Material moving device

Abstract

The utility model discloses a material moving device which comprises a first material moving mechanism, the first material moving mechanism comprises a material moving unit, the material moving unit comprises at least two stages of material moving assemblies, each material moving assembly comprises a base plate, the normal direction of the large face of each base plate is the first direction, and the normal direction of the large face of each base plate is the second direction. The base plates of all stages of material moving assemblies are arranged at intervals in the first direction, and an included angle is formed between the first direction and the vertical direction. In the first direction, the base plate of the most upstream material moving assembly is used for installing and fixing the material moving units, the base plates of every two adjacent stages of material moving assemblies are slidably connected in the second direction, and an included angle is formed between the second direction and the first direction. The base plate of the most downstream material moving assembly is slidably connected with a mounting base in the second direction. The material moving device can have relatively good bending resistance in the vertical direction, and the possibility of deflection deformation of the material moving device in the using process can be reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and specifically to a material transfer device, which is particularly useful for receiving and transferring carriers such as quartz boats and graphite boats in semiconductor processing equipment. Background Technology

[0002] In semiconductor processing equipment, robotic arms and other transfer devices are frequently used to move carriers such as quartz boats, graphite boats, and support baskets between different workstations. However, with the continuous development of the industry and the increasing production capacity of equipment, the load on the carriers picked up by the transfer devices also increases accordingly. Over long-term use, the transfer devices are prone to significant deflection and deformation, which may lead to inaccurate picking positions and failure to accurately pick up carriers. In severe cases, it may even cause safety accidents such as carrier falling or overturning.

[0003] Therefore, how to provide a solution to overcome or alleviate the above-mentioned defects remains a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0004] The purpose of this invention is to provide a material transfer device that has relatively good bending resistance in the vertical direction, thereby reducing the possibility of deflection deformation during use.

[0005] To solve the above-mentioned technical problems, this utility model provides a material transfer device, including a first material transfer mechanism, the first material transfer mechanism including a material transfer unit, the material transfer unit including at least two stages of material transfer components, the material transfer components including a substrate, the normal of the large surface of the substrate being a first direction, the substrates of each stage of the material transfer components being arranged at intervals along the first direction, the first direction being set at an angle to the up and down direction; along the first direction, the substrate of the most upstream material transfer component is used for mounting and fixing the material transfer unit, the substrates of two adjacent stages of the material transfer components are slidably connected along a second direction, the second direction being set at an angle to the first direction, and the substrate of the most downstream material transfer component is slidably connected to a mounting base along the second direction.

[0006] In the above-described solution, the normal direction (i.e., the first direction) of the transfer component is set to be at an angle to the vertical direction. This allows for more efficient use of the large surface area of ​​the substrate, thereby improving the substrate's bending resistance in the vertical direction. This reduces the possibility of deflection deformation during the transfer device's operation, ensuring the accuracy of the transfer device's picking position over a longer period. It also significantly reduces the risk of accidents such as the falling or overturning of the parts to be transferred, thus contributing to safe production.

[0007] Optionally, the first material transfer mechanism includes two material transfer units, which are arranged at intervals along the first direction.

[0008] Optionally, the first transfer mechanism further includes a synchronizing rod, and the substrates corresponding to the transfer components in the two transfer units are connected by the synchronizing rod.

[0009] Optionally, the transfer assembly further includes a driving component; in two adjacent transfer assemblies, the driving component of the upstream transfer assembly can drive the downstream transfer assembly to move along the second direction; the driving component of the most downstream transfer assembly can drive the mounting base to move along the second direction.

[0010] Optionally, the driving component includes a power generation section; in two adjacent stages of the transfer assembly, the power generation section of the upstream transfer assembly is located on the side of its substrate facing away from the downstream transfer assembly, and the power generation section of the downstream transfer assembly is located on the side of its substrate facing the upstream transfer assembly.

[0011] Optionally, the substrate of the upstream transfer assembly includes a body portion and an upper protrusion portion, the upper protrusion portion is located on the upper side of the body portion, the power generation portion of the upstream transfer assembly is mounted on the upper protrusion portion, and the substrate of the transfer assembly adjacent to the upstream transfer assembly is slidably connected to the body portion.

[0012] Optionally, the substrate of the upstream transfer assembly includes a first end and a second end disposed opposite to each other in the second direction, the first end being used for mounting and fixing the first transfer mechanism; in each of the other transfer assemblies besides the upstream transfer assembly, the power generation part is disposed at the end of the substrate of the corresponding transfer assembly away from the first end.

[0013] Optionally, the two transfer units are a first transfer unit and a second transfer unit, and each transfer component of the first transfer unit is provided with the power generation unit; the first transfer mechanism further includes a synchronous shaft, and the power generation unit of the first transfer unit can be connected to the drive component of the corresponding transfer component in the second transfer unit through the synchronous shaft.

[0014] Optionally, the driving component further includes a conveyor belt module; the conveyor belt module of the upstream material transfer assembly includes a conveyor belt body, a drive wheel, two tensioning wheels and at least two support wheels. The conveyor belt body includes an upper belt segment and a lower belt segment. The upper belt segment is located above the lower belt segment. The upper belt segment is wound around the drive wheel, and the lower belt segment is wound around each of the support wheels. The two tensioning wheels are respectively disposed at two connection points of the upper belt segment and the lower belt segment.

[0015] Optionally, the material transfer assembly further includes a slide rail and an oil baffle, both of which are mounted on the base plate, with the oil baffle located below the slide rail.

[0016] Optionally, the first material transfer mechanism may further include a stroke detection component.

[0017] Optionally, it further includes a second transfer mechanism, wherein the substrate of the upstream transfer component is mounted on the second transfer mechanism, and the second transfer mechanism is used to drive the first transfer mechanism to move along a third direction, the third direction being set at an angle to the first direction, and the third direction being set at an angle to the second direction. Attached Figure Description

[0018] Figure 1 This is a structural schematic diagram of one implementation of the material transfer device provided in this utility model embodiment;

[0019] Figure 2 for Figure 1 A schematic diagram of the first material transfer unit in its unfolded state;

[0020] Figure 3 Schematic diagram of the first-stage substrate placed in different orientations;

[0021] Figure 4 for Figure 2 Schematic diagram of the first-stage material transfer assembly;

[0022] Figure 5 for Figure 2 A schematic diagram of the first material transfer unit in its retracted state;

[0023] Figure 6 for Figure 5 The left view;

[0024] Figure 7 for Figure 1 A schematic diagram of the second material transfer unit in its unfolded state;

[0025] Figure 8 for Figure 7 A schematic diagram of the structure of the second-stage material transfer assembly.

[0026] Figure label:

[0027] 1000 - First material transfer mechanism; 1100 - First material transfer unit; 1110 - First stage material transfer assembly; 1111 - First stage substrate; 1111A - First body part; 1111B - First upper protrusion; 1112 - First mounting plate; 1113 - First stage slide rail; 1114 - First stage oil baffle; 1115 - First stage drive component; 1115A - First stage power generation part; 1115B - First stage conveyor belt module; 1115B1 - First stage conveyor belt body; 1115B11 - First upper belt segment; 1115B12 - First lower belt segment; 1115B2 - First stage drive Wheel; 1115B21 - First stage drive shaft; 1115B3 - First tension wheel; 1115B4 - First stage support wheel; 1116 - First slide block; 1117 - First stage sensor; 1120 - First and second stage material transfer assembly; 1121 - First and second stage base plate; 1123 - First and second stage slide rail; 1124 - First and second stage oil baffle; 1125 - First and second stage drive component; 1125A - First and second stage power generation unit; 1125B - First and second stage conveyor belt module; 1125B1 - First and second stage drive shaft; 1126 - First mounting base; 1127 - First and second stage sensor; 1130 - First and third stage sensor ; 1200 - Second material transfer unit; 1210 - Second primary material transfer assembly; 1211 - Second primary substrate; 1211A - Second body part; 1211B - Second upper protrusion; 1212 - Second mounting plate; 1213 - Second primary slide rail; 1214 - Second primary oil baffle; 1215 - Second primary drive component; 1215A - Second primary conveyor belt module; 1215A1 - Second primary conveyor belt body; 1215A11 - Second upper belt segment; 1215A12 - Second lower belt segment; 1215A2 - Second primary drive wheel; 1215A21 - Second primary drive shaft; 1215A3 - Second upper belt wheel Tensioner wheel; 1215A4 - Second-stage support wheel; 1216 - Second slide block; 1217 - Second-stage sensor; 1220 - Second-stage transfer assembly; 1221 - Second-stage base plate; 1223 - Second-stage slide rail; 1224 - Second-stage oil baffle; 1225 - Second-stage drive component; 1225A - Second-stage conveyor belt module; 1225B - Second-stage drive shaft; 1226 - Second mounting base; 1227 - Second-stage sensor; 1230 - Second-stage sensor; 1300 - First-stage synchronizing rod; 1400 - Second-stage synchronizing rod; 1500 - First-stage synchronizing shaft; 1600 - Second-stage synchronizing shaft;

[0028] 2000 - Second material transfer mechanism; 2100 - Support; 2110 - Crossbeam; 2120 - Vertical beam; 2200 - Drive assembly;

[0029] 3000 - Pickup mechanism;

[0030] 4000 - Panel; 4100 - Large surface. Detailed Implementation

[0031] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0032] In the description of the embodiments of this utility model, the terms "first," "second," "third," "primary," and "secondary" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," "third," "primary," and "secondary" may explicitly or implicitly include one or more of that feature.

[0033] In the description of the embodiments of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, "linking" can mean a detachable connection or a non-detachable connection; it can mean a direct connection or an indirect connection through an intermediate medium. "Sliding connection" refers to a connection that allows relative sliding between the connected parts.

[0034] In the description of embodiments of this utility model, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0035] Please refer to Figure 1 , Figure 1 This is a structural schematic diagram of one implementation of the material transfer device provided in this utility model embodiment.

[0036] This utility model provides a material transfer device, specifically applicable to semiconductor or photovoltaic production systems. For example, it can be used to carry and transfer components to be transferred, such as carriers in diffusion equipment or plasma-enhanced chemical vapor deposition (PECVD) equipment. The carrier can be, for example, a quartz boat, a graphite boat, or, for example, a carrying basket.

[0037] like Figure 1As shown, the above-mentioned material transfer device includes a first material transfer mechanism 1000 and a second material transfer mechanism 2000.

[0038] The first material transfer mechanism 1000 includes two material transfer units, namely a first material transfer unit 1100 and a second material transfer unit 1200. The first material transfer unit 1100 and the second material transfer unit 1200 are arranged opposite to each other along a first direction X. The first direction X can be a horizontal direction, or it can be at a certain angle to the horizontal direction, which is not limited here.

[0039] A picking mechanism 3000 can be connected between the first transfer unit 1100 and the second transfer unit 1200. The picking mechanism 3000 can be used to pick up the parts to be transferred, such as the aforementioned carriers. Specifically, the picking mechanism 3000 can be a robotic arm mechanism, an electromagnetic adsorption mechanism, etc. Taking the robotic arm mechanism as an example, it can include a support beam, side grippers, and intermediate grippers, and can be used to pick up a single carrier or multiple carriers.

[0040] Both the first transfer unit 1100 and the second transfer unit 1200 may include at least two stages of transfer components. Each stage of the transfer components can slide relative to the other in the second direction Y, allowing both the first transfer unit 1100 and the second transfer unit 1200 to switch between an extended state and a retracted state. This drives the picking mechanism 3000 to move in the second direction Y, thereby moving the part to be transferred in the second direction Y. The second direction Y and the first direction X may be set at an angle, such as 90 degrees. Specifically, the second direction Y may be a horizontal direction, or it may be at a certain angle to the horizontal direction; this is not limited here.

[0041] It can be seen that the number of transfer components included in the first transfer unit 1100 and the second transfer unit 1200 can be the same, and the transfer components in the first transfer unit 1100 and the second transfer unit 1200 can be in one-to-one correspondence. The corresponding transfer components can operate synchronously to ensure the synchronicity and consistency of the displacement of the first transfer unit 1100 and the second transfer unit 1200 in the second direction Y.

[0042] Based on this, the first material transfer mechanism 1000 in this embodiment of the present invention may further include a synchronizing rod, which can connect two corresponding material transfer components in the first material transfer unit 1100 and the second material transfer unit 1200, so as to improve the displacement synchronization and consistency of the corresponding material transfer components.

[0043] Here, this embodiment of the present invention does not limit the number of transfer components included in the first transfer unit 1100 and the second transfer unit 1200. In practice, those skilled in the art can select according to specific needs, as long as the requirements of use are met. In some implementations, such as Figure 1 As shown, both the first transfer unit 1100 and the second transfer unit 1200 may include two-stage transfer components. Specifically, the first transfer unit 1100 may include a first-stage transfer component (not shown in the figure) and a first-second-stage transfer component (not shown in the figure), and the second transfer unit 1200 may include a second-stage transfer component (not shown in the figure) and a second-second-stage transfer component (not shown in the figure). Correspondingly, the first transfer mechanism 1000 may include two-stage synchronization rods, namely a first-stage synchronization rod 1300 and a second-stage synchronization rod 1400. The first-stage synchronization rod 1300 can connect the first-stage transfer component and the second-stage transfer component, and the second-stage synchronization rod 1400 can connect the first-second-stage transfer component and the second-second-stage transfer component.

[0044] Each level of the transfer components in the first transfer unit 1100 and the second transfer unit 1200 can be equipped with a power generation unit, meaning that each level of the transfer components can be an active transfer component. In this case, the actions of the first transfer unit 1100 and the second transfer unit 1200 can be relatively independent, and the overall power supply of the first transfer mechanism 1000 can be relatively sufficient, which is more conducive to ensuring the smooth displacement of each level of the transfer components.

[0045] In addition, in the first material transfer unit 1100 and the second material transfer unit 1200, only one of the material transfer components at each stage may be equipped with a power generation unit. In this case, the number of power generation units can be relatively small, and the structure of the first material transfer mechanism 1000 can be relatively simple.

[0046] Taking the example where each level of the transfer assembly in the first transfer unit 1100 is equipped with a power generation unit, in this case, each level of the transfer assembly in the first transfer unit 1100 is an active transfer assembly, while each level of the transfer assembly in the second transfer unit 1200 is a driven transfer assembly. To ensure that each level of the transfer assembly in the second transfer unit 1200 can also be smoothly displaced, the first transfer mechanism 1000 provided in this embodiment may further include a synchronous shaft. The synchronous shaft can connect the corresponding transfer assemblies in the first transfer unit 1100 and the second transfer unit 1200, so as to transfer the power of each transfer assembly in the first transfer unit 1100 to each transfer assembly in the second transfer unit 1200.

[0047] It can be seen that the number of synchronous shafts, the number of transfer components in the first transfer unit 1100, and the number of transfer components in the second transfer unit 1200 can all be consistent, so that each synchronous shaft can realize the power connection between the corresponding transfer components in the first transfer unit 1100 and the second transfer unit 1200 in a one-to-one correspondence. Still using... Figure 1 Taking the implementation method in the example, the first material transfer mechanism 1000 may include a primary synchronous shaft 1500 and a secondary synchronous shaft 1600. The primary synchronous shaft 1500 can be connected to the power generation unit of the first primary material transfer component and the second primary material transfer component so as to guide the power of the first primary material transfer component to the second primary material transfer component. The secondary synchronous shaft 1600 can be connected to the power generation unit of the first secondary material transfer component and the second secondary material transfer component so as to guide the power of the first secondary material transfer component to the second secondary material transfer component.

[0048] The first transfer mechanism 1000 may be installed on the second transfer mechanism 2000. The second transfer mechanism 2000 is used to drive the first transfer mechanism 1000 to move along a third direction Z. The third direction Z and the first direction X may be set at an angle, and the third direction Z and the second direction Y may also be set at an angle, such as 90 degrees. The third direction Z may be a vertical direction, or it may be at a certain angle to the vertical direction, which is not limited here.

[0049] With this configuration, the material transfer device provided in this embodiment of the present invention can provide displacement along the second direction Y and displacement along the third direction Z, thus having more degrees of freedom and better meeting the displacement requirements of the component to be transferred.

[0050] like Figure 1 As shown, the second material transfer mechanism 2000 may include a support 2100 and a drive assembly 2200.

[0051] The support frame 2100 serves as the structural foundation of the second material transfer mechanism 2000, and includes a horizontal beam 2110 and a vertical beam 2120. The vertical beams 2120 can extend along a third direction Z, and there can be two vertical beams 2120, which can be arranged opposite each other along a first direction X. The horizontal beam 2110 can be connected to the two vertical beams 2120 to form a frame-like support frame 2100, thereby ensuring the structural strength of the support frame 2100. The first material transfer unit 1100 and the second material transfer unit 1200 can be respectively installed on the two vertical beams 2120 and can slide along the two vertical beams 2120 in the third direction Z.

[0052] The drive assembly 2200 can be connected to the first transfer mechanism 1000 to provide driving force for the displacement of the first transfer mechanism 1000 in the third direction Z.

[0053] In some implementations, the drive component 2200 can be a linear drive element that can directly output linear displacement, such as a linear cylinder or a linear hydraulic cylinder. In this way, the structure of the drive component 2200 can be relatively simple.

[0054] In other implementations, the drive assembly 2200 may further include a rotary drive element such as a servo motor capable of directly outputting rotary displacement. In this case, the drive assembly 2200 may also include a displacement conversion mechanism such as a rack and pinion mechanism, a lead screw mechanism, or a conveyor belt mechanism to convert the rotary displacement directly output by the rotary drive element into the linear displacement required by the first material transfer mechanism 1000. In practice, the drive assembly 2200 may also include a reducer to adjust the displacement speed of the first material transfer mechanism 1000. This reducer may specifically be a worm gear reducer, which may have a mechanical self-locking function. This can largely prevent the first material transfer mechanism 1000 from falling off the second material transfer mechanism 2000, thus ensuring the safe and reliable operation of the material transfer device.

[0055] It should be understood that the above description of the specific structural form of the material transfer device is mainly based on Figure 1 The illustrations provided are for illustrative purposes only and should not be construed as limiting the scope of the material transfer device provided in this embodiment of the present invention. While fulfilling the functional requirements, the material transfer device provided in this embodiment of the present invention may also adopt other structural forms. For example, the first material transfer mechanism 1000 may include only one material transfer unit. As another example, the material transfer device may include only the first material transfer mechanism 1000, without including the second material transfer mechanism 2000.

[0056] Please refer to Figures 2-6 , Figure 2 for Figure 1 A schematic diagram of the first material transfer unit in its unfolded state; Figure 3 Schematic diagram of the first-stage substrate placed in different orientations; Figure 4 for Figure 2 Schematic diagram of the first-stage material transfer assembly; Figure 5 for Figure 2 A schematic diagram of the first material transfer unit in its retracted state; Figure 6 for Figure 5 The left view.

[0057] In this embodiment of the present invention, the structural forms of each material transfer component may be similar. The following embodiments of the present invention will first describe the structural forms of each level of material transfer components in the first material transfer unit 1100.

[0058] like Figure 2As shown, the first transfer unit 1100 may include two-stage transfer components, namely a first-stage transfer component 1110 and a first-second-stage transfer component 1120. The first-stage transfer component 1110 includes a first-stage substrate 1111, and the first-second-stage transfer component 1120 includes a first-second-stage substrate 1121. The normal direction of the large surface of both the first-stage substrate 1111 and the first-second-stage substrate 1121 is a first direction X, which is set at an angle to the vertical direction. This angle can be, for example, 90 degrees, etc., and is not limited here.

[0059] As can be seen, a plate component includes multiple outer wall surfaces. In this embodiment of the invention, the outer wall surface with the largest area is defined as the large surface of the plate component. For example... Figure 3 As illustrated in diagram a, for a rectangular plate 4000, it has a length L, a width W, and a height H, where length L > width W > height H. Thus, its large surface 4100 is the outer wall surface defined by length L and width W. Figure 3 As illustrated in diagram b, when the normal and vertical directions of the large surface 4100 are in the same direction, due to the relatively small height H of the plate 4000, the bending moment that the plate 4000 can withstand in the vertical direction is relatively small, making the plate 4000 prone to bending deformation. For example... Figure 3 As shown in the diagram, when the normal and vertical directions of the large surface 4100 are perpendicular, the width W of the plate 4000 is relatively large, which makes the bending moment that the plate 4000 can withstand in the vertical direction relatively large, and the plate 4000 is not prone to bending deformation.

[0060] Based on this, in this embodiment of the utility model, the normal direction (i.e., the first direction X) of the first primary substrate 1111 and the first secondary substrate 1121 is set to be at an angle to the vertical direction. This can make full use of the size of the large surface of the substrate to improve the bending resistance of the first primary substrate 1111 and the first secondary substrate 1121 in the vertical direction. This can reduce the possibility of deflection deformation of the first transfer unit 1100 during use, thereby ensuring the accuracy of the pick-up position of the transfer device for a longer period of time, and greatly avoiding safety accidents such as falling or overturning of the parts to be transferred, which is conducive to ensuring safe production.

[0061] The first primary substrate 1111 and the first secondary substrate 1121 are arranged at intervals in the first direction X. The first primary transfer assembly 1110 is located upstream of the first secondary transfer assembly 1120. The first primary transfer assembly 1110 is the most upstream transfer assembly in the first transfer unit 1100, and it can be used to install and fix the first transfer unit 1100. Specifically, it can be slidably connected to the aforementioned vertical beam 2120, etc., so as to realize the connection between the first transfer unit 1100 and the second transfer mechanism 2000. Correspondingly, the first secondary transfer assembly 1120 is the most downstream transfer assembly.

[0062] The first primary substrate 1111 includes a first end portion disposed opposite to each other along the second direction Y. Figure 2 (left end) and second end ( Figure 2 The first primary substrate 1111 can be mounted and fixed through the right end of the first primary substrate 1111. Specifically, the first primary substrate 1111 can be provided with a first mounting plate 1112 at the first end, and the first mounting plate 1112 can be connected by various connection methods such as screw connection, welding, snap-fit, riveting, etc.

[0063] In some alternative implementations, such as Figure 2 As shown, the first primary substrate 1111 may be provided with a first primary slide rail 1113, and the first secondary substrate 1121 may be slidably connected to the first primary slide rail 1113 so as to realize the relative sliding of the first secondary substrate 1121 and the first primary substrate 1111 in the second direction Y.

[0064] The first secondary substrate 1121 can be directly connected to the first primary slide rail 1113 mentioned above. Or, as... Figure 2 and Figure 4 As shown, the first primary material transfer assembly 1110 may further include a first slide block 1116, which is slidably connected to the first primary slide rail 1113. The first secondary substrate 1121 may be connected to the first slide block 1116 so as to be indirectly connected to the first primary slide rail 1113 through the first slide block 1116.

[0065] In some alternative implementations, the first secondary substrate 1121 may be provided with a first secondary slide rail 1123.

[0066] As the downstream transfer assembly, the first and second-level transfer assembly 1120 may be provided with a first mounting base 1126. The first mounting base 1126 is used to connect with the aforementioned pick-up mechanism 3000 to realize the connection between the pick-up mechanism 3000 and the downstream transfer assembly. The first mounting base 1126 can be slidably connected to the first and second-level slide rail 1123 to realize the relative sliding of the first mounting base 1126 and the first and second-level substrate 1121 in the second direction Y.

[0067] In some alternative implementations, the first-stage material transfer assembly 1110 may also include a first-stage oil baffle 1114.

[0068] The first-stage oil baffle 1114 can be installed on the first-stage base plate 1111, and the first-stage oil baffle 1114 can be located below the first-stage slide rail 1113. In actual operation, the first-stage oil baffle 1114 can be used to catch lubricating oil that may drip during the relative sliding of the first-stage transfer assembly 1120 and the first-stage transfer assembly 1110, so as to reduce the possibility of lubricating oil dripping onto the parts to be transferred or the ground, thereby reducing the possibility of contamination of the parts to be transferred, and also helping to ensure the environment of the production workshop.

[0069] Similarly, the first and second stage material transfer assembly 1120 may also include a first and second stage oil baffle 1124.

[0070] The first and second stage oil baffle 1124 can be installed on the first and second stage base plate 1121, and the first and second stage oil baffle 1124 can be located below the first and second stage slide rail 1123. In actual operation, the first and second stage oil baffle 1124 can be used to catch lubricating oil that may drip during the relative sliding of the first mounting base 1126 and the first and second stage base plate 1121, so as to reduce the possibility of lubricating oil dripping onto the parts to be transferred or the ground, thereby reducing the possibility of contamination of the parts to be transferred, and also helping to ensure the environment of the production workshop.

[0071] In some alternative implementations, such as Figure 2 As shown, the first-stage transfer assembly 1110 may include a first-stage drive component 1115, which drives the first-stage transfer assembly 1120 to move along the second direction Y. The first-stage transfer assembly 1120 may include a first-stage drive component 1125, which, as the downstream transfer assembly, drives the first mounting base 1126 to move along the second direction Y.

[0072] Both the first-stage drive component 1115 and the first-stage drive component 1125 can include a power generation unit, meaning that both the first-stage transfer assembly 1110 and the first-stage transfer assembly 1120 can be active transfer assemblies. Specifically, the power generation unit of the first-stage drive component 1115 is the first-stage power generation unit 1115A, and the power generation unit of the first-stage drive component 1125 is the first-stage power generation unit 1125A.

[0073] During specific assembly, such as Figure 2 and Figure 6As shown, the first primary power generation unit 1115A can be located on the side of the first primary substrate 1111 away from the first secondary substrate 1121, and the first secondary power generation unit 1125A can be located on the side of the first secondary substrate 1121 facing the first primary substrate 1111. That is, both the first primary power generation unit 1115A and the first secondary power generation unit 1125A can be relatively far away from the pickup mechanism 3000 in the second direction Y. In this way, when the pickup mechanism 3000 picks up the component to be transferred at a relatively high temperature, the impact of heat radiation on the first primary power generation unit 1115A and the first secondary power generation unit 1125A can be reduced, which is beneficial to ensuring the service life of the first primary power generation unit 1115A and the first secondary power generation unit 1125A.

[0074] As the upstream material transfer assembly, the first-stage substrate 1111 of the first-stage material transfer assembly 1110 may include a first body portion 1111A and a first upper protrusion 1111B. The first upper protrusion 1111B may be located above the first body portion 1111A, and the first-stage power generation portion 1115A may be mounted on the first upper protrusion 1111B. In this way, interference between the first-stage power generation portion 1115A and the first-stage secondary material transfer assembly 1120 can be better avoided.

[0075] The first secondary power generation unit 1125A can be disposed at the end of the first secondary substrate 1121 away from the first end in the second direction Y. In this way, interference between the first secondary power generation unit 1125A and the first primary material transfer assembly 1110 can be better avoided.

[0076] Both the first-stage power generation unit 1115A and the first-stage power generation unit 1125A can be electric motors. In this case, both the first-stage drive unit 1115 and the first-stage drive unit 1125 can also include a conveyor belt module to convert the rotational displacement directly output by the motor into the required linear displacement. The conveyor belt module of the first-stage drive unit 1115 is referred to as the first-stage conveyor belt module 1115B. The conveyor belt module of the first-stage drive unit 1125 is referred to as the first-stage conveyor belt module 1125B.

[0077] Combination Figure 2 and Figure 4As the upstream material transfer component, the first-stage conveyor module 1115B may include a first-stage conveyor body 1115B1, a first-stage drive wheel 1115B2, two first tensioning wheels 1115B3, and at least two first-stage support wheels 1115B4. The first-stage conveyor body 1115B1 may include a first upper belt segment 1115B11 and a first lower belt segment 1115B12, with the first upper belt segment 1115B11 located above the first lower belt segment 1115B12. In specific assembly, the first stage drive wheel 1115B2 can be installed on the first upper protrusion 1111B, and the first stage support wheel 1115B4 can be installed on the first body part 1111A; the first upper belt segment 1115B11 can be wound around the first stage drive wheel 1115B2, and the first lower belt segment 1115B12 can be wound around each of the first stage support wheels 1115B4; the two first tensioning wheels 1115B3 can be respectively set at the two connection points of the first upper belt segment 1115B11 and the first lower belt segment 1115B12 to tension the first stage conveyor belt body 1115B1.

[0078] It should be understood that the division of the first upper belt segment 1115B11 and the first lower belt segment 1115B12 is mainly based on the setting positions of the first stage drive wheel 1115B2, the first tension wheel 1115B3 and the first stage support wheel 1115B4. The first upper belt segment 1115B11 and the first lower belt segment 1115B12 do not refer to certain specific sections in the first stage conveyor belt body 1115B1. During the transmission process of the first stage conveyor belt body 1115B1, any belt segment on it can be used as the first upper belt segment 1115B11, and similarly, any belt segment on it can also be used as the first lower belt segment 1115B12.

[0079] Combination Figure 4 The first stage drive wheel 1115B2 can be connected to the first stage drive shaft 1115B21, and the first stage drive shaft 1115B21 can be connected to the aforementioned first stage synchronous shaft 1500 so as to transmit the power of the first stage power generation unit 1115A to the second stage material transfer assembly.

[0080] The structural form of the first and second stage conveyor belt module 1125B is similar to that of the aforementioned first stage conveyor belt module 1115B. For example... Figure 2As shown, the first and second stage conveyor belt module 1125B may include a drive wheel, a conveyor belt body, a support wheel, and a tensioning wheel. In practical applications, the positions of the drive wheel, support wheel, and tensioning wheel can be adjusted according to usage requirements to arrange the conveyor belt body in a winding configuration. The drive wheel of the first and second stage conveyor belt module 1125B may be connected to a first and second stage drive shaft 1125B1, which may be connected to the aforementioned second stage synchronous shaft 1600 to transmit the power of the first and second stage power generation unit 1125A to the second and second stage material transfer assembly.

[0081] It should be understood that the above description of the specific structural forms of the first-stage drive component 1115 and the first-stage drive component 1125 is mainly based on... Figure 2 and Figure 4 In some other implementations of this utility model, the first-stage drive component 1115 and the first-stage drive component 1125 can also adopt other structural forms. For example, when the first-stage power generation unit 1115A and the first-stage power generation unit 1125A use motors, they can also be combined with gear and rack mechanisms, lead screw mechanisms, etc., to realize the conversion of rotary displacement to linear displacement. As another example, the first-stage power generation unit 1115A and the first-stage power generation unit 1125A can also use linear drive elements such as linear hydraulic cylinders and linear pneumatic cylinders that can directly output linear displacement. In this case, the aforementioned power conversion mechanisms such as the first-stage conveyor belt module 1115B and the first-stage conveyor belt module 1125B can be omitted to simplify the structure.

[0082] In some alternative implementations, the first transfer unit 1100 may also include a stroke detection component.

[0083] Specifically, the first primary transfer assembly 1110 may include a first primary sensor 1117, and the first secondary transfer assembly 1120 may include a first secondary sensor 1127. Both the first primary sensor 1117 and the first secondary sensor 1127 may be infrared sensors, ultrasonic sensors, electromagnetic wave sensors, etc. The first primary sensor 1117 can detect the relative position of the first secondary transfer assembly 1120 relative to the first primary transfer assembly 1110 in the second direction Y, and the first secondary sensor 1127 can detect the movement position of the first mounting base 1126 on the first secondary substrate 1121.

[0084] In addition, the first transfer unit 1100 may also include a first third-level sensor 1130. The first third-level sensor 1130 may also be an infrared sensor, an ultrasonic sensor, an electromagnetic wave sensor, etc. The first third-level sensor 1130 may be disposed on the first first-level transfer assembly 1110, for example, it may be disposed on the first mounting plate 1112, for detecting the movement position of the first transfer unit 1100 in the third direction Z.

[0085] Please refer to Figure 7 and Figure 8 , Figure 7 for Figure 1 A schematic diagram of the second material transfer unit in its unfolded state; Figure 8 for Figure 7 A schematic diagram of the structure of the second-stage material transfer assembly.

[0086] like Figure 7 and Figure 8 As shown, the second transfer unit 1200 may include a second primary transfer component 1210 and a second secondary transfer component 1220. The specific structure of the second primary transfer component 1210 may be basically the same as that of the first primary transfer component 1110, and the specific structure of the second secondary transfer component 1220 may be basically the same as that of the first secondary transfer component 1120.

[0087] The second-stage material transfer assembly 1210 may include a second-stage substrate 1211, a second mounting plate 1212, a second-stage slide rail 1213, a second-stage oil baffle 1214, a second-stage drive component 1215, a second slide block 1216, and a second-stage sensor 1217.

[0088] The second primary substrate 1211 may include a second body portion 1211A and a second upper protrusion portion 1211B. The second primary substrate 1211 and the first primary substrate 1111 may be connected by the aforementioned primary synchronization rod 1300 to improve the synchronicity and consistency of the displacement of the first primary transfer assembly 1110 and the second primary transfer assembly 1210 in the second direction Y.

[0089] The second mounting plate 1212 is also located on one side of the second primary substrate 1211 in the second direction Y, and is used to install and fix the second primary substrate 1211. The second primary slide rail 1213 and the second primary oil baffle 1214 can both be mounted on the second primary substrate 1211, and the second primary oil baffle 1214 can be located on the lower side of the second primary slide rail 1213.

[0090] The second-stage drive component 1215 may be mounted on the second-stage substrate 1211. The second-stage drive component 1215 may include a second-stage conveyor belt module 1215A, a second-stage drive wheel 1215A2, a second tension wheel 1215A3, and a second-stage support wheel 1215A4. The second-stage conveyor belt module 1215A may also include a second-stage conveyor belt body 1215A1, which may also include a second upper belt segment 1215A11 and a second lower belt segment 1215A12. The second upper belt segment 1215A11 may be wound around the second-stage drive wheel 1215A2, and the second lower belt segment 1215A12 may be wound around two second-stage support wheels 1215A4. The two second tension wheels 1215A3 may also be disposed at the two connection points of the second upper belt segment 1215A11 and the second lower belt segment 1215A12.

[0091] The second-stage drive wheel 1215A2 can be connected to the second-stage drive shaft 1215A21.

[0092] The second-stage transfer assembly 1210 differs from the first-stage transfer assembly 1110 in that it does not have a power generation unit. Its second-stage drive shaft 1215A21 can be connected to the first-stage drive shaft 1115B21 of the first-stage transfer assembly 1110 via a first-stage synchronous shaft 1500, so as to transfer the power of the first-stage transfer assembly 1110 to the second-stage transfer assembly 1210.

[0093] The second-stage transfer assembly 1210 may be equipped with a second-stage sensor 1217 and a third-stage sensor 1230. The second-stage sensor 1217 is used to detect the displacement of the second-stage transfer assembly 1220 relative to the second-stage transfer assembly 1210 in the second direction Y. The second-stage sensor 1230 is used to detect the position of the second transfer unit 1200 in the third direction Z.

[0094] The second-level material transfer assembly 1220 may include a second-level substrate 1221, a second-level slide rail 1223, a second-level oil baffle 1224, and a second-level drive component 1225.

[0095] The second secondary substrate 1221 and the first secondary substrate 1121 can be connected by the aforementioned secondary synchronization rod 1400, so as to improve the synchronicity and consistency of the displacement of the first secondary transfer component 1120 and the second secondary transfer component 1220 in the second direction Y.

[0096] The second secondary drive component 1225 may be mounted on the second secondary substrate 1221. The second secondary drive component 1225 may include a second secondary conveyor module 1225A and a second secondary drive shaft 1225B. The second secondary drive component 1225 may also not include a power generation unit, and its second secondary drive shaft 1225B may be connected to the first secondary drive shaft 1125B1 of the first secondary transfer assembly 1120 via a secondary synchronous shaft 1600, so as to guide the power of the first secondary transfer assembly 1120 to the second secondary transfer assembly 1220.

[0097] The second secondary transfer assembly 1220 may further include a second mounting base 1226 and a second secondary sensor 1227. The second mounting base 1226 can be connected to the aforementioned pick-up mechanism 3000 to realize the connection between the pick-up mechanism 3000 and the downstream transfer assembly. The second secondary sensor 1227 is used to detect the position of the second mounting base 1226 in the second direction Y.

[0098] In the above implementation, both the first transfer unit 1100 and the second transfer unit 1200 include two-stage transfer components. Alternatively, the first transfer unit 1100 and the second transfer unit 1200 can also include three, four, or even more stages of transfer components. Taking the first transfer unit 1100 as an example, when it includes three stages of transfer components, in addition to the aforementioned first-stage transfer component 1110 and first-stage transfer component 1120, it can also include a first-stage tertiary transfer component. The structure of the first-stage tertiary transfer component can be basically the same as that of the first-stage transfer component 1120, and will not be repeated here.

[0099] The above are merely preferred embodiments of this utility model. It should be noted that, for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model.

Claims

1. A material moving device characterized by, The first material moving mechanism comprises a material moving unit, the material moving unit comprises at least two stages of material moving assemblies, the material moving assembly comprises a base plate, the normal of the large surface of the base plate is the first direction, the base plates of the material moving assemblies at different stages are arranged along the first direction, and the first direction and the up-down direction are arranged at an angle; Along the first direction, the base plate of the most upstream material moving assembly is used for mounting and fixing the material moving unit, the base plates of the material moving assemblies at adjacent stages are connected in sliding along the second direction, the second direction and the first direction are arranged at an angle, and the base plate of the most downstream material moving assembly is connected in sliding along the second direction and is provided with a mounting seat.

2. The material moving apparatus of claim 1, wherein, The first material moving mechanism comprises two material moving units, and the two material moving units are arranged along the first direction.

3. The material moving apparatus of claim 2, wherein, The first material moving mechanism further comprises a synchronization rod, and the base plates of the material moving assemblies in the two material moving units are connected through the synchronization rod.

4. The material moving apparatus of claim 2, wherein, The material moving assembly further comprises a driving component; In the adjacent two stages of material moving assemblies, the driving component of the upstream material moving assembly can drive the downstream material moving assembly to move along the second direction, and the driving component of the most downstream material moving assembly can drive the mounting seat to move along the second direction.

5. The material moving apparatus of claim 4, wherein, The driving component comprises a power generation component; In the adjacent two stages of material moving assemblies, the power generation component of the upstream material moving assembly is located on the side of the base plate of the upstream material moving assembly away from the downstream material moving assembly, and the power generation component of the downstream material moving assembly is located on the side of the base plate of the downstream material moving assembly facing the upstream material moving assembly.

6. The material moving apparatus of claim 5, wherein, The base plate of the most upstream material moving assembly comprises a body part and an upper protruding part, the upper protruding part is located on the upper side of the body part, the power generation component of the most upstream material moving assembly is mounted on the upper protruding part, and the base plate of the material moving assembly adjacent to the most upstream material moving assembly is connected in sliding on the body part.

7. The material moving apparatus of claim 5, wherein, The base plate of the most upstream material moving assembly comprises a first end part and a second end part arranged opposite in the second direction, and the first end part is used for mounting and fixing the first material moving mechanism. In each of the material moving assemblies except the most upstream material moving assembly, the power generation component is arranged on the end of the base plate of the corresponding material moving assembly away from the first end part.

8. The material moving apparatus of claim 5, wherein, The two material moving units are respectively a first material moving unit and a second material moving unit, and each material moving assembly of the first material moving unit is provided with the power generation component. The first material moving mechanism further comprises a synchronization shaft, and the power generation component of the first material moving unit can be connected through the synchronization shaft and the driving component of the material moving assembly in the second material moving unit.

9. The material moving apparatus of any one of claims 4-8, wherein, The driving component further comprises a conveyor belt module. The conveyor belt module of the most upstream material moving assembly comprises a conveyor belt body, a driving wheel, two tensioning wheels and at least two supporting wheels, the conveyor belt body comprises an upper belt segment and a lower belt segment, the upper belt segment is located on the upper side of the lower belt segment, the upper belt segment is wound around the driving wheel, the lower belt segment is wound around each supporting wheel, and the two tensioning wheels are arranged at two connection positions of the upper belt segment and the lower belt segment respectively.

10. The material moving apparatus of any one of claims 1-8, wherein, The material moving assembly further comprises a slide rail and an oil baffle, both of which are mounted on the base plate, and the oil baffle is located at the lower side of the slide rail.

11. The material moving apparatus of any one of claims 1-8, wherein, The first material moving mechanism further comprises a stroke detection component.

12. The material moving apparatus of any one of claims 1-8, wherein, The material moving assembly further comprises a second material moving mechanism, the base plate of the most upstream material moving assembly is mounted on the second material moving mechanism, and the second material moving mechanism is used to drive the first material moving mechanism to move in a third direction, the third direction and the first direction are arranged at an angle, and the third direction and the second direction are also arranged at an angle.

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