Testing device
By designing air-cooled components, the problems of high cost and low efficiency of cooling methods in semiconductor module production have been solved, achieving waterless cooling and efficient testing.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-16
- Publication Date
- 2026-03-10
AI Technical Summary
In the current semiconductor module production process, cooling methods are costly and affect testing efficiency. After the water channel plate is cooled, water needs to be removed, which also affects testing efficiency.
The design employs an air-cooled component, including a first air-cooled component and a second air-cooled component. By covering the workpieces on the conveyor station with cooling gas, air-cooling is achieved, preventing water residue on the workpiece surface, improving testing efficiency, and reducing costs.
This technology enables efficient cooling without the need to remove water during semiconductor module testing, improving testing efficiency and reducing costs.
Smart Images
Figure CN223986137U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor module testing technology, and in particular to a testing device. Background Technology
[0002] The semiconductor module manufacturing process involves dynamic testing and static testing. After dynamic testing, the semiconductor module is at a high temperature and needs to be cooled before static testing.
[0003] Existing cooling methods mostly use water channels, which have the advantage of fast cooling. However, the cooling process leaves water on the semiconductor module. Therefore, the water needs to be removed before static testing of the semiconductor, which affects the testing efficiency. At the same time, using water channels for cooling is costly.
[0004] Therefore, it is urgent to research a testing device to solve the above problems. Utility Model Content
[0005] The purpose of this invention is to provide a testing device to solve the problems of low testing efficiency and high cost in the prior art.
[0006] To achieve the above objectives, the present invention adopts the following technical solution:
[0007] The testing apparatus includes:
[0008] The frame has a loading station and an inspection station;
[0009] A testing component, comprising a test piece disposed at the testing station and used for testing the workpiece;
[0010] A conveying assembly, comprising a conveying member having a conveying station for carrying a workpiece, the conveying member being movably mounted on the frame for moving the workpiece on the conveying station from the loading station to the inspection station.
[0011] A first air-cooling component is located on the conveying path of the conveying station, such that the cooling gas blown by the first air-cooling component can cover at least a portion of the workpiece on the conveying station.
[0012] As an optional technical solution for the testing device, the conveying component is a turntable, which is rotatably mounted on the frame to drive the conveying station to circulate between the loading station and the testing station.
[0013] As an optional technical solution for the testing device, the first air-cooling component includes a first bracket and a first air-cooling element. The first air-cooling element is mounted on the frame via the first bracket and is located above the turntable, and can blow cooling gas to the workpiece at the conveying station.
[0014] As an optional technical solution for the testing device, the first air-cooled component includes an air knife, which is located above the turntable and its air outlet faces the turntable; and / or,
[0015] The turntable has an installation channel in the middle. The first bracket includes a support rod and a support plate at one end of the support rod. The support rod passes through the installation channel and is fixed to the frame at the other end. The first air-cooling assembly includes a plurality of first air-cooling components located on the outer periphery of the support rod and evenly distributed on the support plate. There are a plurality of conveying stations, and each first air-cooling component can be arranged in a one-to-one correspondence with each conveying station.
[0016] As an optional technical solution for the testing device, the testing device further includes a second air-cooling component, which is disposed on the frame and blows cooling gas to the workpiece at the conveying station in a different direction from the first air-cooling component.
[0017] As an optional technical solution for the testing device, the conveying component is a turntable, which is rotatably mounted on the frame. The turntable has an air blowing channel at the conveying station. The second air-cooling component includes a second bracket and a second air-cooling component. The second bracket is mounted on the frame and located below the workpiece. The second air-cooling component is mounted on the second bracket. When the conveying station moves above the second air-cooling component, the air outlet of the second air-cooling component is connected to the air blowing channel.
[0018] As an optional technical solution for the testing device, the second air-cooling component is a fan; and / or,
[0019] The second air-cooling component is of several kinds, and the turntable has several conveying stations arranged at intervals around its own axis. Each second air-cooling component can be arranged in a one-to-one correspondence with each of the conveying stations.
[0020] As an optional technical solution for the testing device, the testing device includes a temperature detection element, which is disposed on the first air-cooling assembly and is used to detect the temperature of the workpiece at the conveying station.
[0021] As an optional technical solution for a testing device, the testing device includes several temperature detection elements, and the conveying element is a turntable rotatably mounted on the frame, and has several conveying stations arranged at intervals around its own axis. Each temperature detection element is arranged around the axis of the turntable and can be arranged in a one-to-one correspondence with each of the conveying stations.
[0022] As an optional technical solution for the testing device, the testing component further includes a lifting drive component, which is disposed on the frame. The test piece is slidably disposed on the frame in the vertical direction and is connected to the output end of the lifting drive component to drive the test piece to move closer to or away from the testing station.
[0023] The beneficial effects of this utility model are as follows:
[0024] This utility model provides a testing device, which includes a frame, a detection component, a conveying component, and a first air-cooling component. The detection component is located on the frame and includes a test piece for testing the workpiece. The conveying component includes a conveyor with a conveying station, which can transfer the workpiece from the conveying station to the detection station. During the movement of the conveyor, the workpiece on the conveying station passes through the coverage area of the cooling gas blown by the first air-cooling component. Thus, during the process of transferring the workpiece to the detection station, the workpiece is cooled by air, avoiding the formation of water on the workpiece surface, thereby reducing the dehydration process and improving testing efficiency. In addition, the air-cooling method is low in cost. Attached Figure Description
[0025] Figure 1 This is a schematic diagram of the testing device in an embodiment of the present invention;
[0026] Figure 2 This is a partial cross-sectional view of the testing device in an embodiment of this utility model.
[0027] In the picture:
[0028] 100. Frame; 110. Robotic arm;
[0029] 200. Test component; 210. Test piece; 220. Lifting drive component;
[0030] 310. Conveyor component; 311. Installation channel; 312. Air blowing channel;
[0031] 400. First air-cooled assembly; 410. First bracket; 411. Support rod; 412. Support plate; 420. First air-cooled component;
[0032] 500. Second air-cooling assembly; 510. Second bracket; 520. Second air-cooling component;
[0033] 600. Temperature detection components. Detailed Implementation
[0034] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.
[0035] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions. Moreover, "above," "on top of," and "over" the first feature in relation to the second feature includes the first feature directly above and diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature includes the first feature directly below and diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0036] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0037] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.
[0038] like Figure 1 and Figure 2As shown, this embodiment provides a testing device, which can be a static testing device for testing workpieces such as semiconductor modules. The testing device includes a frame 100, a testing component 200, a conveying component, and a first air-cooling component 400. The frame 100 has a loading station and a testing station; the testing component 200 includes a test piece 210 disposed at the testing station for testing the workpiece; the conveying component includes a conveyor 310 with a conveying station for carrying the workpiece, and the conveyor 310 is movably disposed on the frame 100 to move the workpiece from the loading station to the testing station; the first air-cooling component 400 is located on the conveying path of the conveying station so that the cooling gas blown by the first air-cooling component 400 can cover at least a portion of the workpiece at the conveying station.
[0039] With the above-mentioned structure, during the movement of the conveyor 310, the workpiece on the conveyor station is covered by the cooling gas blown by the first air-cooling component 400. Thus, during the process of transferring the workpiece to the testing station, the workpiece is cooled by air, avoiding the generation of water on the workpiece surface, thereby reducing the dehydration process and improving testing efficiency. In addition, compared with water channel plate cooling, air cooling is less expensive.
[0040] In some embodiments, the conveyor 310 is a turntable, which is rotatably mounted on the frame 100 to drive the conveying station to circulate between the loading station and the inspection station. The loading station and the inspection station are located on the outer periphery of the turntable. The turntable allows the conveying station to rotate around its axis, thus achieving reciprocating circulation. The turntables are located on the same plane, which helps to reduce the height dimension of the testing device. Furthermore, different stations can be set at different positions on the turntable to perform different processing techniques on the workpiece. In other embodiments, the workpiece can also be transported via a ring-shaped transmission belt parallel to the horizontal plane. In some embodiments, a robotic arm 110 is mounted on the frame 100, which is used to move the workpiece from other equipment to the loading station of the turntable.
[0041] Regarding the structure of the first air-cooling assembly 400, in some embodiments, the first air-cooling assembly 400 includes a first support 410 and a first air-cooling component 420. The first air-cooling component 420 is mounted on the frame 100 via the first support 410 and is located above the turntable, and can blow cooling gas from above onto the workpiece conveying station. This structure allows the cooling gas to be blown from above the workpiece, thereby cooling the upper part of the workpiece. The first support 410 allows for adjustment of the height of the first air-cooling component 420, thus accommodating workpieces of different heights.
[0042] An installation channel 311 is provided in the middle of the turntable. The first bracket 410 includes a support rod 411 and a support plate 412 located at the upper end of the support rod 411. The support rod 411 passes through the installation channel 311 and its lower end is fixed to the frame 100. The first air-cooling assembly 400 includes a plurality of first air-cooling components 420 located on the outer periphery of the support rod 411 and evenly distributed at intervals on the support plate 412. There are a plurality of conveying stations, and each first air-cooling component 420 can be arranged in a one-to-one correspondence with each conveying station. The arrangement of the plurality of first air-cooling components 420 allows the workpiece to be intermittently and repeatedly purged with cold air during the movement of the workpiece, thereby improving the cooling efficiency. At the same time, the support rod 411 passes through the installation channel 311 and the first air-cooling components 420 are installed through the support plate 412, which helps to save floor space. In addition, the above structure allows the first air-cooling components 420 to be located on the side of the workpiece closer to the axis of the turntable. During the purging process, the cold air flows outward, which helps to blow the heat of the workpiece to the outside, facilitating heat dissipation.
[0043] Specifically, the first air-cooling component 420 includes an air knife, which is located above the turntable and its air outlet faces the turntable. The air knife can better constrain the airflow direction and improve the cooling effect.
[0044] In other embodiments, the testing apparatus further includes a second air-cooling component 500, which is mounted on the frame 100 and blows cooling gas onto the workpiece at the conveying station in a different direction than the first air-cooling component 400. Specifically, the cooling gas blowing direction of the second air-cooling component 500 forms an angle with the cooling gas blowing direction of the first air-cooling component 400. The arrangement of the second air-cooling component 500 in conjunction with the first air-cooling component 400 allows the workpiece to be subjected to cooling gas blown from different directions, thereby increasing the heat exchange area and improving the cooling rate.
[0045] In this embodiment, the conveyor 310 is a turntable, which is rotatably mounted on the frame 100. A blowing channel 312 is provided at the conveying station on the turntable. The second air-cooling assembly 500 includes a second support 510 and a second air-cooling component 520. The second support 510 is mounted on the frame 100 and located below the workpiece. The second air-cooling component 520 is mounted on the second support 510. When the conveying station moves above the second air-cooling component 520, the air outlet of the second air-cooling component 520 is connected to the blowing channel 312. This arrangement allows the workpiece to pass through the second air-cooling component 520 during turntable rotation, thereby being cooled by the cooling gas blown out by the second air-cooling component 520 and passing through the blowing channel 312. The second support 510 allows for adjustment of the height of the second air-cooling component 520 and the blowing angle on the workpiece, thus improving the cooling efficiency of the workpiece.
[0046] In some embodiments, there are multiple second air-cooling components 520, and the turntable has multiple conveying stations arranged at intervals around its own axis. Each second air-cooling component 520 can be arranged in a one-to-one correspondence with each conveying station. Specifically, when a test station corresponds to any one of the conveying stations, each conveying station corresponds one-to-one with each second air-cooling component 520. This arrangement allows each workpiece to pass through multiple second air-cooling components 520 during its movement, thereby achieving multiple cooling cycles and improving cooling efficiency.
[0047] Specifically, the second air-cooling component 520 is a fan; the fan has a large blowing area, which makes it easy for the cooling gas to cover the entire workpiece, thereby improving cooling efficiency. In some embodiments, the conveying assembly further includes a conveying drive component, which is disposed on the frame 100 and its output end is connected to the turntable drive.
[0048] To ensure effective cooling of the workpiece, in some embodiments, the testing device includes a temperature detection element 600, which is located in the first air-cooling assembly 400 and used to detect the temperature of the workpiece at the conveying station. Both the temperature detection element 600 and the first air-cooling assembly 420 are communicatively connected to a controller. This allows the temperature detection element 600 to work with the controller to control the airflow speed of the first air-cooling assembly 420 after detecting the workpiece temperature, thereby achieving appropriate cooling of the workpiece. Specifically, when the workpiece temperature is high, the first air-cooling assembly 420 cools the workpiece with a higher airflow speed; when the workpiece temperature is low, the first air-cooling assembly 420 cools the workpiece with a lower airflow speed, ensuring that the workpiece reaches a preset temperature when it moves to the testing station.
[0049] Specifically, the testing device includes several temperature sensors 600, and the conveyor 310 is a turntable rotatably mounted on the frame 100, with several conveying stations spaced apart around its own axis. Each temperature sensor 600 is arranged around the axis of the turntable and corresponds one-to-one with each conveying station. This arrangement allows the workpiece to be tested multiple times during its movement, thereby continuously adjusting the cooling gas blown out by the subsequent first air-cooling component 420, thus achieving precise temperature control of the workpiece.
[0050] Of course, in other embodiments, the controller is also connected to the second air-cooling component 520 to synchronously control the second air-cooling component 520, so as to more accurately control the cooling rate of the workpiece, thereby making the temperature of the workpiece when it moves to the detection station as consistent as possible with the preset temperature.
[0051] The testing assembly 200 also includes a lifting drive 220, which is mounted on the frame 100. The test piece 210 is slidably mounted on the frame 100 in a vertical direction and is connected to the output end of the lifting drive 220 to drive the test piece 210 closer to or further away from the testing station. This arrangement allows the test piece 210 to be controlled to descend during testing, thus approaching the testing station for easier workpiece inspection; and after testing, the test piece 210 is controlled to rise, thus moving away from the workpiece to avoid interference and ensure the workpiece smoothly enters the next station.
[0052] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.
Claims
1. A testing device, characterized in that The test device comprises: a rack (100) having a feeding station and a testing station; a testing assembly (200) comprising a testing member (210) arranged at the testing station and used for testing a workpiece; a conveying assembly comprising a conveying member (310) having a conveying station used for carrying a workpiece, the conveying member (310) being movably arranged at the rack (100) to move the workpiece on the conveying station from the feeding station to the testing station; a first air cooling assembly (400) located on a conveying path of the conveying station, so that cooling gas blown by the first air cooling assembly (400) can cover at least part of the workpiece on the conveying station.
2. The test device of claim 1, wherein, The conveying member (310) is a rotary disc which is rotationally arranged at the rack (100) to drive the conveying station to cyclically transfer between the feeding station and the testing station.
3. The test device of claim 2, wherein, The first air cooling assembly (400) comprises a first support (410) and a first air cooling member (420), the first air cooling member (420) being mounted on the rack (100) by the first support (410) and located above the rotary disc and capable of blowing cooling gas to the workpiece on the conveying station.
4. The test device of claim 3, wherein, The first air cooling member (420) comprises an air knife located above the rotary disc and having an air outlet facing the rotary disc; and / or A mounting channel (311) is arranged at a middle portion of the rotary disc, the first support (410) comprises a support rod (411) and a support disc (412) arranged at one end of the support rod (411), the support rod (411) is arranged through the mounting channel (311) and the other end is fixedly connected with the rack (100); the first air cooling assembly (400) comprises a plurality of first air cooling members (420) located at the outer periphery of the support rod (411) and uniformly distributed on the support disc (412), the conveying station has a plurality of conveying stations, and each first air cooling member (420) can be arranged in one-to-one correspondence with each conveying station.
5. The test device according to any one of claims 1 to 4, characterized in that The test device further comprises a second air cooling assembly (500) arranged at the rack (100) and blowing cooling gas to the workpiece on the conveying station in a direction different from the first air cooling assembly (400).
6. The test device of claim 5, wherein, The conveying member (310) is a rotary disc which is rotationally arranged at the rack (100), the rotary disc is provided with a blowing channel (312) at the conveying station, the second air cooling assembly (500) comprises a second support (510) and a second air cooling member (520), the second support (510) is arranged at the rack (100) and located below the workpiece, and the second air cooling member (520) is arranged at the second support (510) and has an air outlet in communication with the blowing channel (312) when the conveying station moves above the second air cooling member (520).
7. The test device of claim 6, wherein, The second air cooling member (520) is a fan; and / or The second air cooling member (520) has a plurality of, the rotary disc has a plurality of conveying stations arranged at intervals around its own axis, and each of the second air cooling members (520) is arranged in one-to-one correspondence with each of the conveying stations.
8. The test device of claim 1, wherein, The testing device comprises a temperature detection member (600), which is arranged on the first air cooling assembly (400) and is used for detecting the temperature of the workpiece in the conveying station.
9. The test device of claim 8, wherein, The testing device comprises a plurality of temperature detection members (600), the conveying member (310) is a rotary disc rotatably arranged on the rack (100) and has a plurality of conveying stations arranged at intervals around its own axis, each of the temperature detection members (600) is arranged on the circumferential side of the rotary disc axis and can be arranged in one-to-one correspondence with each of the conveying stations.
10. The test device of any one of claims 1-4, wherein, The testing assembly (200) further comprises a lifting driving member (220) arranged on the rack (100), the testing member (210) is slidingly arranged on the rack (100) in the vertical direction and is in transmission connection with the output end of the lifting driving member (220) to drive the testing member (210) to approach or move away from the detection station.