Rotation module and torsion sensor thereof

Abstract

The utility model provides a rotating module which comprises a shell, a power unit and a torsion sensor. The power unit is arranged in the shell in the axial direction and assembled to output torsion. The torsion sensor is arranged around the power unit and comprises a first end, a second end, a first sensing beam and a second sensing beam. The first end and the second end are axially opposite to each other. The first end is connected with the shell, and the second end is connected with the power unit to measure the torque output by the power unit. The first sensing beam and the second sensing beam are respectively connected between the first end and the second end and are arranged at an interval. The first sensing beam comprises a first strain gauge arranged on the first face of the first sensing beam, and the second sensing beam comprises a second strain gauge arranged on the second face of the second sensing beam. The first surface and the second surface are not parallel to each other.

Description

Technical Field

[0001] This utility model relates to a rotation module, and more particularly to a rotation module and its torque sensor. The torque sensor, which has at least two sets of dissimilar sensing beams, is sleeved between the housing and the power unit, which facilitates the miniaturization of the rotation module while ensuring the accuracy of torque measurement. Background Technology

[0002] Modern industrial robots commonly use torque sensors to measure the torque at the output end of the robot joint, enabling high-precision operations such as welding or assembly. In current robot joints, the torque sensor is mounted on the flange end face of the reducer for measurement.

[0003] However, this assembly structure increases the axial stack length of the rotating modules in the robot joint and restricts the installation method. Furthermore, this assembly structure requires space for the torque sensor's wiring in the center perforation of the flange end face, which is not easy to achieve for miniaturized rotating modules with limited center perforation space. In addition, considering safety regulations requiring the torque sensor to output dual-channel torque signals, it is even more difficult to meet the measurement requirements in a limited space for small rotating modules.

[0004] In view of this, it is necessary to provide a rotation module and its torque sensor, which uses a torque sensor with at least two sets of dissimilar sensing beams sleeved between the housing and the power unit, which facilitates the miniaturization of the rotation module and ensures the accuracy of torque measurement, thus solving the problems existing in the prior art. Utility Model Content

[0005] The purpose of this invention is to provide a rotation module and its torque sensor. By utilizing a torque sensor with at least two sets of dissimilar sensing beams, fitted between the housing and the power unit, the rotation module can be miniaturized while ensuring the accuracy of torque measurement.

[0006] Another objective of this invention is to provide a rotation module and its torque sensor. The motor and reducer in the rotation module are connected axially, and the reducer outputs torque driven by the rotation of the motor. The torque sensor is arranged around the motor, with its two ends connected to the housing of the rotation module and the motor, respectively. This reduces the axial stacking length of the rotation module while achieving torque measurement, facilitating miniaturization. The rotation module includes a bearing disposed between the housing and the reducer to support the radial force on the torque sensor, ensuring accurate torque measurement and protecting the sensor from damage caused by non-sensing axial loads. Strain gauges are respectively provided on the first and second sensing beams of the torque sensor, and their planes are arranged, for example, with their orientations not parallel to each other circumferentially, thereby achieving dual-channel torque signal output for different measurement methods and improving the safety performance of the rotation module. The second sensing beam has radially arranged perforations, causing the strain of the second sensing beam to concentrate on the outer side. The second sensing beam also has two strain gauges, respectively disposed on two parallel and misaligned planes, to measure the tensile strain and compressive strain of the second sensing beam. This not only facilitates the adhesion and installation of strain gauges but also improves the measurement resolution of torque sensors. Torque sensors, for example, have multiple first sensing beams and second sensing beams, arranged symmetrically around a central axis and staggered to each other, further enhancing the measurement accuracy of the torque sensors.

[0007] To achieve the aforementioned objectives, this utility model provides a rotation module, including a housing, a power unit, and a torque sensor. The power unit is axially disposed within the housing and outputs torque. The torque sensor is arranged around the power unit with a central axis as its center, and the central axis is parallel to the axial direction. The central axis may be coaxial with the axial direction. The torque sensor includes a first end, a second end, a first sensing beam, and a second sensing beam. The first end and the second end are axially opposite to each other. The first end is connected to the housing, and the second end is connected to the power unit to measure the torque output by the power unit. The first sensing beam is connected between the first end and the second end. The first sensing beam includes a first strain gauge disposed on a first surface of the first sensing beam. The second sensing beam is connected between the first end and the second end and is spaced apart from the first sensing beam. The second sensing beam includes a second strain gauge disposed on a second surface of the second sensing beam. The first surface and the second surface are parallel to the axial direction, but the first surface and the second surface are not parallel to each other.

[0008] In one embodiment, the torque sensor includes a first body and a second body, arranged in a ring around a central axis. The first body is located at a first end, and the second body is located at a second end.

[0009] In one embodiment, the first body of the torque sensor is fixed axially to the housing, and the second body of the torque sensor is fixed axially to the power unit.

[0010] In one embodiment, the power unit includes a motor unit and a reducer. The motor unit and the reducer are axially connected, and the reducer is driven by the rotation of the motor unit around its central axis to output torque. The second body of the torque sensor is axially fixed to the motor unit.

[0011] In one embodiment, the motor unit includes a motor body and a connector. The connector is disposed around the motor body. A second body and a reducer are respectively fixed axially to the connector.

[0012] In one embodiment, the rotating module includes a bearing connected between the housing and the reducer.

[0013] In one embodiment, the first sensing beam includes a plurality of first sensing beams, and the second sensing beam includes a plurality of second sensing beams. The plurality of first sensing beams and the plurality of second sensing beams are respectively arranged symmetrically about a central axis, and the plurality of first sensing beams and the plurality of second sensing beams are arranged alternately.

[0014] In one embodiment, a first surface of the first sensing beam is perpendicular to the radial direction, and a second surface of the second sensing beam is perpendicular to the circumferential direction. The radial direction is perpendicular to the central axis. The circumferential direction is perpendicular to the radial direction and has a fixed distance from the central axis.

[0015] In one embodiment, the first strain gauge includes two first strain gauges, the measurement directions of which are not parallel to each other and are not parallel to the circumferential or axial directions.

[0016] In one embodiment, the second sensing beam includes a radially disposed through hole, and the second strain gauge includes two second strain gauges. The two second strain gauges are respectively arranged axially and corresponding to the through hole. Each of the two second strain gauges includes a second strain gauge, and the measurement direction of the second strain gauge is parallel to the axial direction.

[0017] In one embodiment, the second surface includes a first plane and a second plane. The first plane and the second plane are offset from each other to form a stepped structure. Two second strain gauges are respectively disposed on the first plane and the second plane.

[0018] To achieve the aforementioned objectives, this utility model further provides a torque sensor, comprising a first end, a second end, a first sensing beam, and a second sensing beam. The first end and the second end are axially opposite to each other. The first sensing beam is connected between the first end and the second end. The first sensing beam includes a first strain gauge disposed on a first surface of the first sensing beam. The second sensing beam is connected between the first end and the second end and is spaced apart from the first sensing beam. The second sensing beam includes a second strain gauge disposed on a second surface of the second sensing beam. The first surface and the second surface are parallel to the axial direction, but are not parallel to each other. A power unit assembly of a rotating module outputs torque, and a torque sensor assembly is arranged around the power unit with a central axis as the center. The first end is connected to the housing of the rotating module, and the second end is connected to the power unit to measure the torque output by the reducer.

[0019] In one embodiment, the torque sensor includes a first body and a second body, arranged in a ring around a central axis. The first body is located at a first end, and the second body is located at a second end.

[0020] In one embodiment, the second body assembly is axially fixed to the motor unit of the power unit.

[0021] In one embodiment, the first sensing beam includes a plurality of first sensing beams, and the second sensing beam includes a plurality of second sensing beams. The plurality of first sensing beams and the plurality of second sensing beams are respectively arranged symmetrically about a central axis, and the plurality of first sensing beams and the plurality of second sensing beams are arranged alternately.

[0022] In one embodiment, a first surface of the first sensing beam is perpendicular to the radial direction, and a second surface of the second sensing beam is perpendicular to the circumferential direction. The radial direction is perpendicular to the central axis. The circumferential direction is perpendicular to the radial direction and has a fixed distance from the central axis.

[0023] In one embodiment, the first strain gauge includes two first strain gauges, the measurement directions of which are not parallel to each other and are not parallel to the circumferential or axial directions.

[0024] In one embodiment, the second sensing beam includes a radially disposed through-hole, and the second strain gauge includes two second strain gauges. The two second strain gauges are arranged axially and are disposed corresponding to the through-hole. Each of the two second strain gauges includes a second strain gauge, and the measurement direction of the second strain gauge is parallel to the axial direction.

[0025] In one embodiment, the second surface includes a first plane and a second plane, which are offset from each other to form a stepped structure. Two second strain gauges are respectively disposed on the first plane and the second plane. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of the rotating module according to an embodiment of the present invention;

[0027] Figure 2A The rotating module of this utility model is along Figure 1 A cross-sectional view of line segment A-A';

[0028] Figure 2B The rotating module of this utility model is along Figure 1 A cross-sectional view of line segment A-A' from another perspective;

[0029] Figure 3A This is a schematic diagram of the structure of a torque sensor according to an embodiment of the present invention;

[0030] Figure 3B This is a schematic diagram of the torque sensor according to an embodiment of the present invention from another perspective;

[0031] In the attached figures, the following labels are used:

[0032] 1: Rotating Module

[0033] 10: Shell

[0034] 11: First convex part

[0035] 20: Power Unit

[0036] 21: Motor Unit

[0037] 211: Rotor

[0038] 212: Stator

[0039] 213: Connector

[0040] 213a: Second convex part

[0041] 22: Gearbox

[0042] 23: First pivot

[0043] 24: Second pivot

[0044] 25: Third Locking Fitting

[0045] 30: Torque sensor

[0046] 31: First end

[0047] 32: Second end

[0048] 33: First sensing beam

[0049] 331: First Strain Code

[0050] 331a: First strain gauge

[0051] 332: First Page

[0052] 34: Second sensing beam

[0053] 341: Second Strain Gauge

[0054] 341a: Second strain gauge

[0055] 342: Second Page

[0056] 342a: First plane

[0057] 342b: Second plane

[0058] 343: Perforation

[0059] 35: The first ontology

[0060] 36: Second Body

[0061] 40: Bearing

[0062] A-A': line segment

[0063] C: Central axis

[0064] X, Y, Z: Axes. Detailed Implementation

[0065] Some typical embodiments embodying the features and advantages of this utility model will be described in detail in the following description. It should be understood that this utility model can have various variations in different forms, all of which do not depart from the scope of this utility model, and the descriptions and drawings herein are essentially illustrative and not intended to limit this utility model. For example, if the following description of this utility model states that a first feature is disposed on or above a second feature, it indicates that it includes embodiments where the first and second features are in direct contact, and also includes embodiments where an additional feature can be disposed between the first and second features, so that the first and second features may not be in direct contact. Furthermore, to facilitate the description of the relationship between one component or feature in the drawings and another component(s) or feature(s), spatially related terms such as "inner," "outer," "front," "rear," and similar terms may be used. In addition to the orientations shown in the drawings, spatially related terms are used to cover different orientations of the device in use or operation. The device described in this utility model can be positioned in other directions (e.g., rotated 90 degrees or located in other directions), and the spatial terminology used can be interpreted accordingly. When a component is referred to as being "connected" or "coupled" to another component, it can be directly connected to or coupled to the other component, or there may be an intervening component. It should be understood that although terms such as "first," "second," and "third" may be used in the claims to describe different components, these components should not be limited by these terms, and the components described in the embodiments are represented by different component symbols. These terms are used to distinguish different components; for example, a first component may be referred to as a second component. Similarly, a second component may also be referred to as a first component without departing from the scope of the embodiments.

[0066] Please refer to Figures 1 to 3B . Figure 1 This is a schematic diagram of the structure of the rotating module according to an embodiment of the present invention. Figure 2A The rotating module of this utility model is along Figure 1 A cross-sectional view of line segment AA'. Figure 2B The rotating module of this utility model is along Figure 1 A cross-sectional view of line segment A-A' from another perspective. Figure 3A This is a schematic diagram of the structure of a torque sensor according to an embodiment of the present invention. Figure 3BThis is a schematic diagram of the torque sensor according to an embodiment of the present invention from another perspective. In this embodiment, the rotation module 1 is applied, for example, to a robot joint. It should be noted that the rotation module 1 of the present invention is not limited to robot joints, but can also be applied to other power mechanical structures; however, this is not an essential technical feature of the present invention and will not be described in detail here. In this embodiment, the rotation module 1 includes a housing 10, a power unit 20, and a torque sensor 30. The power unit 20 is arranged axially (Z-axis direction) within the housing 10 and outputs torque. The torque sensor 30 is arranged around the power unit 20 with a central axis C as the center, and the central axis C is parallel to the axial direction. The torque sensor 30 includes a first end 31, a second end 32, a first sensing beam 33, and a second sensing beam 34. In this embodiment, the first end 31 and the second end 32 of the torque sensor 30 are opposite each other axially (Z-axis direction). The first end 31 is connected to the housing 10 and is structured as a fixed end, while the second end 32 is connected to the power unit 20 and is structured as a force-bearing end. The first sensing beam 33 is connected between the first end 31 and the second end 32. The first sensing beam includes a first strain gauge 331, which is disposed on the first surface 332 of the first sensing beam 33. The second sensing beam 34 is connected between the first end 31 and the second end 32, and is spaced apart from the first sensing beam 33. The second sensing beam 34 includes a second strain gauge 341, which is disposed on the second surface 342 of the second sensing beam 34. In this embodiment, the first sensing beam 33 and the second sensing beam 34 may be made of an elastic body, for example, and have different shapes and structures, and this utility model is not limited thereto. When the second end 32 (force-bearing end) of the torque sensor 30 is displaced relative to the first end 31 (fixed end) by the torque output by the power unit 20, the first sensing beam 33 and the second sensing beam 34 deform together, and then output torque signals through the first strain gauge 331 and the second strain gauge 341. By connecting the two ends of the torque sensor 30 to the housing 10 and the power unit 20 respectively, and cooperating with the sensing beam connected between the two ends of the torque sensor 30 and the strain gauge thereon, the rotation module 1 realizes the torque measurement of the power unit 20 relative to the housing 10. The arrangement of the torque sensor 30 surrounding the radially outer side of the power unit 20 further reduces the stack length of the rotation module 1 in the axial direction (Z-axis direction). The radial direction is perpendicular to the central axis C. In this embodiment, the first surface 332 and the second surface 342 are, for example, parallel to the axial direction (Z-axis direction), and the first surface 332 and the second surface 342 are not parallel to each other. The first strain gauge 331 of the first sensing beam 33 and the second strain gauge 341 of the second sensing beam 34 are arranged differently, which further realizes the dual-channel torque signal output of different measurement methods and improves the safety performance of the rotation module 1.

[0067] In this embodiment, the power unit 20 includes, for example, a motor unit 21, a reducer 22, a first rotating shaft 23, and a second rotating shaft 24, all concentrically arranged around a central axis C. The motor unit 21 and the reducer 22 are axially connected. The motor unit 21 includes, for example, a rotor 211, a stator 212, and a connecting member 213. The rotor 211 and stator 212 form the motor body. The stator 212 surrounds the rotor 211, and the connecting member 213 surrounds both the stator 212 and the rotor 211. In other words, the rotor 211, stator 212, and connecting member 213 are arranged radially from the inside out. The rotor 211 rotates relative to the stator 212 around the central axis C, causing the first rotating shaft 23 to rotate, which in turn causes the reducer 22 to rotate. The motor unit 21 inputs torque to the reducer 22 via the first rotating shaft 23, and the reducer 22 then outputs torque via the second rotating shaft 24 to drive other robot joints (not shown). Torque sensor 30 is used to measure the reaction torque of the second rotating shaft 24. In this embodiment, torque sensor 30 includes a first body 35 and a second body 36, with the first body 35 located at a first end 31 and the second body 36 located at a second end 32. The first body 35 and the second body 36 may have similar shapes and sizes, for example, and this invention is not limited thereto. A first sensing beam 33 and a second sensing beam 34 are axially connected between the first body 35 and the second body 36. The first body 35 and the second body 36 are respectively arranged in a ring around a central axis C, and are, for example, fitted onto the connector 213 of the motor unit 21. In other words, the rotor 211, stator 212, connector 213, and torque sensor 30 are arranged radially from the inside out to reduce the axial stacking length of the rotating module 1.

[0068] In this embodiment, the first body 35 is axially fixed to the housing 10, and the second body 36 is axially fixed to the connector 213 of the motor unit 21. The reducer 22 is axially fixed to the connector 213 of the motor unit 21. The housing 10 includes, for example, a first protrusion 11 extending radially inward, and the connector 213 includes, for example, a second protrusion 213a extending radially outward. The torque sensor 30 is axially located between the first protrusion 11 and the second protrusion 213a. The first body 35 is fixed to the first protrusion 11 of the housing 10, and the second body 36 is fixed to the second protrusion 213a of the connector 213. In other words, the first protrusion 11, the torque sensor 30, and the second protrusion 213a are stacked sequentially in the axial direction. In a radial cross-section, the axial width of the torque sensor 30 is, for example, not greater than the axial width of the motor unit 21. In this embodiment, the rotating module 1 is connected axially to the first protrusion 11 of the housing 10 and the first body 35 of the torque sensor 30 via a first locking fastener (not shown). A second locking fastener (not shown) is connected axially to the second protrusion 213a of the connector 213 and the second body 36 of the torque sensor 30. A third locking fastener 25 is connected axially to the second protrusion 213a of the connector 213 and the reducer 22. It should be noted that the locking methods of the housing 10, torque sensor 30, motor unit 21, and reducer 22 are not limited to this, but are not limiting features of this invention and will not be elaborated here. The first end 31 of the torque sensor 30 is configured as a fixed end by locking the first body 35 to the housing 10. The motor unit 21 and the reducer 22 are locked together to form an integral power unit 20, and the second end 32 of the torque sensor 30 is configured as a force-bearing end by locking the second body 36 to the power unit 20. When the second end 32 (force-bearing end) of the torque sensor 30 is displaced relative to the first end 31 (fixed end) by bearing the torque output by the power unit 20, the first sensing beam 33 and the second sensing beam 34 deform, thereby outputting a torque signal through the first strain gauge 331 and the second strain gauge 341. In this embodiment, the rotation module 1 further includes, for example, a bearing 40, which is arranged around the reducer 22 with the central shaft C as the center and is connected between the housing 10 and the reducer 22, thereby supporting the radial force mounted on the torque sensor 30 and ensuring the accuracy of torque measurement.

[0069] Please see Figure 3A and Figure 3B . Figure 3A This is a schematic diagram of the structure of a torque sensor according to an embodiment of the present invention. Figure 3BThis is a schematic diagram of the torque sensor according to an embodiment of the present invention from another perspective. In this embodiment, the torque sensor 30 includes, for example, a plurality of first sensing beams 33 and a plurality of second sensing beams 34. The plurality of first sensing beams 33 and the plurality of second sensing beams 34 are respectively symmetrically arranged about a central axis C, and are staggered with each other. In this embodiment, the torque sensor 30 includes, for example, four first sensing beams 33 and four second sensing beams 34, staggered circumferentially. The circumferential direction is perpendicular to the radial direction and has a fixed distance from the central axis C. Adjacent first sensing beams 33 have an angle of 45 degrees about the central axis C. Adjacent second sensing beams 34 have an angle of 45 degrees about the central axis C. Adjacent first sensing beams 33 and second sensing beams 34 have an angle of 22.5 degrees about the central axis C. In this embodiment, two of the four first sensing beams 33 are provided with first strain gauges 331, and the two first sensing beams 33 with first strain gauges 331 are opposite to each other. Two of the four second sensing beams 34 are provided with second strain gauges 341, and the two second sensing beams 34 with second strain gauges 341 are opposite to each other. Through the symmetrical arrangement of the sensing beams and strain gauges, the torque sensor 30 of this invention further improves measurement accuracy. Of course, the number and arrangement of the first sensing beams 33, second sensing beams 34, first strain gauges 331, and second strain gauges 341 of this invention are not limited to this. In other embodiments of this invention, the first strain gauges 331 and second strain gauges 341 can be installed on the corresponding planes of the symmetrical sensing beams 33 and 34 according to usage requirements.

[0070] In this embodiment, the first strain gauge 331 of the first sensing beam 33 is attached to the first surface 332. The first surface 332 of the first sensing beam 33 is, for example, perpendicular to the radial direction. The first strain gauge 331 includes, for example, two first strain gauges 331a. The measurement directions of the two first strain gauges 331a are not parallel to each other, nor are they parallel to the circumferential or axial direction. It should be noted that the strain gauges include metal wires arranged parallel to each other in a specific direction, and the measurement direction of the strain gauges represents the direction in which the metal wires are arranged parallel to each other. In this embodiment, the measurement directions of the two first strain gauges 331a are, for example, perpendicular to each other, and each has an angle of 45 degrees with the axial direction. When the second end 32 (force-bearing end) of the torque sensor 30 carries the torque output by the power unit 20 and is displaced relative to the first end 31 (fixed end), the first sensing beam 33 deforms, causing the metal wires of the first strain gauges 331a to deform, thereby measuring the shear strain of the first sensing beam 33 and outputting a torque signal.

[0071] In this embodiment, the two second strain gauges 341 of the second sensing beam 34 are respectively attached to the first plane 342a and the second plane 342b. The first plane 342a and the second plane 342b are perpendicular to the circumferential direction and are staggered and parallel to each other, forming a step structure. The first plane 342a is adjacent to the first body 35, and the second plane is adjacent to the second body 36, for example. In this embodiment, the second sensing beam 34 includes a radially arranged through hole 343. The through hole 343 penetrates the second sensing beam 34, so that the strain of the second sensing beam 34 is concentrated on the outer surface, i.e., the first plane 342a and the second plane 342b, which facilitates the attachment of the strain gauges, improves the measurement resolution of the torque sensor 30, and helps to improve accuracy. The two second strain gauges 341 are arranged axially and corresponding to the through hole 343. The second strain gauge 341 includes a second strain gauge 341a. The measurement direction of the second strain gauge 341a is parallel to the axial direction. The second strain gauges 341a of the two strain gauges 341 are respectively disposed at the points closest to the inner wall of the perforation 343 and the first plane 342a, and at the points closest to the inner wall of the perforation 343 and the second plane 342b, to measure concentrated strain. When the second end 32 (force-bearing end) of the torque sensor 30 is displaced relative to the first end 31 (fixed end) by bearing the torque output by the power unit 20, the second sensing beam 34 is deformed, causing the metal wire of the second strain gauge 341a to deform. Since the two second strain gauges 341 are arranged axially and respectively disposed on the first plane 342a and the second plane 342b, their second strain gauges 341a measure the tensile strain and compressive strain of the second sensing beam 34 and output torque signals, thereby improving the measurement resolution of the torque sensor.

[0072] In summary, this utility model provides a rotation module and its torque sensor. The motor and reducer in the rotation module are connected axially, and the reducer outputs torque driven by the rotation of the motor. The torque sensor is arranged around the motor, with its two ends connected to the housing of the rotation module and the motor, respectively. This reduces the axial stacking length of the rotation module while achieving torque measurement, and facilitates the installation of a miniaturized rotation module. The rotation module includes a bearing disposed between the housing and the reducer to support the radial force on the torque sensor, ensuring the accuracy of torque measurement and protecting the sensor from damage caused by non-sensing axial loads. Strain gauges are respectively provided on the first and second sensing beams of the torque sensor, and their planes are arranged, for example, with their orientations not parallel to each other circumferentially, thereby achieving dual-channel torque signal output for different measurement methods and improving the safety performance of the rotation module. The second sensing beam has radially arranged through holes, causing the strain of the second sensing beam to concentrate on the outer side. The second sensing beam also has two strain gauges, respectively disposed on two parallel and misaligned planes, to measure the tensile strain and compressive strain of the second sensing beam. This not only facilitates the adhesion and installation of strain gauges but also improves the measurement resolution of torque sensors. Torque sensors, for example, have multiple first sensing beams and second sensing beams, arranged symmetrically around a central axis and staggered to each other, further enhancing the measurement accuracy of the torque sensors.

[0073] This utility model may be modified in various ways by those skilled in the art, but all modifications shall not deviate from the scope of protection sought by the appended patent application.

Claims

1. A rotating module, characterized by The torque sensor comprises: a first end; a second end opposite to the first end along the axial direction, wherein the first end is connected to the housing and the second end is connected to the power unit to measure the torque output by the power unit; a first sensing beam connected between the first end and the second end, wherein the first sensing beam comprises a first strain gauge arranged on a first surface of the first sensing beam; and a second sensing beam connected between the first end and the second end and spaced apart from the first sensing beam, wherein the second sensing beam comprises a second strain gauge arranged on a second surface of the second sensing beam, wherein the first surface and the second surface are parallel to the axial direction and the first surface is not parallel to the second surface. The torque sensor comprises a first body and a second body arranged annularly around the central axis, wherein the first body is located at the first end and the second body is located at the second end. The first body of the torque sensor is fixed to the housing along the axial direction and the second body of the torque sensor is fixed to the power unit along the axial direction. The power unit comprises a motor unit and a speed reducer, the motor unit and the speed reducer are connected along the axial direction, and the speed reducer is configured to output a torque driven by the rotation of the motor unit around the central axis, wherein the second body of the torque sensor is fixed to the motor unit along the axial direction. The motor unit comprises a motor body and a connecting member arranged around the motor body, wherein the second body and the speed reducer are respectively fixed to the connecting member along the axial direction.

2. The rotating module of claim 1, wherein, The torque sensor comprises a bearing connected between the housing and the speed reducer.

3. The rotating module of claim 2, wherein, The first sensing beam comprises a plurality of first sensing beams and the second sensing beam comprises a plurality of second sensing beams, wherein the plurality of first sensing beams and the plurality of second sensing beams are respectively arranged symmetrically around the central axis and staggered with each other.

4. The rotating module of claim 3, wherein the rotating module is configured to rotate the substrate about the first axis of rotation. The first surface of the first sensing beam is perpendicular to a radial direction and the second surface of the second sensing beam is perpendicular to a circumferential direction, wherein the radial direction is perpendicular to the central axis, the circumferential direction is perpendicular to the radial direction, and the circumferential direction has a fixed distance from the central axis.

5. The rotating module of claim 4, wherein the rotating module is configured to rotate the substrate about the first axis of rotation. The first strain gauge comprises two first strain gauges, the measurement directions of the two first strain gauges are not parallel to each other and not parallel to the circumferential direction or the axial direction.

6. The rotating module of claim 4, wherein the rotating module is configured to rotate the substrate about the first axis of rotation. The second sensing beam comprises a through hole arranged along the radial direction, and the second strain gauge comprises two second strain gauges, wherein the two second strain gauges are arranged along the axial direction and correspond to the through hole, wherein the two second strain gauges respectively comprise a second strain gauge, and the measurement direction of the second strain gauge is parallel to the axial direction.

7. The rotational module of claim 1, wherein, The second surface comprises a first plane and a second plane, the first plane and the second plane are staggered to form a stepped structure, and the two second strain gauges are respectively arranged on the first plane and the second plane.

8. The rotational module of claim 1, wherein, ​ 9. The rotating module of claim 8, wherein the rotating module is configured to rotate the substrate about the first axis of rotation and the second axis of rotation. ​ 10. The rotating module of claim 8, wherein the rotating module is configured to rotate the substrate about the first axis of rotation and the second axis of rotation. ​ 11. The rotating module of claim 10, wherein the rotating module is configured to rotate the substrate about the first axis of rotation and the second axis of rotation. ​ 12. A torque sensor, suitable for a rotation module, characterized in that, The torque sensor comprises: a first end; a second end opposite to the first end along an axial direction; a first sensing beam connected between the first end and the second end, wherein the first sensing beam comprises a first strain gauge disposed on a first surface of the first sensing beam; and a second sensing beam connected between the first end and the second end and spaced apart from the first sensing beam, wherein the second sensing beam comprises a second strain gauge disposed on a second surface of the second sensing beam, wherein the first surface and the second surface are parallel to the axial direction, and the first surface and the second surface are not parallel to each other; wherein a power unit of the rotation module is configured to output a torque, and the torque sensor is configured to be disposed around the power unit with a center axis as a center, wherein the first end is connected to a housing of the rotation module, and the second end is connected to the power unit to measure the torque.

13. The torsion sensor of claim 12, wherein the torsion sensor is configured to measure a torsion of the torsion sensor by measuring a change in the capacitance of the first capacitor and the second capacitor. The torque sensor comprises a first body and a second body disposed around the center axis, wherein the first body is located at the first end, and the second body is located at the second end.

14. The torsion sensor of claim 13, wherein the torsion sensor is configured to measure a torsion of the torsion sensor by measuring a change in the capacitance of the first capacitor and the second capacitor. The first body is configured to be fixed to the housing of the rotation module along the axial direction, and the second body is configured to be fixed to the power unit of the rotation module along the axial direction.

15. The torsion sensor of claim 14, wherein the torsion sensor is configured to measure a torsion of the torsion sensor by measuring a change in the capacitance of the first capacitor and the second capacitor. The second body is configured to be fixed to a motor unit of the power unit along the axial direction.

16. The torsion sensor of claim 12, wherein the torsion sensor is configured to measure a torsion of the torsion sensor in a range of 0.1 to 10 degrees. 16 The first sensing beam comprises a plurality of first sensing beams, and the second sensing beam comprises a plurality of second sensing beams, wherein the plurality of first sensing beams and the plurality of second sensing beams are respectively symmetrically disposed around the center axis, and the plurality of first sensing beams and the plurality of second sensing beams are staggered with each other.

17. The torsion sensor of claim 12, wherein the torsion sensor is configured to be mounted on a surface of a device. The first surface of the first sensing beam is perpendicular to a radial direction, and the second surface of the second sensing beam is perpendicular to a circumferential direction, wherein the radial direction is perpendicular to the center axis, the circumferential direction is perpendicular to the radial direction, and the circumferential direction has a fixed distance from the center axis.

18. The torsion sensor of claim 17, wherein the torsion sensor is configured to measure a torsion of the torsion sensor by measuring a change in the capacitance of the first capacitor and the second capacitor. The first strain gauge comprises two first strain gauges, and measurement directions of the two first strain gauges are not parallel to each other and are not parallel to the circumferential direction or the axial direction.

19. The torque sensor as described in claim 17, characterized in that, The second sensing beam comprises a through hole disposed along the radial direction, and the second strain gauge comprises two second strain gauges, wherein the two second strain gauges are arranged along the axial direction and correspond to the through hole, wherein the two second strain gauges respectively comprise a second strain gauge, and a measurement direction of the second strain gauge is parallel to the axial direction.

20. The torsion sensor of claim 19, wherein the torsion sensor is configured to measure a torsion of the torsion sensor by measuring a change in the capacitance of the first capacitor and the second capacitor. The second surface comprises a first plane and a second plane, and the first plane and the second plane are staggered to form a stepped structure, wherein the two second strain gauges are respectively disposed on the first plane and the second plane.

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