Closed low-temperature heat exchange cooling table system

Abstract

The utility model discloses a closed low-temperature heat exchange cold table system, which belongs to the technical field of ultralow-temperature refrigeration, a low-temperature thermostat and a low-temperature sample table are mounted on a scanning electron microscope, an internal channel of the low-temperature thermostat is connected with the low-temperature sample table, and the low-temperature thermostat is used for regulating and controlling the temperature of helium / nitrogen entering the low-temperature sample table; the heat exchanger is contained in a heat exchange box of the low-temperature refrigerator, the interior of the heat exchange box is in a vacuum state, the heat exchanger is connected with a cold head of the low-temperature refrigerator, and a refrigerant in the cold head of the low-temperature refrigerator in the heat exchange box absorbs heat of helium / nitrogen in the heat exchanger to reduce the temperature of the helium / nitrogen in the heat exchanger; the circulating air pump is connected with an inlet of the heat exchanger through a pipeline, an outlet of the heat exchanger is connected with one end of the low-temperature thermostat internal inflow channel, and the other end of the low-temperature thermostat internal inflow channel is connected with the low-temperature sample table; and the problem of vibration of the low-temperature sample table caused by gas-liquid phase change is avoided.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of ultralow temperature refrigeration technology, specifically relates to a closed low temperature heat exchange cold stage system. BACKGROUND

[0002] The scanning electron microscope is a common laboratory equipment, which can observe the sample under high magnification without damaging the sample. In order to ensure the observation accuracy and stability of the scanning electron microscope, the sample stage needs to be controlled at a very low temperature. At this time, the cold stage system of the scanning electron microscope is particularly important. The application of the cold stage system in the scanning electron microscope mainly has the following aspects: first, providing a stable low temperature environment, the cold stage system can control the temperature of the sample stage to keep it at a very low temperature, which helps to improve the observation accuracy and stability of the scanning electron microscope. Second, protecting the sample, the low temperature environment can slow down the decay process of the sample, thereby protecting the sample from damage. Third, improving the observation effect, in the low temperature environment, the physical and chemical properties of the sample change, which can help scientists more accurately observe the morphology and structure of the sample.

[0003] At present, there are mainly two technical forms to meet the low temperature requirement: the first is to use liquid helium / liquid nitrogen in the Dewar flask, and through the low temperature transmission pipeline, the low temperature liquid helium / liquid nitrogen is delivered to the sample stage, and the phase change latent heat and sensible heat of the low temperature liquid helium / liquid nitrogen are used to cool the sample stage to achieve the low temperature effect; the second is to use the technology of combining compressor and low temperature refrigerator to expand the high pressure helium / nitrogen gas to achieve the purpose of low temperature. The above-mentioned first method, the liquid helium / liquid nitrogen will undergo gas-liquid phase change in the cold stage, which will produce gas-liquid expansion, and then when the scanning electron microscope observes the sample, the sample image will vibrate. The above-mentioned second method, the refrigerator and the scanning electron microscope are rigidly connected through the cold guide mechanism, and the vibration generated by the refrigerator during work will be transmitted to the sample stage of the scanning electron microscope, which also causes the sample image to vibrate and affects the observation effect.

[0004] In fact, the vibration introduced by the above-mentioned two methods is relatively small, which can be ignored in general experiments, and no one will pay attention to these small vibrations. The above-mentioned two methods will introduce vibration only when facing very harsh vibration requirements. In some special cases, the vibration-sensitive experiment needs to avoid any small vibration of the image as much as possible, so the above-mentioned two methods are not suitable for scanning electron microscope sample observation experiments which are very sensitive to vibration. UTILITY MODEL CONTENTS

[0005] Therefore, the utility model provides a closed low temperature heat exchange cold stage system, which can cool the sample stage by using low temperature gas during the experiment, and solves the problem of vibration of the sample image when the scanning electron microscope observes the sample.

[0006] The closed-loop low-temperature heat exchange cold table system provided by this utility model adopts the following technical solution:

[0007] A closed-loop cryogenic heat exchange cold stage system includes a circulating air pump, a cryogenic refrigerator, a heat exchanger, a scanning electron microscope, a cryogenic thermostat, and a cryogenic sample stage;

[0008] The cryostat and the cryogenic sample stage are mounted on the scanning electron microscope, and the internal channel of the cryostat is connected to the cryogenic sample stage. The cryostat is used to regulate the temperature of helium / nitrogen entering the cryogenic sample stage.

[0009] The heat exchanger is housed in the heat exchange box of the cryogenic refrigerator. The heat exchange box is in a vacuum state. The heat exchanger is connected to the cold head of the cryogenic refrigerator. The refrigerant in the cold head of the cryogenic refrigerator absorbs the heat of the helium / nitrogen in the heat exchanger, thereby reducing the temperature of the helium / nitrogen in the heat exchanger.

[0010] The circulating air pump is connected to the inlet of the heat exchanger through a pipeline, the outlet of the heat exchanger is connected to one end of the internal flow channel of the low-temperature thermostat, and the other end of the internal flow channel of the low-temperature thermostat is connected to the low-temperature sample stage.

[0011] During operation, driven by the circulating gas pump, the closed-loop flow path of helium / nitrogen is: circulating gas pump → heat exchanger inlet → heat exchanger → heat exchanger outlet → cryogenic thermostat inlet channel → cryogenic sample stage → cryogenic thermostat outlet channel → circulating gas pump.

[0012] Furthermore, it also includes a regenerator;

[0013] The regenerator includes inlet A, outlet A, inlet B, and outlet B. Inlet A and outlet A are connected inside the regenerator, and inlet B and outlet B are connected inside the regenerator.

[0014] The A inlet of the regenerator is connected to the outlet of the circulating air pump through a pipeline, the A outlet is connected to the inlet of the heat exchanger through a pipeline, the B inlet is connected to the outlet channel of the low-temperature thermostat through a pipeline, and the B outlet is connected to the inlet of the circulating air pump through a pipeline.

[0015] During operation, driven by the circulating gas pump, the closed-loop flow path of helium / nitrogen is: circulating gas pump → regenerator inlet → regenerator → regenerator outlet → heat exchanger inlet → heat exchanger → heat exchanger outlet → cryogenic thermostat inlet channel → cryogenic sample stage → cryogenic thermostat outlet channel → B inlet → regenerator → B outlet → circulating gas pump.

[0016] Helium / nitrogen flowing from the cryogenic sample stage into the regenerator precools the helium / nitrogen flowing from the circulating gas pump inside the regenerator.

[0017] Furthermore, during operation, the helium / nitrogen flowing from the low-temperature sample stage into the regenerator and the helium / nitrogen flowing from the circulating gas pump into the regenerator are in a countercurrent state inside the regenerator.

[0018] More specifically, during work:

[0019] The temperature of the helium / nitrogen flowing into the regenerator from the circulating gas pump is 290K-300K;

[0020] The temperature of the helium / nitrogen gas flowing into the heat exchanger from outlet A is 30K-210K;

[0021] The temperature of the helium / nitrogen gas flowing from the heat exchanger into the cryogenic thermostat is 10K-100K;

[0022] The temperature of the helium / nitrogen gas flowing from the cryostat into the regenerator is 20K-200K;

[0023] The temperature of the helium / nitrogen flowing from the regenerator into the circulating gas pump is 280K-300K.

[0024] More specifically, the regenerator and piping are equipped with thermal insulation structures.

[0025] The inlet and outlet channels of the cryogenic thermostat are connected to the cryogenic sample stage via a first hose and a second hose, respectively. During operation, the gas cooling the cryogenic sample stage in the inlet channel flows into the cryogenic sample stage through the first hose, and the gas cooling the cryogenic sample stage flows into the outlet channel through the second hose.

[0026] More specifically, a capillary expansion heat exchanger is fitted around the outer periphery of the end of the flow channel that is connected to the first hose;

[0027] The inlet channel of the cryogenic thermostat is an air inlet pipe structure, which is connected to the cryogenic sample stage through a first flexible hose. The outlet channel of the cryogenic thermostat is an exhaust pipe structure, which is connected to the cryogenic sample stage through a second flexible hose.

[0028] It also includes an intermediate heat exchanger and a cold screen. The outer periphery of the end of the inlet pipe structure connected to the low-temperature sample stage is fitted with a cold screen. The intermediate heat exchanger is not only connected to the cold screen, but also supports the inlet pipe structure and the exhaust pipe structure, which are arranged side by side in the vacuum shell inside the low-temperature thermostat.

[0029] More specifically, the cryostat is connected to a temperature controller, which regulates the helium / nitrogen temperature of the cryogenic sample stage entering the scanning electron microscope.

[0030] More specifically, the pipes connecting the regenerator to the circulating air pump, the pipes connecting the circulating air pump to the heat exchanger, the pipes connecting the heat exchanger to the low-temperature thermostat, and the pipes connecting the low-temperature thermostat to the regenerator are all flexible hoses.

[0031] Beneficial effects of the utility model:

[0032] 1. Using cryogenic gas to cool the cryogenic sample stage ensures stable gas flow and heat exchange within the stage, effectively avoiding vibration issues caused by gas-liquid phase changes. Furthermore, the cryogenic cooling mechanism, connected to a cryostat and scanning electron microscope (SEM), supplies cryogenic gas to the stage via a flexible gas path, further preventing the slight vibrations caused by traditional cooling methods that can lead to image vibrations during SEM observation. This closed-loop cryogenic heat exchange stage system eliminates the need to replace the helium / nitrogen gas used for cooling during its designed lifespan, making it ideal for environments lacking helium / nitrogen sources.

[0033] 2. The regenerator can utilize the cooling capacity of the helium / nitrogen gas discharged from the low-temperature sample stage to pre-cool the helium / nitrogen gas that is about to enter the heat exchanger, effectively reducing the consumption of helium / nitrogen gas and improving energy utilization.

[0034] 3. The pipes connecting the regenerator and the circulating air pump, the pipes connecting the circulating air pump and the heat exchanger, the pipes connecting the heat exchanger and the cryogenic thermostat, and the pipes connecting the cryogenic thermostat and the regenerator are all flexible hoses. This can further reduce the transmission of vibrations from external sources such as the cryogenic refrigerator to the cryogenic sample stage, ensuring that the sample image is vibration-free and improving the observation quality. In addition, these pipes are equipped with thermal insulation structures to enhance the cooling effect on the cryogenic sample stage.

[0035] 4. The hose adopts a multi-layer composite structure, which can not only isolate external mechanical vibration, but also reduce heat loss in the pipeline, ensuring the stability of the low-temperature sample stage in complex experimental environments.

[0036] 5. The inlet and outlet pipes of the cryostat, near the scanning electron microscope, are connected to the cryogenic sample stage via a first flexible hose and a second flexible hose, respectively. During operation, the gas cooling the cryogenic sample stage in the inlet pipe flows into the stage through the first flexible hose, while the gas cooling the stage flows into the outlet pipe through the second flexible hose. This use of flexible hoses as the connection between the cryostat and the cryogenic sample stage effectively achieves direct contact between the cryogenic helium / nitrogen gas and the stage, reducing the thermal resistance between them and significantly improving heat transfer efficiency. This ensures that the cryogenic sample stage is not affected by vibrations caused by the vaporization and expansion of the cryogenic liquid during use. Furthermore, the flexible hose connection avoids the influence of the piping structure on the movement of the cryogenic sample stage.

[0037] 6. A capillary expansion heat exchanger is fitted around the outer periphery of the end where the inlet pipe connects to the first flexible hose. This design ensures that the liquefied liquid helium / liquid nitrogen is in a low-temperature saturated gaseous state when it enters the cryogenic cold stage, thus avoiding the presence of a liquid phase. This helps to further reduce vibrations caused by gas-liquid phase changes and improves the stability and performance of the equipment.

[0038] 7. Furthermore, it also includes an intermediate heat exchanger and a cold screen. The inlet channel of the low-temperature thermostat is an inlet pipe structure, and the outlet channel of the low-temperature thermostat is an exhaust pipe structure. A cold screen is fitted around the outer periphery of the end of the inlet pipe that is connected to the low-temperature sample stage. The intermediate heat exchanger is connected to the cold screen and supports the inlet pipe and the exhaust pipe, which are arranged side by side in the vacuum shell inside the low-temperature thermostat. The intermediate heat exchanger not only cools the cold screen, but also prevents vibrations from occurring when the gas flows in the inlet pipe and the exhaust pipe. Attached Figure Description

[0039] Figure 1 A schematic diagram of a closed-loop low-temperature heat exchange cold table system provided for an embodiment of this utility model;

[0040] Among them, 1-circulating air pump, 2-regenerator, 3-low temperature refrigerator, 4-heat exchanger, 5-temperature controller, 6-scanning electron microscope, 7-low temperature sample stage, and 8-low temperature thermostat. Detailed Implementation

[0041] The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0042] Example 1:

[0043] Reference Figure 1 A closed-loop cryogenic heat exchange stage system includes a circulating air pump 1, a cryogenic refrigerator 3, a heat exchanger 4, a scanning electron microscope 6, a cryostat 8, and a cryogenic sample stage 7, wherein:

[0044] The cryostat 8 and the cryogenic sample stage 7 are mounted on the scanning electron microscope 6, and the internal channel of the cryostat 8 is connected to the cryogenic sample stage 7. The cryostat 8 is used to regulate the temperature of the helium / nitrogen gas entering the cryogenic sample stage 7. The heat exchanger 4 is housed in the heat exchange chamber of the cryogenic refrigerator 3. The heat exchange chamber is in a vacuum state. The heat exchanger 4 is connected to the cold head of the cryogenic refrigerator 3. The refrigerant in the cold head of the cryogenic refrigerator 3 in the heat exchange chamber absorbs the heat of the helium / nitrogen gas in the heat exchanger 4, thereby reducing the temperature of the helium / nitrogen gas in the heat exchanger 4. The temperature of the gas; the circulating gas pump 1 is connected to the inlet of the heat exchanger 4 through a pipeline, the outlet of the heat exchanger 4 is connected to one end of the internal inlet channel of the cryogenic thermostat 8, and the other end of the internal inlet channel of the cryogenic thermostat 8 is connected to the cryogenic sample stage 7; during operation, driven by the circulating gas pump 1, the closed-loop flow path of helium / nitrogen is: circulating gas pump 1 → heat exchanger 4 inlet → heat exchanger 4 → heat exchanger 4 outlet → cryogenic thermostat 8 inlet channel → cryogenic sample stage 7 → cryogenic thermostat 8 outlet channel → circulating gas pump 1.

[0045] By using cryogenic gas to cool the cryogenic sample stage 7, stable gas flow and heat exchange within the stage are ensured, effectively avoiding vibration issues caused by gas-liquid phase changes. Furthermore, the cooling mechanism, connected to the cryogenic thermostat 8 and the scanning electron microscope 6, supplies cryogenic gas to the stage 7 via a flexible gas path, further preventing the slight vibrations caused by traditional cooling methods that could lead to image vibrations during SEM observation. This closed-loop cryogenic heat exchange stage system, operating in a closed-loop cycle, eliminates the need to replace the helium / nitrogen gas used for cooling during its designed lifespan, making it ideal for environments lacking helium / nitrogen sources.

[0046] As an improvement, the inlet channel of the cryostat 8 is named the inlet pipe, and the outlet channel is named the outlet pipe. The ends of the inlet and outlet pipes of the cryostat 8 near the scanning electron microscope 6 are connected to the cryogenic sample stage 7 via a first flexible tube and a second flexible tube, respectively. During operation, the gas cooling the cryogenic sample stage 7 in the inlet pipe flows into the cryogenic sample stage 7 through the first flexible tube, and the gas after cooling the cryogenic sample stage 7 flows into the outlet pipe through the second flexible tube. The first and second flexible tubes can be made of polytetrafluoroethylene (PTFE) tubing or corrugated metal tubing, etc. In this embodiment, corrugated metal tubing is used. Thus, using flexible tubes as the connection method between the cryostat 8 and the cryogenic sample stage 7 effectively achieves direct contact between the cryogenic helium / nitrogen gas and the cryogenic sample stage 7, reducing the thermal resistance between them, thereby significantly improving heat transfer efficiency and ensuring that the cryogenic sample stage 7 is not affected by vibrations caused by the vaporization and expansion of the cryogenic liquid during use. Furthermore, using flexible tubes avoids the influence of the piping structure on the movement of the cryogenic sample stage 7.

[0047] As a further improvement, a capillary expansion heat exchanger is fitted around the outer periphery of the end where the inlet pipe connects to the first flexible hose. This design ensures that the liquefied liquid helium / liquid nitrogen is in a low-temperature saturated gaseous state when it enters the cryogenic cold stage, thus avoiding the presence of a liquid phase. This helps to further reduce vibrations caused by gas-liquid phase changes and improves the stability and performance of the equipment.

[0048] Example 2:

[0049] Based on Embodiment 1, a regenerator 2 is added. The regenerator 2 includes an inlet A, an outlet A, an inlet B, and an outlet B. The inlet A and outlet A are connected inside the regenerator 2, and the inlet B and outlet B are also connected inside the regenerator 2. The inlet A of the regenerator 2 is connected to the outlet of the circulating air pump through a pipeline, the outlet A is connected to the inlet of the heat exchanger 4 through a pipeline, the inlet B is connected to the outlet channel of the low-temperature thermostat 8 through a pipeline, and the outlet B is connected to the inlet of the circulating air pump 1 through a pipeline. During operation, driven by the circulating gas pump 1, the closed-loop flow path of helium / nitrogen is as follows: circulating gas pump 1 → inlet of regenerator 2 → regenerator 2 → outlet of regenerator 2 → inlet of heat exchanger 4 → heat exchanger 4 → outlet of heat exchanger 4 → inlet channel of cryogenic thermostat 8 → cryogenic sample stage 7 → outlet channel of cryogenic thermostat 8 → inlet B → regenerator 2 → outlet B → circulating gas pump 1; the helium / nitrogen flowing from the cryogenic sample stage 7 into the regenerator 2 precools the helium / nitrogen flowing from the circulating gas pump 1 into the regenerator 2 inside the regenerator 2.

[0050] Thus, the regenerator 2 can utilize the cooling capacity of the helium / nitrogen discharged from the low-temperature sample stage 7 to pre-cool the helium / nitrogen that is about to enter the heat exchanger 4, effectively reducing the consumption of helium / nitrogen and improving energy utilization.

[0051] Specifically, during operation, the helium / nitrogen flowing from the low-temperature sample stage 7 into the regenerator 2 and the helium / nitrogen flowing from the circulating gas pump 1 into the regenerator 2 are in a countercurrent state inside the regenerator 2, which improves the preheating effect.

[0052] More specifically, in this embodiment, during operation: the temperature of helium / nitrogen flowing from the circulating gas pump 1 into the regenerator 2 is 290K-300K; the temperature of helium / nitrogen flowing from outlet A into the heat exchanger 4 is 30K-210K; the temperature of helium / nitrogen flowing from the heat exchanger 4 into the cryogenic thermostat 8 is 10K-100K; the temperature of helium / nitrogen flowing from the cryogenic thermostat 8 into the regenerator 2 is 20K-200K; and the temperature of helium / nitrogen flowing from the regenerator 2 into the circulating gas pump 1 is 280K-300K.

[0053] More specifically, in this embodiment, the regenerator 2 and the surrounding piping are equipped with a thermal insulation structure to improve the cooling effect on the low-temperature sample stage 7. The low-temperature thermostat 8 is connected to the temperature controller 5, which regulates the temperature of the helium / nitrogen gas entering the low-temperature sample stage 7 of the scanning electron microscope 6. Moreover, the piping connecting the regenerator 2 to the circulating gas pump 1, the piping connecting the circulating gas pump 1 to the heat exchanger 4, the piping connecting the heat exchanger 4 to the low-temperature thermostat 8, and the piping connecting the low-temperature thermostat 8 to the regenerator 2 are all flexible hoses. This can further reduce the transmission of vibrations from outside the scanning electron microscope 6, such as the low-temperature refrigerator 3, to the low-temperature sample stage 7 of the scanning electron microscope 6, ensuring that the sample image is vibration-free and improving the observation quality.

[0054] Specifically, the inlet channel of the cryogenic thermostat 8 is an inlet pipe structure, which is connected to the cryogenic sample stage 7 via a first flexible tube (helium / nitrogen flows from the inlet pipe structure into the first flexible tube, and then into the cryogenic sample stage 7). The outlet channel of the cryogenic thermostat 8 is an exhaust pipe structure, which is connected to the cryogenic sample stage 7 via a second flexible tube (helium / nitrogen in the cryogenic sample stage 7 flows out to the second flexible tube, and then out to the exhaust pipe). Furthermore, a capillary expansion heat exchanger is fitted around the outer periphery of the end of the inlet channel of the cryogenic thermostat 8 that is connected to the first flexible tube. This design ensures that the liquefied liquid helium / liquid nitrogen is in a cryogenic saturated gaseous state when it enters the cryogenic sample stage 7, thereby avoiding the presence of a liquid phase. This helps to further reduce vibrations caused by gas-liquid phase changes and improves the stability and performance of the equipment. Furthermore, it also includes an intermediate heat exchanger and a cold screen. A cold screen is fitted around the outer periphery of the end where the inlet pipe structure is connected to the low-temperature sample stage 7. The intermediate heat exchanger is not only connected to the cold screen, but also supports the inlet pipe structure and the exhaust pipe structure, which are arranged side by side in the vacuum shell inside the low-temperature thermostat 8. The intermediate heat exchanger not only cools the cold screen, but also prevents vibrations from occurring when the gas flows in the inlet pipe structure and the exhaust pipe structure.

[0055] In summary, the above are merely preferred embodiments of this utility model and are not intended to limit the scope of protection of this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. A closed cryogenic heat exchange cold table system, characterized by, The helium / nitrogen closed loop flow path is: the circulating gas pump→ the heat exchanger inlet→ the heat exchanger→ the heat exchanger outlet→ the low-temperature thermostat inlet channel→ the low-temperature sample table→ the low-temperature thermostat outlet channel→ the circulating gas pump. The heat exchanger is accommodated in a heat exchange box of the low-temperature refrigerator, the heat exchange box is in a vacuum state, the heat exchanger is connected with a cold head of the low-temperature refrigerator, and a refrigerant in the cold head of the low-temperature refrigerator in the heat exchange box absorbs heat of helium / nitrogen in the heat exchanger, so that the temperature of the helium / nitrogen in the heat exchanger is reduced. The circulating gas pump is connected with the heat exchanger inlet through a pipeline, the heat exchanger outlet is connected with one end of the low-temperature thermostat inlet channel, and the other end of the low-temperature thermostat inlet channel is connected with the low-temperature sample table. When working, under the driving of the circulating gas pump, the helium / nitrogen closed loop flow path is: the circulating gas pump→ the heat exchanger inlet→ the heat exchanger→ the heat exchanger outlet→ the low-temperature thermostat inlet channel→ the low-temperature sample table→ the low-temperature thermostat outlet channel→ the circulating gas pump. The heat exchanger is accommodated in a heat exchange box of the low-temperature refrigerator, the heat exchange box is in a vacuum state, the heat exchanger is connected with a cold head of the low-temperature refrigerator, and a refrigerant in the cold head of the low-temperature refrigerator in the heat exchange box absorbs heat of helium / nitrogen in the heat exchanger, so that the temperature of the helium / nitrogen in the heat exchanger is reduced.

2. The closed cryogenic heat pipe cold platform system of claim 1, wherein, The circulating gas pump is connected with the heat exchanger inlet through a pipeline, the heat exchanger outlet is connected with one end of the low-temperature thermostat inlet channel, and the other end of the low-temperature thermostat inlet channel is connected with the low-temperature sample table. When working, under the driving of the circulating gas pump, the helium / nitrogen closed loop flow path is: the circulating gas pump→ the heat exchanger inlet→ the heat exchanger→ the heat exchanger outlet→ the low-temperature thermostat inlet channel→ the low-temperature sample table→ the low-temperature thermostat outlet channel→ the circulating gas pump. The helium / nitrogen flowing from the low-temperature sample table into the regenerator pre-cools the helium / nitrogen flowing from the circulating gas pump into the regenerator. When working, the helium / nitrogen flowing from the low-temperature sample table into the regenerator and the helium / nitrogen flowing from the circulating gas pump into the regenerator are in a countercurrent state in the regenerator. When working:

3. A closed cryogenic heat exchanger cold table system according to claim 2, wherein, The temperature of the helium / nitrogen flowing from the circulating gas pump into the regenerator is 290K-300K; 4. A closed cryogenic heat exchanger cold platform system according to claim 2 or 3, characterized in that, The temperature of the helium / nitrogen flowing from the A outlet into the heat exchanger is 30K-210K; The temperature of the helium / nitrogen flowing from the heat exchanger into the low-temperature thermostat is 10K-100K; The temperature of the helium / nitrogen flowing from the low-temperature thermostat into the regenerator is 20K-200K; The temperature of the helium / nitrogen flowing from the regenerator into the circulating gas pump is 280K-300K. The regenerator and the pipeline are provided with a heat preservation and heat insulation structure; The low-temperature thermostat inlet channel and the low-temperature thermostat outlet channel are connected with the low-temperature sample table through a first hose and a second hose respectively, and when working, the gas in the inlet channel for cooling the low-temperature sample table flows into the low-temperature sample table through the first hose, and the gas cooled by the low-temperature sample table flows into the outlet channel from the second hose.

5. A closed cryogenic heat pipe cold platform system according to any one of claims 1 to 3, wherein, The periphery of one end of the inlet channel connected with the first hose is sleeved with a capillary expansion heat exchanger. ​ 6. A closed cryogenic heat pipe cold platform system according to claim 5, wherein, ​ The inflow channel of the cryostat is an air inlet pipe structure, the air inlet pipe structure is connected with the cryogenic sample table through a first hose, the outflow channel of the cryostat is an air outlet pipe structure, the air outlet pipe structure is connected with the cryogenic sample table through a second hose; The air inlet pipe structure and the air outlet pipe structure are supported by the intermediate heat exchanger and the cold screen, and the cold screen is sleeved on the outer periphery of one end of the air inlet pipe structure connected with the cryogenic sample table.

7. A closed cryogenic heat pipe cold platform system according to any one of claims 1 to 3, wherein, The cryostat is connected with a temperature controller, and the temperature of the helium / nitrogen entering the cryogenic sample table is controlled through the temperature controller.

8. A closed cryogenic heat pipe cold platform system according to claim 2 or 3, wherein, The pipes connecting the regenerator and the circulating gas pump, the pipes connecting the circulating gas pump and the heat exchanger, the pipes connecting the heat exchanger and the cryostat, and the pipes connecting the cryostat and the regenerator are all hoses.

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