Reciprocating dedusting, spraying and laminating device for microelectronic products

Abstract

The utility model discloses a reciprocating type dedusting, spraying and laminating device for microelectronic products, and relates to the technical field of microelectronic products. The reciprocating type dust removal, spraying and film covering device for the microelectronic products comprises a film covering box, and a spraying mechanism and a dust removal mechanism are arranged in the film covering box; the dust removal mechanism comprises a dust removal part and a placement part; the dust removal part comprises a connecting box and a corrugated telescopic pipe; the placement part comprises a placement frame and a suction cup; the dust removal mechanism has the technical effects that the dust removal mechanism can efficiently remove dust and impurities on the surfaces of microelectronic products through cooperation of a compression air pump, a corrugated telescopic pipe, the connecting box and a plurality of air outlet nozzles, and a clean foundation is provided for film covering; a suction cup on the top surface of the placing frame cooperates with a compression spring, a damper, an extrusion plate and other parts, the product can be accurately positioned and fixed, and displacement is prevented; and through the combination of the connecting box, the fixing frame, the connecting sleeve and the bolt, the height of the air outlet nozzle can be flexibly adjusted.

Description

Technical Field

[0001] This utility model relates to the field of microelectronic product technology, specifically to a reciprocating dust removal spray coating device for microelectronic products. Background Technology

[0002] Microelectronics is a new technology that has developed alongside integrated circuits, especially very large-scale integrated circuits. Microelectronic products utilize the movement of micro-electrons within solids at the micrometer or even nanometer scale to achieve functions such as information processing, transmission, and storage.

[0003] With the rapid development of science and technology, microelectronic products are increasingly widely used in various fields, and their performance and quality are receiving more and more attention. In the manufacturing process of microelectronic products, surface dust removal and subsequent spray coating processes are key links to ensure product quality.

[0004] Existing dust removal devices lack effective adjustment mechanisms when removing dust from microelectronic products of different specifications, making it difficult to adjust them according to the specific specifications and characteristics of the microelectronic products. This results in unsatisfactory dust removal effects during the dust removal process. Therefore, a reciprocating dust removal spray coating device for microelectronic products is proposed. Utility Model Content

[0005] (a) Technical problems to be solved

[0006] To address the shortcomings of existing technologies, this utility model provides a reciprocating dust removal spray coating device for microelectronic products, which solves the problem that when removing dust from microelectronic products of different specifications, there is a lack of effective adjustment mechanisms, making it difficult to adjust according to the specific specifications and characteristics of the microelectronic products, resulting in unsatisfactory dust removal effects.

[0007] (II) Technical Solution

[0008] To achieve the above objectives, this utility model is implemented through the following technical solution: it includes a coating box, and the coating box is equipped with a spraying mechanism and a dust removal mechanism;

[0009] The dust removal mechanism includes a dust removal section and a placement section;

[0010] The dust removal section includes a connecting box and a corrugated telescopic tube, and the placement section includes a placement frame and a suction cup;

[0011] The inner side of the laminating box is slidably connected to the outer wall of the connecting box. Multiple air outlets are fixedly installed through the outer wall of the connecting box, extending into the interior of the connecting box. The corrugated telescopic tube is fixedly installed through the outer wall of the connecting box, extending into the interior of the connecting box. A compressed air pump is fixedly installed on the outer wall of the laminating box. The air outlet of the compressed air pump is fixedly installed through the outer wall of the laminating box, extending into the interior of the laminating box. The air outlet of the compressed air pump is fixedly connected to the side of the corrugated telescopic tube away from the connecting box. The bottom surface of the placement frame is fixedly connected to the inner side of the laminating box. Multiple suction cups are fixedly installed on the top surface of the placement frame. An exhaust pipe is fixedly installed through the outer wall of the laminating box, extending into the interior of the laminating box. A one-way valve is fixedly installed through the outer wall of the exhaust pipe.

[0012] Preferably, the spraying mechanism includes multiple atomizing nozzles, and a reciprocating threaded rod is rotatably provided on the inner side of the coating box via a bearing seat. A control block is threadedly sleeved on the outer wall of the reciprocating threaded rod. The outer wall of the control block is slidably connected to the inner side of the coating box. A spraying box is fixedly provided on the bottom surface of the control block. The top surfaces of the multiple atomizing nozzles are all fixedly extended through the bottom surface of the spraying box into the interior of the spraying box.

[0013] Preferably, the top surface of the placement frame has two sliding grooves, the inner walls of the two sliding grooves are respectively provided with two moving blocks, the top surfaces of the two moving blocks are respectively fixedly provided with two positioning blocks, the inner side of the placement frame is provided with a pressing plate, the top surface of the pressing plate is hinged with two connecting rods, and the side of the two connecting rods away from the pressing plate is respectively hinged to the bottom surface of the two moving blocks.

[0014] Preferably, a compression spring and a damper are fixedly provided on the inner side of the placement frame, and the top surface of the compression spring and the top surface of the damper are both fixedly connected to the bottom surface of the extrusion plate.

[0015] Preferably, a fixing frame is fixedly provided on the inner bottom surface of the coating box, and a connecting sleeve is slidably sleeved on the outer wall of the fixing frame. The side of the connecting sleeve near the connecting box is fixedly connected to the outer wall of the connecting box. A bolt is threaded through the outer wall of the connecting sleeve and extends into the interior of the fixing frame. A wedge-shaped groove is provided on the inner side of the coating box, and a wedge-shaped block is slidably provided on the inner wall of the wedge-shaped groove. The side of the wedge-shaped block near the connecting box is fixedly connected to the outer wall of the connecting box.

[0016] Preferably, a motor is fixedly installed on the outer wall of the coating box, and the output end of the motor is fixedly connected to the outer wall of the reciprocating threaded rod through the outer wall of the coating box. A liquid pump is fixedly installed on the outer wall of the coating box, and the liquid pump outlet is fixedly installed through the outer wall of the coating box and extends into the interior of the coating box. A hose is fixedly installed at the liquid pump outlet, and the side of the hose near the spray box is fixedly installed through the outer wall of the spray box and extends into the interior of the spray box.

[0017] (III) Beneficial Effects

[0018] This utility model provides a reciprocating dust removal spray coating device for microelectronic products. It has the following features:

[0019] Beneficial effects:

[0020] (I) This reciprocating dust removal spray coating device for microelectronic products, the dust removal mechanism, through the cooperation of compressed air pump, corrugated telescopic pipe, connecting box and multiple air nozzles, can efficiently remove dust and impurities from the surface of microelectronic products, providing a clean basis for coating; the suction cup on the top surface of the placement frame, together with the compression spring, damper, extrusion plate and other components, can accurately position and fix the product to prevent displacement; the combination of connecting box with fixed frame, connecting sleeve and bolts realizes flexible adjustment of air nozzle height to adapt to different specifications of products.

[0021] (II) The reciprocating dust removal spray coating device for microelectronic products has a motor driving a reciprocating threaded rod to rotate in the spraying mechanism, which causes the control block to drive the spraying box and multiple atomizing nozzles to move horizontally back and forth, so as to achieve uniform spray coating, ensure consistent coating thickness, improve product performance and quality, and the multiple atomizing nozzles improve spraying efficiency; the liquid pump stably delivers coating liquid to the spraying box, which is uniformly sprayed through the atomizing nozzles, ensuring a stable and continuous liquid supply; the overall structure is reasonable, the components are tightly connected, and the operation is simple. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0023] Figure 2 This is a schematic diagram of the dust removal mechanism of this utility model;

[0024] Figure 3 This is a schematic diagram of the internal structure of the placement frame in the dust removal mechanism of this utility model;

[0025] Figure 4 This is a schematic diagram of the spraying mechanism of this utility model;

[0026] Figure 5 This utility model Figure 2 Enlarged structural diagram of region A in the middle;

[0027] Figure 6 This utility model Figure 4 A magnified structural diagram of region B in the middle.

[0028] In the diagram: 1. Coating box; 2. Spraying mechanism; 21. Reciprocating threaded rod; 22. Control block; 23. Spraying box; 24. Motor; 25. Liquid pump; 26. Atomizing nozzle; 27. Hose; 3. Dust removal mechanism; 31. Connecting box; 32. Wedge block; 33. Fixing frame; 34. Corrugated telescopic pipe; 35. Compressed air pump; 36. Air outlet; 37. Placement frame; 38. Suction cup; 39. Positioning block; 310. Exhaust pipe; 311. Moving block; 312. Connecting rod; 313. Extrusion plate; 314. Compression spring; 315. Damper; 316. Connecting sleeve; 317. Bolt. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0030] Please see Figure 1-6 The present invention provides a technical solution: including a coating box 1, wherein a spraying mechanism 2 and a dust removal mechanism 3 are provided inside the coating box 1;

[0031] Dust removal mechanism 3 includes a dust removal section and a placement section;

[0032] The dust removal unit includes a connecting box 31 and a corrugated telescopic tube 34, and the placement unit includes a placement frame 37 and a suction cup 38;

[0033] The inner side of the laminating box 1 is slidably connected to the outer wall of the connecting box 31. Multiple air outlets 36 are fixedly installed through the outer wall of the connecting box 31, extending into the interior of the connecting box 31. A corrugated telescopic pipe 34 is fixedly installed through the outer wall of the connecting box 31, extending into the interior of the connecting box 31. A compressed air pump 35 is fixedly installed on the outer wall of the laminating box 1, with its outlet fixedly extending through the outer wall of the laminating box 1 into the interior of the laminating box 1. The outlet of the compressed air pump 35 is fixedly connected to the side of the corrugated telescopic pipe 34 away from the connecting box 31. The bottom surface of the placement frame 37 is fixedly connected to the inner side of the laminating box 1. Multiple suction cups 38 are fixedly installed on the top surface of the placement frame 37. An exhaust pipe 310 is fixedly installed through the outer wall of the laminating box 1, extending into the interior of the laminating box 1. A one-way valve is fixedly installed through the outer wall of the exhaust pipe 310. Two sliding grooves are opened on the top surface of the placement frame 37. Two moving blocks 311 are slidably installed on the inner walls of the two sliding grooves, and the top surfaces of the two moving blocks 311 are fixedly... Two positioning blocks 39 are provided. An extrusion plate 313 is slidably provided on the inner side of the placement frame 37. Two connecting rods 312 are hinged to the top surface of the extrusion plate 313. The side of the two connecting rods 312 away from the extrusion plate 313 is respectively hinged to the bottom surface of the two moving blocks 311. A compression spring 314 and a damper 315 are fixedly provided on the inner side of the placement frame 37. The top surface of the compression spring 314 and the top surface of the damper 315 are both fixedly connected to the bottom surface of the extrusion plate 313. A fixing frame 33 is fixedly provided on the bottom surface of the inner side of the film-coating box 1. A connecting sleeve 316 is slidably sleeved on the outer wall of the fixing frame 33. The side of the connecting sleeve 316 near the connecting box 31 is fixedly connected to the outer wall of the connecting box 31. A bolt 317 is threaded through the outer wall of the connecting sleeve 316 and extends into the interior of the fixing frame 33. A wedge-shaped groove is opened on the inner side of the film-coating box 1. A wedge block 32 is slidably provided on the inner wall of the wedge groove. The side of the wedge block 32 near the connecting box 31 is fixedly connected to the outer wall of the connecting box 31.

[0034] The spraying mechanism 2 includes multiple atomizing nozzles 26. A reciprocating threaded rod 21 is rotatably mounted on the inner side of the coating box 1 via a bearing seat. A control block 22 is threadedly fitted on the outer wall of the reciprocating threaded rod 21. The outer wall of the control block 22 is slidably connected to the inner side of the coating box 1. A spraying box 23 is fixedly mounted on the bottom surface of the control block 22. The top surfaces of the multiple atomizing nozzles 26 are fixedly extended through the bottom surface of the spraying box 23 and into the interior of the spraying box 23. A motor 24 is fixedly mounted on the outer wall of the coating box 1. The output end of the motor 24 is fixedly connected through the outer wall of the coating box 1 and to the outer wall of the reciprocating threaded rod 21. A liquid pump 25 is fixedly mounted on the outer wall of the coating box 1. The liquid outlet end of the liquid pump 25 is fixedly extended through the outer wall of the coating box 1 and into the interior of the coating box 1. A hose 27 is fixedly mounted on the liquid outlet end of the liquid pump 25. The side of the hose 27 near the spraying box 23 is fixedly extended through the outer wall of the spraying box 23 and into the interior of the spraying box 23.

[0035] In use, the microelectronic product that needs to be coated is placed above the placement frame 37. The compression spring 314 and the damper 315 can provide a downward force to the extrusion plate 313. When the extrusion plate 313 moves downward, the two connecting rods 312 and the two moving blocks 311 can make the two positioning blocks 39 extrude and position the microelectronic product, so that it is located in the middle of the placement frame 37. The microelectronic product can be fixed by multiple suction cups 38.

[0036] After the fixing is completed, manually adjust the height of the connecting box 31 and the multiple air outlets 36 so that the height of the multiple air outlets 36 is adapted to the height of the microelectronic product. During the adjustment process, you only need to manually control the connecting box 31 to move up and down. After the adjustment is completed, tighten the bolts 317 to fix the height of the connecting box 31 and the multiple air outlets 36. At this time, close the box cover of the film-coating box 1, and then turn on the compressed air pump 35. After the compressed air pump 35 is turned on, it can deliver compressed air into the connecting box 31 through the corrugated telescopic pipe 34, and then spray it out through the multiple air outlets 36, thereby removing dust from the outer wall of the microelectronic product. The air inside the film-coating box 1 can be discharged through the exhaust pipe 310 and the one-way valve.

[0037] After dust removal is completed, the compressed air pump 35 is turned off, and the motor 24 and the liquid pump 25 are turned on. After the liquid pump 25 is turned on, it can deliver the liquid required for coating to the inside of the spray box 23. It can be sprayed onto the outer wall of the microelectronic product through multiple atomizing nozzles 26, and then coated. After the motor 24 is turned on, it can drive the reciprocating threaded rod 21 to rotate. During the rotation, the reciprocating threaded rod 21 can drive the spray box 23 and multiple atomizing nozzles 26 to move horizontally back and forth through the control block 22, so as to reciprocate the coating of the microelectronic product.

[0038] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes the element.

[0039] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A reciprocating dust removal and coating device for microelectronic products, comprising a coating box (1), characterized in that: The film coating box (1) is internally provided with a spraying mechanism (2) and a dust removal mechanism (3); The dust removal mechanism (3) comprises a dust removal part and a placing part; The dust removal part comprises a connecting box (31) and a corrugated telescopic pipe (34), and the placing part comprises a placing frame (37) and a suction disc (38); The inner side of the film coating box (1) is slidably connected with the outer wall of the connecting box (31), a plurality of air outlets (36) are fixedly and penetratingly arranged on the outer wall of the connecting box (31) and extend into the connecting box (31), the corrugated telescopic pipe (34) is fixedly and penetratingly arranged on the side of the connecting box (31) and extends into the connecting box (31), a compressed air pump (35) is fixedly arranged on the outer wall of the film coating box (1) and extends into the film coating box (1), the air outlet end of the compressed air pump (35) is fixedly and penetratingly connected with the side of the corrugated telescopic pipe (34) away from the connecting box (31), the bottom surface of the placing frame (37) is fixedly connected with the inner side of the film coating box (1), a plurality of suction discs (38) are fixedly arranged on the top surface of the placing frame (37), an air exhaust pipe (310) is fixedly and penetratingly arranged on the outer wall of the film coating box (1) and extends into the film coating box (1), and a one-way valve is fixedly and penetratingly arranged on the outer wall of the air exhaust pipe (310).

2. A reciprocating spray coating apparatus for microelectronic products as defined in claim 1, wherein: The spraying mechanism (2) comprises a plurality of atomizing nozzles (26), the inner side of the film coating box (1) is rotatably provided with a reciprocating threaded rod (21) through a bearing seat, the outer wall of the reciprocating threaded rod (21) is threadedly sleeved with a control block (22), the outer wall of the control block (22) is slidably connected with the inner side of the film coating box (1), the bottom surface of the control block (22) is fixedly provided with a spraying box (23), and the top surfaces of the plurality of atomizing nozzles (26) are fixedly and penetratingly arranged on the bottom surface of the spraying box (23) and extend into the spraying box (23).

3. A reciprocating spray coating apparatus for microelectronic products as defined in claim 1, wherein: Two sliding grooves are formed in the top surface of the placing frame (37), two moving blocks (311) are slidably arranged in the inner walls of the two sliding grooves, respectively, two positioning blocks (39) are fixedly arranged on the top surfaces of the two moving blocks (311), respectively, an extrusion plate (313) is slidably arranged on the inner side of the placing frame (37), two connecting rods (312) are hingedly arranged on the top surface of the extrusion plate (313), and the bottom surfaces of the two moving blocks (311) are hingedly connected with the side of the two connecting rods (312) away from the extrusion plate (313), respectively.

4. A reciprocating spray coating apparatus for microelectronic products as defined in claim 3, wherein: A compression spring (314) and a damper (315) are fixedly arranged on the inner side of the placing frame (37), and the top surfaces of the compression spring (314) and the damper (315) are fixedly connected with the bottom surface of the extrusion plate (313).

5. The reciprocating spray coating apparatus for microelectronic products of claim 1, wherein: The inner bottom surface of the film coating box (1) is fixedly provided with a fixed frame (33), an outer wall of the fixed frame (33) is slidably sleeved with a connecting sleeve (316), one side of the connecting sleeve (316) close to the connecting box (31) is fixedly connected with an outer wall of the connecting box (31), and a bolt (317) is threadedly and penetratingly arranged on an outer wall of the connecting sleeve (316) to extend into the fixed frame (33), an inner surface of the film coating box (1) is provided with a wedge-shaped groove, and an inner wall of the wedge-shaped groove is slidably provided with a wedge-shaped block (32), and one side of the wedge-shaped block (32) close to the connecting box (31) is fixedly connected with an outer wall of the connecting box (31).

6. A reciprocating spray coating apparatus for microelectronic products as defined in claim 2, wherein: An outer wall of the film coating box (1) is fixedly provided with a motor (24), an output end of the motor (24) is fixedly connected with an outer wall of the reciprocating screw rod (21) penetrating through the outer wall of the film coating box (1), an outer wall of the film coating box (1) is fixedly provided with a liquid pump (25), an outlet end of the liquid pump (25) is fixedly and penetratingly arranged on the outer wall of the film coating box (1) to extend into the film coating box (1), the outlet end of the liquid pump (25) is fixedly provided with a hose (27), and one side of the hose (27) close to the spraying box (23) is fixedly and penetratingly arranged on an outer wall of the spraying box (23) to extend into the spraying box (23).

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