Adjustable supporting structure

Abstract

The utility model relates to the field of evaporation equipment, and provides an adjustable supporting structure which comprises a supporting seat, a supporting rod and an adjusting assembly, and the supporting seat is arranged in a vacuum cavity; the supporting rod is provided with a rotating end and an adjusting end, the rotating end is suitable for extending into the vacuum cavity and being rotationally connected with the supporting seat, a supporting roller is further arranged above the rotating end and is suitable for supporting the source bottom plate assembly, and the adjusting end is suitable for being arranged on the outer side of the vacuum cavity; the adjusting assembly is movably connected with the adjusting end of the supporting rod and suitable for driving the supporting rod to rotate around the rotating end so as to adjust the height of the supporting roller on the rotating end. The supporting rod is driven by the adjusting assembly to rotate around the rotating end, then the height of the supporting roller on the rotating end is adjusted, height adjustment of the supporting roller can be rapidly achieved without repeatedly disassembling and assembling the supporting base, and when the height of the supporting roller is within the adjustable range, the supporting requirement of the source bottom plate can be accurately matched; therefore, the maintenance and installation time is obviously shortened, and the equipment maintenance efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of evaporation equipment, further relates to an adjustable support structure. BACKGROUND

[0002] In order to facilitate the maintenance of process area, maintenance and maintenance, the process area of evaporation equipment adopts the design of opening laterally sliding. The source bottom plate one end (including source connection terminal etc.) of process area is fixed on the sliding door plate, and the other end is in the state of suspension. In order to avoid the deformation of equipment caused by long time suspension, the suspension end below source bottom plate is mostly supported by roller support seat to ensure the stability of equipment. However, the machining precision of corresponding machining parts is required to be extremely high in this design. In actual operation, it is necessary to repeatedly disassemble and assemble the roller support seat and increase or decrease the gasket to adjust the support height of the roller support seat, so as to match the source bottom plate assembly. This adjustment process is not only cumbersome, but also needs to be tested several times to determine the appropriate height. In addition, during the use of evaporation equipment, once the maintenance of the position is involved, the above-mentioned complex adjustment operation is also required, which undoubtedly will greatly increase the maintenance time and reduce the maintenance efficiency of the equipment. SUMMARY

[0003] In view of the above technical problems, the purpose of the utility model is to provide an adjustable support structure, which drives the support rod to rotate around the rotating end through the adjusting assembly, and then adjusts the height of the support roller on the rotating end. The height adjustment of the support roller can be quickly realized without repeatedly disassembling the support seat. When the height of the support roller is within the adjustable range, the support requirement of the source bottom plate can be accurately matched, thereby significantly shortening the maintenance and installation time and improving the maintenance efficiency of the equipment.

[0004] In order to achieve the above purpose, the utility model provides an adjustable support structure, which comprises a support seat, a support rod and an adjusting assembly, and the support seat is arranged inside the vacuum cavity.

[0005] The support rod has a rotating end and an adjusting end, the rotating end is suitable for extending into the vacuum cavity and rotatingly connecting the support seat, a support roller is further arranged above the rotating end, the support roller is suitable for supporting the source bottom plate assembly, and the adjusting end is suitable for being arranged outside the vacuum cavity.

[0006] The adjusting assembly is movably connected with the adjusting end of the support rod and is suitable for driving the support rod to rotate around the rotating end, so as to adjust the height of the support roller on the rotating end.

[0007] In some embodiments, a sealing cavity is also included, which is installed on the outer wall of the vacuum cavity and adapted to communicate with the interior of the vacuum cavity. The adjusting end of the support rod is disposed inside the sealing cavity. The adjusting assembly is installed on the outer wall of the sealing cavity and adapted to seal through the sealing cavity and connect to the adjusting end. The end of the sealing cavity away from the vacuum cavity is also provided with a removable sealing cover.

[0008] In some embodiments, the adjusting assembly includes a first fixed seat, a second fixed seat, a flexible connector, a fixing screw, and a fixing nut. The flexible connector elastically connects the first fixed seat and the second fixed seat. The second fixed seat is adapted to seal the sealing cavity. A movable rod is sealed on the first fixed seat. The movable rod is adapted to pass through the flexible connector, the second fixed seat, and the sealing cavity and then connect to the adjusting end. The fixing screw is adapted to pass through the first fixed seat and the second fixed seat and is adapted to adjust the height position of the first fixed seat by means of the fixing nut, thereby adjusting the height position of the movable rod.

[0009] In some embodiments, the adjusting end is provided with an adjusting channel, and the end of the movable rod is also provided with an adjusting shaft and an adjusting roller. The adjusting shaft is adapted to axially pass through the adjusting channel, and the adjusting roller is sleeved on the outside of the adjusting shaft and located opposite to it within the adjusting channel.

[0010] In some embodiments, the first mounting base is further provided with a sensing pad;

[0011] It also includes a mounting base, which is fixedly installed on the outer wall of the vacuum chamber. The mounting base is also equipped with a detection sensor, which is adapted to detect the relative position of the sensing pad.

[0012] In some embodiments, the rotating end is further provided with a rotating shaft and a support wheel seat, the rotating shaft rotatably connecting the rotating end and the support seat; the support wheel seat is fixedly installed on the support rod, and the support roller is fixedly installed on the support wheel seat by vacuum fasteners.

[0013] In some embodiments, the bottom of the support base is further provided with a support pad, and the vacuum fastener is adapted to pass through the support base and the support pad and then connect to the vacuum cavity.

[0014] In some embodiments, an elastic component is also included, which is elastically connected to the adjusting end of the support rod and adapted to suspend the movable rod end of the adjusting component in the adjusting channel of the adjusting end, so that the support roller is adapted to make fine up and down adjustments.

[0015] In some embodiments, the elastic component includes an elastic element, a first hook, and a second hook, wherein the first hook is disposed at the top of the sealed cavity, the second hook is disposed at the end of the adjusting end, and the elastic element elastically connects the first hook and the second hook.

[0016] In some embodiments, the end of the adjustment end is further provided with an adjustable hook seat, which is adapted to adjust the height position of the second hook.

[0017] Compared with the prior art, the adjustable support structure provided by this utility model has at least one of the following beneficial effects:

[0018] 1. By adjusting the component to drive the support rod to rotate around the rotating end, the height of the support roller on the rotating end can be adjusted quickly without repeatedly disassembling and assembling the support base. When the height of the support roller is within the adjustable range, it can accurately match the support requirements of the source base plate, thereby significantly shortening maintenance and installation time and improving equipment maintenance efficiency.

[0019] 2. The adjustable support structure enables rapid and precise adjustment of the height of the support rollers, while also providing a vacuum environment for the adjustment end of the support rod through a sealed cavity, ensuring the stability of the vacuum environment in the vacuum cavity.

[0020] 3. An adjustment channel is provided on the adjustment end, which provides a through passage for the movable rod. The adjustment roller is sleeved on the outside of the adjustment shaft and located inside the adjustment channel. The adjustment roller enables the support rod to move smoothly during the adjustment process, reducing wear and vibration caused by direct contact. Moreover, the free rotation characteristic of the adjustment roller further improves the flexibility and stability of the adjustment process.

[0021] 4. The detection sensor can monitor the positional changes of the sensing pad in real time, promptly detect deviations during the adjustment process, and provide feedback and correction through the control system to ensure the stability of equipment operation.

[0022] 5. The elastic component provides elastic support for the support roller, allowing it to remain suspended within the adjustment channel. This enables fine adjustments to the vertical position of the support roller, ensuring that it always maintains elastic contact with the position requiring support. This solves the collision problem between the support roller and the side-sliding component. The elastic support of the elastic component can absorb minor vibrations and impacts, ensuring the smoothness of the adjustment process. Attached Figure Description

[0023] The preferred embodiments will be described below in a clear and easy-to-understand manner, in conjunction with the accompanying drawings, to further explain the above-mentioned characteristics, technical features, advantages and implementation methods of this utility model.

[0024] Figure 1It is a structural diagram of an adjustable support structure;

[0025] Figure 2 It is a side view of an adjustable support structure;

[0026] Figure 3 This is a cross-sectional view of an adjustable support structure.

[0027] Explanation of icon numbers:

[0028] Support base 1, support pad 11, vacuum fastener 12, support rod 2, rotating end 21, support roller 211, rotating shaft 212, support wheel seat 213, adjusting end 22, adjusting channel 221, adjusting assembly 3, first fixed seat 31, movable rod 311, adjusting shaft 3111, adjusting roller 3112, sensing pad 312, second fixed seat 32, flexible connector 33, fixing nut 34, sealing cavity 4, sealing cover 41, mounting base 5, detection sensor 51, elastic assembly 6, elastic element 61, first hook 62, second hook 63, adjustable hook seat 64. Detailed Implementation

[0029] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the specific implementation methods of this utility model will be described below with reference to the accompanying drawings. Obviously, the drawings described below are merely some embodiments of this utility model. For those skilled in the art, other drawings and other implementation methods can be obtained based on these drawings without any creative effort.

[0030] To keep the drawings concise, each figure only schematically shows the parts relevant to the utility model, and these do not represent the actual structure of the product. Furthermore, for ease of understanding, in some figures, only one of the components with the same structure or function is schematically depicted, or only one is labeled. In this document, "one" not only means "only one," but can also mean "more than one."

[0031] It should also be further understood that the term “and / or” as used in this application specification and the appended claims means any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0032] In this document, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0033] Furthermore, in the description of this application, the terms "first," "second," etc., are used only for distinguishing descriptions and should not be construed as indicating or implying relative importance. It should be noted that the above embodiments can be freely combined as needed. The above are merely preferred embodiments of this utility model. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

[0034] refer to Figure 1 and Figure 2 This utility model provides an adjustable support structure, including a support base 1, a support rod 2, and an adjustment assembly 3. The support base 1 is disposed inside a vacuum chamber. The support rod 2 has a rotating end 21 and an adjusting end 22. The rotating end 21 is adapted to extend into the vacuum chamber and rotatably connect to the support base 1. A support roller 211 is also provided above the rotating end 21. The support roller 211 is adapted to support the source base plate assembly. The adjusting end 22 is adapted to be disposed outside the vacuum chamber. The adjustment assembly 3 is movably connected to the adjusting end 22 of the support rod 2 and is adapted to drive the support rod 2 to rotate around the rotating end 21, thereby adjusting the height of the support roller 211 on the rotating end 21.

[0035] In this embodiment, the support rod 2 is driven to rotate around the rotating end 21 by the adjustment component 3, thereby adjusting the height of the support roller 211 on the rotating end 21. The height of the support roller 211 can be quickly adjusted without repeatedly disassembling and assembling the support base 1. When the height of the support roller 211 is within the adjustable range, it can accurately match the support requirements of the source base plate, thereby significantly shortening the maintenance and installation time and improving the equipment maintenance efficiency.

[0036] Specifically, this application aims to efficiently solve the problems of difficult adjustment and cumbersome maintenance of the support roller 211 in the prior art. The support base 1 is firmly installed inside the vacuum chamber, providing a solid foundation for the entire support structure. One end of the support rod 2 is a rotating end 21, and the other end is an adjusting end 22. The rotating end 21 extends into the vacuum chamber and is connected to the support base 1 through a rotatable connection, ensuring that the support rod 2 can rotate flexibly on the support base 1. The support roller 211 is provided above the rotating end 21. This support roller 211 is used to support the source base plate assembly, ensuring that it remains stable during equipment operation. The adjusting end 22 of the support rod 2 extends to the outside of the vacuum chamber, providing convenience for external operation.

[0037] The adjusting component 3 is telescopically movable and connected to the adjusting end 22 of the support rod 2. The adjusting component 3 can drive the support rod 2 to rotate around the rotating end 21. By telescopically moving the adjusting component 3, the height of the support roller 211 on the rotating end 21 can be quickly and accurately adjusted, thereby achieving flexible support for the source base plate assembly. Compared with the traditional method of repeatedly disassembling and assembling the support base 1 to adjust the roller height, the adjustable support structure of this application does not require cumbersome disassembly and assembly operations, saving time and labor costs.

[0038] It is worth noting that when the height of the support roller 211 is within the adjustable range, this adjustable support structure can perfectly match the support requirements of the source base plate, ensuring the stability and reliability of the equipment during operation. This adjustable support structure significantly shortens maintenance and installation time, greatly improves equipment maintenance efficiency, and provides a strong guarantee for the efficient operation of the vapor deposition equipment. The bottom of the support base 1 is also equipped with a support pad 11, and the vacuum fastener 12 is suitable for connecting to the vacuum chamber after passing through the support base 1 and the support pad 11. During installation, the support pad 11 can also be used to adjust the level of the equipment. By adding or removing pads between the support pad 11 and the vacuum chamber, the horizontal position of the equipment can be finely adjusted to ensure stability during operation. The support pad 11 also acts as a buffer and shock absorber, reducing damage caused by vibration or impact during equipment operation. Especially in high-precision equipment, this buffering effect can significantly improve the operating accuracy and lifespan of the equipment.

[0039] Furthermore, it also includes a sealed cavity 4, which is installed on the outer wall of the vacuum cavity and is adapted to communicate with the inside of the vacuum cavity. The adjustment end 22 of the support rod 2 is located inside the sealed cavity 4. The adjustment component 3 is installed on the outer wall of the sealed cavity 4 and is adapted to seal the passage through the sealed cavity 4 and then connect to the adjustment end 22. The end of the sealed cavity 4 away from the vacuum cavity is also provided with a detachable sealing cover plate 41.

[0040] In this embodiment, the adjustable support structure not only enables rapid and precise adjustment of the height of the support roller 211, but also provides a vacuum environment for the adjustment end 22 of the support rod 2 through the sealed cavity 4, ensuring the stability of the vacuum environment of the vacuum cavity.

[0041] Specifically, the sealed cavity 4 is installed on the outer wall of the vacuum cavity and communicates with the interior of the vacuum cavity through a specific channel. This ensures the airtightness of the vacuum cavity and provides an independent vacuum installation space for the adjustment end 22 of the support rod 2. The adjustment end 22 of the support rod 2 is located inside the sealed cavity 4, while the adjustment assembly 3 is installed on the outer wall of the sealed cavity 4. The adjustment assembly 3 is connected to the adjustment end 22 of the support rod 2 through a sealed connection, ensuring that the airtightness of the vacuum cavity is not affected during adjustment. The sealed cavity 4 not only prevents external air from entering the vacuum cavity but also avoids potential interference from the internal vacuum environment to the adjustment assembly 3, thereby ensuring the accuracy and reliability of the adjustment operation. In addition, the end of the sealed cavity 4 furthest from the vacuum cavity is equipped with a removable sealing cover 41. This greatly facilitates the maintenance and repair of the equipment. When it is necessary to inspect or repair the adjustment assembly 3 or the adjustment end 22 of the support rod 2, simply remove the sealing cover 41 to easily enter the sealed cavity 4 for operation. The removable sealing cover 41 not only improves the maintainability of the equipment but also reduces maintenance time, further enhancing the equipment's operating efficiency. Whether in routine maintenance or emergency repairs of sudden malfunctions, the removable sealing cover 41 significantly reduces maintenance time and labor costs, providing a strong guarantee for the efficient and stable operation of the vapor deposition equipment.

[0042] It is worth noting that the rotating end 21 is also equipped with a rotating shaft 212 and a support wheel seat 213. The rotating shaft 212 rotatably connects the rotating end 21 and the support seat 1; the support wheel seat 213 is fixedly installed on the support rod 2, and the support roller 211 is fixedly installed on the support wheel seat 213 by a vacuum fastener 12. The rotating shaft 212 allows the adjusting end 22 of the support rod 2 to rotate around its axis under the action of the adjusting component 3, which not only simplifies the adjustment process but also improves the flexibility and accuracy of the adjustment. By rotating the rotating shaft 212, the height of the support roller 211 can be precisely adjusted to meet the support requirements of different source base plate components. The support wheel seat 213 is connected to the support roller 211 by the vacuum fastener 12, ensuring that the support roller 211 is firmly installed in a vacuum environment.

[0043] Further, refer to Figure 3The adjusting assembly 3 includes a first fixed seat 31, a second fixed seat 32, a flexible connector 33, a fixing screw, and a fixing nut 34. The flexible connector 33 elastically connects the first fixed seat 31 and the second fixed seat 32. The second fixed seat 32 is adapted to seal the connection to the sealing cavity 4. A movable rod 311 is sealed on the first fixed seat 31. The movable rod 311 is adapted to pass through the flexible connector 33, the second fixed seat 32, and the sealing cavity 4 and then connect to the adjusting end 22. The fixing screw is adapted to pass through the first fixed seat 31 and the second fixed seat 32 and is adapted to adjust the height position of the first fixed seat 31 by means of the fixing nut 34, thereby adjusting the height position of the movable rod 311.

[0044] In this embodiment, the adjustment component 3 can efficiently adjust the height of the adjustment end 22 of the support rod 2, while ensuring the stability and reliability of the entire system.

[0045] Specifically, the first fixed seat 31 is installed on the outer wall of the sealed cavity 4 through a sealing method. Inside, there is a movable rod 311, which passes through the flexible connector 33, the second fixed seat 32, and the sealed cavity 4, ultimately connecting to the adjusting end 22 of the support rod 2. The design of the first fixed seat 31 ensures the stability and sealing of the movable rod 311, while providing stable support for the entire adjusting assembly 3. The second fixed seat 32 is tightly connected to the sealed cavity 4 through a sealing connection, ensuring the sealing of the vacuum environment. It is elastically connected to the first fixed seat 31 through the flexible connector 33. The flexible connector 33 elastically connects the first fixed seat 31 and the second fixed seat 32, which not only absorbs minor displacements caused by temperature changes or mechanical vibrations, but also provides a certain buffering effect during adjustment, preventing stress concentration caused by rigid connections. The elastic characteristics of the flexible connector 33 make the adjusting assembly 3 more stable during adjustment, reducing potential damage to the equipment. A fixing screw passes through and connects the first fixed seat 31 and the second fixed seat 32, and is tightened by a fixing nut 34. By rotating the fixing nut 34, the height of the first fixed seat 31 can be precisely adjusted. Since the movable rod 311 is connected to the first fixed seat 31, changes in the height of the first fixed seat 31 directly result in changes in the height of the movable rod 311, making the height adjustment of the support roller 211 simple and precise, eliminating the need for complex disassembly and assembly operations, and improving adjustment efficiency. The height adjustment range of the adjusting component 3 can be designed according to actual needs, allowing it to adapt to source base plate components of different sizes and weights; this flexibility makes the adjustable support structure suitable for various vapor deposition equipment, exhibiting wide applicability.

[0046] It is worth noting that the adjusting component 3 in this application is preferably a telescopic bellows assembly. Of course, the adjusting component 3 can also be a movable structure, etc., and this application does not further limit it, as long as it can drive the support rod 2 to rotate. In a modified embodiment, the adjusting component 3 may not be equipped with a fixing screw. The fixing screw is only used to stabilize the first fixed seat 31 and move the first fixed seat 31 relative to the second fixed seat 32. However, the first fixed seat 31 can also be fixedly installed on the outer wall of the vacuum chamber through other mounting structures. For example, it can be slidably installed on the outer wall of the vacuum chamber through a sliding groove, and after sliding, it can be fixed to the outer wall of the vacuum chamber with screws. In this case, it can also play the role of fixing and moving the first fixed seat 31 without affecting the vertical displacement of the first fixed seat. Other forms of the adjusting component 3 will not be further described in this application.

[0047] Furthermore, the adjusting end 22 is provided with an adjusting channel 221, and the end of the movable rod 311 is also provided with an adjusting shaft 3111 and an adjusting roller 3112. The adjusting shaft 3111 is adapted to axially pass through the adjusting channel 221, and the adjusting roller 3112 is sleeved on the outside of the adjusting shaft 3111 and is located opposite to the adjusting channel 221.

[0048] In this embodiment, the adjusting end 22 is provided with an adjusting channel 221, which provides a through passage for the movable rod 311. The adjusting roller 3112 is sleeved on the outside of the adjusting shaft 3111 and located inside the adjusting channel 221. The adjusting roller 3112 enables the support rod 2 to move smoothly during the adjustment process, reducing wear and vibration caused by direct contact. Moreover, the free rotation characteristic of the adjusting roller 3112 further improves the flexibility and stability of the adjustment process.

[0049] Specifically, when the adjusting assembly 3 adjusts the height of the first fixed seat 31 via the fixing nut 34, the movable rod 311 moves up and down accordingly. The movement of the movable rod 311 is transmitted to the adjusting end 22 of the support rod 2 via the adjusting shaft 3111. The adjusting shaft 3111 slides within the adjusting channel 221, while the adjusting roller 3112 rolls within the adjusting channel 221, ensuring smooth movement of the support rod 2. The adjusting roller 3112 not only reduces friction but also improves the stability of the adjustment process through rolling contact, allowing the support rod 2 to remain stable during adjustment and avoiding vibration and wear caused by direct contact, thereby extending the service life of the equipment.

[0050] It is worth noting that the shape of the adjustment channel 221 is diverse, including circular channels, rectangular channels, elliptical channels, polygonal channels, etc., which will not be further elaborated here. The shape of the adjustment channel 221 should be determined according to the specific application scenario and adjustment requirements. In this application, it is optimized to be an oval channel.

[0051] Furthermore, the first fixed base 31 is also provided with a sensing pad 312; it also includes a mounting base 5, which is fixedly installed on the outer wall of the vacuum chamber, and the mounting base 5 is also provided with a detection sensor 51, which is suitable for detecting the relative position of the sensing pad 312.

[0052] In this embodiment, the detection sensor 51 can monitor the position change of the sensing pad 312 in real time, detect deviations in the adjustment process in a timely manner, and provide feedback and correction through the control system to ensure the stability of the equipment operation.

[0053] Specifically, the mounting base 5 is fixedly installed on the outer wall of the vacuum chamber, corresponding to the first fixed base 31, ensuring that the detection sensor 51 can accurately detect changes in the position of the sensing pad 312. The detection sensor 51 can be of various types, such as a photoelectric sensor, capacitive sensor, inductive sensor, or Hall effect sensor, depending on the material of the sensing pad 312 and the required detection accuracy. The mounting base 5 provides a stable mounting foundation for the detection sensor 51, ensuring stability during operation and preventing inaccurate detection signals due to vibration or displacement. The detection sensor 51 is used to monitor the relative position changes of the sensing pad 312 in real time. When the position of the sensing pad 312 changes, the detection sensor 51 can quickly detect this change and transmit the signal to the control system. The control system can automatically determine whether the height of the movable rod 311 has reached the set value based on the sensor signal and perform corresponding adjustments.

[0054] It is worth noting that when the height of the support roller 211 needs to be adjusted, the operator adjusts the height of the first fixed seat 31 using the adjusting components 3 (such as the fixing screw and fixing nut 34). As the height of the first fixed seat 31 changes, the position of the sensing pad 312 also changes. The detection sensor 51 monitors the position change of the sensing pad 312 in real time and transmits the signal to the control system. The control system determines whether the current height meets the requirements based on preset parameters. If it does not meet the requirements, the control system will issue a command to prompt the operator to continue adjusting; if it meets the requirements, the system will issue a confirmation signal indicating that the adjustment is complete. Through this cooperation between the sensing pad 312 and the detection sensor 51, real-time monitoring and precise control of the adjustment process are achieved, ensuring that the height adjustment of the support roller 211 can achieve high precision and high reliability.

[0055] Furthermore, even with high adjustment precision, a simple roller support cannot guarantee a perfect fit between the support roller 211 and the base plate. If adjusted to an interference fit, collisions are likely to occur during lateral sliding; if adjusted to a clearance fit, the support performance cannot be effectively guaranteed. While short-term use may not significantly impact the equipment, long-term stability could be compromised. Moreover, both interference and clearance fits require repeated disassembly and reassembly of the roller assembly, addition and removal of shims, and multiple sliding observations or measurements of the fit, which is time-consuming and increases labor costs. Therefore, the adjustable support structure also includes an elastic component 6. The elastic component 6 is elastically connected to the adjusting end 22 of the support rod 2 and is adapted to suspend the end of the movable rod 311 of the adjusting component 3 within the adjusting channel 221 of the adjusting end 22, allowing the support roller 211 to be finely adjusted vertically.

[0056] In this embodiment, the elastic component 6 provides elastic support for the support roller 211, allowing it to remain suspended within the adjustment channel 221. This enables fine adjustments to the vertical position of the support roller 211, ensuring that the support roller 211 always maintains elastic contact with the position requiring support. This solves the collision problem between the support roller 211 and the side-sliding component. The elastic support of the elastic component 6 can absorb minor vibrations and impacts, ensuring the smoothness of the adjustment process.

[0057] Specifically, a gap of ±2mm is reserved between the inner wall of the adjusting channel 221 on the adjusting end 22 and the outer wall of the adjusting roller 3112. This gap provides sufficient space for the up-and-down fine-tuning movement of the adjusting roller 3112, while avoiding direct contact between the adjusting roller 3112 and the adjusting channel 221, thus reducing wear. When it is necessary to adjust the height of the supporting roller 211, the adjusting assembly 3 adjusts the height of the first fixed seat 31 through the fixing screw and fixing nut 34, thereby driving the movable rod 311 to move up and down. At this time, the outer wall of the adjusting roller 3112 abuts against the top wall of the adjusting channel 221, providing an initial position for subsequent fine-tuning. After the adjusting roller 3112 abuts against the top wall of the adjusting channel 221, the elastic component 6 adjusts the adjusting roller 3112 to the middle position of the adjusting channel 221, so that the adjusting roller 3112 is suspended in the adjusting channel 221. At this time, both the adjusting end 22 and the rotating end 21 of the movable rod 311 are suitable for fine-tuning up and down, ensuring that the support roller 211 maintains a stable contact with the position requiring support. Specifically, when the lateral sliding component of the process area cooperates with the support roller 211, if the reserved gap is insufficient for adjustment, it will cause mutual collision. In this case, the adjusting end 22 of the movable rod 311 can be suspended by the elastic component 6 to solve the problem of collision between the support roller 211 and the lateral sliding component. It can be understood that the movable rod 311 is similar to a lever, and the support roller 211 of the rotating end 21 and the adjusting end 22 are the two fulcrums on the lever. They have a linkage effect in the same direction. The up and down movement of one fulcrum will inevitably lead to the up and down movement of the other fulcrum. At the same time, the adjusting end 22 is farther away from the rotating shaft 212 than the rotating end 21. Therefore, the up and down movement of the adjusting end 22 will be proportionally scaled to the up and down fine-tuning of the rotating end 21.

[0058] More specifically, the elastic component 6 includes an elastic element 61, a first hook 62, and a second hook 63. The first hook 62 is located at the top of the sealed cavity 4, and the second hook 63 is located at the end of the adjusting end 22. The elastic element 61 elastically connects the first hook 62 and the second hook 63. Through the stretching and compression of the elastic element 61, the support roller 211 can move up and down within the adjusting channel 221, thereby adapting to different support requirements. The elastic properties of the elastic element 61 can also absorb minor vibrations and impacts, reducing wear during equipment operation. The end of the adjusting end 22 is also provided with an adjustable hook seat 64, which is suitable for adjusting the height position of the second hook 63. The adjustable hook seat 64 provides an adjustable installation position for the second hook 63. By adjusting the height of the adjustable hook seat 64, the stretching length of the elastic element 61 can be changed, thereby achieving fine-tuning of the height of the support roller 211. This not only improves the flexibility of adjustment but also ensures that the support roller 211 maintains stable contact under different loads and operating conditions. The adjustable hook seat 64 is preferably a groove-adjustable type, including a base, an adjusting plate, and a groove. The groove is located on the base, which is fixed to the adjusting end 22 of the support rod 2. The adjusting plate is connected to the base through the groove, and the second hook 63 is fixed to the adjusting plate. By sliding the adjusting plate, the height of the second hook 63 can be quickly adjusted, thereby changing the extension length of the elastic element 61 and achieving fine adjustment of the height of the support roller 211. Alternatively, it can be a threaded adjustment type. The base is fixed to the adjusting end 22 of the support rod 2, the movable rod 311 is connected to the base via a thread, and the second hook 63 is fixed to the top of the movable rod 311. By rotating the movable rod 311, the height of the second hook 63 can be precisely adjusted, thereby changing the extension length of the elastic element 61 and achieving fine adjustment of the height of the support roller 211. It can also be a gear-adjustable type, with the base fixed to the adjusting end 22 of the support rod 2, the gear meshing with a rack, the rack fixed to the base, and the second hook 63 fixed to the gear. By rotating the gear, the height of the second hook 63 can be precisely adjusted, thereby changing the extension length of the elastic element 61 and achieving fine-tuning of the height of the support roller 211. The structure of the adjustable hook will not be further described here.

[0059] It is worth noting that the elastic element 61 includes, but is not limited to, springs, rubber, etc., which will not be further described in this application. The first hook 62 and the second hook 63 can adopt L-shape, U-shape, or other suitable shapes, depending on the design of the support rod 2 and the connection method of the elastic element 61. Two elastic elements 61 are provided between the first hook 62 and the second hook 63, one for providing the main elastic support and the other for providing auxiliary buffering or fine-tuning functions, thereby improving the stability and adjustment accuracy of the system.

[0060] In a modified embodiment, the elastic component 6 may further include an elastic element 61 and an elastic seat. The elastic seat is disposed at the bottom inner side of the sealed cavity 4, and the elastic element 61 elastically connects the elastic seat and the bottom of the adjusting end 22. Alternatively, a spring-loaded metal sheet may be used, with one end fixed to the sealed cavity 4 and the other end fixed to the adjusting end 22. The elastic component 6 has various structural forms, which will not be further described here.

[0061] It should be noted that the above embodiments can be freely combined as needed. The above are merely preferred embodiments of this utility model. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. An adjustable support structure, characterized by, The adjustable support structure comprises: a support base arranged inside the vacuum cavity; a support rod having a rotating end and an adjusting end, the rotating end being adapted to extend into the vacuum cavity and being rotatably connected to the support base, and a support roller being further arranged above the rotating end and being adapted to support a source bottom plate assembly, and the adjusting end being adapted to be arranged outside the vacuum cavity; an adjusting assembly movably connected to the adjusting end of the support rod and being adapted to drive the support rod to rotate around the rotating end, so as to adjust the height of the support roller on the rotating end.

2. The adjustable support structure according to claim 1, further comprising: a sealed cavity mounted on the outer wall of the vacuum cavity and being adapted to communicate with the inside of the vacuum cavity, the adjusting end of the support rod being arranged inside the sealed cavity, and the adjusting assembly being mounted on the outer wall of the sealed cavity and being adapted to be connected to the adjusting end after penetrating through the sealed cavity, and a detachable sealing cover being further arranged at the end of the sealed cavity away from the vacuum cavity.

3. The adjustable support structure according to claim 2, wherein: the adjusting assembly comprises a first fixed base, a second fixed base, a flexible connecting piece, a fixed screw rod and a fixed nut, the flexible connecting piece being elastically connected to the first fixed base and the second fixed base, the second fixed base being adapted to be sealingly connected to the sealed cavity, a movable rod being sealingly arranged on the first fixed base and being adapted to be connected to the adjusting end after penetrating through the flexible connecting piece, the second fixed base and the sealed cavity, the fixed screw rod being adapted to penetrate through the first fixed base and the second fixed base and being adapted to adjust the height position of the first fixed base through the fixed nut, so as to adjust the height position of the movable rod.

4. The adjustable support structure according to claim 3, wherein: an adjusting hole is arranged on the adjusting end, and an adjusting shaft and an adjusting roller are further arranged at the end of the movable rod, the adjusting shaft being adapted to axially penetrate through the adjusting hole, and the adjusting roller being sleeved outside the adjusting shaft and being located in the adjusting hole oppositely.

5. The adjustable support structure according to claim 3, wherein: a sensing pad is further arranged on the first fixed base; a mounting base is further arranged, the mounting base being fixedly mounted on the outer wall of the vacuum cavity, and a detection sensor being further arranged on the mounting base and being adapted to detect the relative position of the sensing pad.

6. The adjustable support structure according to claim 1, wherein: a rotating shaft and a support wheel base are further arranged on the rotating end, the rotating shaft being rotatably connected to the rotating end and the support base, and the support wheel base being fixedly mounted on the support rod, and the support roller being fixedly mounted on the support wheel base through a vacuum fastener.

7. The adjustable support structure according to claim 1, wherein: a support pad is further arranged at the bottom of the support base, and a vacuum fastener is adapted to be connected to the vacuum cavity after penetrating through the support base and the support pad.

8. The adjustable support structure according to any one of claims 1-7, further comprising a resilient assembly elastically connecting the adjustment end of the support rod and adapted to suspend the movable rod end of the adjustment assembly within an adjustment channel of the adjustment end such that the support roller is adapted to be fine-adjusted up and down.

9. The adjustable support structure according to claim 8, wherein the resilient assembly comprises a resilient member, a first hook and a second hook, the first hook being disposed at a top of the sealed cavity, the second hook being disposed at an end of the adjustment end, and the resilient member elastically connecting the first hook and the second hook.

10. The adjustable support structure according to claim 9, wherein the end of the adjustment end further comprises an adjustable hook seat adapted to adjust a height position of the second hook. ​ ​ ​

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