Support plate device and coating equipment
By setting limiting holes and locking parts on the tray, combined with the staggered structure and hook design of the carrier frame, the problem of tray deformation or warping under high temperature environment is solved, and the uniformity of coating and the stability of carrier device are achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-11
- Publication Date
- 2026-03-06
AI Technical Summary
The carrier tray is prone to deformation or warping under high temperature, resulting in gaps between it and the frame, causing uneven coating. The existing screw fixing effect is not ideal.
Limiting holes are set on the tray, and the locking part is embedded in the limiting holes. The displacement of the tray is restricted by the cross structure of the horizontal and vertical ribs of the carrier plate frame. Combined with the design of hooks and conductive sheets, the stability of the tray and the uniformity of coating are improved.
It effectively prevents the tray from deforming or warping in high-temperature environments, ensures uniform coating, and improves the stability and coating effect of the carrier plate device.
Smart Images
Figure CN223974200U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the technical field of solar photovoltaic cell coating equipment, and particularly relates to a carrier plate device and coating equipment. Background Technology
[0002] With the increasing global demand for renewable energy, the solar photovoltaic industry has developed rapidly. In the manufacturing process of solar cells, silicon wafers need to undergo processes such as cleaning, diffusion, annealing, coating, and screen printing. PECVD (Plasma-Enhanced Chemical Vapor Deposition) is one of the commonly used coating methods in solar cell production. PECVD equipment consists of a loading chamber, a preheating chamber, a process chamber, a discharge chamber, and a carrier plate return device. Each chamber is equipped with roller drives, and the carrier plate carries the silicon wafer, rotating between chambers under the action of the roller drives to complete the coating process.
[0003] The carrier plate typically consists of two parts: a tray and a frame. During the coating process, the heating temperature inside the chamber is high. The tray may deform or warp under high temperature, resulting in gaps between it and the frame and causing uneven coating. In the existing technology, screws are usually used to fix the tray and the frame to prevent deformation. However, screws are prone to loosening under high-frequency high-temperature cycling, and the fixing effect is not ideal.
[0004] Therefore, how to prevent the tray from deforming or warping in a high-temperature environment, which would lead to gaps between the tray and the frame and result in uneven coating, is a technical problem that urgently needs to be solved by those skilled in the art.
[0005] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content
[0006] This disclosure provides at least one carrier plate device and a coating equipment.
[0007] In a first aspect, embodiments of this disclosure provide a carrier plate device, including:
[0008] The carrier frame includes several intersecting horizontal and vertical ribs;
[0009] Several engaging parts are provided on the vertical ribs;
[0010] At least one tray has a plurality of limiting holes adapted to the engaging portion;
[0011] The engaging part is embedded in the limiting hole to limit the displacement of the tray on the carrier frame.
[0012] In one optional embodiment, the edge of the tray is a triangular structure, and slots adapted to the triangular structure are provided on both sides of the vertical rib located at the center of the carrier frame. The triangular structure is embedded in the slots to limit the position of the tray.
[0013] In one optional embodiment, the engaging part is a hook, which includes a hook and a hook fixing member, with the hook positioned above the hook fixing member.
[0014] In one optional embodiment, the hook fixing member has several fixing holes, and the hanger is assembled to the vertical rib through the fixing holes and bolts.
[0015] In one alternative embodiment, the limiting hole protrudes from the tray surface, and its position and opening direction match the engaging portion.
[0016] In one optional embodiment, the engaging portion on the vertical rib located at the center of the carrier frame is a wide hanger, which is symmetrically arranged on both sides of the central vertical rib; and,
[0017] The length of the wide hanger hook fixing component is greater than the length of the hook, and there is a gap between the hook and the hook fixing component to form a tray support surface.
[0018] In one alternative embodiment, the engaging portion located on the vertical ribs on both sides of the carrier plate frame is a narrow hanger, and conductive plates are provided between the narrow hangers, with at least two conductive plates electrically connected in series through the narrow hangers.
[0019] In one optional implementation, the upper and lower adjacent narrow hangers face opposite directions, and the corresponding limiting holes of the upper and lower adjacent narrow hangers face opposite directions.
[0020] In one optional embodiment, a right-angle washer is provided at the junction of the horizontal and vertical ribs. The right-angle washer has several threaded holes, and several bolts pass through the threaded holes and the horizontal and vertical ribs respectively, and are fixed to the two sides of the right-angle washer on the horizontal and vertical ribs respectively with nuts.
[0021] Secondly, this disclosure also provides a coating apparatus, including: the aforementioned carrier plate device; and a transmission roller disposed below the carrier plate device for transporting the carrier plate device to each chamber.
[0022] The beneficial effect of this utility model is that the carrier plate device has a locking part on the vertical rib and a limiting hole on the tray that matches the locking part. The locking part is embedded in the limiting hole to limit the displacement of the tray on the carrier plate frame, thereby avoiding the tray from deforming or warping under high temperature environment, which would cause gaps between the tray and the frame and result in uneven coating.
[0023] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and drawings.
[0024] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description
[0025] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0026] Figure 1 A structural diagram of a carrier plate device provided in an embodiment of this disclosure;
[0027] Figure 2 A front view of a tray for a carrier device provided in an embodiment of this disclosure;
[0028] Figure 3 A side view of a tray for a carrier device provided in an embodiment of this disclosure;
[0029] Figure 4 A side view of a carrier plate device provided in an embodiment of this disclosure;
[0030] Figure 5 A perspective view of a wide hanger for a carrier plate device provided in an embodiment of this disclosure;
[0031] Figure 6 A perspective view of a narrow mounting bracket for a carrier plate device provided in an embodiment of this disclosure;
[0032] Figure 7 This is a structural diagram of part A of a carrier plate device provided in an embodiment of this disclosure.
[0033] In the picture:
[0034] 100. Carrier frame; 110. Horizontal rib; 120. Vertical rib; 200. Engaging part; 210. Hook; 220. Hook fastener; 221. Fixing hole; 230. Wide hanger; 231. Support surface; 240. Narrow hanger; 300. Tray; 310. Limiting hole; 320. Triangular structure; 400. Conductive sheet; 500. Right angle washer; 510. Bolt; 520. Nut. Detailed Implementation
[0035] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0036] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.
[0037] In this document, when an element or layer is referred to as “located,” “joined to,” “connected to,” “attached to,” or “coupled to” another element or layer, it may be directly located, joined, connected, attached to, or coupled to the other element or layer, or there may be intermediate elements or layers present. Conversely, when an element is referred to as “directly on another element or layer,” “directly joined to,” “directly connected to,” “directly attached to,” or “directly coupled to” another element or layer, there may be no intermediate elements or layers present. Other terms used to describe relationships between elements should be interpreted in a similar manner (e.g., “between” versus “directly between,” “adjacent” versus “directly adjacent,” etc.). As used herein, the term “and / or” includes any and all combinations of one or more of the related listed items.
[0038] In this document, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than individual elements in the list. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.
[0039] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise clearly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.
[0040] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.
[0041] Research has revealed the following drawbacks of existing technologies: the carrier plate is usually composed of a tray and a frame. During the coating process, the heating temperature inside the chamber is high. The tray may deform or warp under high temperature, resulting in gaps between it and the frame and causing uneven coating. Existing technologies typically use screws to fix the tray and the frame to prevent deformation, but after a period of use, the screws will loosen, and the fixing effect is not ideal.
[0042] Based on the above research, this disclosure provides a carrier plate device and a coating equipment, which solves the above problems by setting a locking part to lock into the limiting hole of the tray.
[0043] The shortcomings of the above solutions are the result of the inventor's practical experience and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure should be considered as the inventor's contribution to this disclosure.
[0044] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0045] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0046] See Figure 1 This disclosure provides a carrier plate device, including: a carrier plate frame 100, comprising a plurality of crisscrossing horizontal ribs 110 and vertical ribs 120, with a plurality of engaging portions 200 provided on the vertical ribs 120; at least one tray 300, preferably two trays 300, with a plurality of limiting holes 310 adapted to the engaging portions 200; wherein the engaging portions 200 are embedded in the limiting holes 310 to limit the displacement of the trays 300 on the carrier plate frame 100. This avoids deformation or warping of the trays 300 under high temperature conditions, which could lead to gaps between the trays and the frame and cause uneven coating.
[0047] See Figure 4 In some embodiments, the edge of the tray 300 is a triangular structure 320. Grooves adapted to the triangular structure 320 are provided on both sides of the vertical rib 120 located at the center of the carrier frame 100. The triangular structure 320 is embedded in the grooves to limit the position of the tray 300. Through this arrangement, the edge of the tray 300 is embedded in the grooves on both sides of the vertical rib 120, preventing the edge of the tray 300 from warping due to high-temperature environments, thereby improving the uniformity of the coating.
[0048] See Figure 5 and Figure 6 In some embodiments, the engaging part 200 is a hanger, which includes a hook 210 and a hook fixing member 220, with the hook 210 disposed above the hook fixing member 220.
[0049] Furthermore, the hook fastener 220 has several fixing holes 221, and the hanger is assembled onto the vertical rib 120 through the fixing holes 221 and the bolts 510.
[0050] See Figure 2 and Figure 3 In some embodiments, the limiting hole 310 is provided on the surface of the tray 300 and the position and opening direction of the limiting hole 310 correspond to the engaging part 200. The engaging part 200 is embedded in the limiting hole 310 to limit the displacement of the tray 300 on the carrier frame 100.
[0051] See Figure 5In some embodiments, the engaging portion 200 on the vertical rib 120 located at the center of the carrier frame 100 is a wide hanger 230. The wide hangers 230 are symmetrically arranged on both sides of the central vertical rib 120, and the opening direction of their hooks 210 matches the limiting holes 310 of the trays 300 on both sides of the central vertical rib 120. Furthermore, the length of the hook fixing member 220 of the wide hanger 230 is greater than the length of the hook 210, and there is a gap between the hook 210 and the hook fixing member 220 to form a support surface 231 for the tray 300. The support surface 231 of the tray 300 is suitable for supporting the edge of the tray 300 to improve the stability of the assembly between the tray 300 and the central vertical rib 120.
[0052] See Figure 1 and Figure 4 In some embodiments, the engaging portions 200 located on the vertical ribs 120 on both sides of the carrier frame 100 are narrow hangers 240, and conductive sheets 400 are disposed between the narrow hangers 240. At least two conductive sheets 400 are electrically connected in series through the narrow hangers. The current of the conductive sheets 400 is transmitted to the tray 300 through the narrow hangers 240, so that the tray 300 and the cavity form an electric field. The multi-point feed connection of the series structure of conductive sheets 400 to the tray 300 can keep the electric field of the tray 300 uniform, thereby improving the coating uniformity.
[0053] See Figure 1 and Figure 2 In some embodiments, the upper and lower adjacent narrow hangers 240 are oriented in opposite directions, and the corresponding limiting holes 310 of the upper and lower adjacent narrow hangers 240 are oriented in opposite directions. The opposite orientation can reduce the unilateral pressure on the tray 300, making the tray 300 more balanced when under force, and reducing the possibility of deformation or shaking.
[0054] See Figure 1 and Figure 7 In some embodiments, a right-angle washer 500 is provided at the junction of the horizontal rib 110 and the vertical rib 120. The right-angle washer 500 has several threaded holes, and several bolts 510 pass through the threaded holes and the horizontal rib 110 and the threaded holes and the vertical rib 120, respectively. With the help of nuts 520, the two sides of the right-angle washer 500 are fixed to the horizontal rib 110 and the vertical rib 120, respectively. By connecting the horizontal rib 110 and the vertical rib 120 through the right-angle washer 500, the perpendicular relationship between the horizontal rib 110 and the vertical rib 120 can be constrained, avoiding angular displacement at the connection point due to external force or self-weight, and further improving the stability of the carrier plate device.
[0055] Some embodiments also provide a coating apparatus, including a carrier plate device as described above; and drive rollers disposed below the carrier plate device for transporting the carrier plate device to various chambers.
[0056] In summary, this carrier plate device provides a locking part 200 on the vertical rib 120 and a limiting hole 310 on the tray 300 that matches the locking part 200. The locking part 200 is embedded in the limiting hole 310 to limit the displacement of the tray 300 on the carrier plate frame 100, thereby preventing the tray 300 from deforming or warping under high temperature environment, which would cause gaps between the tray 300 and the frame and result in uneven coating.
[0057] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0058] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as the second element, component, region, layer, or segment.
[0059] Spatially relative terms, such as “inside,” “outside,” “below,” “below,” “down,” “above,” “up,” etc., may be used herein to describe the relationship between one element or feature illustrated in the figures and another element or feature. In addition to the orientations depicted in the figures, spatially relative terms may be intended to cover different orientations of the device in use or operation. For example, if the device in the figure is flipped, an element described as “below” or “below” other elements or features would be oriented as “above” other elements or features. Thus, the example term “below” can cover both above and below orientations. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.
[0060] In the above discussion, unless otherwise stated, when used to describe numerical values, the terms “about,” “approximately,” “basically,” etc., indicate a change of + / - 10% in that value.
[0061] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.
Claims
1. A carrier device, characterized by The utility model relates to a carrier board device, including: a carrier board frame (100) comprising a plurality of longitudinal and transverse intersecting horizontal ribs (110) and vertical ribs (120); a plurality of clamping parts (200) arranged on the vertical ribs (120); at least one tray (300) having a plurality of limiting holes (310) adapted to the clamping parts (200) arranged thereon; wherein the clamping parts (200) are embedded in the limiting holes (310) to limit the displacement of the tray (300) on the carrier board frame (100).
2. The carrier board device of claim 1, wherein the edge of the tray (300) is a triangular structure (320), and a notch adapted to the triangular structure (320) is arranged on both sides of the vertical rib (120) at the center of the carrier board frame (100), and the triangular structure (320) is embedded in the notch to limit the tray (300).
3. The carrier board device of claim 1, wherein the clamping part (200) is a hanger; the hanger comprises a hook (210) and a hook fixing part (220), and the hook (210) is arranged above the hook fixing part (220).
4. The carrier board device of claim 3, wherein a plurality of fixing holes (221) are arranged on the hook fixing part (220), and the hanger is assembled on the vertical rib (120) through the fixing holes (221) and bolts (510).
5. The carrier board device of claim 1, wherein the limiting hole (310) protrudes from the surface of the tray (300), and the position and opening direction thereof are matched with the clamping part (200).
6. The carrier board device of claim 1, wherein the clamping part (200) on the vertical rib (120) at the center of the carrier board frame (100) is a wide hanger (230), and the wide hangers (230) are symmetrically arranged on both sides of the central vertical rib (120); and the length of the hook fixing part (220) of the wide hanger (230) is greater than the length of the hook (210), and a gap exists between the hook (210) and the hook fixing part (220) to form a support surface (231) of the tray (300).
7. The carrier board device of claim 1, wherein the clamping part (200) on the vertical rib (120) on both sides of the carrier board frame (100) is a narrow hanger (240), and a conductive sheet (400) is arranged between the narrow hangers (240), and at least two conductive sheets (400) are electrically connected in series through the narrow hangers.
8. The carrier board device of claim 7, wherein the facing directions of the upper and lower adjacent narrow hangers (240) are opposite, and the facing directions of the limiting holes (310) corresponding to the upper and lower adjacent narrow hangers (240) are opposite.
9. The carrier board device of claim 1, wherein The intersection of the horizontal rib (110) and the vertical rib (120) is provided with a right-angle gasket (500), a plurality of threaded holes are formed in the right-angle gasket (500), a plurality of bolts (510) respectively pass through the threaded holes and the horizontal rib (110) and the threaded holes and the vertical rib (120), and the right-angle gasket (500) is fixed on the horizontal rib (110) and the vertical rib (120) by cooperating with the nuts (520).
10. A coating apparatus, characterized by, Comprising: The carrier plate device according to any one of claims 1-9; And, A transmission roller is arranged below the carrier plate device and is used for conveying the carrier plate device into each chamber.