Supporting device and heating furnace

Abstract

The supporting device comprises a supporting piece, the supporting piece is provided with a supporting face and a hollowed-out area, the supporting face is used for supporting graphite paper, and the hollowed-out area penetrates through the supporting face. The supporting device and the graphite paper can be charged and discharged together. Before baking, a user can flatly lay the graphite paper on the supporting surface of the supporting device in advance, then the graphite paper and the graphite paper are put into a heating furnace together to be baked, and the hollow area is beneficial to the baking process. After baking, a user can take out the supporting device and the graphite paper from the heating furnace together, and then take down the graphite paper from the supporting surface. Therefore, the graphite paper can be tiled and taken down outside the furnace, the space is wider, workers do not need to transfer the graphite paper into a hearth one by one, the difficulty of charging and discharging the graphite paper is reduced, and less manpower is needed. Besides, in the loading-out process, the graphite paper is flatly laid on the supporting face, the probability that the graphite paper is damaged in the transferring process is reduced, and the yield is increased.

Description

Technical Field

[0001] This application relates to the field of heating equipment technology, and in particular to a support device and a heating furnace. Background Technology

[0002] In related technologies, the CVD furnace is used to bake graphite paper by directly laying the graphite paper flat inside the CVD furnace for baking.

[0003] However, directly baking flat-laid graphite paper inside a CVD furnace requires personnel to stand on both sides of the furnace chamber and pass the graphite paper one sheet at a time into the furnace. This presents problems such as difficulty in removing the graphite paper from the furnace, long loading and unloading times, and low efficiency. Generally, at least four people are required for this operation, which consumes a lot of manpower. In addition, loading and unloading are carried out in the confined space of the furnace, and the graphite paper is easily damaged during the transfer process, resulting in a low yield. Utility Model Content

[0004] Therefore, it is necessary to provide a support device and heating furnace that can improve the efficiency of graphite paper loading and unloading and reduce its damage rate during loading and unloading, in order to address the above problems.

[0005] A support device includes a support member having a support surface and a hollow area, the support surface being used to support graphite paper, and the hollow area penetrating the support surface.

[0006] The aforementioned support device can be loaded into the furnace along with the graphite paper. Before baking, the user can lay the graphite paper flat on the support surface of the device before loading it into the furnace for baking. The perforated area facilitates the baking process. After baking, the user can remove the support device and graphite paper from the furnace, and then remove the graphite paper from the support surface. In this way, the laying and removal of the graphite paper can be done outside the furnace, providing more space and eliminating the need for workers to pass the graphite paper sheet by sheet from both sides of the furnace chamber, reducing the difficulty of loading and unloading, improving production efficiency, and requiring less manpower. Furthermore, since the graphite paper is laid flat on the support surface during loading, the probability of damage during transport is reduced, increasing the yield rate.

[0007] In one embodiment, the support member includes at least two support rods, all of which together define the support surface, and all of the support rods are spaced apart to form the hollow area.

[0008] In one embodiment, the support device further includes a base, all of the support rods are connected to the base, and together define the support surface at their top ends in the height direction of the base.

[0009] In one embodiment, the longitudinal direction of all the support rods is arranged along a first direction;

[0010] The support device further includes a crossbar, the longitudinal direction of which is arranged along the second direction and connects at least two of the support rods, wherein the first direction intersects the second direction.

[0011] In one embodiment, all the support rods include a first support rod and a second support rod, the first support rod and the second support rod being respectively disposed on both sides of the base in the first direction;

[0012] And / or, the base has a threaded mounting hole, one end of the support rod is a threaded mounting end, and the support rod is connected to the base through the threaded mounting end and the threaded mounting hole;

[0013] And / or, the crossbar is connected to the support rod via a first threaded connection.

[0014] In one embodiment, the support device further includes a pad protruding from the base surface opposite to the support surface.

[0015] In one embodiment, the support device further includes a second limiting block, which protrudes from the surface of the base opposite to the support surface.

[0016] In one embodiment, the support device further includes at least two first limiting blocks, all of which are disposed on the periphery of the support surface.

[0017] In one embodiment, all the first limiting blocks include corner limiting blocks, which are located at the corners of the support surface;

[0018] And / or, all of the first limiting blocks include side limiting blocks, which are located at the edge of the support surface.

[0019] A heating furnace includes the aforementioned support device. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the support device in one embodiment of this application.

[0022] Figure 2 for Figure 1The diagram shows the structure of the support device from another angle.

[0023] Figure 3 for Figure 1 The diagram shows the structure of the support device after it has been fitted with graphite paper.

[0024] Figure 4 for Figure 3 The diagram shows the structure of the support device containing graphite paper from another angle.

[0025] Figure 5 for Figure 3 The diagram shows the structure of the support device containing graphite paper engaging with the fork arm at another angle.

[0026] Explanation of reference numerals in the attached drawings: 100, support device; 10, support component; 11, support surface; 13, hollow area; 15, support rod; 151, first support rod; 153, second support rod; 20, base; 30, first limiting block; 31, corner limiting block; 33, side limiting block; 40, crossbar; 41, first threaded component; 50, pad; 51, second threaded component; 60, second limiting block; 201, graphite paper; 203, fork arm. Detailed Implementation

[0027] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0028] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0029] Furthermore, where the term "and / or" appears, it merely describes the relationship between related objects and indicates that three relationships can exist. For example, A and / or B can represent the relationship between A and B: A alone, A and B simultaneously, and B alone. Additionally, the character " / " in this document generally indicates an "or" relationship between the related objects before and after it. Where the terms "first" and "second" appear, these terms are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature specified with "first" or "second" may explicitly or implicitly include at least one of those features. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, four, five, etc., unless otherwise explicitly specified.

[0030] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0031] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0032] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0033] Please see Figures 1 to 5The support device 100 provided in one embodiment of this application includes a support member 10, which has a support surface 11 and a hollow area 13. The support surface 11 is used to support graphite paper 201, and the hollow area 13 penetrates the support surface 11.

[0034] Understandably, the graphite paper 201 can be laid flat on the support surface 11. In addition, the support member 10 adopts a hollow design, and the part of the graphite paper 201 aligned with the hollow area 13 is not blocked by the support member 10. That is, in addition to supporting the graphite paper 201 through the support surface 11, the support member 10 can also ensure that it is in direct contact with the heating gas or thermal radiation through the hollow area 13, thus ensuring the efficiency of convective heat transfer and thermal radiation.

[0035] The aforementioned support device 100 can be loaded into the furnace along with the graphite paper 201. Before baking, the user can lay the graphite paper 201 flat on the support surface 11 of the support device 100, and then load it into the heating furnace together for baking. The perforated area 13 facilitates the baking process. After baking, the user can remove the support device 100 and the graphite paper 201 from the heating furnace, and then remove the graphite paper 201 from the support surface 11. In this way, the laying and removal of the graphite paper 201 can be carried out outside the furnace, providing more space. This eliminates the need for staff to pass the graphite paper 201 sheet by sheet from both sides of the furnace chamber, reducing the difficulty of loading and unloading, improving production efficiency, and requiring less manpower. Furthermore, during the loading process, the graphite paper 201 remains flat on the support surface 11 and is not bent or pulled, which reduces the probability of damage during transport and improves the yield rate.

[0036] In some embodiments, the support member 10 includes at least two support rods 15, all of which together define a support surface 11, and all of which are spaced apart to form a hollow area 13.

[0037] Thus, the support rods 15 are spaced apart, which naturally form the hollow area 13 and the support surface 11. This structure is simple and reliable.

[0038] In one specific embodiment, the support rod 15 may have a circular cross-section and may be made of graphite material. In other embodiments, the support rod 15 may also have a gaseous shape structure, for example, a square cross-section, etc., which are not specifically limited here.

[0039] In some embodiments, the support device 100 further includes a base 20, all support rods 15 are connected to the base 20, and are positioned along the height of the base 20 (e.g., ...). Figure 4 The tops of the Z-direction (as shown) together define and form the support surface 11.

[0040] Understandably, the base 20 has a top surface and a bottom surface on its two sides in the height direction, wherein the bottom surface can be used for support inside the heating furnace.

[0041] Thus, the base 20 can serve as an installation base, and the support rod 15 can be connected to it to build the support frame.

[0042] In one embodiment, the top end of the support rod 15 in the height direction of the base 20 is flush with the top surface of the base 20, and the top surface of the base 20 can be part of the support surface 11. In other embodiments, the top end of the support rod 15 in the height direction of the base 20 is higher than the top surface of the base 20, and the top surface of the base 20 is not part of the support surface 11.

[0043] In some embodiments, the support device 100 further includes at least two first limiting blocks 30, all of which are disposed on the periphery of the support surface 11.

[0044] Understandably, all the first limiting blocks 30 can be arranged around the support surface 11, and their top ends are higher than the support surface 11 in the height direction of the base 20. That is, the first limiting blocks 30 protrude around the support surface 11 to limit movement at the edge of the support surface 11. In other words, all the first limiting blocks 30 can also be understood as being used to define the range of the support surface 11.

[0045] Thus, after the graphite paper 201 is laid flat on the support surface 11, the first limiting block 30 can reduce the probability of it shifting or moving along the support surface 11, thereby improving its stability. On the other hand, the first limiting block 30 can also protect the graphite paper 201 in the height direction, reducing the probability of the graphite paper 201 being damaged by external structural pressure.

[0046] Furthermore, all first limiting blocks 30 include corner limiting blocks 31, which are located at the corners of the support surface 11.

[0047] Here, the corner refers to the intersection of the outermost edges of the support surface 11. Specifically, the support surface 11 can be, but is not limited to, a square, and the first limiting block 30 includes four corner limiting blocks 31, which can be located at the four corners.

[0048] In this way, the corner limit block 31 can limit and protect the graphite paper 201 at the four corners, and comprehensively restrict the translation and movement of the graphite paper 201.

[0049] Furthermore, all first limiting blocks 30 include side limiting blocks 33, which are located at the edge of the support surface 11.

[0050] Understandably, the side limiting block 33 can be set along one side line of the support surface 11. Specifically, the side limiting blocks 33 can be set in pairs on opposite sides of the support surface 11.

[0051] Thus, the side limiting block 33 can limit and protect the graphite paper 201 from the side, mainly restricting the left and right and / or front and back translation and movement of the graphite paper 201.

[0052] In some embodiments, the longitudinal direction of all support rods 15 is along a first direction (e.g., Figure 2 (The X direction is shown in the image) setting.

[0053] Specifically, the first direction can be the direction in which the support device 100 is mounted on the heating furnace. The outline of the support surface 11 can be generally rectangular, and the first direction is its length direction.

[0054] Furthermore, the support device 100 also includes a crossbar 40, the longitudinal direction of which is along the second direction (e.g., Figure 2 The first direction (as shown in the Y direction) is set up and connected to at least two support rods 15, with the first direction intersecting the second direction.

[0055] Specifically, the second direction can be perpendicular to the first direction, where the first direction is the length direction of the support surface 11 and the second direction is the width direction of the support surface 11.

[0056] In this way, the crossbar 40 can connect the different support rods 15 to form a frame together, which helps to improve the stability of the support rods 15.

[0057] Furthermore, the crossbar 40 and the support rod 15 are connected by a first threaded component 41, which can be, but is not limited to, a screw. Thus, the connection between the crossbar 40 and the support rod 15 is simple and reliable.

[0058] In some embodiments, the base 20 has a threaded mounting hole, and one end of the support rod 15 is a threaded mounting end. The support rod 15 is connected to the base 20 through the threaded mounting end and the threaded mounting hole.

[0059] Understandably, the threaded assembly hole of the base 20 may have an internal thread, and the threaded assembly end of the support rod 15 may have an external thread, with the external thread of the threaded assembly end matching the internal thread of the threaded assembly hole.

[0060] Thus, the support rod 15 can be connected to the base 20 by inserting the threaded end into the threaded hole and rotating it.

[0061] In some embodiments, all support rods 15 include a first support rod 151 and a second support rod 153, with the first support rod 151 and the second support rod 153 respectively disposed on both sides of the base 20 in a first direction.

[0062] Understandably, all support rods 15 extend to both sides of the chassis. The crossbar 40 may have mounting holes for inserting the end of the support rod 15 away from the base 20.

[0063] All support rods 15 include a set of first support rods 151 and a set of second support rods 153. Each set of first support rods 151 includes at least two first support rods 151, and each set of second support rods 153 includes at least two second support rods 153. All first support rods 151 are spaced apart along a second direction, and all second support rods 153 are spaced apart along a second direction.

[0064] Specifically, the support device 100 includes two crossbars 40, one of which connects to the end of all the first support rods 151 away from the base 20, and the other crossbar 40 connects to the end of all the second support rods 153 away from the base 20.

[0065] Thus, the support member 10 extends to both sides with the base 20 as the support center to form a stable support surface 11, and forms a hollow area 13 between the adjacent first support rod 151 and second support rod 153.

[0066] In some embodiments, the support device 100 further includes a pad 50, which protrudes from the surface of the base 20 opposite to the support surface 11.

[0067] Specifically, the pad 50 is located on the bottom surface of the base 20 to form a working space at the bottom of the base 20 for the fork arm 203 of the forklift to extend into. The pad 50 can be connected to the base 20 via the second threaded part 51.

[0068] Thus, when the support device 100 is placed on the bottom surface or inside the heating furnace, there is a certain working space under the base 20 supported by the pad block 50, which allows the fork arm 203 of the forklift to extend in, so that the support device 100 can be picked up and put in by the forklift, making it convenient for the support device 100 to be loaded and unloaded from the furnace.

[0069] In one embodiment, the pad 50 is generally rectangular and made of graphite. In other embodiments, the pad 50 may also have other shapes or structures, such as circular graphite pillars, square graphite pillars, etc., which are not specifically limited here.

[0070] Furthermore, the support device 100 also includes a second limiting block 60, which protrudes from the surface of the base 20 opposite to the support surface 11.

[0071] In other words, the second limiting block 60 has a limiting surface that intersects with the horizontal plane and protrudes from the bottom surface of the base 20. Specifically, the first direction is the direction in which the support device 100 is installed out of the heating furnace. Correspondingly, the forklift's fork arm 203 can reach or leave the working space below the base 20 along the first direction. The second limiting block 60 can be located at one end of the bottom surface of the base 20 in the first direction, and the two pads 50 can be located near the bottom surface at both ends in the second direction.

[0072] Thus, the two pads 50, the second limiting block 60 and the base 20 together define and form the working space. The fork arm 203 enters the working space along the first direction and can be raised and lowered in the working space to contact or separate from the bottom surface of the base 20 in order to pick up and put down the support device 100.

[0073] For ease of understanding, the assembly process of the support device 100 is briefly described below:

[0074] Step 1: Fix the pad 50 to the base 20 with the second threaded part 51 and lock it. Install the second limit block 60 onto the base 20. Then place the base 20 with the side of the pad 50 facing down on the flat ground, and the pad 50 is supported on the flat ground.

[0075] Step 2: Insert the threaded end of the support rod 15 into the corresponding threaded mounting hole of the base 20 and tighten it.

[0076] Step 3: Install the crossbar 40 onto the support rod 15 and lock it with the first threaded part 41 to prevent the crossbar 40 from moving. Then install the first limiting block 30 onto the base 20 and the crossbar 40. At this point, the support device 100 is complete.

[0077] To facilitate understanding, the process of loading and unloading graphite paper 201 from the furnace using the support device 100 is described below:

[0078] Step 1: Place the graphite paper 201 onto the support surface 11 of the assembled support device 100 (e.g., Figure 5 (as shown)

[0079] Step 2: The support device 100 is lifted off as a whole by a forklift (e.g., ...). Figure 5 (As shown), and then put into a heating furnace for baking of graphite paper 201;

[0080] Step 3: After the graphite paper 201 is baked, the support device 100 is removed from the heating furnace by a forklift, thus completing the loading and unloading process.

[0081] The aforementioned support device 100 allows for loading and unloading from the furnace in a spacious area outside the furnace. The graphite paper 201 is aligned and placed on the support device 100, then loaded into the heating furnace by a forklift. This eliminates the need for personnel to stand on either side of the furnace chamber and transfer the graphite paper 201 sheet by sheet, reducing the difficulty of loading and unloading. After the graphite paper 201 is aligned and placed on the support device 100, it can be loaded and unloaded by a forklift, reducing loading and unloading time and improving production efficiency. Loading and unloading in a spacious area outside the furnace avoids damage to the graphite paper 201 during transfer, improving the yield rate. Furthermore, loading and unloading in a spacious area outside the furnace requires only two people to operate, reducing labor requirements.

[0082] This application also provides a heating furnace, including the aforementioned support device 100. Specifically, the heating furnace can be, but is not limited to, a CVD furnace.

[0083] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0084] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A support device, characterized in that, The support device comprises a support piece (10) having a support surface (11) for supporting a graphite paper (201) and a hollowed region (13) penetrating the support surface (11).

2. The support device of claim 1, wherein, The support piece (10) comprises at least two support rods (15) which together define the support surface (11) and are spaced apart to form the hollowed region (13).

3. The support device of claim 2, wherein, The support device further comprises a base (20) to which the support rods (15) are connected and whose top end together defines the support surface (11) in the height direction.

4. The support device of claim 3, wherein, The longitudinal direction of the support rods (15) is arranged in a first direction. The support device further comprises a crossbar (40) having a longitudinal direction arranged in a second direction and connected to at least two support rods (15), wherein the first direction intersects the second direction.

5. The support device of claim 4, wherein, The support rods (15) comprise first support rods (151) and second support rods (153) arranged on both sides of the base (20) in the first direction, respectively. The base (20) has a threaded assembly hole, one end of the support rod (15) is a threaded assembly end, and the support rod (15) is connected to the base (20) through the threaded assembly end and the threaded assembly hole. The crossbar (40) and the support rod (15) are connected through a first threaded member (41).

6. The support apparatus of claim 3, wherein The support device further comprises a pad (50) protruding from the surface of the base (20) opposite to the support surface (11).

7. The support device of claim 6, wherein, The support device further comprises a second limiting block (60) protruding from the surface of the base (20) opposite to the support surface (11).

8. The support device of claim 1, wherein, The support device further comprises at least two first limiting blocks (30) arranged on the periphery of the support surface (11).

9. The support apparatus of claim 8, wherein, The first limiting blocks (30) comprise corner limiting blocks (31) arranged at the corners of the support surface (11). The first limiting blocks (30) further comprise side limiting blocks (33) arranged at the edges of the support surface (11).

10. A heating furnace characterized by comprising: The support device according to any one of claims 1-9.

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