MFC installation auxiliary device

Abstract

The utility model discloses an MFC installation auxiliary device, which relates to the technical field of semiconductor installation and comprises a lower seat body which can be placed on an MFC on the lower side, an upper seat body which is arranged on the lower seat body and an adjusting device which is used for adjusting the distance between the lower seat body and the upper seat body. An upper seat body and a lower seat body which can be used for placing the MFCs on the upper side and the lower side are arranged, and an adjusting device for adjusting the distance between the lower seat body and the upper seat body is arranged. The MFC on the upper side and the MFC on the lower side are positioned by adjusting the distance between the upper base body and the lower base body, and an operator can conveniently and rapidly install or replace the MFC.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor mounting technology, and specifically to an MFC mounting auxiliary device. Background Technology

[0002] A gas mass flow controller (MFC) is a type of gas flow controller and a key, core component highly relevant to fluid processes and applications. It typically needs to be used in conjunction with other equipment to precisely control gas flow rates and is widely used in semiconductors, photovoltaics, biomedicine, and other industrial fields. Semiconductor processes require the use of gases for cleaning, vapor deposition, heat treatment, and etching. For example, in photolithography, gases such as hydrogen fluoride, nitrogen, and oxygen are injected into the reaction chamber at precise flow rates to control the exposure and etching processes of semiconductor chips, thereby manufacturing high-quality chips.

[0003] In daily operation, several MFCs are neatly arranged and installed on the gas holder module. If an MFC needs to be replaced, it can currently only be installed manually based on the operator's experience. Both the MFC and the gas holder module have corresponding mounting holes. When installing the MFC, the sealing ring needs to be placed on the mounting hole of the MFC, and then the mounting hole on the MFC needs to be connected to the mounting hole on the gas holder module. The sealing ring provides a seal. This requires the mounting holes on the MFC and the mounting holes on the gas holder module to be precisely aligned. However, the sealing ring is only placed on the mounting hole of the MFC and is not fixed. When installing manually, the sealing ring may fall off due to hand tremors, or it may be installed but not accurately aligned with the mounting hole on the gas holder module, thus increasing the installation error rate and installation time. Improper installation can also damage the sealing ring and pose safety hazards. Utility Model Content

[0004] The technical problem to be solved by this utility model is to overcome the shortcomings of the prior art and provide an installation auxiliary device that can assist and facilitate the installation of MFC.

[0005] To solve the above-mentioned technical problems, the present invention provides an MFC installation auxiliary device, including a lower base that can be placed on the lower MFC, an upper base disposed on the lower base, and an adjustment device for adjusting the distance between the lower base and the upper base.

[0006] Furthermore, the total height of the lower and upper seats is less than the distance between two adjacent MFCs.

[0007] Furthermore, the lower seat includes a base plate, a first side plate and a second side plate disposed on both sides of the base plate in the lateral direction, and the base plate, the first side plate and the second side plate surround to form a first sliding groove; when the lower seat is placed on the lower MFC, the base plate presses against the upper surface of the lower MFC, and the first side plate and the second side plate respectively contact the lateral sides of the lower MFC.

[0008] Furthermore, the upper seat includes a top plate, a third side plate and a fourth side plate disposed on both sides of the top plate in the lateral direction; the top plate, the third side plate and the fourth side plate surround to form a second sliding groove, when the upper MFC is located on the upper seat, the top plate abuts against the lower surface of the upper seat, and the third side plate and the fourth side plate respectively contact the lateral sides of the upper MFC.

[0009] Furthermore, on the horizontal projection plane, both the bottom plate and the top plate have regions located outside the corresponding MFC; the adjustment device includes a threaded through hole disposed on the bottom plate outside the region located on the lower side of the MFC and a screw threadedly connected to the threaded through hole, the upper end of the screw being rotatably connected to the top plate and the lower end passing through the threaded through hole.

[0010] Furthermore, a blind hole is provided on the top plate at the position corresponding to the threaded through hole, and the upper end of the screw is rotatably disposed in the blind hole.

[0011] Furthermore, both the lower and upper MFCs are T-shaped on the horizontal projection plane, with the lateral dimension of the front portion being larger than that of the rear portion; the lateral dimension of the base plate is adapted to the lateral dimension of the front portion, and the dimension of the base plate along the front-rear direction is not less than the dimension of the lower MFC in the corresponding direction; the base plate has a first region and a second region located outside the lateral sides of the rear portion, and each of the first and second regions is provided with at least one threaded through hole.

[0012] Furthermore, the lateral dimension of the top plate is adapted to the lateral dimension of the front portion, and the dimension of the top plate along the front-back direction is not less than the dimension of the upper MFC in the corresponding direction; the top plate has a third region and a fourth region located outside the lateral sides of the rear portion, and each of the third region and the fourth region is provided with at least one blind hole that matches the at least one threaded through hole.

[0013] Furthermore, two threaded through holes are provided on both the first and second regions, and two blind holes are provided on the third and fourth regions respectively.

[0014] Furthermore, the dimensions of the first and second side plates in the front-back direction are smaller than the dimensions of the bottom plate in the front-back direction, and the dimensions of the third and fourth side plates in the front-back direction are smaller than the dimensions of the top plate in the front-back direction.

[0015] In summary, the MFC installation auxiliary device disclosed in this utility model has the following beneficial effects:

[0016] 1. The system includes an upper and lower mounting base for placing the MFC (Multi-Functional Component) units, as well as an adjustment mechanism to regulate the distance between them. Adjusting the distance between the upper and lower mounting bases allows for precise positioning of the MFC units, facilitating quick installation or replacement by the operator.

[0017] 2. The adjustment device includes a threaded through hole on the base plate, a screw threaded to the threaded through hole, and a blind hole on the top plate connected to the screw. By rotating the screw, the screw can be moved up and down in the threaded through hole, thereby adjusting the distance between the upper and lower seats. The adjustment is convenient, simple and quick.

[0018] 3. The dimensions of the first and second side plates in the front-back direction are smaller than those of the bottom plate in the front-back direction, and the dimensions of the third and fourth side plates in the front-back direction are smaller than those of the top plate in the front-back direction. This not only saves materials but also expands the field of vision and operating space, allowing more of the bottom plate to be exposed, so that the adjustment device can adjust the distance between the upper and lower seats. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of this utility model.

[0020] Figure 2 This is an exploded view of this utility model.

[0021] Figure 3 yes Figure 1 Sectional view of AA.

[0022] Figure 4 This is a structural schematic diagram of scenario one of this utility model.

[0023] Figure 5 This is a structural schematic diagram of scenario two of this utility model.

[0024] The meanings of the reference numerals in the attached drawings are as follows: MFC 100, front part 101, rear part 102, lower seat 200, base plate 210, first area 211, second area 212, first side plate 220, second side plate 230, first slide groove 240, upper seat 300, top plate 310, third area 311, fourth area 312, third side plate 320, fourth side plate 330, second slide groove 340, threaded through hole 400, screw 500, blind hole 600. Detailed Implementation

[0025] The following detailed description illustrates the specific implementation method:

[0026] Please see Figure 1 , Figure 1 This is a schematic diagram of one embodiment of the MFC installation auxiliary device of this utility model. The MFC installation auxiliary device shown is used to assist in installing or replacing MFC 100 on a gas holder module, facilitating quick installation or replacement of the MFC 100 by the operator. Typically, several MFC 100s need to be installed on the gas holder module, for example, several MFC 100s can be evenly spaced along the height of the gas holder module. During the installation of the MFC 100, the operator can first install the MFC 100 located at the bottom. After installation, the MFC installation auxiliary device of this embodiment can be used to install each MFC 100 sequentially from bottom to top, facilitating quick installation of each MFC 100. During replacement, the operator can insert the MFC installation auxiliary device into the gap between the MFC 100 to be replaced and the adjacent lower MFC 100 for quick replacement. In the illustrated embodiment, each MFC 100 is T-shaped on the horizontal projection plane, including a front portion 101 and a rear portion 102, wherein the lateral dimension of the front portion 101 is larger than the lateral dimension of the rear portion 102.

[0027] The illustrated MFC installation aid includes a lower base 200 that can be placed on a lower MFC 100, an upper base 300 disposed on the lower base 200, and an adjustment device for adjusting the distance between the lower base 200 and the upper base 300. The lower base 200 is placed at the upper end of the lower MFC 100, and the upper base 300 is placed at the lower end of the upper MFC 100. The total height of the lower base 200 and the upper base 300 is less than the distance between two adjacent MFCs 100, to ensure that the MFC installation aid can be smoothly inserted into the gap between two adjacent MFCs 100. The adjustment device is used to adjust the distance between the upper seat 300 and the lower seat 200 to form tension and contact the upper or lower surface of the corresponding side MFC 100, thereby positioning the upper seat 300 and the lower seat 200. The position of the upper seat 300 and the lower seat 200 is used to locate the MFC 100 that needs to be replaced, so as to ensure the positioning accuracy of the replaced or installed MFC 100.

[0028] Please see Figure 2 and Figure 3 , Figure 2 yes Figure 1 Explosion diagram, Figure 3 yes Figure 1 A cross-sectional view of AA. The lower seat 200 includes a base plate 210, a first side plate 220 and a second side plate 230 disposed on both sides of the base plate 210 in the lateral direction, the base plate 210, the first side plate 220 and the second side plate 230 forming a first sliding groove 240. When the lower seat 200 is placed on the lower MFC 100, the base plate 210 presses against the upper surface of the lower MFC 100, and the first side plate 220 and the second side plate 230 respectively contact the lateral sides of the lower MFC 100 to position the lower seat 200. The lateral dimension of the base plate 210 is adapted to the lateral dimension of the front part 101, and the dimension of the base plate 210 in the front-rear direction is not less than the dimension of the lower MFC 100 in the corresponding direction. In this embodiment, the first slide groove 240 allows the lower seat 200 to be quickly and accurately placed on the upper end of the lower MFC 100. Throughout the process, the lower seat 200 is first placed on the front side of the lower MFC 100 (the side furthest from the gas holder module). Then, the lower seat 200 is moved from front to back towards the gas holder module, so that the first slide groove 240 fits into the upper end of the lower MFC 100, causing the base plate 210 to press against the upper surface of the lower MFC 100, and causing the first side plate 220 and the second side plate 230 to contact the lateral sides of the lower MFC 100 respectively. This completes the assembly and positioning of the lower seat 200. The dimension of the base plate 210 along the front-back direction is greater than or equal to the dimension of the MFC 100 in the corresponding direction below, so that the entire MFC 100 can be completely incorporated into the first groove 240, and the upper surface of the MFC 100 below is in complete contact with the base plate 210.

[0029] In the embodiment shown, the dimensions of the first side plate 220 and the second side plate 230 in the front-back direction are smaller than the dimensions of the base plate 210 in the front-back direction. This not only saves materials but also expands the field of vision and operating space, allowing the base plate 210 to be more exposed, so that the adjustment device can adjust the distance between the upper body 300 and the lower body 200.

[0030] The upper seat 300 includes a top plate 310, a third side plate 320 and a fourth side plate 330 disposed on both lateral sides of the top plate 310, and the top plate 310, the third side plate 320 and the fourth side plate 330 together form a second sliding groove 340. When the upper MFC 100 is located on the upper seat 300, the top plate 310 abuts against the lower surface of the upper seat 300, the third side plate 320 and the fourth side plate 330 respectively contact the lateral sides of the upper MFC 100, the lateral dimension of the top plate 310 is adapted to the lateral dimension of the front part 101, and the dimension of the top plate 310 along the front-back direction is not less than the dimension of the upper MFC 100 in the corresponding direction. In this embodiment, the second slide 340 allows the upper seat 300 to be quickly and accurately placed at the lower end of the upper MFC 100; or the second slide 340 allows the upper MFC 100 to quickly and accurately slide into the installation position of the gas holder module. Throughout the process, the upper seat 300 is installed together with the lower seat 200. When the lower seat 200 is in place, the upper seat 300 is also installed in its lateral position. The height of the upper seat 300 is adjusted by an adjustment device. The dimension of the top plate 310 along the front-back direction is greater than or equal to the corresponding dimension of the upper MFC 100, thus allowing the entire upper MFC 100 to be completely incorporated into the second slide 340.

[0031] When it is necessary to replace the upper MFC 100, after placing the MFC installation auxiliary device into the gap on the lower side of the MFC 100 to be replaced and adjusting the gap between the upper base 300 and the lower base 200, firstly, disconnect the original upper MFC 100 from the gas holder module. Then, place the new MFC 100 in the second slide 340 and push it towards the gas holder module. Because the third side plate 320 and the fourth side plate 330 of the second slide 340 guide the MFC 100, the new MFC 100 can only move forward in a straight line and will not sway left or right. This ensures that the mounting holes on the new MFC 100 are aligned with the mounting holes on the gas holder module, ensuring precise alignment between the holes and achieving the purpose of fast and accurate installation. In addition, by using the top plate 310 to support the new upper MFC 100, only one operator is needed to align and install the upper MFC 100 during the replacement process. This eliminates the need for two operators to lift and install it separately, reducing labor costs and installation difficulty.

[0032] In the illustrated embodiment, the dimensions of the third side plate 320 and the fourth side plate 330 in the front-back direction are smaller than the dimensions of the top plate 310 in the front-back direction. This not only saves materials but also expands the field of vision and operating space, allowing more of the base plate 210 to be exposed, thus facilitating the adjustment of the distance between the upper seat 300 and the lower seat 200 by the adjustment device.

[0033] Please see Figure 3 , Figure 4 and Figure 5 On the horizontal projection plane, both the base plate 210 and the top plate 310 have areas located outside the corresponding MFC 100. The adjustment device includes a threaded through hole 400 located on the base plate 210 outside the area of ​​the lower MFC 100, and a screw 500 threadedly connected to the threaded through hole 400. The upper end of the screw 500 is rotatably connected to the top plate 310, and the lower end extends out of the threaded through hole 400. A blind hole 600 is provided on the top plate 310 at a position corresponding to the threaded through hole 400, and the upper end of the screw 500 is rotatably disposed in the blind hole 600. Thus, by simply rotating the screw 500 to move it up and down in the threaded through hole 400, the upper seat 300, which is rotatably connected to the upper end of the screw 500, rises or falls with the upper screw 500, thereby adjusting the distance between the upper seat 300 and the lower seat 200. The adjustment is simple, convenient, and quick.

[0034] The base plate 210 has a first region 211 and a second region 212 located outside the lateral sides of the rear portion 102, and each of the first region 211 and the second region 212 is provided with at least one threaded through hole 400. The top plate 310 has a third region 311 and a fourth region 312 located outside the lateral sides of the rear portion 102, and each of the third region 311 and the fourth region 312 is provided with at least one blind hole 600 corresponding to the at least one threaded through hole 400.

[0035] The threaded through holes 400 are disposed in the first region 211 and the second region 212, that is, on both sides of the upper MFC 100. Blind holes 600 are disposed in the third region 311 and the fourth region 312, corresponding to the threaded through holes 400, to facilitate adjustment using the threaded through holes 400 and blind holes 600. The threaded through holes 400 are disposed on both sides of the upper MFC 100, with at least one threaded through hole 400 on each side. The height of the two sides of the installation auxiliary device can be adjusted by cooperating with the threaded through holes 400 and the screw 500, allowing for more flexible adjustment. In this embodiment, two threaded through holes 400 are provided in both the first region 211 and the second region 212, and two blind holes 600 are correspondingly provided in the third region 311 and the fourth region 312. The four threaded through holes 400 form a surface, allowing for more precise adjustment of the distance and level between the top plate 310 and the bottom plate 210 from four points.

[0036] The following describes an exemplary use case of the MFC installation assistance device of this embodiment.

[0037] Scenario 1: MFC replacement

[0038] First, adjust the distance between the upper seat 300 and the lower seat 200 of this MFC installation auxiliary device so that their total height is less than the distance between the upper MFC 100 and the lower MFC 100 (i.e., the vertical distance between the upper surface of the top plate 310 and the lower surface of the bottom plate 210 is less than the distance between the upper MFC 100 and the lower MFC 100). Second, align the gaps between the top plate 310 and the bottom plate 210 and the two MFC 100, inserting them into the gaps from the outside in, so that they abut against the gas holder module. At this time, the first side plate 220 and the second side plate 230 respectively contact the lateral sides of the lower MFC 100. Then, press down the lower seat 200 with one hand and adjust the screws 500 of the adjusting device with the other hand to adjust the height and level of the upper seat 300, so that the upper seat 300 and the lower seat 200 respectively contact the upper MFC 100 and the lower MFC 100. 100, thereby achieving the positioning of the upper seat 300; then, disassemble the upper MFC 100, install sealing rings at the holes of the new MFC 100 (the new MFC 100 is the same size as the disassembled original MFC 100), and place the new MFC 100 along the second slide groove 340 of the upper seat 300 to fit against the gas holder module, so that the installation position of the new MFC 100 and the gas holder module can be aligned, and the holes on the new MFC 100 can be quickly aligned with the holes on the gas holder module; finally, lock the new MFC 100 to the gas holder module. After the MFC 100 is installed, rotate the screws 500 one by one to reduce the distance between the upper seat 300 and the lower seat 200. This creates a gap between the upper seat 300 and the lower seat 200 and the upper and / or lower MFC 100 to remove the MFC 100 installation aid. The replacement of the MFC 100 is now complete. In this design, because the MFC 100 is pushed through the second slide 340, the entire process is smooth. Even if the sealing rings on the mounting holes of the MFC 100 are not fixed, they will not fall off during the smooth movement. Furthermore, the second slide 340 limits the movement of the MFC 100, ensuring accurate alignment between the new MFC 100's holes and the gas holder module's holes, reducing errors and improving assembly efficiency.

[0039] Scenario 2: MFC Installation

[0040] When installing a row of MFC 100s (several evenly spaced MFC 100s installed along the height), first install the bottommost MFC 100 without tools. Since there are no obstructions, the bottommost MFC 100 is relatively easy to install even without tools. Next, place the lower seat 200 of the MFC 100 installation aid on the bottommost MFC 100, so that the lower surface of the base plate 210 presses against the upper surface of the bottommost MFC 100, and the first side plate 220 and the second side plate 230 contact the lateral sides of the bottommost MFC 100 respectively. Then, install the MFCs to be installed on the upper side... The installation position of the upper seat 300 is adjusted to ensure its position and levelness, thereby completing the relative position adjustment of the upper seat 300 and the lower seat 200. To facilitate quick and easy adjustment of the position and levelness of the upper seat 300, standard scales can be marked on the adjusting device (such as screw 500). The screw 500 is adjusted to the corresponding scale position according to the actual distance. Then, the upper MFC 100 is aligned with the gas holder module along the second slide groove 340, thus aligning the installation position of the upper MFC 100 with that of the gas holder module and quickly aligning the holes on the upper MFC 100 with the holes on the gas holder module. Finally, the upper MFC 100 is locked to the gas holder module. After the MFC 100 on the upper side is installed, the screw 500 is finely adjusted again to reduce the gap between the upper body 300 and the lower body 200 so that the MFC 100 installation auxiliary device can be removed. This completes the installation of one MFC 100 on the upper side.

[0041] The above are merely embodiments of this utility model. Commonly known structures and characteristics are not described in detail here. It should be noted that those skilled in the art can make various modifications and improvements without departing from the structure of this utility model, and these should also be considered within the scope of protection of this utility model. These modifications and improvements will not affect the effectiveness of the implementation of this utility model or its practicality.

Claims

1. An MFC installation aid, characterized by, The lower seat body can be placed on the lower side of the MFC, the upper seat body is arranged on the lower seat body, and the adjusting device is used for adjusting the distance between the lower seat body and the upper seat body. The lower seat body comprises a bottom plate, a first side plate and a second side plate arranged on the two lateral sides of the bottom plate, and the bottom plate, the first side plate and the second side plate form a first sliding groove; when the lower seat body is placed on the lower side of the MFC, the bottom plate is pressed on the upper surface of the lower side of the MFC, and the first side plate and the second side plate are in contact with the two lateral sides of the lower side of the MFC respectively.

2. The MFC installation aid of claim 1, wherein: The total height of the lower seat body and the upper seat body is less than the distance between the two adjacent MFCs.

3. The MFC installation aid of claim 1, wherein: The upper seat body comprises a top plate, a third side plate and a fourth side plate arranged on the two lateral sides of the top plate, and the top plate, the third side plate and the fourth side plate form a second sliding groove; when the upper side of the MFC is located on the upper seat body, the top plate is pressed on the lower surface of the upper seat body, and the third side plate and the fourth side plate are in contact with the two lateral sides of the upper side of the MFC respectively.

4. The MFC installation aid of claim 3, wherein: On the horizontal projection plane, the bottom plate and the top plate each have an area outside the corresponding MFC; the adjusting device comprises a threaded through hole arranged on the bottom plate outside the area outside the lower side of the MFC and a screw rod screwed into the threaded through hole, the upper end of the screw rod is rotatably connected with the top plate, and the lower end of the screw rod penetrates through the threaded through hole.

5. The MFC installation aid of claim 4, wherein: A blind hole is arranged on the top plate at a position corresponding to the threaded through hole, and the upper end of the screw rod is rotatably arranged in the blind hole.

6. The MFC installation aid of claim 5, wherein: The lower side of the MFC and the upper side of the MFC each have a T shape on the horizontal projection plane, the lateral dimension of the front side part is greater than that of the rear side part, the lateral dimension of the bottom plate is adapted to that of the front side part, the dimension of the bottom plate in the front-rear direction is not less than that of the lower side of the MFC in the corresponding direction, the bottom plate has a first area and a second area outside the two lateral sides of the rear side part, and at least one threaded through hole is arranged on each of the first area and the second area.

7. The MFC installation aid of claim 6, wherein: The lateral dimension of the top plate is adapted to that of the front side part, the dimension of the top plate in the front-rear direction is not less than that of the upper side of the MFC in the corresponding direction, the top plate has a third area and a fourth area outside the two lateral sides of the rear side part, and at least one blind hole matched with the at least one threaded through hole is arranged on each of the third area and the fourth area.

8. The MFC installation aid of claim 7, wherein: Two threaded through holes are arranged on each of the first area and the second area, and two blind holes are arranged on the third area and the fourth area correspondingly.

9. The MFC installation aid of claim 3, wherein: The dimensions of the first side plate and the second side plate in the front-rear direction are less than that of the bottom plate in the front-rear direction, and the dimensions of the third side plate and the fourth side plate in the front-rear direction are less than that of the top plate in the front-rear direction.

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