Disassembling and assembling structure

Abstract

The utility model discloses a disassembling and assembling structure which comprises a first moving assembly, the first moving assembly is connected with a second moving assembly through a connecting assembly, and a clamping jaw assembly is arranged at the end of the second moving assembly. When moving up and down, the first moving assembly can drive the second moving assembly to move in the radial direction through the connecting assembly, and then the diameter of a circle defined by the clamping jaw assemblies is adjusted. By means of the accurate clamping function of the clamping jaw assembly, the risk of fragmentation caused by uneven force during manual operation is avoided. And meanwhile, accurate positioning and clamping of the heating disc are achieved through an automatic mechanical structure, the problems of complexity and low error-tolerant rate of manual operation are solved, rapid and efficient operation is achieved, the working efficiency is remarkably improved, and the labor intensity of operators is reduced. That is, according to the embodiment, the problems that the heating disc is prone to fragmentation, complex in operation and low in efficiency are effectively solved, and reliable technical support is provided for disassembly and assembly of the heating disc in semiconductor thin film deposition equipment.

Description

Technical Field

[0001] This utility model relates to the field of mechanical fixing technology, and in particular to a disassembly and assembly structure. Background Technology

[0002] In semiconductor equipment, especially thin film deposition equipment, the heating plate inside the reaction chamber is one of the core components. Heating plates are expensive, have long manufacturing cycles, and are fragile. Therefore, they should be protected during material transportation, use, storage, maintenance, and passive disassembly / reassembly when replacing materials, to minimize the risk of damage.

[0003] However, the heating plates of current mainstream machines are relatively large and made of hard and brittle ceramic, which often poses a high risk of breakage during maintenance, replacement, and disassembly. The high unit price and long lead time of heating plates mean that any problems can severely impact the normal operation of the machine and cause significant economic losses. Furthermore, most current machines have a compact design, resulting in a small distance between the heating plate and other components within the reaction chamber. This presents a considerable challenge for manual installation and disassembly of the heating plate, and manual operation is unreliable, has a low error tolerance, is inefficient, time-consuming, and causes operator fatigue. Therefore, it is necessary to develop a tooling system specifically designed for the disassembly and installation of heating plates to improve safety during disassembly and installation, while simultaneously increasing work efficiency and reducing the workload of operators. Utility Model Content

[0004] The embodiments of this utility model provide a disassembly and assembly structure, which solves the technical problems of low reliability and time-consuming and labor-intensive manual installation and disassembly.

[0005] To address the aforementioned problems, according to one aspect of this application, an embodiment of the present invention provides a disassembly and assembly structure, which includes a first moving component, a connecting component, a second moving component, and a claw component. The first moving component is connected to the second moving component via the connecting component, and the claw component is disposed at the end of the second moving component. When the first moving component moves up and down, it can drive the second moving component to move radially via the connecting component, thereby adjusting the diameter of the circle formed by the claw component.

[0006] In some embodiments, the first movable component includes a central column, a slider, and a locking unit. The slider is sleeved on the central column, and both the slider and the central column have fixing holes. The locking unit cooperates with the fixing holes, so that the first movable component has a first state of locking the disassembly structure and a second state of releasing the disassembly structure.

[0007] In some embodiments, the locking unit includes a fixing member, a first hole in the slider, and a second hole in the central column; when the fixing member passes through both the first hole and the second hole, the first moving component is in the first state, and vice versa, the first moving component is in the second state.

[0008] In some embodiments, the connecting components are at least two, each of the connecting components including a first link and a second link, one end of the first link being hinged to the slider, the other end of the first link being connected to one end of the second link, and the other end of the second link being connected to the claw assembly via the second moving component; wherein, one end of the second link can be inserted into the other end of the first link, and the insertion length can be adjusted so that the connecting components have different lengths.

[0009] In some embodiments, the second link includes a link body, one end of which has a first mating section having at least two third holes, the first link being a hollow structure having a fourth hole, the fourth hole mating with different third holes to make the connecting assembly have different lengths; the other end of the link body has a second mating section, the second mating section being hinged to the second moving assembly.

[0010] In some embodiments, the connecting assembly further includes a bracket having the same number of extensions as the connecting assembly, at least two of the extensions extending radially, the claw assembly being located at the bottom of the extension, and the bottom end of the second moving assembly passing through the through hole of the extension and acting on the claw assembly; the central column is fixed to the bracket.

[0011] In some embodiments, the connecting component further includes a limiting block fixed to both sides of the second moving component, with its bottom abutting the surface of the extension segment.

[0012] In some embodiments, the claw assembly includes at least two claws, the number of which is the same as the number of extension segments, and they are disposed one-to-one at the bottom of the extension segments; wherein the claws have inwardly bent portions.

[0013] In some embodiments, the inner surface of the bend has an anti-abrasion pad.

[0014] In some embodiments, the connecting components are three in number, which are evenly distributed circumferentially around the outer periphery of the slider and extend radially.

[0015] Compared with the prior art, the disassembly and assembly structure of this utility model has at least the following beneficial effects:

[0016] The disassembly and assembly structure provided by this utility model includes a first moving component, a connecting component, a second moving component, and a claw component. The first moving component is connected to the second moving component through the connecting component, and the claw component is disposed at the end of the second moving component. When the first moving component moves up and down, it can drive the second moving component to move radially through the connecting component, thereby adjusting the diameter of the circle formed by the claw component.

[0017] This embodiment utilizes the precise clamping function of the claw assembly to avoid the risk of breakage caused by uneven force during manual operation, thus improving the safety of the heating plate. Simultaneously, the automated mechanical structure achieves precise positioning and clamping of the heating plate, reducing the complexity and low error tolerance of manual operation. Furthermore, this embodiment achieves fast and efficient operation through mechanized assembly and disassembly tools, significantly improving work efficiency and reducing the labor intensity of operators. In other words, this embodiment effectively solves the problems of heating plate fragility, operational complexity, and low efficiency through mechanized and automated design, providing reliable technical support for the assembly and disassembly of heating plates in semiconductor thin film deposition equipment.

[0018] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This invention provides a schematic diagram of a disassembly and assembly structure according to an embodiment of the present invention.

[0021] Figure 2 This invention provides a first structural schematic diagram of a disassembly and assembly structure in a working state, according to an embodiment of the present invention.

[0022] Figure 3 This invention provides a second structural schematic diagram showing a disassembly and assembly structure in a working state according to an embodiment of the present invention.

[0023] Figure 4 This invention presents a schematic diagram of the first connecting rod in a disassembly and assembly structure according to an embodiment of the present invention.

[0024] Figure 5This invention provides a schematic diagram of the structure of the second link in a disassembly and assembly structure according to an embodiment of the present invention.

[0025] Figure 6 An exploded view of the first movable component in a disassembly and assembly structure provided by an embodiment of the present invention is shown;

[0026] Figure 7 This invention provides another exploded view of the first movable component in a disassembly and assembly structure according to an embodiment of the present invention.

[0027] Figure label:

[0028] 1. First moving component; 11. Central column; 12. Slider; 13. Locking unit; 131. Fixing component; 132. First hole; 133. Second hole; 2. Connecting component; 21. First connecting rod; 22. Second connecting rod; 23. Limiting block; 24. Bracket; 25. Extension section; 211. Fourth hole; 221. Connecting rod body; 222. First mating section; 223. Second mating section; 224. Third hole; 251. Through hole; 3. Second moving component; 4. Claw assembly; 41. Claw; 42. Bending part; 43. Anti-wear pad; 5. Heating plate. Detailed Implementation

[0029] To further illustrate the technical means and effects adopted by this utility model to achieve its intended purpose, the specific implementation methods, structures, features, and effects according to this utility model application are described in detail below with reference to the accompanying drawings and preferred embodiments. In the following description, different "an embodiment" or "an embodiment" do not necessarily refer to the same embodiment. Furthermore, specific features, structures, or characteristics in one or more embodiments can be combined in any suitable form.

[0030] In the description of this utility model, it should be clarified that the terms "first," "second," etc., in the specification, claims, and drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence; the terms "vertical," "lateral," "longitudinal," "front," "back," "left," "right," "up," "down," "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing this utility model, and do not mean that the device or element referred to must have a specific orientation or position, and therefore should not be construed as a limitation of this utility model.

[0031] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0032] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0033] This embodiment provides a disassembly and assembly structure, such as Figures 1-7 As shown, the disassembly and assembly structure includes a first moving component 1, a connecting component 2, a second moving component 3, and a claw component 4. The first moving component 1 is connected to the second moving component 3 through the connecting component 2, and the claw component 4 is disposed at the end of the second moving component 3. When the first moving component 1 moves up and down, it can drive the second moving component 3 to move radially through the connecting component 2, thereby adjusting the diameter of the circle formed by the claw component 4.

[0034] For clarity, it is assumed that the object to be disassembled and installed in this embodiment is the heating plate 5. Of course, the disassembly and assembly structure provided in this embodiment can also disassemble other workpieces.

[0035] The first moving component 1 is located at the top of the entire disassembly and assembly structure and can move up and down. Its main function is to drive the connecting component 2 to make radial adjustments through its up-and-down movement, thereby controlling the clamping or releasing action of the claw component 4. The connecting component 2 connects the first moving component 1 and the second moving component 3, and plays a role in transmitting force. When the first moving component 1 moves up and down, the connecting component 2 moves accordingly, driving the second moving component 3 to move radially. The second moving component 3 is located between the first moving component 1 and the claw component 4, and achieves radial movement through the drive of the connecting component 2. Its main function is to adjust the diameter of the circle formed by the claw component 4 to meet the clamping requirements of the heating plate 5. The claw component 4 is located at the end of the second moving component 3 and is used to clamp the heating plate 5. When the second moving component 3 moves radially, the diameter of the circle formed by the claw component 4 changes, thereby achieving the clamping or releasing action of the heating plate 5.

[0036] Using the disassembly and assembly structure provided in this embodiment, the disassembly process of the heating plate 5 is as follows: the first moving component 1 moves upward, driving the connecting component 2 to retract inward, thereby causing the second moving component 3 to retract radially inward. As the second moving component 3 retracts radially, the diameter of the circle formed by the claw component 4 decreases, clamping the heating plate 5. After the heating plate 5 is clamped, it can be removed from the reaction chamber by other means to complete the disassembly.

[0037] Using the disassembly and assembly structure provided in this embodiment, the installation process of the heating plate 5 is as follows: The heating plate 5 is placed within the circle formed by the claw assembly 4, and after clamping, the entire disassembly and assembly structure, along with the heating plate 5, is moved to the reaction chamber by a robotic arm or manually. Then, the first moving assembly 1 moves downwards, causing the connecting assembly 2 and the second moving assembly 3 to expand outwards, increasing the diameter of the circle formed by the claw assembly 4. After the claw assembly 4 releases the heating plate 5, it is placed inside the reaction chamber to complete the installation.

[0038] Currently, the heating plates of mainstream equipment are large and made of hard and brittle ceramic, making them prone to breakage during assembly and disassembly. This embodiment utilizes the precise clamping function of the claw assembly 4 to avoid the risk of breakage due to uneven force during manual operation, thus improving the safety of the heating plate. Simultaneously, the existing equipment design is compact, with a small distance between the heating plate and other components within the reaction chamber, posing a significant challenge for manual operation. To address this, this embodiment employs an automated mechanical structure to achieve precise positioning and clamping of the heating plate, reducing the complexity and low error tolerance of manual operation. Furthermore, addressing the issues of time-consuming manual assembly and disassembly of the heating plate and operator fatigue, this embodiment utilizes mechanized assembly and disassembly tools to achieve fast and efficient operation, significantly improving work efficiency and reducing operator workload. In other words, this embodiment effectively solves the problems of heating plate fragility, operational complexity, and low efficiency through mechanized automated design, providing reliable technical support for the assembly and disassembly of heating plates in semiconductor thin film deposition equipment.

[0039] In a specific embodiment, the first moving component 1 includes a central column 11, a slider 12, and a locking unit 13. The slider 12 is sleeved on the central column 11, and both the slider 12 and the central column 11 have fixing holes. The locking unit 13 cooperates with the fixing holes, so that the first moving component 1 has a first state of locking the disassembly structure and a second state of releasing the disassembly structure.

[0040] The central column 11 is located at the center of the first moving component 1. Serving as a support and guide, its main function is to provide the vertical movement track for the slider 12 and ensure the stability of its movement. The slider 12 is fitted onto the central column 11 and can slide up and down along it. Its main function is to drive the movement of the connecting component 2 (such as inward retraction or outward expansion) through its vertical movement, thereby indirectly controlling the clamping or releasing action of the claw component 4. The locking unit 13 is located between the slider 12 and the central column 11. Its main function is to fix the slider 12 at a specific position on the central column 11. When it is necessary to fix the disassembly structure in a specific position (such as after clamping the heating plate), the slider 12 slides upward along the central column 11. At this time, the locking unit 13 fixes the slider 12 in the current position by cooperating with the fixing hole on the central column 11. When it is necessary to adjust or release the disassembly structure (such as releasing the heating plate), the locking unit 13 releases the fixation of the slider 12, and then the slider 12 slides downward along the central column 11 to the target position.

[0041] In this embodiment, the central column 11 serves as a support and guide component, ensuring the stability of the slider 12's up-and-down movement, thereby improving the motion accuracy of the entire assembly / disassembly structure. The locking unit 13, by fixing the slider 12 to a specific position on the central column 11, ensures the stability and safety of the assembly / disassembly structure, thereby improving the reliability of the entire operation.

[0042] In a specific embodiment, the locking unit 13 includes a fixing member 131, a first hole 132 opened on the slider 12, and a second hole 133 opened on the central column 11; when the fixing member 131 passes through the first hole 132 and the second hole 133 at the same time, the first moving component 1 is in the first state, otherwise the first moving component 1 is in the second state.

[0043] The fixing member 131 is located in the locking unit 13 (i.e., between the slider 12 and the central column 11). Its main function is to fix the slider 12 to the central column 11 (such as in the locked state) by passing through both the first hole 132 and the second hole 133. The first hole 132 is formed on the slider 12 and cooperates with the fixing member 131; its main function is to provide a position for the fixing member 131 to pass through and be fixed to achieve the locking function of the slider 12. The second hole 133 is formed on the central column 11 and cooperates with the fixing member 131; its main function is to provide a position for the fixing member 131 to pass through and be fixed to achieve the locking function of the slider 12.

[0044] In the first state (i.e., the locked state): the fixing member 131 passes through both the first hole 132 on the slider 12 and the second hole 133 on the central column 11; at this time, the fixing member 131 fixes the slider 12 to the central column 11 to ensure the stability and safety of the entire disassembly and assembly structure. In the second state (i.e., the released state): the fixing member 131 does not pass through both the first hole 132 on the slider 12 and the second hole 133 on the central column 11. It may be located only in the second hole 133 or not in any hole. At this time, the fixing member 131 does not fix the slider 12 to the central column 11 to facilitate adjustment or release of the entire disassembly and assembly structure.

[0045] In a specific embodiment, the connecting component 2 has at least two components, each of which includes a first connecting rod 21 and a second connecting rod 22. One end of the first connecting rod 21 is hinged to the slider 12, and the other end of the first connecting rod 21 is connected to one end of the second connecting rod 22. The other end of the second connecting rod 22 is connected to the claw component 4 through the second moving component 3. The second connecting rod 22 can be inserted into the other end of the first connecting rod 21, and the insertion length can be adjusted so that the connecting component 2 has different lengths.

[0046] One end of the first connecting rod 21 is hinged to the slider 12, and the other end is connected to one end of the second connecting rod 22. Its main function is to convert the up-and-down movement of the slider 12 into the movement of the second connecting rod 22 to control the claw assembly 4. One end of the second connecting rod 22 is connected to the other end of the first connecting rod 21, and the other end is connected to the claw assembly 4 through the second moving component 3. Its main function is to adjust the length inserted into the first connecting rod 21 to accommodate the needs of heating plates of different sizes and to control the claw assembly. The second moving component is located at the other end of the second connecting rod 22 and is connected to the claw assembly 4. Its main function is to transmit the movement of the second connecting rod 22 to the claw assembly 4.

[0047] In this embodiment, one end of the second connecting rod 22 can be inserted into the other end of the first connecting rod 21, and the insertion length can be adjusted so that the connecting component 2 has different lengths. For example, if it is inserted deeper, the connecting component 2 is shorter, and the circle formed by the claw component 4 at its end is smaller. This disassembly and assembly structure is suitable for heating plates with smaller diameters. Conversely, if it is inserted shallower, the connecting component 2 is longer, and the circle formed by the claw component 4 at its end is larger. This disassembly and assembly structure is suitable for heating plates with larger diameters.

[0048] In a specific embodiment, the second connecting rod 22 includes a connecting rod body 221. One end of the connecting rod body 221 has a first mating section 222. The first mating section 222 has at least two third holes 224. The first connecting rod 21 is a hollow structure with a fourth hole 211. The fourth hole 211 mates with different third holes 224 to make the connecting assembly 2 have different lengths. The other end of the connecting rod body 221 has a second mating section 223, which is hinged to the second moving assembly 3.

[0049] The first mating section 222 is located at the end where the second connecting rod 22 is inserted into the first connecting rod 21, and its surface has multiple third holes 224. Its function is to adjust the insertion depth of the two connecting rods by aligning them with the fourth hole 211 of the first connecting rod 21. The third holes 224 are formed on the first mating section 222 and are used to fix it to the fourth hole 211 of the first connecting rod 21 by pins or bolts, providing fixing points for different insertion positions. The fourth hole 211 is formed on the hollow surface of the first connecting rod 21, and is fixed after alignment with the third hole 224, its function being to engage with the third hole to lock the insertion length of the second connecting rod 22. The second mating section 223 is located at the other end of the second connecting rod 22 and is connected to the second moving assembly 3 by a hinge. Its function is to transmit the movement of the second connecting rod 22 to the pawl assembly 4, while allowing rotational freedom to accommodate radial movement.

[0050] When there are two third holes 224, the length of the connecting assembly 2 can be adjusted by the following steps: Insert the first mating section 222 of the second connecting rod 22 into the hollow end of the first connecting rod 21, adjust the insertion depth so that the fourth hole 211 of the first connecting rod 21 is aligned with one of the third holes 224, and use a pin or bolt to pass through the aligned fourth hole 211 and third hole 224 to lock the current insertion depth. Alternatively, align the third hole 224 closer to the end of the second connecting rod 22 with the fourth hole 211; this will result in a deeper insertion. Figure 3 As shown, the total length of connecting component 2 is shortened. The third hole 224, located further from the end, is aligned with the fourth hole 211, resulting in a shallower insertion, as shown. Figure 2 As shown, the total length of connecting component 2 is extended.

[0051] In this embodiment, the connecting component 2 can be adapted to heating plates 5 of different diameters through the above method, thereby achieving adjustment of the clamping range.

[0052] In a specific embodiment, the connecting component 2 further includes a bracket 24, the bracket 24 having the same number of extension segments 25 as the connecting component 2, at least two of the extension segments 25 extending radially, the claw assembly 4 being located at the bottom of the extension segment 25, the bottom end of the second moving component 3 passing through the through hole 251 of the extension segment 25 and acting on the claw assembly 4; the central column 11 is fixed to the bracket 24.

[0053] The bracket 24 is located in the central area of ​​the disassembly structure and is fixedly connected to the central column 11 of the first moving component 1, serving as the support base for the entire structure. The bracket 24 supports the central column 11 and forms an integral frame with each connecting component 2 and the claw assembly 4 via extension sections 25, ensuring structural stability. Extension sections 25 extend radially outward from the center of the bracket 24, with the same number as the connecting components 2. Each extension section 25 corresponds to a claw assembly 4 at its end. The extension section 25 provides an installation position for the claw assembly 4 and restricts its movement only in the radial direction, preventing deflection or tilting. A through hole 251 is formed at the end of the extension section 25 (near the claw assembly 4) for the bottom end of the second moving component 3 to pass through. The through hole 251 allows the second moving component 3 to connect with the claw assembly 4 after passing through the extension section 25, ensuring that the radial movement of the second connecting rod 22 is directly converted into the opening and closing action of the claw. Furthermore, the inner wall of the through hole 251, in cooperation with the second moving component 3, restricts the movement trajectory of the claw assembly 4, improving operational accuracy.

[0054] In a specific embodiment, the connecting component 2 further includes a limiting block 23, which is fixed to both sides of the second moving component 3, with its bottom closely abutting the surface of the extension section 25.

[0055] In this embodiment, the bottom of the limiting block 23 is in direct contact with the surface of the extension section 25, forming a vertical physical support to prevent the second moving component 3 from swaying or warping due to uneven force or load offset during movement. The contact surface between the bottom of the limiting block 23 and the surface of the extension section 25 acts as a sliding pair, forcing the second moving component 3 to translate only radially along the extension section 25, eliminating the posture deviation of the claw component 4 caused by the tilting or twisting of the second moving component 3. The limiting blocks 23 are symmetrically arranged on both sides of the second moving component 3, and their bottom is designed to be in close contact with the surface of the extension section 25 to form symmetrically distributed friction and support forces, further offsetting non-axial torque and ensuring that the moving trajectory of the claw component 4 is strictly aligned radially. That is to say, the bottom of the limiting block 23 is in close contact with the surface of the extension section 25, and through the dual effects of vertical support and sliding surface guidance, it restricts the degree of freedom of the second moving component 3 during movement, forcing it to translate only along a preset path, thereby avoiding the risk of unstable clamping or breakage of the heating plate due to warping of the claw component 4.

[0056] In a specific embodiment, the claw assembly 4 includes at least two claws 41, the number of which is the same as the number of extension segments 25, and they are correspondingly disposed at the bottom of each extension segment 25. Each claw has an inwardly bent portion 42. The bent portion 42 is located at the clamping end of the claw 41 and bends inward (towards the center of the heating plate 5). The bent portion 42 conforms to the edge of the heating plate 5, and its curvature matches the shape of the outer edge of the heating plate 5, increasing the contact area and improving clamping stability. The bent portion 42 forms a "hook-like" structure, restricting the vertical displacement of the heating plate 5 and preventing slippage due to vibration or tilting during clamping. Furthermore, the bent portion 42 can also transmit the clamping force from the end of the claw 41 to the sidewall of the heating plate 5, reducing local stress concentration and lowering the risk of ceramic material breakage.

[0057] The inner surface of the bent portion 42 has an anti-wear pad 43. The anti-wear pad 43 is made of a flexible material (such as rubber or polyurethane) to absorb the impact force during clamping and prevent the hard claws 41 from directly contacting the surface of the heating plate 5, causing scratches or micro-cracks.

[0058] In a specific embodiment, there are three connecting components 2, which are evenly distributed circumferentially on the outer periphery of the slider 12 and extend radially.

[0059] Three connecting components 2 are evenly distributed circumferentially (spaced 120° apart), and their corresponding three claws 41 form a three-point clamping structure. The three points have a natural self-centering characteristic geometrically; even if the heating plate 5 has slight dimensional deviations or installation errors, the three-point clamping can automatically adjust to a uniform force state, ensuring that the clamping center is aligned with the geometric center of the heating plate 5. Furthermore, the symmetrical distribution of the three claws 41 allows the clamping force to be applied evenly to the circumference of the heating plate 5, avoiding localized stress concentration caused by single-point or double-point clamping and reducing the risk of breakage of the hard and brittle ceramic material.

[0060] In addition, the surface of the semiconductor heating plate 5 is typically equipped with wafer support components, such as lifting pins and electrostatic chuck electrodes. These components must be protected from collisions during assembly and disassembly. When the three jaws 41 are evenly distributed circumferentially, their clamping points can be precisely designed at the gap positions of the wafer support components (e.g., avoiding support pillars or electrode distribution areas), ensuring that the clamping operation does not interfere with critical components. Three points define a plane, and three-point clamping effectively restricts the radial, axial, and rotational degrees of freedom of the heating plate 5, preventing it from shaking or shifting during movement. This feature is particularly suitable for compact reaction chamber environments, preventing the heating plate 5 from colliding with other components in the chamber.

[0061] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this utility model, and these modifications or substitutions should all be covered within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

Claims

1. A dismountable structure, characterized by, The disassembling structure comprises a first moving assembly, a connecting assembly, a second moving assembly and a claw assembly, the first moving assembly is connected with the second moving assembly through the connecting assembly, and the claw assembly is arranged at the end of the second moving assembly; wherein the first moving assembly can drive the second moving assembly to move along the radial direction through the connecting assembly when the first moving assembly moves up and down, so as to adjust the diameter of the circle surrounded by the claw assembly.

2. The detachable structure according to claim 1, wherein The first moving assembly comprises a center column, a sliding block and a locking unit, the sliding block is sleeved on the center column, and the sliding block and the center column are both provided with fixing holes, and the locking unit is matched with the fixing holes, so that the first moving assembly has a first state of locking the disassembling structure and a second state of releasing the disassembling structure.

3. The detachable structure according to claim 2, wherein The locking unit comprises a fixing piece, a first hole arranged on the sliding block and a second hole arranged on the center column; when the fixing piece passes through the first hole and the second hole at the same time, the first moving assembly is in the first state, and vice versa, the first moving assembly is in the second state.

4. The detachable structure according to claim 2, wherein The connecting assembly has at least two, each of the connecting assemblies comprises a first connecting rod and a second connecting rod, one end of the first connecting rod is hinged with the sliding block, the other end of the first connecting rod is connected with one end of the second connecting rod, and the other end of the second connecting rod is connected with the claw assembly through the second moving assembly; wherein one end of the second connecting rod can be inserted into the other end of the first connecting rod, and the insertion length can be adjusted, so that the connecting assembly has different lengths.

5. The structure of claim 4, wherein The second connecting rod comprises a connecting rod body, one end of the connecting rod body has a first matching section, the first matching section is provided with at least two third holes, the first connecting rod is a hollow structure and is provided with a fourth hole, and the fourth hole is matched with different third holes to make the connecting assembly have different lengths; the other end of the connecting rod body has a second matching section, and the second matching section is hinged on the second moving assembly.

6. The structure of claim 5, wherein The connecting assembly further comprises a support, the support has the same number of extension sections as the connecting assemblies, at least two extension sections extend radially, the claw assembly is located at the bottom of the extension section, the bottom end of the second moving assembly acts on the claw assembly after passing through the through hole of the extension section, and the center column is fixed on the support.

7. The dismountable structure according to claim 6, wherein The connecting assembly further comprises a limiting block, the limiting block is fixed on both sides of the second moving assembly, and the bottom of the limiting block is close to the surface of the extension section.

8. The detachable structure according to claim 6, wherein The claw assembly comprises at least two claws, the number of the claws is the same as the number of the extension sections, and the claws are arranged at the bottom of the extension section one by one; wherein the claw has an inward bending part.

9. The dismountable structure according to claim 8, wherein The inner surface of the bending part is provided with an anti-abrasion pad.

10. The knock-down structure according to any one of claims 4-9, wherein, The connecting assembly has three, and the three connecting assemblies are uniformly distributed on the outer periphery of the sliding block in the circumferential direction and extend in the radial direction.

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