Exposure equipment

By introducing a peeling mechanism into the exposure equipment, and utilizing a drive assembly and a roller-type peeling element, the problem of the exposure material being torn during the winding process is solved, achieving efficient material peeling and winding.

CN223977497UActive Publication Date: 2026-03-06HANGZHOU XINJUNZHE MICROELECTRONICS CO LTD
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Patent Information

Application Number
CN202520592466.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-03-31
Publication Date
2026-03-06
Estimated Expiration
2035-03-31

AI Technical Summary

Technical Problem

In existing roll-to-roll double-sided exposure machines, the friction between the exposure material and the lower glass during the winding process causes the material to be easily torn, affecting processing efficiency.

Method used

An exposure device was designed, which includes a peeling mechanism. The peeling component is driven by a drive assembly to move in the vertical and horizontal directions to avoid large-area adhesion between the exposure material and the lower glass. The peeling component is in the form of a roller to reduce friction and achieve smooth peeling of the material.

Benefits of technology

It improves the efficiency of exposure processing, avoids tearing of exposure materials, and ensures smooth processing.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses exposure equipment and relates to the technical field of exposure machines. The exposure equipment comprises a base table, lower glass and a stripping mechanism, and the lower glass is arranged on the surface of the base table and used for being attached to an exposure material in the exposure process; the stripping mechanism comprises a driving assembly and a stripping part, the driving assembly is arranged on the base table and connected with the stripping part, and the stripping part is used for moving upwards from one end of the lower glass to jack up the exposure material and then moving towards the other end of the lower glass in the first horizontal direction under the driving of the driving assembly after exposure is finished; at least part of the exposure material is stripped from the lower glass surface. According to the exposure equipment provided by the utility model, the exposure processing efficiency can be improved, and the exposure material is prevented from being torn.
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Description

Technical Field

[0001] This utility model relates to the field of exposure machine technology, and more specifically, to an exposure device. Background Technology

[0002] Currently, roll-to-roll double-sided exposure machines on the market continuously unwind and wind exposure material between the lower and upper glass panes. When the area to be exposed on the material reaches the surface of the lower glass, the upper glass presses down to clamp the material together with the lower glass. After exposure, the upper glass rises and winds up the material, allowing the exposed portion to leave the lower glass, and the next section to be exposed reaches the surface of the lower glass.

[0003] After exposure is completed, due to the large area of ​​close contact between the exposure material and the lower glass, there is a large friction between the exposure material and the lower glass during the winding process. Direct winding can easily cause the exposure material to be torn. Usually, the operator manually peels the exposure material off the surface of the lower glass, which seriously affects the processing efficiency. Utility Model Content

[0004] The purpose of this invention is to provide an exposure device that can improve the efficiency of exposure processing and prevent the exposure material from being torn.

[0005] The embodiments of this utility model provide a technical solution:

[0006] An exposure apparatus includes a base, a lower glass, and a peeling mechanism. The lower glass is disposed on the surface of the base and is used to adhere to an exposure material during the exposure process. The peeling mechanism includes a drive assembly and a peeling member. The drive assembly is disposed on the base and connected to the peeling member. After exposure, the peeling member, driven by the drive assembly, moves upward from one end of the lower glass to lift the exposure material, and then moves towards the other end of the lower glass in a first horizontal direction to peel at least a portion of the exposure material from the surface of the lower glass.

[0007] In an optional embodiment, the driving assembly includes a first driving member and a second driving member, both of which are disposed on the base. The first driving member is used to drive the peeling member to move in the vertical direction, and the second driving member is used to drive the peeling member to move in the first horizontal direction.

[0008] In an optional embodiment, the driving assembly further includes a connector and a sliding block. The connector is connected to the second driving member, and the connector is provided with a groove extending in the vertical direction. The sliding block is connected to the peeling member and slides in cooperation with the groove. The sliding block is used to slide along the groove under the drive of the first driving member.

[0009] In an optional embodiment, the sliding block is provided with a connecting shaft extending in a second horizontal direction, and the peeling member is a roller coaxially sleeved on the connecting shaft, wherein the second horizontal direction forms an angle with the first horizontal direction.

[0010] In an optional embodiment, the base has a receiving channel extending in a vertical direction, and during exposure, the bottom of the sliding block is embedded in the receiving channel; the first driving member is used to push the sliding block upward from below after exposure to exit the receiving channel.

[0011] In an optional embodiment, the peeling mechanism further includes a support rail laid on the surface of the base, and a support roller is provided at the bottom of the sliding block. The second driving member is used to drive the connecting member to move in the first horizontal direction when the sliding block moves upward until the support roller is flush with the support rail, so that the support roller rolls on the support rail.

[0012] In an optional embodiment, the number of the peeling mechanisms is two, and the two peeling elements corresponding to the two peeling mechanisms are respectively located at opposite ends of the lower glass in the first horizontal direction.

[0013] In an optional embodiment, the exposure device further includes two fixing mechanisms, which are respectively disposed at opposite ends of the lower glass in the first horizontal direction, and are used to fix the exposure material before exposure begins.

[0014] In an optional embodiment, the exposure apparatus further includes two lifting mechanisms, which are respectively disposed at opposite ends of the base in the first horizontal direction, and are used to lift the exposure material upward.

[0015] In an optional embodiment, the exposure apparatus further includes an upper glass, an unwinding mechanism, and a winding mechanism. The upper glass is located above the lower glass and is used to move downward during the exposure process to clamp the exposure material with the lower glass. The unwinding mechanism and the winding mechanism are respectively disposed at opposite ends of the base in the first horizontal direction. The unwinding mechanism is used to unwind the exposure material, and the winding mechanism is used to wind the exposure material.

[0016] Compared to existing technologies, the exposure equipment provided by this invention features a peeling mechanism whose driving component can, after exposure and before winding up the exposed material, drive the peeling member upwards from one end of the lower glass to lift the exposed material, and then move towards the other end of the lower glass in a first horizontal direction. This allows at least a portion of the exposed material to peel off from the surface of the lower glass, preventing large-area adhesion between the exposed material and the lower glass, and facilitating smooth winding of the exposed material. Therefore, the beneficial effects of the exposure equipment provided by this invention include: improved exposure processing efficiency and prevention of tearing of the exposed material. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of this utility model and therefore should not be considered as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without any creative effort.

[0018] Figure 1 A partial structural schematic diagram of the exposure device provided for an embodiment of this utility model;

[0019] Figure 2 for Figure 1 Exploded view of the stripping mechanism;

[0020] Figure 3 for Figure 2 Enlarged view of region A in the middle;

[0021] Figure 4 for Figure 1 Enlarged view of region B in the middle;

[0022] Figure 5 for Figure 1 A magnified view of region C in the middle.

[0023] Icons: 100-Exposure device; 110-Base; 120-Lower glass; 130-Peeling mechanism; 131-Peeling component; 132-First drive component; 133-Second drive component; 134-Connector; 135-Sliding block; 1351-Support roller; 136-Groove; 137-Connecting shaft; 138-Support rail; 140-Fixing mechanism; 150-Lifting mechanism; 200-Exposure material. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0026] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0027] In the description of this utility model, it should be understood that the terms "upper", "lower", "inner", "outer", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship that the utility model product is usually placed in during use, or the orientation or positional relationship that is commonly understood by those skilled in the art. They are only used to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0028] Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0029] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, terms such as "set" and "connection" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0030] The specific embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0031] Example

[0032] Please see Figure 1, Figure 1 The diagram shown is a partial structural schematic of the exposure device 100 provided in this embodiment.

[0033] The exposure apparatus 100 provided in this embodiment is used for segmented double-sided exposure of continuously unwound and rewound exposure material 200. Specifically, the exposure apparatus 100 includes a base 110, a lower glass 120, an upper glass, an unwinding mechanism, and a winding mechanism.

[0034] The lower glass 120 is disposed on the surface of the base 110, and the upper glass is located above the lower glass 120. The unwinding mechanism and the winding mechanism are disposed at opposite ends of the base 110 in the first horizontal direction. The unwinding mechanism is used to unwind the exposure material 200, and the winding mechanism is used to wind the exposure material 200.

[0035] When the exposure material 200 is subjected to segmented double-sided exposure, when the area to be exposed on the exposure material 200 reaches the surface of the lower glass 120, the upper glass is pressed down to clamp the exposure material 200 together with the lower glass 120. After the exposure is completed, the upper glass is raised and the exposure material 200 is wound up so that the exposed part leaves the lower glass 120 and the next section to be exposed reaches the surface of the lower glass 120.

[0036] Under the downward pressure of the upper glass, the exposure material 200 is tightly bonded to the lower glass 120 over a large area. If the exposure material 200 is directly wound up after the upper glass is lifted, it is very easy for the exposure material 200 to be torn due to the large frictional force. To solve this problem, the exposure apparatus 100 provided in this embodiment also includes a peeling mechanism 130. The peeling mechanism 130 is disposed on the base 110 and is used to peel at least a portion of the exposure material 200 from the surface of the lower glass 120 before winding up the exposure material 200 after a single exposure.

[0037] Please refer to the following: Figure 2 , Figure 2 The diagram shown is an exploded view of the stripping mechanism 130.

[0038] The peeling mechanism 130 includes a drive assembly and a peeling member 131. The drive assembly is disposed on the base 110 and connected to the peeling member 131. After exposure, the peeling member 131 is driven by the drive assembly to move upward from one end of the lower glass 120 to lift the exposure material 200, and then moves towards the other end of the lower glass 120 in a first horizontal direction to peel at least a portion of the exposure material 200 from the surface of the lower glass 120.

[0039] In this embodiment, Figure 1 and Figure 2The X arrow points to the first horizontal direction, the Z arrow points to the vertical direction, and the Y arrow points to the second horizontal direction. Preferably, in this embodiment, the first horizontal direction is perpendicular to the second horizontal direction.

[0040] In practical applications, after the upper glass is lifted away from the exposure material 200, the exposure material 200 remains tightly adhered to the lower glass 120. At this time, the peeling member 131 is located at one end of the lower glass 120 in the first horizontal direction and below the exposure material 200. The drive assembly drives the peeling member 131 to move vertically upward until the peeling member 131 lifts the exposure material 200. Afterward, the drive assembly drives the peeling member 131 to move towards the other end of the lower glass 120 in the first horizontal direction, so that at least a portion of the exposure material 200 is peeled off from the surface of the lower glass 120.

[0041] Specifically, the driving assembly includes a first driving member 132 and a second driving member 133. Both the first driving member 132 and the second driving member 133 are disposed on the base 110. The first driving member 132 is used to drive the peeling member 131 to move in the vertical direction, and the second driving member 133 is used to drive the peeling member 131 to move in the first horizontal direction.

[0042] Please refer to the following: Figure 3 , Figure 3 As shown Figure 2 An enlarged schematic diagram of region A in the middle.

[0043] In fact, the drive assembly also includes a connector 134 and a sliding block 135. The connector 134 is connected to the second drive member 133. The connector 134 is provided with a groove 136 extending in the vertical direction. The sliding block 135 is connected to the peeling member 131 and slides in cooperation with the groove 136. The sliding block 135 is used to slide along the groove 136 under the drive of the first drive member 132.

[0044] The combination of connector 134 and sliding block 135 allows the peeling member 131 to move both vertically and horizontally when the first driving member 132 and the second driving member 133 are fixed to the base 110. Specifically, the first driving member 132 acts directly on the sliding block 135, causing the sliding block 135 to slide vertically upward along the groove 136, thereby driving the peeling member 131 to move up and down until it lifts the exposure material 200. The second driving member 133 acts directly on connector 134, and through connector 134 and sliding block 135, drives the peeling member 131 to move in the first horizontal direction.

[0045] In this embodiment, the first driving component 132 is a cylinder and the second driving component 133 is an electric cylinder. In another embodiment, the first driving component 132 and the second driving component 133 can be selected in other ways according to the actual application conditions, as long as linear reciprocating drive can be achieved.

[0046] It is understood that during the movement of the peeling member 131 in the first horizontal direction, it remains in close contact with and moves relative to the exposure material 200. To prevent the exposure material 200 from being torn during the movement of the peeling member 131, in this embodiment, the peeling member 131 is a rotatable roller. Specifically, a connecting shaft 137 extending in the second horizontal direction is provided on the sliding block 135, and the peeling member 131 is coaxially sleeved on the connecting shaft 137.

[0047] As the peeling member 131 pushes the exposure material 200 upward and moves in the first horizontal direction, it is subjected to the frictional force between its wheel surface and the exposure material 200. The peeling member 131 rolls on the lower surface of the exposure material 200 with the connecting shaft 137 as the center line. The rolling friction is much smaller than the sliding friction, which can prevent the exposure material 200 from being torn under the sliding friction.

[0048] To avoid obstructing the vertical movement of the slider 135 and prevent excessive vertical space occupation, in this embodiment, the base 110 has a receiving channel extending in the vertical direction. During exposure, the bottom of the slider 135 is embedded in the receiving channel. The first driving member 132 is used to push the slider 135 upward from below after exposure to exit the receiving channel.

[0049] In practice, the output end of the first driving member 132 is embedded at the bottom of the receiving channel and is located below the sliding block 135. After a single exposure is completed, the first driving member 132 pushes the sliding block 135 upward, and the sliding block 135 gradually moves upward along the groove 136 within the receiving channel, thereby driving the peeling member 131 to gradually move upward. When the peeling member 131 moves to lift the exposed material 200, the sliding block 135 exits the receiving channel. In this case, the second driving member 133 drives the connecting member 134 to move in the first direction, thereby driving the peeling member 131 to move downward toward the other end of the glass 120 in the first direction to peel off the exposed material 200.

[0050] In this embodiment, the peeling mechanism 130 further includes a support rail 138 laid on the surface of the base 110, and a support roller 1351 is provided at the bottom of the sliding block 135. The second driving member 133 is used to drive the connecting member 134 to move in the first horizontal direction when the sliding block 135 moves upward until the support roller 1351 is flush with the support rail 138, so that the support roller 1351 rolls on the support rail 138.

[0051] It is understandable that by laying a support track 138 on the surface of the base 110 and setting a support roller 1351 at the bottom of the sliding block 135, the support roller 1351 rolls on the surface of the support track 138 and provides support for the sliding block 135 and the stripping part 131, avoiding sliding friction between the sliding block 135 and the base 110, improving the smoothness of the movement process, and further improving the exposure processing efficiency.

[0052] In order to shorten the movement distance of the peeling member 131 in the first horizontal direction and further improve the processing efficiency, in this embodiment, there are two peeling mechanisms 130, and the two peeling members 131 corresponding to the two peeling mechanisms 130 are respectively located at opposite ends of the lower glass 120 in the first horizontal direction.

[0053] In practical applications, after the upper glass is lifted away from the exposure material 200, the two peeling members 131 at both ends of the lower glass 120 move upward under the action of their respective first driving members 132 until they each lift up the two portions of the exposure material 200 at both ends of the lower glass 120. Then, under the action of the two second driving members 133, the two peeling members 131 move closer to each other in the first horizontal direction, thereby synchronously peeling off the exposure material 200 from both ends of the lower glass 120.

[0054] Please refer to the following: Figure 4 and Figure 5 , Figure 4 As shown Figure 1 Enlarged diagram of region B in the middle. Figure 5 As shown Figure 1 A magnified view of region C in the middle.

[0055] Considering that before exposure begins, due to the long span between the winding and unwinding mechanisms, there is too much exposure material 200 in the area above the lower glass 120, when the upper glass is pressed down, the excessive exposure material 200 between the upper and lower glass 120 is prone to wrinkles, which will have an adverse effect on the exposure effect.

[0056] To solve this problem, the exposure device 100 provided in this embodiment also includes two fixing mechanisms 140, which are respectively disposed at opposite ends of the lower glass 120 in the first horizontal direction. The two fixing mechanisms 140 are used to fix the exposure material 200 before the exposure begins.

[0057] Understandably, before the upper glass is pressed down, the two fixing mechanisms 140 at both ends of the lower glass 120 fix the exposure material 200 to ensure that the exposure material 200 in the area above the lower glass 120 can be as taut as possible, thereby preventing the exposure material 200 from wrinkling when the upper glass is pressed down and improving the exposure effect.

[0058] Preferably, the fixing mechanism 140 in this embodiment is a vacuum suction cup. In other embodiments, the fixing mechanism 140 for fixing the exposure material 200 can also be selected in other forms, such as clamping.

[0059] To further improve the conveying effect of the exposure material 200, in this embodiment, the exposure device 100 also includes two lifting mechanisms 150. Each lifting mechanism 150 includes a cylinder mounted on the base 110 and a roller connected to the cylinder's output end. The two lifting mechanisms 150 are respectively disposed at opposite ends of the base 110 in the first horizontal direction, and are used to lift the exposure material 200 upwards. In fact, at any end of the lower glass 120, the peeling member 131, the fixing mechanism 140, and the lifting mechanism 150 are arranged sequentially from closest to furthest from the lower glass 120.

[0060] In practical applications, before the upper glass is pressed down, the two fixing mechanisms 140 activate to secure the portions of the exposure material 200 located at both ends of the lower glass 120, after which the upper glass is pressed down. After exposure is complete, once the upper glass is lifted away from the exposure material 200, the two fixing mechanisms 140 release their fixation on the exposure material 200. Then, the peeling parts 131 of the two peeling mechanisms 130 and the rollers of the two lifting mechanisms 150 rise synchronously, lifting the exposure material 200. Afterward, the two peeling parts 131 move closer to each other in a first direction, completing the peeling of the exposure material 200. After peeling is complete, the two peeling parts 131 and the rollers of the two lifting mechanisms 150 return to their original positions. After the return movement is complete, the winding mechanism winds up the exposure material 200.

[0061] In summary, the exposure apparatus 100 provided in this embodiment can improve the exposure processing efficiency and prevent the exposure material 200 from being torn.

[0062] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An exposure apparatus characterized by comprising: The base (110), the lower glass (120) and the peeling mechanism (130), the lower glass (120) is arranged on the surface of the base (110) and used to adhere to the exposure material (200) during the exposure process; the peeling mechanism (130) comprises a driving assembly and a peeling piece (131), the driving assembly is arranged on the base (110) and connected with the peeling piece (131), the peeling piece (131) is used to move upward from one end of the lower glass (120) to jack up the exposure material (200) under the driving of the driving assembly after the exposure is completed, and then move in the first horizontal direction to the other end of the lower glass (120) to peel at least part of the exposure material (200) from the surface of the lower glass (120).

2. The exposure apparatus according to claim 1, wherein The driving assembly comprises a first driving piece (132) and a second driving piece (133), the first driving piece (132) and the second driving piece (133) are arranged on the base (110), the first driving piece (132) is used to drive the peeling piece (131) to move in the vertical direction, and the second driving piece (133) is used to drive the peeling piece (131) to move in the first horizontal direction.

3. The exposure apparatus according to claim 2, wherein The driving assembly further comprises a connecting piece (134) and a sliding block (135), the connecting piece (134) is connected with the second driving piece (133), the connecting piece (134) is provided with a sliding groove (136) extending in the vertical direction, the sliding block (135) is connected with the peeling piece (131) and slidably matched with the sliding groove (136), and the sliding block (135) is used to slide along the sliding groove (136) under the driving of the first driving piece (132).

4. The exposure apparatus according to claim 3, wherein The sliding block (135) is provided with a connecting shaft (137) extending in the second horizontal direction, the peeling piece (131) is a roller coaxially sleeved on the connecting shaft (137), and the second horizontal direction forms an angle with the first horizontal direction.

5. The exposure apparatus according to claim 3, wherein The base (110) has an accommodation channel extending in the vertical direction, and the bottom of the sliding block (135) is embedded in the accommodation channel during the exposure process. The first driving piece (132) is used to push the sliding block (135) upward from below to exit the accommodation channel after the exposure is completed.

6. The exposure apparatus according to one of claims 3, wherein The peeling mechanism (130) further comprises a supporting track (138) laid on the surface of the base (110), the bottom of the sliding block (135) is provided with a supporting roller (1351), and the second driving piece (133) is used to drive the connecting piece (134) to move in the first horizontal direction when the supporting roller (1351) is flush with the supporting track (138) after the sliding block (135) moves upward, so that the supporting roller (1351) rolls on the supporting track (138).

7. The exposure apparatus according to any one of claims 1-6, wherein The number of the peeling mechanisms (130) is two, and two corresponding peeling pieces (131) of the two peeling mechanisms (130) are respectively located at opposite ends of the lower glass (120) in the first horizontal direction.

8. The exposure apparatus according to any one of claims 1-6, wherein The exposure device (100) further comprises two fixing mechanisms (140), which are respectively arranged at opposite ends of the lower glass (120) in the first horizontal direction, and are used to fix the exposure material (200) before exposure starts.

9. The exposure apparatus according to any one of claims 1-6, wherein The exposure device (100) further comprises two lifting mechanisms (150), which are respectively arranged at opposite ends of the base (110) in the first horizontal direction, and are used to lift the exposure material (200) upward.

10. The exposure apparatus according to any one of claims 1-6, wherein The exposure device (100) further comprises an upper glass, an unwinding mechanism and a winding mechanism. The upper glass is located above the lower glass (120), and is used to move downward to clamp the exposure material (200) with the lower glass (120) during exposure. The unwinding mechanism and the winding mechanism are respectively arranged at opposite ends of the base (110) in the first horizontal direction. The unwinding mechanism is used to unwind the exposure material (200), and the winding mechanism is used to wind the exposure material (200).