Mask box bottom dustproof structure

Abstract

The utility model discloses a dustproof structure at the bottom of a mask box, which relates to the technical field of mask boxes and comprises a box body, a box cover is hinged to the top of the box body, a box bottom plate is fixedly connected to the inner wall of the box body, a filter component is arranged below the box bottom plate, and a dustproof component is arranged below the box body. According to the dust-proof box, the dust-proof assembly can be closely attached to a placement table top to form a dust-proof barrier to prevent dust from entering from a bottom gap, the filter assembly can filter air entering from the bottom and prevent dust from entering the box, and the dust-proof box is convenient to use through mutual cooperation between the dust-proof assembly and the filter assembly. And therefore, the dust can be doubly filtered, the dustproof effect of the bottom plate at the bottom of the mask box is effectively improved, and the mask in the box is protected from being damaged by the dust.

Description

Technical Field

[0001] This utility model relates to the field of photomask box technology, specifically a dustproof structure at the bottom of a photomask box. Background Technology

[0002] As a container for storing photomasks, the dustproof performance of the bottom of the photomask box is particularly critical. In actual production, if the dustproof effect of the bottom of the photomask box is not good, dust can easily enter the box and adhere to the photomask. During photolithography, this can lead to problems such as pattern deviation and short circuits, which seriously affect product quality and increase production costs. Therefore, developing an efficient and reliable dustproof structure for the bottom of the photomask box has become an important requirement for improving production quality and efficiency.

[0003] Currently, the existing dustproof structures at the bottom of photomask boxes have poor dustproof performance. Some traditional structures rely solely on simple sealing strips, which are prone to aging and wear after long-term use, leading to a decrease in sealing performance. Dust can still enter the box through the gaps. Some dustproof structures are equipped with filters, but these filters are usually fixed in place and difficult to disassemble, clean, or replace. As the usage time increases, the dustproof effect is greatly reduced after the filters become clogged. These structures have certain shortcomings. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of the existing technology and provide a dustproof structure at the bottom of the mask box.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a dustproof structure at the bottom of a mask box, comprising a box body, a box cover hinged to the top of the box body, a box bottom plate fixedly connected to the inner wall of the box body, a filter assembly disposed below the box bottom plate, and a dustproof assembly disposed below the box body.

[0006] Furthermore, the filter assembly includes a magnetic strip fixedly connected to the inner wall of the box, and a magnetic frame is attached to the bottom of the magnetic strip.

[0007] Furthermore, a filter screen is fixedly connected to the inner wall of the magnetic frame, and the top of the filter screen is in contact with the bottom of the box base plate.

[0008] Furthermore, the dustproof component includes a base fixedly connected to the bottom of the box, and the base has a slot inside.

[0009] Furthermore, a support seat is slidably connected to the inner wall of the slot, and a brush is fixedly connected to the bottom of the support seat.

[0010] Furthermore, the inner wall of the base is threaded with a fixing screw, and the fixing screw is screwed to the bearing seat. A knob is fixedly connected to the outer surface of the fixing screw.

[0011] Compared with existing technologies, the dustproof structure at the bottom of this photomask box has the following advantages:

[0012] This invention features a dustproof component that fits closely to the surface of the container, forming a dust barrier to prevent dust from entering through the bottom gaps. A filter component further filters the air entering from the bottom, preventing dust from entering the box. The combined use of the dustproof and filter components provides dual filtration, effectively improving the dustproof performance of the bottom plate of the photomask box and protecting the photomask inside from dust damage.

[0013] This utility model facilitates the disassembly, cleaning, and replacement of the brush by cooperating with the base, support seat, fixing screw, knob, and slot. When maintenance is required, turning the knob causes the fixing screw to disengage from the support seat, which releases the fixing limit on the support seat and brush, allowing the brush to be easily removed. This greatly improves the convenience of later maintenance and extends the service life of the entire dustproof structure. Attached Figure Description

[0014] Figure 1 This is a three-dimensional front view structural diagram of the present invention.

[0015] Figure 2 This is a bottom view of the structure of this utility model.

[0016] Figure 3 This is a cross-sectional structural diagram of the present invention.

[0017] Figure 4 This is a schematic diagram of the filter assembly structure of this utility model.

[0018] Figure 5 This is an enlarged structural diagram of point A of this utility model.

[0019] In the diagram: 1. Box body; 2. Box lid; 3. Box bottom plate; 4. Filter assembly; 401. Magnetic strip; 402. Magnetic frame; 403. Filter screen; 5. Dustproof assembly; 501. Base; 502. Support seat; 503. Brush; 504. Fixing screw; 505. Knob; 506. Slot. Detailed Implementation

[0020] The principles and features of this utility model are described below with reference to the accompanying drawings. The examples given are only for explaining this utility model and are not intended to limit the scope of this utility model.

[0021] This embodiment provides a dustproof structure at the bottom of a photomask box. By setting a dustproof component 5, the present invention can closely fit the placement surface to form a dustproof barrier, preventing dust from entering from the bottom gap. By setting a filter component 4, the air entering from the bottom can be filtered to prevent dust from entering the box. Through the cooperation between the dustproof component 5 and the filter component 4, the dust can be filtered twice, effectively improving the dustproof effect of the bottom plate 3 of the photomask box and protecting the photomask inside the box from dust damage.

[0022] See Figures 1-5 A dustproof structure at the bottom of a photomask box includes a box body 1, which is made of high-strength aluminum alloy. Aluminum alloy has the characteristics of being lightweight, high-strength, and corrosion-resistant, and can provide a stable and reliable protective space for the internal photomasks. Its overall shape is a regular cuboid, which is convenient for storage, handling and use with other equipment on the production line.

[0023] The top of the box body 1 is hinged to a lid 2. The hinge is made of stainless steel, which is not only sturdy and durable but also flexible, ensuring that the lid 2 opens and closes smoothly. The lid 2 is also made of aluminum alloy and has a sealing rubber strip installed at the edge. When the lid 2 is closed, the sealing rubber strip can fit tightly against the box body 1, further enhancing the box's airtightness and preventing dust from entering from the top gap.

[0024] The inner wall of the box body 1 is fixedly connected to the bottom plate 3, which is made of engineering plastic. This engineering plastic has good insulation and wear resistance. Its surface has been finely polished, making it flat and smooth, providing stable support for placing the mask. At the same time, the connection between the bottom plate 3 and the inner wall of the box body 1 adopts a dual method of high-strength adhesive bonding and screw fixing to ensure a firm connection that will not loosen due to daily handling and use.

[0025] A filter assembly 4 is installed below the bottom plate 3 of the box. The filter assembly 4 plays an important role in filtering dust and purifying the air entering the box.

[0026] The filter assembly 4 includes a magnetic strip 401 fixedly connected to the inner wall of the box 1. The magnetic strip 401 uses high-performance neodymium iron boron permanent magnet material. This material has strong magnetism and can ensure a stable adsorption effect for a long time. The magnetic strip 401 is arranged in a continuous ring around the inner wall of the box 1 to ensure the complete adsorption of the components below.

[0027] The bottom of the magnetic strip 401 is attached to a magnetic frame 402. The magnetic frame 402 is made of magnetic stainless steel, which not only adheres tightly to the magnetic strip 401, but also has good rust resistance and extends service life. This magnetic connection method makes the installation and removal of the magnetic frame 402 very convenient, facilitating subsequent maintenance and replacement.

[0028] A filter screen 403 is fixedly connected to the inner wall of the magnetic frame 402, and the top of the filter screen 403 is in contact with the bottom of the box bottom plate 3. The filter screen 403 is made of multiple layers of polyester fiber filter screens with different pore sizes, which can effectively filter out dust particles of different sizes. The connection between the filter screen 403 and the magnetic frame 402 is made by hot melt welding to ensure a tight connection and prevent gaps from causing dust leakage. When outside air enters the box through the bottom, the filter screen 403 can intercept the dust and ensure that the air entering the box is clean.

[0029] A dustproof component 5 is provided at the bottom of the box 1. The dustproof component 5 can fit tightly against the table surface when the box is placed, forming an effective dustproof barrier.

[0030] The dustproof component 5 includes a base 501 fixedly connected to the bottom of the box body 1. The base 501 is made of high-strength ABS plastic, which has good toughness and impact resistance and can withstand a certain amount of external force without being damaged. The shape of the base 501 matches the bottom of the box body 1 and is fixed to the bottom of the box body 1 with screws to ensure a stable connection.

[0031] The base 501 has a slot 506 inside. The slot 506 is in a continuous ring and its dimensional accuracy is controlled within a very small range to ensure the installation accuracy of subsequent components.

[0032] The inner wall of the slot 506 is slidably connected to the support seat 502. The support seat 502 is also made of ABS plastic and its surface has been smoothed so that it can slide smoothly in the slot 506. The two sides of the support seat 502 are provided with raised guide rails that cooperate with the grooves on the inner wall of the slot 506 to further improve the stability and accuracy of sliding.

[0033] A brush 503 is fixedly connected to the bottom of the support base 502. The brush 503 is made of soft and highly elastic nylon bristles. The nylon bristles have good wear resistance and dustproof performance. The brush 503 is densely arranged to form a complete ring. When the box 1 is placed on the table, the brush 503 can fit tightly against the table and effectively prevent dust from entering the box from the bottom gap.

[0034] The inner wall of the base 501 is threaded with a fixing screw 504, and the fixing screw 504 is screwed to the bearing seat 502. A knob 505 is fixedly connected to the outer surface of the fixing screw 504. The fixing screw 504 is made of stainless steel and the surface is chrome-plated, which not only prevents rust but also improves the wear resistance of the screw.

[0035] When it is necessary to disassemble, replace or clean the brush 503, simply turn the knob 505 to gradually disengage the fixing screw 504 from the carrier 502. The carrier 502 can then slide downwards in the slot 506 of the base 501, making it easy to remove the brush 503 connected to the bottom of the carrier 502 for cleaning.

[0036] Working Principle: When using the dustproof structure at the bottom of the photomask box, the lid 2 is hinged to the top of the box body 1. Opening the lid 2 allows for the insertion or removal of the photomask. For dust prevention, in the filter assembly 4, the magnetic strip 401 is fixedly connected to the inner wall of the box body 1, and the magnetic frame 402 is attracted to the bottom of the magnetic strip 401, thus fixing the filter screen 403. The filter screen 403 filters the air entering from the bottom, preventing dust from entering the box. When the box body 1 is placed on a workbench, the brush 503 is in close contact with the workbench, forming a dust barrier to prevent dust from entering through the bottom gaps. Even after being blocked by the brush 503, a small amount of dust may still enter. At this time, the filter screen 403 further filters this dust, providing double protection and effectively improving the dustproof effect at the bottom of the photomask box, protecting the photomask inside. When the brush 503 needs to be disassembled, replaced, or cleaned due to dust, simply turn the knob 505 to gradually disengage the fixing screw 504 from the carrier 502. The carrier 502 can then slide downwards within the slot 506 of the base 501, allowing the brush 503 connected to the bottom of the carrier 502 to be easily removed for cleaning. After cleaning, turn the knob 505 forward to reconnect the fixing screw 504 to the carrier 502, fixing the carrier 502 and brush 503 in a suitable position. This ensures that the brush 503 is in close contact with the surface it is placed on, providing excellent dust protection. This design not only ensures the normal operation of the dustproof component 5 but also improves the convenience of later maintenance, ensuring that the dustproof structure at the bottom of the mask box can stably protect the mask inside the box for a long time.

[0037] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A dustproof structure of a mask box bottom, comprising a box body (1), characterized in that: The top of the box body (1) is hingedly installed with a box cover (2), the inner wall of the box body (1) is fixedly connected with a box bottom plate (3), the lower portion of the box bottom plate (3) is provided with a filtering assembly (4), and the lower portion of the box body (1) is provided with a dustproof assembly (5).

2. The dustproof structure of the mask box bottom according to claim 1, characterized in that: The filtering assembly (4) comprises a magnetic strip (401) fixedly connected to the inner wall of the box body (1), and the bottom of the magnetic strip (401) is attached with a magnetic frame (402).

3. The dustproof structure of the mask box bottom according to claim 2, characterized in that: The inner wall of the magnetic frame (402) is fixedly connected with a filter screen (403), and the top of the filter screen (403) is in contact with the bottom of the box bottom plate (3).

4. The dustproof structure of the mask box bottom according to claim 1, characterized in that: The dustproof assembly (5) comprises a base (501) fixedly connected to the bottom of the box body (1), and the inner portion of the base (501) is provided with a clamping groove (506).

5. The dustproof structure of the mask box bottom according to claim 4, characterized in that: The inner wall of the clamping groove (506) is slidably connected with a bearing seat (502), and the bottom of the bearing seat (502) is fixedly connected with a brush (503).

6. The dustproof structure of the mask box bottom according to claim 5, characterized in that: The inner wall of the base (501) is threadedly connected with a fixing screw rod (504), the fixing screw rod (504) is screwed with the bearing seat (502), and the outer surface of the fixing screw rod (504) is fixedly connected with a knob (505).

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