate 22 or lower clamping plate 23. The drive unit 24 will then drive the lower clamping plate 23 to approach the upper clamping plate 22, clamp the middle product 400, flip it over, and transfer it to the product adsorption platform for punching. In addition, for product 400 that needs to be punched on both sides, after punching on one side, it will be transferred to the flipping mechanism 2 to flip it over before punching on the other side.

[0031] Reference Figure 5 The laser module 4 is mounted on the machine platform via a stand 41. The laser module 4 includes a laser 42, a laser galvanometer 43, and a laser cutting head 44. The laser 42 is fixed on the stand 41, while the laser galvanometer 43 and laser cutting head 44 are movably mounted on the stand 41 via a lifting module 45. The laser cutting head 44, also known as the processing objective lens, is used to focus the laser emitted from the laser galvanometer 43 to guide drilling on the product. A dust extraction hood 46 is also located below the laser cutting head 44 to remove dust generated during product cutting. The positioning mechanism 5 includes a vision positioning unit 51, which is mounted on the lifting module 45 and moves synchronously with the laser cutting head. The vision positioning unit uses a positioning camera. During positioning, if the product has MARK points, the product is identified; otherwise, the four sides of the product are identified. The product image is fitted for positioning. After drilling is completed, the positioning camera can also acquire drilling images to check the drilling quality.

[0032] In addition, ion air bars 47 are provided on both sides of the lifting module 45 on the stand 41, which are aligned with the lower part of the laser cutting head 44. When cutting the product, they blow ion air to remove static electricity from the product surface and further remove dust. A cleanliness measuring device, preferably a dust particle counter, is also provided on the stand 41 to monitor the cleanliness of the punching chamber 200.

[0033] Reference Figure 6 The product moving platform 3 includes a product adsorption platform 31, an X-axis linear motion module 32, and a Y-axis linear motion module 33. The Y-axis linear motion module 33 is mounted on the machine base, and the X-axis linear motion module 32 is mounted on the Y-axis linear motion module 33. The product adsorption platform 31 is mounted on the X-axis linear motion module 32 via a mounting base. The Y-axis linear motion module 33 and the X-axis linear motion module 32 act as driving components for linear motion, driving the product adsorption platform 31 to perform horizontal and vertical translational movements.

[0034] The product adsorption platform 31 includes a carrier frame 311, a receiving and lifting mechanism 312, and an adsorption platform 313. The receiving and lifting mechanism 312 is movably disposed inside the carrier frame 311, and the adsorption platform 313 is fixed to the top of the carrier frame 311. The receiving and lifting mechanism 312 includes a lifting seat 3121, a lifting motor 3122, and multiple positioning posts 3123. Through holes are provided on the adsorption platform 313 corresponding to the positions of the positioning posts 3123. The multiple positioning posts 3123 are disposed on the top of the lifting seat 3121, and the lifting seat 3121 is disposed on the lifting motor 3122. The lifting motor 3122 drives the lifting movement, causing the positioning posts 3123 to rise and fall within the through holes of the adsorption platform 313. In this embodiment, the lifting motor 3122 can be a lead screw motor. Strip light sources 314 are provided around the perimeter of the frame of the carrier frame 311 to provide sufficient illumination for the camera of the visual positioning unit during positioning.

[0035] In conjunction with reference Figure 7 Multiple positioning posts 3123 are arranged regularly in at least two rows on the lifting seat 3121, forming a matrix. In this embodiment, there are three parallel rows, with three positioning posts 3123 evenly spaced in each row. The positioning posts 3123 are hollow columns, and a pad 3124 is provided on the top of each positioning post 3123. The pad 3124 is preferably made of rubber, and an adsorption hole is opened in the center of the pad 3124. An air channel is provided inside the lifting seat 3121, which is connected to the inside of the positioning posts 3123. A vacuum pump is connected to the lifting seat 3121. When a vacuum is drawn, it provides adsorption force to the positioning posts 3123, adsorbing the product onto the pad 3124 and improving the stability when connecting the product.

[0036] In addition, guide blocks 3125 are provided at each of the four corners of the lifting seat 3121. A guide shaft 3126 is movably installed within the guide block 3125, and the bottom of the guide shaft 3126 is fixed to the bottom of the rack 311. When the lifting motor 3122 drives the lifting seat 3121 to lift and lower the positioning column 3123, the guide block 3125 moves linearly on the guide shaft 3126, playing a stabilizing and guiding role during the lifting process.

[0037] Reference Figure 8 When the mobile robotic arm 1 places the product 31 onto the product adsorption platform, the lifting motor 3122 starts, driving the positioning column 3123 to rise and pass through the adsorption platform 313, positioning the product above the adsorption platform 313. Once the product moves above the adsorption platform 313, the top of the positioning column 3123 adsorbs the product, allowing the mobile robotic arm 1 to exit without obstruction from the gap between the product and the adsorption platform 313. The lifting motor 3122 then drives the positioning column 3123 to descend and retract back onto the adsorption platform 313. Once the product is completely on the adsorption platform 313, the auxiliary pressing unit 6 starts, driving the pressure plate 6. 21 moves above the product, flattens the product, the vacuum pump of the adsorption platform 31 starts to adsorb and fix the product, after the vacuum pressure feedback of the adsorption platform 31 is qualified, the pressing unit 62 retracts, the vision positioning unit positions the product, the laser module 4 punches holes in the product, after the punching is completed, the vacuum of the adsorption platform 31 is turned off, the lifting motor 3122 starts to drive the positioning column 3123 to rise through the adsorption platform 31 and lift the product, so that a space is created between the product and the adsorption platform 31. The moving robot 1 enters from the space to support the product and takes away the product. The positioning column 3123 then waits for the next material to be received.

[0038] The product adsorption platform 31 of this structure not only facilitates the picking and placing of products, making the overall equipment structure simpler and more compact, but also prevents the external robotic arm from shifting the product position when it leaves the product, further ensuring the positioning accuracy and thus improving the overall processing accuracy and repeatability of the equipment.

[0039] The mobile robotic arm 1 includes a first moving arm 11, a second moving arm 12, a translation mechanism 13, and a lifting mechanism 14. The lifting mechanism 14 is mounted on the translation mechanism 13, and the two moving arms are mounted on the lifting mechanism 14. The first moving arm 11 includes a rotating arm 111 and a first supporting arm 112. The second moving arm 12 includes a rotating arm 111 and a second supporting arm 113. The first supporting arm 112 and the second supporting arm 113 adopt a Y-shaped structure and are equipped with suction cups for adsorbing products.

[0040] The two moving arms can work in shifts to complete the loading and unloading tasks. For example, at the adsorption platform 31, one moving arm will adsorb and transfer the product that has been punched to the unloading box, while the other moving arm will transfer the product to be punched to the empty adsorption platform 31. This alternating work improves processing efficiency.

[0041] The feeding hopper 100 and the perforation hopper 200 each have an independent enclosed cover 101. The cover 101 is equipped with an electric sliding door and a manual maintenance operation door. The manual maintenance operation door is normally closed and opens when manual intervention is required. It is located on the outer perimeter of the cover 101 of each hopper. The electric sliding door of each hopper is located at the connection between the two hoppers, and the size of the electric sliding door of each hopper can be the same or different. The specific size can be set by the user as needed. The top of the cover 101 is also equipped with a fan filter unit 102. During the laser processing of products in the punching chamber 200, the electric sliding door on its cover is closed. The electric sliding door will only open when the processing is completed and the conditions are met, allowing the moving robot arm to pick up the material. The conditions include the completion of processing and the punching chamber reaching the set cleanliness level. When the cleanliness measuring device detects excessive dust in the punching chamber, the alarm system on the equipment will sound an alarm, and the dust removal system of the punching chamber 200 will increase its power to remove dust. When the dust level is reduced to the set cleanliness level, the alarm will be turned off, and the electric sliding door of the punching chamber will open. The dust removal system includes, but is not limited to, ion bar 47, dust suction hood 46, and fan filter unit 102. Example 2

[0042] The difference from Embodiment 1 is that Embodiment 2 includes all the technical solutions in Embodiment 1, and also includes a height monitoring unit 52 installed in the punching chamber 200. The height monitoring unit 52 uses a laser rangefinder to measure the flatness of the product surface and determine whether the product is deformed or warped. The height monitoring unit 52 and the visual positioning unit 61 are arranged side by side on the lifting module 45 and are raised and lowered synchronously with the laser cutting head 44.

[0043] The height monitoring unit 52 can further determine whether the product is flat on the adsorption platform 31. The X-axis linear motion module 32, the lifting module 45, and the Y-axis linear motion module 33 work together to enable the height monitoring unit to perform multi-point measurements on the product, determine the flatness of the product, and if warping is found, the feedback data drives the pressure plate 621 of the pressing unit 62 to flatten the product. At this time, the warped area will come into contact with the adsorption platform 31 and be fully adsorbed. If the vacuum pressure feedback of the adsorption platform 31 is qualified, the pressing unit 62 will be removed, which further ensures and improves the drilling accuracy and quality of the product.

[0044] Alternatively, a height monitoring unit can be used to measure the flatness of the product surface to determine whether the product is severely deformed. Since some products have a certain probability of deformation that is difficult to detect with the naked eye, they cannot be distinguished from other products during loading. The product is placed on the product adsorption platform. Before or after adsorption and fixation, the height monitoring unit measures the height of multiple points on the product surface to analyze the flatness of the product and determine whether the product is deformed. If the product is still deformed after being pressed by the pressing unit and adsorbed by the product adsorption platform, an alarm is triggered, and no processing is performed. The product is then marked and directly transferred to the material box to avoid misprocessing, wasting resources, producing defective products, and increasing the workload of subsequent inspection processes, thereby improving the overall processing efficiency and yield.

[0045] The accompanying drawings of this utility model embodiment are for illustrative purposes only and represent schematic diagrams, not actual physical images. They should not be construed as limiting this patent. To better illustrate the embodiments of this utility model, some components in the drawings may be omitted, enlarged, or reduced, and do not represent the actual product dimensions. It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted in the drawings.

[0046] In the accompanying drawings of this utility model, the same or similar reference numerals correspond to the same or similar components. In the description of this utility model, it should be understood that if terms such as "upper" or "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, it is only for the convenience of describing this utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0047] In this utility model, any reference to "this embodiment," "other embodiments," etc., means that the specific component, structure, or feature described in connection with that embodiment is included in at least one embodiment of this utility model. The illustrative expressions throughout this specification do not necessarily refer to the same embodiment. Furthermore, when a specific component, structure, or feature is described in connection with any embodiment, it is claimed that implementing such a component, structure, or feature in connection with other embodiments falls within the scope of those skilled in the art.

[0048] Furthermore, the above embodiments are only for illustrating the present utility model and are not intended to limit the technical solutions described herein. Understanding of this specification should be based on those skilled in the art. Although this specification has described the present utility model in detail with reference to the above embodiments, those skilled in the art should understand that modifications or equivalent substitutions can still be made to the present utility model. All technical solutions and improvements that do not depart from the spirit and scope of the present utility model should be covered within the scope of the claims of the present utility model.

Claims

1. A laser-induced perforation apparatus, characterized by: The application relates to a product pressing and perforating device, which comprises a feeding bin and a perforating bin, a mobile manipulator and a turnover mechanism are arranged in the feeding bin, a product moving platform, a laser module, a positioning mechanism and a pressing mechanism are arranged in the perforating bin, the pressing mechanism is arranged above the product moving platform, comprises a synchronous moving mechanism, a pressing unit arranged on the synchronous moving mechanism, the pressing unit comprises a pressing plate, a connecting plate and a lifting driving mechanism, the pressing plate is arranged on the movable end of the lifting driving mechanism, the lifting driving mechanism is arranged on the connecting plate, and the connecting plate is arranged on the synchronous moving mechanism.

2. The laser-induced perforation apparatus of claim 1, wherein: The synchronous moving mechanism is arranged on a machine table through a support frame, the synchronous moving mechanism comprises a synchronous belt, a synchronous motor, synchronous wheels and guide rails, the guide rails are arranged at the top end of the support frame, the synchronous wheels are arranged at the two ends of the side of the support frame, the synchronous belt is sleeved on the two synchronous wheels, one end of the synchronous wheel is connected with the synchronous motor, the connecting plate is connected to the synchronous belt through a clamping plate, and the bottom end of the connecting plate is provided with a sliding block which is movably connected with the guide rail.

3. The laser-induced perforation apparatus of claim 1, wherein: The turnover mechanism comprises two side plates, a clamping mechanism and a rotary driving mechanism, the rotary driving mechanism is arranged outside the side plates, the clamping mechanism is arranged inside the side plates, the clamping mechanism comprises an upper clamping plate, a lower clamping plate and a driving part, the lower clamping plate is movably arranged below the upper clamping plate through the driving part, the driving part drives the lower clamping plate to move close to or away from the upper clamping plate, and the two ends of the upper clamping plate are connected with the rotary driving mechanism through rotating shafts and are rotated by the rotary driving mechanism.

4. The laser-induced perforation apparatus of claim 1, wherein: The laser module is arranged on a machine table through a rack, the laser module comprises a laser, a laser vibrating mirror and a laser cutting head, the laser is fixed on the rack, the laser vibrating mirror and the laser cutting head are movably arranged on the rack through a lifting module, the positioning mechanism is a visual positioning unit and is arranged on the lifting module and synchronously lifted with the laser cutting head.

5. The laser-induced perforation apparatus of claim 1, wherein: The product moving platform comprises a product adsorption platform, an X-axis linear motion module and a Y-axis linear motion module, the Y-axis linear motion module is arranged on a machine table, the X-axis linear motion module is arranged on the Y-axis linear motion module, and the product adsorption platform is arranged on the X-axis linear motion module through a mounting seat.

6. The laser-induced perforation apparatus of claim 5, wherein: The product adsorption platform comprises a carrier, a material receiving and lifting mechanism and an adsorption platform, the material receiving and lifting mechanism is movably arranged in the carrier, and the adsorption platform is fixed on the top of the carrier; the material receiving and lifting mechanism comprises a lifting seat, a lifting motor and a plurality of positioning columns, the adsorption platform is provided with through holes corresponding to the positions of the positioning columns, the plurality of positioning columns are arranged on the top of the lifting seat, the lifting seat is arranged on the lifting motor and is driven to move up and down by the lifting motor, so that the positioning columns move up and down in the through holes of the adsorption platform.

7. The laser-induced perforation apparatus of claim 6, wherein: The positioning column is a hollow column, a pad is arranged on the top of the positioning column, and an adsorption hole is formed in the center of the pad.

8. The laser-induced perforation apparatus of claim 1, wherein: The mobile manipulator comprises a first moving arm, a second moving arm, a translation mechanism and a lifting mechanism, the translation mechanism is arranged at the bottom of the rack of the feeding bin, the lifting mechanism is arranged on the translation mechanism, and the two moving arms are arranged on the lifting mechanism; the first moving arm comprises a rotating arm and a first supporting hand, the second moving arm comprises a rotating arm and a second supporting hand, and the first supporting hand and the second supporting hand are provided with suction cups.

9. The laser-induced perforation apparatus of claim 1, wherein: The perforating bin is also provided with an ion wind rod and a clean measuring device, and the feeding bin and the perforating bin each have an independently closed cover.

10. The laser-induced perforation apparatus of any one of claims 1-9, wherein: The perforating bin is also provided with a height monitoring unit arranged in parallel with the positioning mechanism.

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