Calibration tool for compression ring assembly

Abstract

The utility model discloses a calibration tool for a compression ring assembly. The pressing ring assembly comprises a shielding piece and a pressing ring. The shielding piece comprises an inner wall and an outer wall which extend in the same direction, the inner wall of the shielding piece is sleeved with the pressing ring, and the edge of the pressing ring is located in a gap between the outer wall and the inner wall of the shielding piece; the calibration tool comprises at least one calibration unit, each calibration unit comprises a first fixing part and a second fixing part, and the first fixing parts and the second fixing parts are symmetrically distributed in the circumferential direction; the connecting piece is used for connecting the first fixing piece and the second fixing piece; wherein the first fixing piece and the second fixing piece are suitable for being inserted into a gap between the edge of the pressing ring and the outer wall of the shielding piece through the connecting piece so as to calibrate the position between the pressing ring and the shielding piece.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and specifically to a calibration tool for a pressure ring assembly. Background Technology

[0002] Physical vapor deposition (PVD) is a technique that uses physical methods to vaporize solid or liquid materials into gaseous atoms, molecules, or partially ionize them into ions in a vacuum reaction chamber, and then deposits thin films with special functions on the surface of a substrate through a low-pressure gas (or plasma) process.

[0003] In PVD reaction chambers, a ring clamping assembly is typically installed. This assembly includes a clamping ring and a shielding ring, and is used to fix the substrate by stacking it against the edge of the substrate. The position of the ring clamping assembly affects the location of the deposited thin film on the substrate surface. Therefore, before depositing the thin film, the relative positions of the ring clamping assemblies need to be calibrated to ensure that the deposited area is the desired region.

[0004] However, calibrating the relative positions between the pressure ring components using existing pressure ring assembly calibration tools is not only cumbersome but also difficult. Utility Model Content

[0005] The problem this invention aims to solve is: to facilitate calibration.

[0006] To address the aforementioned problems, this utility model provides a calibration tool for a pressure ring assembly. The pressure ring assembly includes a shield and a pressure ring. The shield includes an inner wall and an outer wall extending in the same direction. The pressure ring is sleeved outside the inner wall of the shield, and the edge of the pressure ring is located within the gap between the outer wall and the inner wall of the shield. The calibration tool includes at least one calibration unit, and each calibration unit includes:

[0007] The first fixing member and the second fixing member are symmetrically distributed along the circumferential direction;

[0008] And a connector for connecting the first fixing member and the second fixing member;

[0009] The first and second fixing members are adapted to be inserted into the gap between the edge of the pressure ring and the outer wall of the shielding member through the connecting member, so as to calibrate the position between the pressure ring and the shielding member.

[0010] In one possible embodiment, the first and second fasteners are detachably connected to the connector.

[0011] In one possible embodiment, the first and second fasteners are snap-fitted together with the connector.

[0012] In one possible embodiment, the first and second fasteners are made of ceramic material.

[0013] In one possible embodiment, the connector is made of plastic.

[0014] In one possible embodiment, the connector is straight.

[0015] In one possible embodiment, both the first fixing member and the second fixing member include an insertion portion and a connecting portion, wherein both the connecting portion and the insertion portion are cylindrical, and the diameter of the connecting portion is smaller than the diameter of the insertion portion.

[0016] In one possible embodiment, the calibration tool includes a plurality of calibration units, the connectors of which are fixedly connected such that the connectors of the plurality of calibration units are evenly distributed circumferentially.

[0017] In one possible embodiment, the calibration tool includes two calibration units connected at a central cross joint between the two calibration units.

[0018] In one possible embodiment, the connectors of the plurality of calibration units are all of the same shape.

[0019] Compared with the prior art, the technical solution of this utility model embodiment has the following advantages:

[0020] In this invention, each calibration unit in the calibration tool includes a first fixed connection and a second fixing member, which are connected by a connector. Subsequently, the first and second fixing members can be inserted into the gap between the edge of the pressure ring and the outer wall of the shielding member via the connector to calibrate the position between the pressure ring and the shielding member. Since the first and second fixing members are symmetrically distributed circumferentially, when inserting them into the gap, there is no need to adjust their circumferential positions to ensure uniform circumferential distribution. This reduces the number of operations during calibration and lowers the calibration difficulty. Furthermore, inserting the first and second fixing members into the gap via the connector allows for simultaneous insertion of both fixing members, eliminating the need for separate insertion of individual fixing members. This reduces the number of operations during calibration, improves insertion efficiency, and thus increases calibration efficiency. Therefore, the calibration tool in this invention provides a more convenient calibration process. Attached Figure Description

[0021] Figure 1 This is a schematic cross-sectional structure diagram of a PVD system;

[0022] Figure 2 This is a structural schematic diagram of the pressure ring and shielding component;

[0023] Figure 3 yes Figure 2 Top view;

[0024] Figure 4 This is a top view of a calibration unit in an embodiment of this utility model;

[0025] Figure 5 yes Figure 4 Cross-sectional view of the calibration unit;

[0026] Figure 6 Is using Figure 4 A schematic diagram showing the calibration unit calibrating the relative positions between the pressure ring assemblies;

[0027] Figure 7 This is a top view of another calibration unit in an embodiment of this utility model;

[0028] Figure 8 This is a top view of another calibration unit in this utility model embodiment. Detailed Implementation

[0029] Figure 1 This is a schematic cross-sectional view of a PVD system. (Refer to...) Figure 1 The PVD system may include a reaction chamber 10, a support assembly, and a pressure ring assembly. The support assembly supports the substrate, and the pressure ring assembly secures the substrate and exposes the deposition area on the substrate surface.

[0030] Specifically, the support assembly may include: a base 101, a heating structure 102, a ceramic disk 103, and a deposition ring 104. The heating structure 102 is fixed to the base 101. The ceramic disk 103 is fixed to the heating structure 102. The substrate is placed on the ceramic disk 103. The ceramic disk 103 can be fixed to the substrate by electrostatic adsorption or other methods. The deposition ring 104 is fitted around the periphery of the ceramic disk 103 to shield areas outside the ceramic disk 103, preventing film deposition on areas outside the ceramic disk 103. The heating structure 102 can heat the ceramic disk 103 to promote the deposition process.

[0031] The cover ring assembly is stacked on the edge region of the substrate. The cover ring assembly may include a cover ring 105 and a shield 106. The cover ring 105 covers the edge region of the substrate, thereby shielding the edge region and preventing film deposition. The shield 106 also limits the film deposition location, protecting the inner wall of the reaction chamber 10 from deposition.

[0032] In practical applications, a target is placed inside the reaction chamber 10. By connecting the target to a power source, a bias voltage can be provided to the target. This bias voltage causes the inert gas in the reaction chamber 10 to discharge and generate plasma. The plasma bombards the target, causing metal atoms on the target surface to escape and deposit on the substrate, thereby achieving the deposition of a metal thin film on the substrate.

[0033] Figure 2 This is a schematic diagram of the structure of the pressure ring 105 and the shielding component 106. Figure 3 for Figure 2 A top view. (Refer to...) Figure 2 and Figure 3 Both the pressure ring 105 and the shielding member 106 are annular. The shielding member 106 has an outer wall 106a and an inner wall 106b extending in the same direction Y. The height of the outer wall 106a in the Y direction is greater than the height of the inner wall 106b in the Y direction. The bottoms of the outer wall 106a and the inner wall 106b are connected by a bottom wall 106c, thereby forming a certain gap between the outer wall 106 and the inner wall 106b. The pressure ring 105 has an edge 105a protruding toward the bottom wall 106c of the shielding member 106, thereby allowing it to be fitted over the inner wall 106b of the shielding member 106, and the edge 105a is located within the gap between the outer wall 106 and the inner wall 106b.

[0034] To prevent the deposition ring 105 and the surface of the deposition ring 104 and ceramic disk 103 below the shielding member 106 from being deposited, and to ensure that the deposition area on the substrate surface meets expectations, it is necessary to ensure that the position of the pressure ring 105 relative to the shielding member 106 does not shift, that is, the center of the pressure ring 105 and the center of the shielding member 106 are on the same central axis. Therefore, before deposition, the position of the pressure ring 105 needs to be calibrated so that the center of the pressure ring 105 is on the central axis of the shielding member 106, thereby ensuring that the edge 105a of the pressure ring 105 is circumferentially aligned with the spacing between the edge 105a and the inner wall 106b of the shielding member 106.

[0035] Currently, when calibrating the position between the pressure ring 105 and the shield 106, it is usually done after the pressure ring 105 is fitted onto the inner wall 106b of the shield 106. Figure 2Multiple fasteners 107 shown are inserted into the gap between the edge 105a of the pressure ring 105 and the outer wall 106a of the shield 106, such that the multiple fasteners 107 are evenly distributed circumferentially along the outer wall 106a of the shield 106. One side of the fastener 107 is in close contact with the outer wall 106a of the shield 106, while the other side has a certain gap with the edge 105a of the pressure ring 105. The position of the shield 106 is fixed. By moving the pressure ring 105, there is no obvious friction between the outer wall of the pressure ring 105 and the fasteners 107, that is, it is assumed that the distance between the edge 105a of the pressure ring 105 and the outer wall 106a of the shield 106 is consistent at all points. At this time, the centers of the pressure ring 105 and the shield 106 are on the same central axis.

[0036] However, when calibrating the position between the pressure ring 105 and the shield 106 using the above method, the fixing members 107 are independent of each other. Therefore, they need to be inserted one by one into the gap between the edge 105a of the pressure ring 105 and the outer wall 106a of the shield 106, which is cumbersome. Furthermore, it requires manual judgment based on experience to determine whether the multiple fixing members 107 are evenly distributed. Due to the small actual gap, when adjusting the position of the pressure ring 105, it often results in a bias to one side, making calibration difficult and making it hard to adjust the position of each fixing member at once.

[0037] To address this problem, this invention provides a calibration tool. Each calibration unit of the tool can include two fasteners connected by the same connector. This allows two fasteners to be inserted simultaneously through the connector without needing to adjust their circumferential distribution. This reduces the number of operations required during calibration, lowers the calibration difficulty, and minimizes process data deviations caused by human factors affecting the PVD reaction chamber.

[0038] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0039] This utility model provides a calibration tool for a pressure ring assembly. The pressure ring assembly includes a shield and a pressure ring. The shield includes an inner wall and an outer wall extending in the same direction. The pressure ring is sleeved on the outer wall of the shield, and the edge of the pressure ring is located in the gap between the outer wall and the inner wall of the shield.

[0040] In an embodiment of this invention, the calibration tool includes at least one calibration unit. Each calibration unit includes:

[0041] The first fixing member and the second fixing member are symmetrically distributed along the circumferential direction;

[0042] And a connector for connecting the first fixing member and the second fixing member;

[0043] The first and second fixing members are adapted to be inserted into the gap between the edge of the pressure ring and the outer wall of the shielding member through the connecting member, so as to calibrate the position between the pressure ring and the shielding member.

[0044] Figure 4 This is a top view of the calibration unit in one embodiment of the present invention. Figure 5 for Figure 4 Cross-sectional view of the calibration unit. Figure 6 For use Figure 4 A schematic diagram of the calibration unit calibrating the relative positions between the pressure ring assemblies.

[0045] Reference Figures 4 to 6 The first fixing member 201 and the second fixing member 202 are connected by the connector 203. Subsequently, the first fixing member 201 and the second fixing member 202 can be directly inserted into the gap between the edge 105a of the pressure ring 105 and the outer wall 106a of the shield 106 through the connector 203.

[0046] In specific implementations, the first fixing member 201 and the second fixing member 202 can have the same structure. Both can include an insertion part and a connecting part, wherein the connecting part and the insertion part are both cylindrical, and the diameter of the connecting part is smaller than the diameter of the insertion part.

[0047] Taking the second fastener 202 as an example, refer to Figure 5 The second fixing member 202 may include an insertion portion 202a and a connecting portion 202b, wherein both the insertion portion 202a and the connecting portion 202b are cylindrical, and the diameter of the insertion portion 202a is larger than the diameter of the connecting portion 202b. The insertion portion 202a is used to insert into the gap between the edge 105a of the pressure ring 105 and the outer wall 106a of the shield 106. The connecting portion 202b is connected to the connecting member 203. The height of the insertion portion 202a is lower than the height of the interior 106b of the shield 106 along the Y direction.

[0048] In specific implementations, the size of the insertion part 202a can be set according to the gap w1 between the edge 105a of the pressure ring 105 and the outer wall 106a of the shield 106. The size of the insertion part 202a should be smaller than the gap w1 between the edge 105a of the pressure ring 105 and the outer wall 106a of the shield 106, and a certain amount of space should be reserved to facilitate the adjustment of the position of the pressure ring 105. For example, when the gap w1 between the edge 105a of the ring 105 and the outer wall 106a of the shield 106 is 23.4mm, the diameter of the insertion part 202a can be set to a range of 22mm to 22.4mm, thereby reserving a space of 1mm to 1.3mm.

[0049] In specific implementation, the first fixing member 201 and the second fixing member 202 have the same maximum dimension along the Y direction, so that the connecting member 203 can be kept on the horizontal plane after being connected to the first fixing member 201 and the second fixing member 202, that is, parallel to the plane where the lower pressure ring 105 is located, which facilitates calibration.

[0050] In specific implementation, the first fixing member 201 and the second fixing member 202 can be made of ceramic material, thereby reducing or avoiding frictional damage to the outer wall 106a of the shielding member 106 when in contact with it.

[0051] In specific implementations, the length of the connector 203 can be set according to the dimensions of the pressure ring 105 and the shield 106. The length of the connector 203 should be less than the diameter w2 of the circle containing the outer wall of the shield 106 and greater than the outer diameter w3 of the pressure ring 105. Typically, the length of the connector 203 is <427.4 mm.

[0052] In specific implementations, the shape of the connector 203 is not limited. For example, along the connection direction of the first fixing member 201 and the second fixing member 202, the shape of the connector 203 can be curved.

[0053] In one embodiment, the connector 202 may be linear in shape, that is, the connector 203 extends in a straight line along the connection direction of the first fixing member 201 and the second fixing member 202, thereby facilitating connection with other calibration units.

[0054] In specific implementations, the material of the connector 203 can be lightweight materials such as plastic, thereby reducing the weight of the connector 203 and facilitating its connection with the fastener.

[0055] In specific implementations, the first fixing member 201 and the second fixing member 202 can be connected to the connecting member 203 in various ways. For example, the first fixing member 201 and the second fixing member 202 can be welded to the end of the connecting member 203.

[0056] In one embodiment of this utility model, the first fixing member 201 and the second fixing member 202 are detachably connected to the connecting member 203, thereby facilitating the replacement of the fixing member when it is damaged or when the size of the shielding member 106 and the pressure ring 105 changes, thus reducing calibration costs.

[0057] Specifically, the first fixing member 201 and the second fixing member 202 can be snapped together with the connecting member 203. For example, a groove corresponding to the size of the connecting part on the fixing member can be provided at the end of the connecting member 203, and an interference fit can be made between the connecting part and the connecting part, so that the connecting part can be pressed into the groove at the end of the connecting member 203 in the horizontal direction.

[0058] In specific implementations, the calibration tool may include only one calibration unit as described in the above embodiments, or it may include two or more calibration units. When the calibration tool includes two or more calibration units, the connecting parts of the two or more calibration units can be fixedly connected, so that the fixing parts of all calibration units are evenly distributed circumferentially along the outer wall 106a of the shield 106. Preferably, the multiple calibration units have the same shape, which facilitates the fixing of the calibration units.

[0059] In one embodiment of this utility model, reference is made to Figure 7 The calibration tool includes two calibration units: a first calibration unit 21 and a second calibration unit 22. The connectors of the first calibration unit 21 and the second calibration unit 22 are fixedly connected. For example, the connectors of the first calibration unit 21 and the second calibration unit 22 can be fixed by welding or bonding. Alternatively, screws can be used to thread the connectors of the first calibration unit 21 and the second calibration unit 22 together.

[0060] In a specific implementation, the structure and shape of the connector of the first calibration unit 21 and the connector of the second calibration unit 22 can be cross-connected at the center P, so that the four fixing parts of the first calibration unit 21 and the second calibration unit 22 are evenly distributed in the circumferential direction. At this time, the sector area formed between any adjacent fixing parts accounts for 1 / 4 of the area of ​​the circle.

[0061] In another embodiment of this utility model, referring to Figure 7 The calibration tool includes three calibration units: a first calibration unit 31, a second calibration unit 32, and a third calibration unit 33. These three calibration units are fixedly connected at the center point P. Thus, using this calibration tool, six fixing members can be simultaneously inserted into the gap between the edge of the pressure ring and the outer wall of the shielding component. These six fixing members are evenly distributed circumferentially, meaning that the fan-shaped area formed between any adjacent fixing members occupies 1 / 6 of the area of ​​the circle in which they are located.

[0062] by Figure 7 Taking the calibration unit as an example, when using Figure 7When calibrating with the calibration tool, you can hold the connector of the calibration unit by hand and place the four fixing parts into the gap between the edge of the pressure ring and the outer wall of the shield at the same time. Slightly rotate the connector of the calibration unit. If there is no obvious friction between the fixing parts, the edge of the pressure ring, and the outer wall of the shield, the calibration is complete.

[0063] Since the distance between each fixing component and the center point of the calibration tool is consistent, after calibrating the relative position between the pressure ring and the shield using this calibration tool, the pressure ring can cover the edge of the substrate more evenly, and the distance between the edge of the pressure ring and the outer wall of the shield can be kept consistent at all points, with the center of the pressure ring and the center of the shield on the same central axis.

[0064] The calibration tool used in this embodiment of the invention can not only reduce the number of operations during the calibration process, but also reduce the difficulty of calibration, improve the efficiency of calibration, make calibration more convenient, and reduce the deviation of process data caused by human factors affecting the PVD reaction chamber.

[0065] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A calibration tool for a compression ring assembly, the compression ring assembly comprising: A shielding member and a compression ring; the shielding member comprises an inner wall and an outer wall extending in the same direction, the compression ring is sleeved outside the inner wall of the shielding member, and the edge of the compression ring is located in the gap between the outer wall and the inner wall of the shielding member; characterized in that the calibration tool comprises at least one calibration unit, each calibration unit comprises: A first fixing member and a second fixing member, the first fixing member and the second fixing member are distributed symmetrically in the circumferential direction; And a connecting member for connecting the first fixing member and the second fixing member; Wherein, the first fixing member and the second fixing member are adapted to be inserted into the gap between the edge of the compression ring and the outer wall of the shielding member through the connecting member, so as to calibrate the position between the compression ring and the shielding member.

2. The calibration tool of claim 1, wherein, The first fixing member and the second fixing member are detachably connected with the connecting member.

3. The calibration tool of claim 2, wherein, The first fixing member and the second fixing member are snap connected with the connecting member.

4. The calibration tool of claim 1, wherein, The material of the first fixing member and the second fixing member is ceramic material.

5. The calibration tool of claim 1, wherein, The material of the connecting member is plastic.

6. The calibration tool of claim 1, wherein, The connecting member is in a straight line shape.

7. The calibration tool of claim 1, wherein, The first fixing member and the second fixing member each comprise an insertion part and a connecting part, the connecting part and the insertion part are in a cylindrical shape, and the diameter of the connecting part is smaller than the diameter of the insertion part.

8. The calibration tool of any one of claims 1 to 7, wherein, The calibration tool comprises a plurality of calibration units, the connecting members of the plurality of calibration units are fixedly connected, so that the fixing members of the plurality of calibration units are uniformly distributed in the circumferential direction.

9. The calibration tool of claim 8, wherein, The calibration tool comprises two calibration units, the connecting members of the two calibration units are cross connected at the center.

10. The calibration tool of claim 8, wherein, The shapes of the connecting members of the plurality of calibration units are the same.

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