Flower basket turnover device

Abstract

The utility model discloses a flower basket turnover device which comprises a workbench, clamping assemblies, a power assembly and a visual inspection assembly, the clamping assemblies are arranged above the workbench at intervals in the thickness direction of the workbench, the clamping assemblies are configured to clamp a flower basket, the power assembly is arranged on the workbench, and the visual inspection assembly is arranged on the workbench. The clamping assembly is connected to the power assembly so as to rotate relative to the workbench, the visual detection assembly is connected to the power assembly and located on one side of the clamping assembly, the visual detection assembly is configured to be capable of conducting visual detection on silicon wafers in the flower basket, and the power assembly is configured to drive the clamping assembly to drive the flower basket to turn over. And driving the visual detection assembly to rotate. According to the flower basket overturning device provided by the embodiment of the invention, the probability of silicon wafer damage caused by mutual collision between the edge of the silicon wafer and the tooth crest of the flower basket can be reduced, the time for adjusting the state of the flower basket is saved, and the yield of the silicon wafer and the automatic production efficiency of battery pieces are improved.

Description

Technical Field

[0001] This application relates to the field of photovoltaic equipment technology, and in particular to a flower basket flipping device. Background Technology

[0002] In the production of solar cells, baskets are typically used as carriers for batch transfer, cleaning, and inspection of silicon wafers. During this process, the baskets need to be rotated to accommodate different process requirements. For example, in the alkaline polishing process, silicon wafers are batched into a chemical bath using baskets. A robotic arm then removes the baskets and places them into a flipping structure for rotation. The baskets are then adjusted using lifting and rotating mechanisms, inspected by a vision camera, and rotated back to their original angle by a rotation mechanism. Finally, a basket circulation mechanism transports the baskets to their designated full-blue channel. This process of basket rotation and inspection by the vision camera requires the basket to undergo two rotations before visual inspection and transfer to the next process. This can easily lead to defects caused by the edges of the silicon wafers colliding with the basket teeth, and also results in significant time waste, hindering the pace of high-speed automated production. Utility Model Content

[0003] This application discloses a flower basket flipping device, which can reduce the probability of silicon wafer damage caused by the edge of the silicon wafer colliding with the top of the flower basket teeth, and save time in adjusting the state of the flower basket.

[0004] To achieve the above objectives, this application discloses a flower basket flipping device, comprising:

[0005] Workbench;

[0006] Clamping assemblies are spaced apart above the worktable along the thickness direction of the worktable, and the clamping assemblies are configured to clamp flower baskets;

[0007] A power assembly, wherein the power assembly is disposed on the worktable, and the clamping assembly is connected to the power assembly and is rotatable relative to the worktable; and

[0008] A vision inspection component is connected to the power component and is located on one side of the clamping component. The vision inspection component is configured to perform visual inspection on the silicon wafers in the basket.

[0009] The power component is configured to drive the clamping component to flip the flower basket and to drive the vision detection component to rotate.

[0010] As an alternative implementation, the power component is configured to drive the clamping component to rotate synchronously with the vision detection component.

[0011] As an optional implementation, the clamping assembly includes a clamping body, which includes a fixing plate, a first clamping plate, and a second clamping plate. The fixing plates are spaced apart above the worktable along the thickness direction of the worktable, and the fixing plates are connected to the power assembly.

[0012] The first clamping plate and the second clamping plate are respectively disposed on two opposite sides of the fixed plate to form a clamping space for clamping the flower basket between them and the fixed plate. The first clamping plate and / or the second clamping plate are slidably connected to the fixed plate. The first clamping plate and the second clamping plate are configured to move towards each other in a first direction to adjust the distance between the first clamping plate and the second clamping plate.

[0013] Wherein, the first direction is the length direction of the flower basket.

[0014] As an optional implementation, the clamping body further includes a support plate, which is located on the side of the fixed plate away from the worktable. The support plate is connected to the first clamping plate. When the first clamping plate is slidably connected to the fixed plate, the support plate is slidably connected to the fixed plate.

[0015] The support plate is configured to support the flower basket.

[0016] As an optional implementation, when the first clamping plate is slidably connected to the fixed plate, the clamping body further includes a first driving member. The first driving member is disposed at one end of the fixed plate near the first clamping plate, and the first driving member is located on the side of the fixed plate near the worktable. The first clamping plate is connected to the driving end of the first driving member, and the first driving member is configured to drive the first clamping plate to move along the first direction.

[0017] And / or,

[0018] When the second clamping plate is slidably connected to the fixed plate, the clamping body further includes a second driving member. The second driving member is disposed at one end of the fixed plate near the second clamping plate, and the second driving member is located on the side of the fixed plate near the worktable. The second clamping plate is connected to the driving end of the second driving member, and the second driving member is configured to drive the second clamping plate to move along the first direction.

[0019] As an optional implementation, the clamping body further includes a first damping member and a second damping member, the first damping member and the second damping member extending along the first direction, the first damping member being disposed on the fixed plate, the second damping member being disposed on the first clamping plate, and the second damping member being slidably connected to the first damping member.

[0020] And / or,

[0021] The clamping body further includes a first guide component, which is located between the support plate and the fixed plate. The first guide component includes a first slider and a first track extending along the first direction. One of the first slider and the first track is disposed on the fixed plate, and the other is disposed on the support plate. The first slider is slidably connected to the first track.

[0022] As an optional implementation, when the first clamping plate is slidably connected to the fixed plate, the clamping body further includes a second guide component. The second guide component extends along the first direction and is connected to the side of the fixed plate near the workbench. The second guide component is disposed on the first clamping plate, and the first clamping plate is slidably connected to the fixed plate through the second guide component.

[0023] And / or,

[0024] When the second clamping plate is slidably connected to the fixed plate, the clamping body further includes a third guide component. The third guide component extends along the first direction, is connected to the fixed plate, and is disposed on the second clamping plate. The second clamping plate is slidably connected to the fixed plate through the third guide component.

[0025] As an optional implementation, the second guide component is located between the fixed plate and the worktable. The second guide component includes a second slider and a second track extending along the first direction. One of the second slider and the second track is disposed on the fixed plate, and the other is disposed on the first clamping plate. The second slider is slidably connected to the second track.

[0026] As an optional implementation, the third guide component includes a third slider and a third track extending along the first direction. The third slider and the third track are located on the side of the fixed plate opposite to the second drive member. One of the third slider and the third track is disposed on the fixed plate, and the other is disposed on the second clamping plate. The third slider is slidably connected to the third track.

[0027] As an optional implementation, the third guide component further includes a fourth slider, which is located on the side of the fixed plate near the second drive component and is disposed on the second clamping plate.

[0028] The second driving member has a fourth track extending along the first direction, and the fourth sliding member is slidably connected to the fourth track.

[0029] As an optional implementation, the clamping assembly further includes a support bracket configured to support the clamping body;

[0030] The power assembly includes a rotary drive and a rotating shaft. The rotary drive is mounted on the worktable, the rotating shaft is connected to the rotary drive, and the support bracket is connected to the rotating shaft.

[0031] As an optional implementation, the support bracket includes a frame and a connector. The frame is configured to support the clamping body, and the connector is connected to the frame and to the rotating shaft to rotate under the action of the rotating shaft, thereby driving the frame and the clamping body to rotate.

[0032] As an optional implementation, the power assembly further includes a speed reducer connected to the rotary drive, and the rotating shaft is connected to the speed reducer.

[0033] As an optional implementation, the power assembly includes a rotary drive and a rotating shaft. The rotary drive is disposed on the worktable, and the rotating shaft is connected to the rotary drive. Along the axial direction of the rotating shaft, the clamping assembly and the vision detection assembly are arranged at intervals in sequence, and both the clamping assembly and the vision detection assembly are connected to the rotating shaft.

[0034] As an optional implementation, the visual inspection component includes a fixed bracket, a mounting bracket, and a camera. The fixed bracket is connected to the rotating shaft, the mounting bracket is slidably mounted on the fixed bracket, and the camera is fixed on the mounting bracket. The mounting bracket can slide relative to the fixed bracket to move the camera to detect different positions of the flower basket.

[0035] As an optional implementation, the visual inspection component further includes a fifth guide component, which includes a fifth slider and a fifth track. The fifth slider is disposed on the mounting bracket, and the fifth track extends along the first direction and is disposed on the fixed bracket. The fifth slider is slidably connected to the fifth track.

[0036] As an optional implementation, the visual inspection component further includes a second limiting component, which includes a first limiting member and a second limiting member, and the first limiting member and the second limiting member are disposed on two opposite sides of the fixed bracket along the first direction.

[0037] Compared with the prior art, the beneficial effects of this application are:

[0038] The basket flipping device provided in this application embodiment can clamp the basket with a clamping component. Since the clamping component and the vision inspection component can rotate under the drive of the power component, the vision inspection component can also flip like the basket. After the basket is flipped, the silicon wafers in the basket can be directly visually inspected by the vision inspection component without the need for additional handling and rotation processes to adjust the position and state of the basket to align with the vision inspection component. This simplifies the basket transfer process in the cell production process, thereby reducing the probability of silicon wafer damage caused by the edge of the silicon wafer colliding with the top of the basket teeth, and saving time in adjusting the position and state of the basket. This is beneficial to improving the yield of silicon wafers and the efficiency of automated cell production. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0040] Figure 1 This is a schematic diagram of the structure of the flower basket flipping device (with a flower basket placed on it) provided in an embodiment of this application from one perspective;

[0041] Figure 2 This is a schematic diagram of the structure of the flower basket flipping device (with a flower basket placed on it) provided in the embodiments of this application from another perspective;

[0042] Figure 3 This is a schematic diagram of the structure of the flower basket flipping device (without a flower basket) provided in the embodiments of this application;

[0043] Figure 4 This is a schematic diagram of the structure of the flower basket flipping device (omitting the workbench and camera) provided in an embodiment of this application from one perspective;

[0044] Figure 5 yes Figure 4 A magnified view of section B in the image;

[0045] Figure 6 This is a schematic diagram of the structure of the flower basket flipping device (omitting the workbench and camera) provided in the embodiments of this application from another perspective;

[0046] Figure 7 yes Figure 6 A magnified view of point A in the image;

[0047] Figure 8This is a schematic diagram of the structure of the flower basket flipping device (omitting the workbench, camera, and support plate) provided in the embodiments of this application;

[0048] Figure 9 This is a schematic diagram of the workbench and power assembly of the flower basket flipping device provided in the embodiments of this application;

[0049] Figure 10 This is a schematic diagram of the structure of the flower basket flipping device (workbench omitted) provided in the embodiments of this application.

[0050] Explanation of reference numerals in the attached figures:

[0051] 100-Flower basket flipping device; 1-Workbench; 11-Column; 2-Clamping assembly; 21-Clamping body; 211-Fixing plate; 212-First clamping plate; 213-Second clamping plate; 214-Supporting plate; 2141-First limiting component; 2151-First driving component; 2152-Second driving component; 2153-Fourth track; 2161-First damping component; 2162-Second damping component; 217-First guide component; 2171-First sliding component; 2172-First track; 218-Second guide component; 2181-Second sliding component; 2182-Second track; 219-Third guide component; 2 191-Third sliding member; 2192-Third track; 2193-Fourth sliding member; 21a-Clamping space; 22-Bearing bracket; 221-Frame; 222-Connector; 3-Power assembly; 31-Rotation drive component; 32-Rotating shaft; 33-Reducing component; 34-Rotation bearing; 4-Vision inspection assembly; 41-Fixed bracket; 42-Mounting bracket; 43-Camera; 44-Fifth guide component; 441-Fifth sliding member; 442-Fifth track; 45-Second limiting component; 451-First limiting component; 452-Second limiting component; X-Thickness direction of the worktable; Y-First direction; 300-Flower basket. Detailed Implementation

[0052] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0053] In this application, the terms "upper," "lower," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated mechanisms, elements, or components to having a specific orientation, or to be constructed and operated in a specific orientation.

[0054] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0055] Furthermore, the terms "installation," "setup," "equipped with," and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two mechanisms, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0056] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different mechanisms, components, or parts (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated mechanisms, components, or parts. Unless otherwise stated, "a plurality of" means two or more.

[0057] Before explaining the technical solution of this application, the inventive concept of this application will be explained first.

[0058] In the production of solar cells, baskets are typically used as carriers for batch transfer, cleaning, and inspection of silicon wafers. During this process, the baskets need to be rotated to accommodate different processing steps. For example, in the alkaline polishing process, baskets are used to transport silicon wafers in batches into a chemical bath. Multiple baskets are usually placed in the same bath simultaneously for this process. After alkaline polishing, the baskets are removed from the bath and their position and orientation are adjusted to accommodate loading and unloading by automated guided vehicles (AGVs) and the next automated processing machine. This process typically involves a robotic arm removing the basket and placing it in a rotating mechanism for rotation. The basket's orientation is then adjusted by a lifting and rotating mechanism. After inspection by a vision detection unit, the basket is rotated back to its original angle by the rotating mechanism. Finally, a basket circulation mechanism moves the basket to its designated full-basket channel. However, during the process of the flower basket being flipped and rotated and then inspected by the vision inspection component, the flower basket needs to be rotated twice before it can be visually inspected and passed to the next process. This not only makes it easy for the edge of the silicon wafer to collide with the top of the teeth of the flower basket during the flipping process, causing defects, but also causes a lot of time waste, which is not conducive to the cycle time of high-speed automated production.

[0059] To address the aforementioned issues, the inventors attempted to adjust the position of the vision inspection component, placing it on the side of the basket-turning device. This allows the component to directly inspect the basket after it is turned over, saving on basket handling processes and reducing the likelihood of wafer damage caused by collisions between the silicon wafer edge and the basket teeth. It also saves time spent adjusting the basket's position. However, because the vision inspection component is located on the side of the basket-turning device and is perpendicular to it when the basket is placed in front of it, the basket-placement process by the robotic arm is somewhat interfered with, hindering the improvement of the efficiency of automated solar cell production.

[0060] In view of this, this application provides a basket flipping device. By rotating the clamping component and the vision inspection component under the drive of the power component, the vision inspection component can be flipped like a basket to directly perform visual inspection on the silicon wafer in the basket. This can reduce the basket transfer process in the cell production process, thereby reducing the probability of silicon wafer damage caused by the silicon wafer edge hitting the top of the basket teeth, and saving the time of adjusting the state of the basket. This is beneficial to improving the yield of silicon wafers and the efficiency of automated cell production.

[0061] The technical solution of this application will be further described below with reference to the embodiments and accompanying drawings.

[0062] Please see Figures 1 to 3 , Figure 1 This is a schematic diagram of the structure of the flower basket flipping device (with a flower basket placed on it) provided in an embodiment of this application from one perspective; Figure 2 This is a schematic diagram of the structure of the flower basket flipping device (with a flower basket placed on it) provided in the embodiments of this application from another perspective; Figure 3 This is a schematic diagram of the structure of the flower basket flipping device (without the flower basket placed) provided in the embodiments of this application. In a first aspect, this application discloses a flower basket flipping device 100, including a worktable 1, a clamping assembly 2, a power assembly 3, and a vision detection assembly 4. Along the thickness direction X of the worktable, the clamping assemblies 2 are spaced apart above the worktable 1 and configured to clamp a flower basket 300. The power assembly 3 is disposed on the worktable 1, and the clamping assemblies 2 are connected to the power assembly 3 to be rotatable relative to the worktable 1. The vision detection assembly 4 is connected to the power assembly 3 and is located on one side of the clamping assembly 2. The vision detection assembly 4 is configured to perform visual inspection of the silicon wafer in the flower basket 300. The power assembly 3 is configured to drive the clamping assembly 2 to flip the flower basket 300 and to drive the vision detection assembly 4 to rotate.

[0063] The basket flipping device 100 provided in this application embodiment can rotate under the drive of the power component 3, so that the vision detection component 4 can be flipped like the basket 300. This allows the basket 300 to be flipped so that the silicon wafers in the basket 300 can be visually inspected directly by the vision detection component 4 after the basket 300 is flipped, without the need for additional handling and rotation processes to adjust the position and state of the basket 300. This reduces the flow process of the basket 300 during the cell production process, thereby reducing the probability of silicon wafer damage caused by the edge of the silicon wafer colliding with the tooth tip of the basket 300, and saving time in adjusting the state of the basket 300. This is beneficial to improving the yield of silicon wafers and the efficiency of automated cell production.

[0064] As an optional implementation method, such as Figures 1 to 3 As shown, the bottom of the workbench 1 is provided with multiple columns 11, which are arranged at intervals around the outer perimeter of the workbench 1, and the columns 11 are configured to support the workbench 1. The columns 11 can provide support for the workbench 1.

[0065] Optionally, the aforementioned columns 11 can be provided in multiple ways, such as two, three, four, five, six, etc., and this embodiment does not limit this. For example, as shown... Figure 3 As shown, there are four columns 11, which are distributed at the four corners of the worktable 1. In this way, the columns 11 provide more stable support for the worktable 1.

[0066] Optionally, the column 11 is provided with weight-reducing holes extending along its length, which can further reduce the weight of the flower basket flipping device 100 and improve the portability of the flower basket flipping device 100.

[0067] It is understandable that the aforementioned power component 3 drives the clamping component 2 and the vision detection component 4 to rotate in the following ways: the power component 3 first drives the clamping component 2 to rotate and complete the flipping of the flower basket 300, and then drives the vision detection component 4 to rotate; or the power component 3 first drives the vision detection component 4 to rotate and then drives the clamping component 2 to rotate and complete the flipping of the flower basket 300; or the power component 3 drives the clamping component 2 and the vision detection component 4 to rotate synchronously, etc.

[0068] This embodiment uses the example of the power component 3 driving the clamping component 2 and the vision detection component 4 to rotate synchronously.

[0069] Optionally, the power unit 3 is configured to drive the clamping component 2 and the vision inspection component 4 to rotate synchronously. In this way, by driving the clamping component 2 and the vision inspection component 4 to rotate simultaneously, the flower basket 300 can be directly visually inspected after being flipped into position. Compared to rotating the clamping component 2 and the vision inspection component 4 sequentially, this saves rotation time and improves the efficiency of automated battery cell production. Furthermore, synchronous rotation avoids the need to adjust the relative positions of the clamping component 2 and the vision inspection component 4 after they have rotated, further improving the efficiency of automated battery cell production. Additionally, by using a single power unit 3 to drive the clamping component 2 and the vision inspection component 4 to rotate simultaneously, the number of power mechanisms required can be reduced, simplifying the structure of the flower basket flipping device 100.

[0070] As an optional implementation method, such as Figure 3 As shown, the clamping assembly 2 includes a clamping body 21, which includes a fixing plate 211, a first clamping plate 212, and a second clamping plate 213. The fixing plate 211 is spaced apart above the worktable 1 along the thickness direction X of the worktable and is connected to the power assembly 3. The first clamping plate 212 and the second clamping plate 213 are respectively disposed on opposite sides of the fixing plate 211 to form a clamping space 21a for clamping the flower basket 300. The clamping space 21a formed by the first clamping plate 212, the second clamping plate 213, and the fixing plate 211 provides a placement space for the flower basket 300 and enables the clamping of the flower basket 300, thus facilitating subsequent flipping operations.

[0071] Understandably, to prevent the basket 300 from falling during the flipping process or from being damaged due to the silicon wafer colliding with the tooth tips of the basket 300 while shaking in the clamping space 21a, it is necessary to adjust the clamping space 21a to clamp the basket 300 tightly with the first clamping plate 212 and the second clamping plate 213. In some optional embodiments, the clamping of the basket 300 is achieved by the opposing movement of the first clamping plate 212 and the second clamping plate 213. As an example, the first clamping plate 212 is slidably connected to the fixed plate 211, and the first clamping plate 212 and the second clamping plate 213 are configured to move in opposite directions along a first direction Y to adjust the distance between the first clamping plate 212 and the second clamping plate 213, wherein the first direction Y is the length direction of the basket 300.

[0072] In another exemplary embodiment, the second clamping plate 213 is slidably connected to the fixed plate 211, and the first clamping plate 212 and the second clamping plate 213 are configured to move toward each other along a first direction Y to adjust the distance between the first clamping plate 212 and the second clamping plate 213, wherein the first direction Y is the length direction of the flower basket 300.

[0073] In another example, the first clamping plate 212 and the second clamping plate 213 are slidably connected to the fixed plate 211. The first clamping plate 212 and the second clamping plate 213 are configured to move toward each other along a first direction Y to adjust the distance between the first clamping plate 212 and the second clamping plate 213, wherein the first direction Y is the length direction of the flower basket 300.

[0074] In the above embodiment, by moving the first clamping plate 212 and the second clamping plate 213 toward each other along the first direction Y, the distance between the first clamping plate 212 and the second clamping plate 213 can be reduced, thereby enabling the first clamping plate 212 and the second clamping plate 213 to clamp the basket 300. This helps to prevent the basket 300 from falling off during the flipping process or from being damaged by the silicon wafer due to the silicon wafer 300 swaying in the clamping space 21a and colliding with the tooth tips of the basket 300. This helps to improve the yield of silicon wafers.

[0075] Please see Figures 4 to 8 , Figure 4 This is a schematic diagram of the structure of the flower basket flipping device (omitting the workbench and camera) provided in an embodiment of this application from one perspective; Figure 5 yes Figure 4 A magnified view of section B in the image; Figure 6 This is a schematic diagram of the structure of the flower basket flipping device (omitting the workbench and camera) provided in the embodiments of this application from another perspective; Figure 7 yes Figure 6 A magnified view of point A in the image; Figure 8 This is a schematic diagram of the flower basket flipping device (omitting the workbench, camera, and support plate) provided in this application embodiment. It is understood that the first clamping plate 212 and the second clamping plate 213 can move towards each other along the first direction Y. This can be done manually; or it can be driven by a motor, etc. This application embodiment does not limit this to any particular method.

[0076] Optionally, such as Figure 4 and Figure 5As shown, when the first clamping plate 212 is slidably connected to the fixed plate 211, the clamping body 21 also includes a first driving member 2151. The first driving member 2151 is disposed at one end of the fixed plate 211 near the first clamping plate 212, and is located on the side of the fixed plate 211 near the worktable 1. The first clamping plate 212 is connected to the driving end of the first driving member 2151, and the first driving member 2151 is configured to drive the first clamping plate 212 to move along the first direction Y. Through the first driving member 2151, on the one hand, the first clamping plate 212 can move along the first direction Y; on the other hand, the movement process of the first clamping plate 212 is more controllable, thereby improving the clamping effect and efficiency of the clamping assembly 2.

[0077] Optionally, the first driving component 2151 can be implemented in various ways. For example, the first driving component 2151 can be driven by a cylinder; alternatively, the first driving component 2151 can be driven by a motor and a rack and pinion mechanism; or, the first driving component 2151 can be driven by a motor and a ball screw mechanism. Alternatively, the first driving component 2151 can be driven by an electric cylinder, etc. This embodiment does not limit this. For example, as shown... Figure 4 and Figure 5 As shown, the first driving component 2151 is configured as a cylinder drive. This has two advantages: firstly, the direct connection between the cylinder's driving end and the first clamping plate 212 reduces the need for external components and simplifies system design and maintenance; secondly, it allows for more precise control of the movement of the first clamping plate 212 in the first direction Y, improving the clamping effect and efficiency of the clamping assembly 2.

[0078] Optionally, such as Figure 4 , Figure 6 and Figure 7 As shown, when the second clamping plate 213 is slidably connected to the fixed plate 211, the clamping body 21 also includes a second driving member 2152. The second driving member 2152 is disposed at one end of the fixed plate 211 near the second clamping plate 213, and the second driving member 2152 is located on the side of the fixed plate 211 near the worktable 1. The second clamping plate 213 is connected to the driving end of the second driving member 2152, and the second driving member 2152 is configured to drive the second clamping plate 213 to move along the first direction Y. Through the second driving member 2152, on the one hand, the second clamping plate 213 can move along the first direction Y; on the other hand, the movement process of the second clamping plate 213 is more controllable, thereby improving the clamping effect and efficiency of the clamping assembly 2.

[0079] Optionally, the second driving component 2152 can be implemented in various ways. For example, the second driving component 2152 can be driven by a cylinder; alternatively, the second driving component 2152 can be driven by a motor and a rack and pinion mechanism; or, the second driving component 2152 can be driven by a motor and a ball screw mechanism. Alternatively, the second driving component 2152 can be driven by an electric cylinder, etc. This embodiment does not limit this. For example, as shown... Figure 4 and Figure 7 As shown, the second driving component 2152 is configured as a cylinder drive. This allows for two advantages: firstly, direct connection between the cylinder's driving end and the second clamping plate 213 reduces the need for external components and simplifies system design and maintenance; secondly, it enables more precise control of the movement of the second clamping plate 213 in the first direction Y, improving the clamping effect and efficiency of the clamping assembly 2.

[0080] Optionally, such as Figure 4 As shown, when the first clamping plate 212 and the second clamping plate 213 are slidably connected to the fixed plate 211, it can be that one driving member simultaneously drives the first clamping plate 212 and the second clamping plate 213 to move towards each other along the first direction Y; it can also be that the first driving member 2151 drives the first clamping plate 212 to move along the first direction Y, and the second driving member 2152 drives the second clamping plate 213 to move along the first direction Y, etc. The embodiments of this application do not limit this. For example, when the first clamping plate 212 and the second clamping plate 213 are slidably connected to the fixed plate 211, the clamping body 21 also includes a first driving member 2151 and a second driving member 2152. The first driving member 2151 is disposed at one end of the fixed plate 211 near the first clamping plate 212, and the first clamping plate 212 is connected to the driving end of the first driving member 2151. The second driving member 2152 is disposed at one end of the fixed plate 211 near the second clamping plate 213, and the second clamping plate 213 is connected to the driving end of the second driving member 2152. The first driving member 2151 and the second driving member 2152 are located on the side of the fixed plate 211 near the workbench 1. The first driving member 2151 is configured to drive the first clamping plate 212 to move along the first direction Y, and the second driving member 2152 is configured to drive the second clamping plate 213 to move along the first direction Y. Through the first driving member 2151 and the second driving member 2152, on the one hand, the first clamping plate 212 and the second clamping plate 213 can move along the first direction Y; on the other hand, the movement process of the first clamping plate 212 and the second clamping plate 213 is made more controllable, thereby improving the clamping effect and efficiency of the clamping assembly 2. In addition, through the first driving member 2151 and the second driving member 2152, the movement of the first clamping plate 212 and the second clamping plate 213 can be adjusted respectively, so that the clamping assembly 2 can clamp or release the flower basket 300 more flexibly, which is beneficial to improving the adaptability of the clamping assembly 2.

[0081] As an optional implementation method, such as Figure 4 and Figure 5 As shown, the clamping body 21 also includes a support plate 214. The support plate 214 is located on the side of the fixed plate 211 away from the workbench 1. The support plate 214 is connected to the first clamping plate 212. When the first clamping plate 212 is slidably connected to the fixed plate 211, the support plate 214 can also be slidably connected to the fixed plate 211. The support plate 214 is configured to support the flower basket 300. Thus, on the one hand, the support plate 214 can provide a place for the flower basket 300; on the other hand, the support plate 214 is slidably connected to the fixing plate 211, so that the support plate 214 can move with the first clamping plate 212. Therefore, when the first clamping plate 212 moves along the first direction Y to clamp the flower basket 300, it can avoid the flower basket 300 from rubbing against the support plate 214 due to the first clamping plate 212 moving the flower basket 300. This helps to avoid the silicon wafer from being damaged by the collision between the silicon wafer and the tooth tip of the flower basket 300, thereby improving the yield of the silicon wafer.

[0082] To improve the stability of the movement of the first clamping plate 212 and the second clamping plate 213 and prevent them from shifting, this application also designs a scheme to make the movement of the first clamping plate 212 and the second clamping plate 213 smoother and the movement trajectory more controllable, as described below:

[0083] As an optional implementation method, such as Figure 5 and Figure 8 As shown, the clamping body 21 also includes a first damping member 2161 and a second damping member 2162. The first damping member 2161 and the second damping member 2162 extend along the first direction Y. The first damping member 2161 is disposed on the fixed plate 211, and the second damping member 2162 is disposed on the first clamping plate 212, and the second damping member 2162 is slidably connected to the first damping member 2161. Through the first damping member 2161 and the second damping member 2162, on the one hand, the moving speed can be reduced, preventing the first clamping plate 212 from instantly impacting the basket 300 and causing damage to the silicon wafer in the basket 300, thus improving the shock resistance and dynamic stability of the clamping assembly 2. On the other hand, it can also provide guidance for the movement of the first clamping plate 212, thereby preventing misalignment during movement.

[0084] Optionally, the first damping element 2161 and the second damping element 2162 described above can have various implementations. For example, the first damping element 2161 can be a damping tube, and the second damping element 2162 can be a damping rod, with the damping rod slidably passing through the damping tube; another example is that the first damping element 2161 can be a damping slider, and the second damping element 2162 can be a damping track, with the damping slider slidably connected to the damping track, etc. This embodiment does not limit this. For example, as shown... Figure 5 and Figure 8 As shown, the first damping element 2161 is a damping tube, which is mounted on the fixed plate 211. The second damping element 2162 is a damping rod, which is fixedly connected to the first clamping plate 212 and can slide through the damping tube. By setting the first damping element 2161 and the second damping element 2162 as a damping tube and a damping rod, the force between the first damping element 2161 and the second damping element 2162 is more uniform, which can further improve the seismic resistance and dynamic stability of the clamping assembly 2.

[0085] Optionally, the first damping element 2161 may include one or more. When the first damping element 2161 includes one, the second damping element 2162 shall be included accordingly. When the first damping element 2161 includes multiple, the second damping element 2162 shall be included accordingly, and the multiple first damping elements 2161 and the multiple second damping elements 2162 shall be provided in a one-to-one correspondence.

[0086] It is understood that the aforementioned first damping element may include multiple components, such as two, three, or four, and the second damping element 2162 may also correspond to two, three, or four components. This embodiment does not limit this. For example, as shown... Figure 8 As shown, there are two first damping elements and two corresponding second damping elements 2162. The two first damping elements 2161 and the two second damping elements 2162 correspond one-to-one, and the two first damping elements 2161 are located on both sides of the fixed plate 211 along the thickness direction X of the worktable. Thus, by providing first damping elements 2161 and second damping elements 2162 on both sides of the fixed plate 211, the damping force on the first clamping plate 212 can be made more uniform, which is beneficial to improving the seismic resistance and stability of the first clamping plate 212, thereby further improving the seismic resistance and dynamic stability of the clamping assembly 2.

[0087] As an optional implementation method, such as Figure 5 and Figure 8 As shown, the clamping body 21 also includes a first guide component 217, which is located between the support plate 214 and the fixed plate 211. The support plate 214 is slidably connected to the fixed plate 211 along the first direction Y via the first guide component 217. Thus, the sliding trajectory and stroke of the support plate 214 and the first clamping plate 212 relative to the fixed plate 211 can be adjusted via the first guide component 217, making the sliding process of the support plate 214 and the first clamping plate 212 more controllable and preventing situations such as sliding misalignment.

[0088] Optionally, such as Figure 5 and Figure 8As shown, the first guide component 217 includes a first sliding member 2171 and a first track 2172 extending along the first direction Y. One of the first sliding member 2171 and the first track 2172 is disposed on the fixed plate 211, and the other is disposed on the support plate 214. The first sliding member 2171 is slidably connected to the first track 2172. Through the sliding connection between the first sliding member 2171 and the first track 2172, the sliding of the support plate 214 and the first clamping plate 212 relative to the fixed plate 211 can be made smoother. At the same time, the sliding trajectory and stroke of the support plate 214 and the first clamping plate 212 relative to the fixed plate 211 can be adjusted, making the sliding process of the support plate 214 and the first clamping plate 212 more controllable and avoiding situations such as sliding misalignment.

[0089] Optionally, the first sliding member 2171 may include a slider, a pulley, etc., and the first track 2172 may include a slide rail, a groove, etc. This application embodiment does not limit the specific features thereto. For example, such as... Figure 5 and Figure 8 As shown, the first sliding member 2171 includes a slider, and the first track 2172 includes a slide rail. Through the sliding connection between the slider and the slide rail, on the one hand, since the slider has greater friction than the pulley, the sliding of the support plate 214 and the first clamping plate 212 relative to the fixed plate 211 can be smoother. On the other hand, the slider can provide better support for the support plate 214 and make the connection structure between the support plate 214 and the fixed plate 211 simpler.

[0090] It is understood that the aforementioned first guide component 217 can be configured as one or more, and when there are multiple first guide components 217, the multiple first guide components 217 are spaced apart from each other. For example, as shown... Figure 8 As shown, the fixed plate 211 is a rectangular plate, and four first guide components 217 are provided, which are respectively located near the four corners of the fixed plate 211. In this way, the four first guide components 217 cooperate with each other to not only guide the support plate 214, but also make the sliding of the support plate 214 more stable.

[0091] Optionally, such as Figure 5 As shown, when the first clamping plate 212 is slidably connected to the fixed plate 211, the clamping body 21 also includes a second guide component 218. The second guide component 218 extends along the first direction Y and is connected to the side of the fixed plate 211 near the workbench 1. The second guide component 218 is disposed on the first clamping plate 212, and the first clamping plate 212 is slidably connected to the fixed plate 211 through the second guide component 218.

[0092] Optionally, such as Figure 7 and Figure 8As shown, when the second clamping plate 213 is slidably connected to the fixed plate 211, the clamping body 21 also includes a third guide component 219. The third guide component 219 extends along the first direction Y and is connected to the fixed plate 211. The third guide component 219 is also disposed on the second clamping plate 213, and the second clamping plate 213 is slidably connected to the fixed plate 211 through the third guide component 219.

[0093] Optionally, such as Figure 5 As shown, when the first clamping plate 212 and the second clamping plate 213 are slidably connected to the fixed plate 211, the clamping body 21 also includes a second guide component 218 and a third guide component 219. The second guide component 218 and the third guide component 219 extend along the first direction Y. The second guide component 218 is connected to the side of the fixed plate 211 near the workbench 1. The second guide component 218 is disposed on the first clamping plate 212. The third guide component 219 is connected to the fixed plate 211 and disposed on the second clamping plate 213. The first clamping plate 212 and the second clamping plate 213 are slidably connected to the fixed plate 211 through the second guide component 218 and the third guide component 219, respectively.

[0094] In the above embodiments, the second guide component 218 and the third guide component 219 can make the sliding of the first clamping plate 212 and the second clamping plate 213 relative to the fixed plate 211 smoother. At the same time, the sliding trajectory and stroke of the first clamping plate 212 and the second clamping plate 213 relative to the fixed plate 211 can be adjusted respectively, making the sliding process of the first clamping plate 212 and the second clamping plate 213 more controllable and avoiding situations such as sliding misalignment.

[0095] It is understood that the aforementioned second guide component 218 can be configured as one or more, and when there are multiple second guide components 218, the multiple second guide components 218 are spaced apart from each other. For example, such as... Figure 5 As shown, there are two second guide components 218, which are respectively disposed on both sides of the first drive component 2151. In this way, the two first guide components 217 cooperate with each other to guide the first clamping plate 212 and make the sliding of the first clamping plate 212 more stable.

[0096] Optionally, such as Figure 5 and Figure 8As shown, the second guide component 218 is located between the fixed plate 211 and the worktable 1. The second guide component 218 includes a second sliding member 2181 and a second track 2182 extending along the first direction Y. One of the second sliding member 2181 and the second track 2182 is disposed on the fixed plate 211, and the other is disposed on the first clamping plate 212. The second sliding member 2181 is slidably connected to the second track 2182. Through the sliding connection of the second sliding member 2181 and the second track 2182, the sliding of the first clamping plate 212 relative to the fixed plate 211 can be made smoother. At the same time, the sliding trajectory and stroke of the first clamping plate 212 relative to the fixed plate 211 can be adjusted, making the sliding process of the first clamping plate 212 more controllable and avoiding situations such as sliding misalignment.

[0097] Optionally, the second sliding member 2181 may include a sliding rod, a crank-slider, etc., and the second track 2182 may include a sliding tube, a sliding rail, etc. This application embodiment does not limit the specific features thereto. For example, such as... Figure 5 As shown, the second sliding member 2181 includes a sliding rod, and the second track 2182 includes a sliding tube, with the sliding rod slidably passing through the sliding tube. This serves two purposes: firstly, it guides the first clamping plate 212; secondly, the sliding rod and sliding tube ensure more uniform force distribution between the second sliding member 2181 and the second track 2182, further improving the stability of the first clamping plate 212's movement.

[0098] Optionally, such as Figure 7 As shown, the third guide component 219 includes a third slider 2191 and a third track 2192 extending along the first direction Y. The third slider 2191 and the third track 2192 are located on the side of the fixed plate 211 opposite to the second drive component 2152. One of the third slider 2191 and the third track 2192 is disposed on the fixed plate 211, and the other is disposed on the second clamping plate 213. The third slider 2191 is slidably connected to the third track 2192. Through the sliding connection of the third slider 2191 and the third track 2192, the sliding of the second clamping plate 213 relative to the fixed plate 211 can be made smoother. At the same time, the sliding trajectory and stroke of the second clamping plate 213 relative to the fixed plate 211 can be adjusted, making the sliding process of the second clamping plate 213 more controllable and avoiding situations such as sliding misalignment.

[0099] Optionally, the third sliding member 2191 may include a sliding rod, a crank-slider, etc., and the third track 2192 may include a sliding tube, a sliding rail, etc. This application embodiment does not limit the specific features thereto. For example, as shown... Figure 7As shown, the third sliding member 2191 includes a sliding rod, and the third track 2192 includes a sliding tube, with the sliding rod slidably passing through the sliding tube. In this way, on the one hand, it can guide the second clamping plate 213; on the other hand, through the sliding rod and the sliding tube, the force between the third sliding member 2191 and the third track 2192 is more uniform, which can further improve the stability of the movement of the second clamping plate 213.

[0100] It is understood that the aforementioned third track 2192 can be configured as one or more. When the third track 2192 includes one, the third slider 2191 is correspondingly included as one; when the third track 2192 includes multiple, the third slider 2191 is correspondingly included as multiple, and the multiple third sliders 2191 are configured in a one-to-one correspondence with the multiple third tracks 2192.

[0101] Optionally, when there are multiple third tracks 2192, the multiple third tracks 2192 are spaced apart from each other. For example, such as... Figure 7 As shown, two third tracks 2192 are provided, spaced apart on the side of the fixed plate 211 opposite to the second driving member 2152; two third sliding members 2191 are provided corresponding to the two third tracks 2192. In this way, the two third sliding members 2191 and the two third tracks 2192 cooperate with each other, not only guiding the second clamping plate 213, but also making the sliding of the second clamping plate 213 more stable.

[0102] Optionally, the third guide component 219 further includes a fourth slider 2193. The fourth slider 2193 is located on the side of the fixed plate 211 near the second drive component 2152. The fourth slider 2193 is disposed on the second clamping plate 213. A fourth track 2153 is provided on the second drive component 2152 extending along the first direction Y. The fourth slider 2193 is slidably connected to the fourth track 2153. Through the sliding connection between the fourth slider 2193 and the fourth track 2153, the sliding of the second clamping plate 213 relative to the fixed plate 211 can be made smoother. At the same time, the sliding trajectory and stroke of the second clamping plate 213 relative to the fixed plate 211 can be adjusted, making the sliding process more controllable and avoiding situations such as sliding misalignment.

[0103] Optionally, the fourth sliding member 2193 may include a sliding rod, a crank-slider, etc., and the fourth track 2153 may include a guide hole, a slide rail, etc. This application embodiment does not limit the specific features thereto. For example, as shown... Figure 7As shown, the fourth sliding member 2193 includes a sliding rod, and the fourth track 2153 includes a guide hole tube, with the sliding rod slidably passing through the guide hole. In this way, on the one hand, it can guide the second clamping plate 213; on the other hand, through the sliding rod and the guide hole, the force between the fourth sliding member 2193 and the fourth track 2153 is made more uniform, further improving the stability of the movement of the second clamping plate 213.

[0104] It is understood that the aforementioned fourth track 2153 can be configured as one or more. When the fourth track 2153 includes one, the fourth slider 2193 includes one correspondingly; when the fourth track 2153 includes multiple, the fourth slider 2193 includes multiple correspondingly, and the multiple fourth sliders 2193 are configured in a one-to-one correspondence with the multiple fourth tracks 2153.

[0105] Optionally, when there are multiple fourth tracks 2153, they are spaced apart from each other. For example, two fourth tracks 2153 are provided, spaced apart at opposite corners of the second drive member 2152; two fourth sliders 2193 are provided corresponding to the two fourth tracks 2153. In this way, the two fourth sliders 2193 cooperate with the two fourth tracks 2153 to guide the second clamping plate 213 while further ensuring smoother sliding of the second clamping plate 213.

[0106] Optionally, such as Figure 7 As shown, the clamping assembly 2 also includes a first limiting component 2141, which is disposed at the end of the support plate 214 away from the first clamping plate 212 along the first direction Y. The first limiting component 2141 can limit the position of the basket 300 on the support plate 214, and can prevent the basket 300 from shifting relative to the support plate 214 due to inertia during the movement of the basket 300 by the first clamping plate 212 and the support plate 214, thus preventing the silicon wafer from being shaken or damaged by impact.

[0107] Optionally, the first limiting component 2141 may include a limiting strip, a limiting block, etc., which are not limited in this embodiment.

[0108] Please combine Figure 9 , Figure 9 This is a schematic diagram of the worktable and power assembly of the flower basket flipping device provided in this application embodiment. As an optional implementation, such as... Figure 4 and Figure 9As shown, the clamping assembly 2 also includes a support bracket 22, which is configured to support the clamping body 21. The power assembly 3 includes a rotary drive 31 and a rotating shaft 32. The rotary drive 31 is mounted on the worktable 1, and the rotating shaft 32 is connected to the rotary drive 31. The support bracket 22 is connected to the rotating shaft 32. Thus, the clamping assembly 2 can be fixed by the rotary drive 31, the rotating shaft 32, and the support bracket 22. At the same time, the rotation of the clamping assembly 2 by the rotary drive 31 can improve the automation rate of the flower basket flipping device 100, and make the rotation of the clamping assembly 2 more controllable, which is beneficial to improving the flipping efficiency of the flower basket flipping device 100.

[0109] Optionally, the rotary drive component 31 may be a servo motor, synchronous motor, etc., and this embodiment does not limit it.

[0110] Optionally, such as Figure 4 and Figure 9 As shown, the support bracket 22 includes a frame 221 and a connector 222. The frame 221 is configured to support the clamping body 21. The connector 222 is connected to the frame 221 and is also connected to the rotating shaft 32, allowing it to rotate under the action of the rotating shaft 32, thereby driving the frame 221 and the clamping body 21 to rotate. The connector 222 enables a fixed connection between the clamping assembly 2 and the rotating shaft 32, allowing the clamping assembly 2 to rotate under the drive of the rotating shaft 32. Furthermore, the frame 221 not only connects the fixing plate 211 to the connector 222 but also provides support for the fixing plate 211, preventing the thin fixing plate 211 from breaking due to torque during rotation after direct connection with the connector 222.

[0111] Optionally, the aforementioned support bracket 22 is provided with a weight-reducing hole extending along the first direction Y, which can reduce the weight of the clamping assembly 2, thereby reducing the power requirement of the rotary drive 31 and helping to save the operating cost of the flower basket flipping device 100.

[0112] Optionally, the connector 222 may include a connector base, a connector block, etc., which are not limited in this embodiment.

[0113] As an optional implementation method, such as Figure 4 and Figure 9 As shown, along the axial direction of the rotating shaft 32, the clamping assembly 2 and the vision inspection assembly 4 are arranged sequentially at intervals, and both the clamping assembly 2 and the vision inspection assembly 4 are connected to the rotating shaft 32. This approach allows for two advantages: firstly, a fixed connection between the clamping assembly 2 and the vision inspection assembly 4 can be achieved through the rotation drive 31 and the rotating shaft 32; secondly, synchronous rotation of the clamping assembly 2 and the vision inspection assembly 4 can be achieved through the rotating shaft 32, making their rotation more controllable.

[0114] Optionally, such as Figure 9 As shown, the power assembly 3 also includes a rotary bearing 34, which is mounted on the worktable 1. The rotating shaft 32 is rotatably mounted through the rotary bearing 34. The rotary bearing 34 provides support for the rotating shaft 32, making its rotation smoother and preventing wobbling at the end of the shaft 32. Furthermore, the rotary bearing 34 reduces the coefficient of friction during the rotation of the shaft 32 and improves its rotational accuracy.

[0115] Optionally, such as Figure 9 As shown, the power assembly 3 also includes a speed reducer 33, which is connected to the rotary drive 31, and the rotating shaft 32 is connected to the speed reducer 33. The speed reducer 33 can reduce the rotational speed of the rotating shaft 32, thereby achieving more precise control over the rotation of the clamping assembly 2.

[0116] Optionally, the aforementioned speed reducer 33 may include a gear reducer, a belt reducer, and a cycloidal pinwheel reducer, etc., and this embodiment does not limit this.

[0117] Please combine Figure 10 , Figure 10 This is a schematic diagram of the structure of the flower basket flipping device (workbench omitted) provided in this embodiment of the application. As an optional implementation, the visual inspection component 4 includes a fixed bracket 41, a mounting bracket 42, and a camera 43. The fixed bracket 41 is connected to the rotating shaft 32, and the mounting bracket 42 is slidably mounted on the fixed bracket 41. The camera 43 is fixed on the mounting bracket 42, and the mounting bracket 42 can slide relative to the fixed bracket 41 to move the camera 43 and detect different positions on the flower basket 300. In this way, on the one hand, the camera 43 is fixedly mounted through the mounting bracket 42 and the fixed bracket 41; on the other hand, the movement of the camera 43 is indirectly controlled by adjusting the sliding of the mounting bracket 42 relative to the fixed bracket 41, so that the camera 43 can detect silicon wafers at different positions on the flower basket 300. This not only makes the movement of the camera 43 more controllable but also avoids the direct connection of the drive device to the camera 43, thus preventing the vibration of the drive device during operation from interfering with the camera 43 and affecting its stability and detection quality.

[0118] Optionally, the sliding of the mounting bracket 42 relative to the fixed bracket 41 can be achieved by a power drive device. For example, it can be driven by a cylinder; alternatively, it can be driven by a motor and a rack and pinion; or it can be driven by a motor and a ball screw, etc. This embodiment does not limit the specific method used.

[0119] Optionally, the aforementioned fixed bracket 41 is provided with a weight-reducing hole extending along the first direction Y, which can reduce the weight of the vision detection component 4, thereby reducing the power requirement of the rotary drive component 31 and helping to save the operating cost of the flower basket flipping device 100.

[0120] Optionally, such as Figure 10 As shown, the visual inspection component 4 also includes a fifth guide component 44, which includes a fifth slider 441 and a fifth track 442. The fifth slider 441 is disposed on the mounting bracket 42, and the fifth track 442 extends along the first direction Y and is disposed on the fixed bracket 41. The fifth slider 441 is slidably connected to the fifth track 442. In this way, through the sliding connection of the fifth slider 441 and the fifth track 442, the sliding of the mounting bracket 42 relative to the fixed bracket 41 can be made smoother; at the same time, the sliding trajectory and stroke of the mounting bracket 42 and the camera 43 relative to the fixed bracket 41 can be adjusted, making the sliding process more controllable and avoiding situations such as sliding misalignment.

[0121] Optionally, the fifth sliding member 441 may include a slider, a pulley, etc., and the fifth track 442 may include a slide rail, a groove, etc. This application embodiment does not limit the specific features thereto. For example, such as... Figure 10 As shown, the fifth slider 441 includes a slider, and the fifth track 442 includes a slide rail. Through the sliding connection between the slider and the slide rail, on the one hand, since the slider has greater friction than the pulley, the sliding of the mounting bracket 42 relative to the fixed bracket 41 can be smoother. On the other hand, the slider can provide better support for the mounting bracket 42 and make the connection structure between the mounting bracket 42 and the fixed bracket 41 simpler.

[0122] Optionally, such as Figure 10 As shown, the visual inspection component 4 also includes a second limiting component 45, which includes a first limiting member 451 and a second limiting member 452. The first limiting member 451 and the second limiting member 452 are disposed on opposite sides of the fixed bracket 41 along the first direction Y. By using the first limiting member 451 and the second limiting member 452 to limit the movement range of the mounting bracket 42 in the first direction Y, it is possible to prevent the movement of the camera 43 driven by the mounting bracket 42 from exceeding the range of the fifth track 442, thereby preventing the mounting bracket 42 and the camera 43 from falling off the fixed bracket 41 and causing damage.

[0123] Optionally, the first limiting member 451 mentioned above may include a limiting strip, a limiting block, a limiting plate, etc., and this application embodiment does not limit this.

[0124] Optionally, the second limiting member 452 may include a limiting strip, a limiting block, a limiting plate, etc., and this application embodiment does not limit this.

[0125] The following is a brief description of the use of the flower basket flipping device 100 of this application:

[0126] First, the robotic arm removes the flower basket 300 from the medicine pool and places it on the support plate 214. The first drive unit 2151 and the second drive unit 2152 respectively drive the first clamping plate 212 and the second clamping plate 213 to move towards each other along the first direction Y to clamp the flower basket 300. Then, the rotation drive unit 31 of the power assembly 3 drives the rotating shaft 32 to drive the clamping assembly 2 and the vision detection assembly 4 to rotate synchronously by 90°. After that, the second drive unit 2152 drives the second clamping plate 213 away from the first clamping plate 212 along the first direction Y, so that the clamping assembly is released from the state of clamping the flower basket 300; at the same time, the camera 43 moves along the first direction Y toward the second clamping plate 213 to the second limiting member 452, and then the camera 43 moves along the first direction Y toward the first limiting member 451 and sequentially detects the silicon wafers in the flower basket 300. Finally, the flower basket circulation mechanism moves the flower basket 300 into the corresponding full-basket channel. Simultaneously, as the flower basket 300 is moved away, the camera 43 moves along the first direction Y to the rotating shaft 32. After the flower basket 300 is moved away, the rotation drive 31 of the power assembly 3 drives the rotating shaft 32 to synchronously rotate the clamping assembly 2 and the vision detection assembly 4 90° back to their initial state. The first drive 2151 drives the first clamping plate 212 and the support plate 214 away from the second clamping plate 213 along the first direction Y, ready to receive the next set of flower baskets 300 and repeat the above process.

[0127] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A flower basket inverting device, characterized by comprising: The utility model relates to a wafer inspection device, comprising: a workbench; a clamping assembly arranged above the workbench along the thickness direction of the workbench, configured to clamp a wafer basket; a power assembly arranged on the workbench, connected to the clamping assembly to rotate relative to the workbench; and a visual inspection assembly connected to the power assembly and located on one side of the clamping assembly, configured to visually inspect a silicon wafer in the wafer basket; the power assembly is configured to drive the clamping assembly to overturn the wafer basket and drive the visual inspection assembly to rotate.

2. The flower basket inverting device according to claim 1, characterized in that The power assembly is configured to drive the clamping assembly and the visual inspection assembly to rotate synchronously.

3. The flower basket inverting device according to claim 2, characterized in that The clamping assembly comprises a clamping body, which comprises a fixed plate, a first clamping plate and a second clamping plate, the fixed plate is arranged above the workbench along the thickness direction of the workbench, and the fixed plate is connected to the power assembly; the first clamping plate and the second clamping plate are arranged on the two opposite sides of the fixed plate respectively to form a clamping space between the fixed plate and the first clamping plate and / or the second clamping plate, the first clamping plate and the second clamping plate are slidably connected to the fixed plate, and the first clamping plate and the second clamping plate are configured to move towards each other along a first direction to adjust the distance between the first clamping plate and the second clamping plate; wherein the first direction is the length direction of the wafer basket.

4. The flower basket inverting device according to claim 3, characterized in that The clamping body further comprises a supporting plate located on the side of the fixed plate away from the workbench, the supporting plate is connected to the first clamping plate, and when the first clamping plate is slidably connected to the fixed plate, the supporting plate is slidably connected to the fixed plate; the supporting plate is configured to support the wafer basket.

5. The flower basket inverting device according to claim 4, wherein The clamping body further comprises a first damping member and a second damping member, the first damping member and the second damping member extend along the first direction, the first damping member is arranged on the fixed plate, the second damping member is arranged on the first clamping plate, and the second damping member is slidably connected to the first damping member; and / or, the clamping body further comprises a first guide component located between the supporting plate and the fixed plate, the first guide component comprises a first sliding member and a first track arranged along the first direction, one of the first sliding member and the first track is arranged on the fixed plate, and the other is arranged on the supporting plate, and the first sliding member is slidably connected to the first track.

6. The flower basket inverting device according to claim 3, wherein When the first clamping plate is slidably connected to the fixed plate, the clamping body further comprises a second guide component arranged along the first direction, the second guide component is connected to the side of the fixed plate close to the workbench, and the second guide component is arranged on the first clamping plate, and the first clamping plate is slidably connected to the fixed plate through the second guide component; and / or, When the second clamping plate is slidably connected to the fixed plate, the clamping body further comprises a third guide component, the third guide component is arranged to extend along the first direction, the third guide component is connected to the fixed plate, and the third guide component is arranged on the second clamping plate, and the second clamping plate is slidably connected to the fixed plate through the third guide component.

7. The flower basket inverting device according to claim 3, wherein The clamping assembly further comprises a bearing support configured to support the clamping body. The power assembly comprises a rotary driving member arranged on the workbench and a rotating shaft connected to the rotary driving member, and the bearing support is connected to the rotating shaft.

8. The flower basket inverting device according to claim 7, characterized in that The bearing support comprises a frame configured to support the clamping body and a connecting member connected to the frame and connected to the rotating shaft to rotate under the action of the rotating shaft to drive the frame and the clamping body to rotate.

9. The flower basket inverting device according to any one of claims 1 to 6, characterized in that, The power assembly comprises a rotary driving member arranged on the workbench and a rotating shaft connected to the rotary driving member, and the clamping assembly and the visual detection assembly are sequentially and spacedly arranged along the axial direction of the rotating shaft, and the clamping assembly and the visual detection assembly are both connected to the rotating shaft.

10. The flower basket inverting device according to claim 9, characterized in that The visual detection assembly comprises a fixed support connected to the rotating shaft, a mounting support slidably arranged on the fixed support, and a camera fixedly arranged on the mounting support, and the mounting support is slidable relative to the fixed support to drive the camera to move to detect different positions of the flower basket.

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