Spacing-adjustable multi-stage light splitting system

Abstract

The utility model provides a spacing-adjustable multi-stage light splitting system, comprising a light splitting laser which comprises a laser output end capable of outputting at least two laser beams used for emitting laser beams; each laser output end is correspondingly provided with at least one light splitting assembly; the light splitting assembly sequentially comprises a first light splitting reflector, a half-wave mirror, a second-stage light splitter, a reflection adjustment module, a third-stage light splitter, a beam expander, a fourth-stage light splitter and a light beam shaper; each light splitting assembly is correspondingly provided with at least one laser output unit; and a light splitting distance precise adjustment platform is arranged between the third light splitting reflector and the third-stage light splitter so as to adjust the light splitting distance. According to the utility model, multi-stage light splitting and multi-path laser output can be realized, accurate adjustment of the laser splitting distance can be realized, and the stability, efficiency, precision and yield of production are improved.

Description

Technical Field

[0001] This utility model relates to the field of laser processing technology, and in particular to a multi-level beam splitting system with adjustable spacing. Background Technology

[0002] With the continuous development of short-pulse and ultrashort-pulse lasers, the ongoing upgrades in large-format laser processing technology, and the changing market demands, ultrafast laser technology is finding increasing applications in semiconductors, new displays, and photovoltaics to achieve higher processing efficiency. These new demands are placing more stringent requirements on the precision and efficiency of laser processing. Stimulated by strong market demand, ultrafast laser technology continues to achieve new breakthroughs and has rapidly become a key development focus for the industry.

[0003] Existing laser processing devices have the following drawbacks:

[0004] 1. Most of them use single-beam laser processing, which has low processing efficiency and makes it difficult to achieve multi-stage beam splitting.

[0005] 2. When using multi-beam laser processing, the laser beam splitting distance is difficult to adjust precisely, resulting in low adjustment accuracy. Utility Model Content

[0006] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a multi-level beam splitting system with adjustable spacing, which can realize multi-level beam splitting and multi-path laser output, and can achieve precise adjustment of the laser beam splitting spacing, thereby improving the stability, efficiency, accuracy and yield of production.

[0007] The embodiments of this utility model are achieved through the following technical solutions:

[0008] A multi-stage beam splitting system with adjustable spacing, comprising:

[0009] A beam splitter laser, the beam splitter laser including laser output terminals capable of outputting at least two laser output terminals for emitting laser beams;

[0010] At least one beam splitter is provided for each of the laser output terminals;

[0011] The beam splitting assembly includes, in sequence, a first beam splitting mirror, a half-wave mirror, a second-stage beam splitter, a reflection adjustment module, a third-stage beam splitter, a beam expander, a fourth-stage beam splitter, and a beam shaper.

[0012] Each of the beam-splitting components is provided with at least one laser output unit;

[0013] The reflection adjustment module is equipped with a precision beam splitting distance adjustment platform to adjust the beam splitting distance.

[0014] According to a preferred embodiment, the reflection adjustment module includes a second beam-splitting mirror, a third beam-splitting mirror, and a fourth beam-splitting mirror;

[0015] The beam splitting spacing precision adjustment platform is located between the third beam splitting reflector and the third-stage beam splitter.

[0016] According to a preferred embodiment, the laser output unit includes a galvanometer and a field mirror;

[0017] It also includes a spectral system temperature controller and an online power monitoring energy feedback device.

[0018] According to a preferred embodiment, the system further includes a beam splitting heat dissipation unit disposed on one side of the beam splitting laser.

[0019] According to a preferred embodiment, the processing wavelength range of the beam splitter is 266-106400nm.

[0020] According to a preferred embodiment, the beam expander is a variable beam expander / contractor used to expand or contract the laser beam.

[0021] According to a preferred embodiment, the variable beam expander / contractor has an adjustment unit for adjusting the divergence angle.

[0022] According to a preferred embodiment, the beam splitting spacing precision adjustment platform includes a first beam splitting adjustment component with a rotatable and adjustable reflector and a second beam splitting adjustment component with a rotatable and adjustable reflector.

[0023] According to a preferred embodiment, the system further includes a multi-stage beam splitting system housing, with an optical cavity inside the housing, and all beam splitting components are disposed within the optical cavity.

[0024] According to a preferred embodiment, the first beam splitting adjustment assembly includes a first adjusting mirror, a first motor, and a first adjusting base. The first motor is connected to the first adjusting base, and the first adjusting base is used to cause the first adjusting mirror to rotate.

[0025] The second beam splitting adjustment assembly includes a second adjusting mirror, a second motor, and a second adjusting base. The second motor is connected to the second adjusting base, and the second adjusting base is used to cause the second adjusting mirror to rotate.

[0026] The technical solution of this utility model embodiment has at least the following advantages and beneficial effects:

[0027] This invention features a multi-stage beam splitter, enabling multi-stage beam splitting and multi-path laser output, significantly improving laser processing efficiency. It includes a first beam splitter mirror, a reflection adjustment module (i.e., a second beam splitter mirror, a third beam splitter mirror, and a fourth beam splitter mirror), allowing for precise adjustment of the laser beam splitting distance, thus improving production stability, efficiency, accuracy, and yield. Furthermore, a precision beam splitting distance adjustment platform is included to further enhance the accuracy of laser beam splitting distance adjustment. Attached Figure Description

[0028] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 A schematic diagram illustrating the structural principle of the adjustable-spacing multi-stage beam splitting system provided in this embodiment of the utility model;

[0030] Figure 2 A side view of the adjustable-spacing multi-level beam splitting system provided in this embodiment of the utility model;

[0031] Figure 3 A three-dimensional structural schematic diagram of the adjustable-spacing multi-level beam splitting system provided in the embodiments of this utility model;

[0032] Figure 4 A schematic diagram of the structure of the beam splitting spacing precision adjustment platform provided in this embodiment of the utility model.

[0033] Icons: 1. Beam splitter; 2. First beam splitter mirror; 3. Half-wave mirror; 4. Second-stage beam splitter; 5. Second beam splitter mirror; 6. Third beam splitter mirror; 7. Fourth beam splitter mirror; 8. Third-stage beam splitter; 9. Beam expander mirror; 10. Fourth-stage beam splitter and beam shaper; 11. Galvanometer mirror; 12. Field mirror; 13. Beam splitter system temperature controller; 14. Online power detection energy feedback unit; 15. Beam splitter heat dissipation unit; 16. Multi-stage beam splitter system enclosure; 17. First adjusting mirror; 18. First adjusting base; 19. Second adjusting mirror; 20. Second adjusting base; 21. Precision adjustment platform for beam splitting distance. Detailed Implementation

[0034] To better understand and implement this invention, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings.

[0035] In the description of this utility model, it should be noted that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0036] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0037] Example

[0038] Please refer to Figures 1 to 4 An adjustable-spacing multi-stage beam splitting system includes: a beam splitter 1, which has at least two laser output ends capable of outputting laser beams; each laser output end is provided with at least one beam splitting component; the beam splitting component sequentially includes a first beam splitting mirror 2, a half-wave mirror 3, a second-stage beam splitter 4, a reflection adjustment module, a third-stage beam splitter 8, a beam expander 9, a fourth-stage beam splitter, and a beam shaper 10; each beam splitting component is provided with at least one laser output unit; the reflection adjustment module is provided with a beam splitting spacing precision adjustment platform 21 to adjust the beam splitting spacing.

[0039] Optionally, the reflection adjustment module includes a second beam-splitting mirror 5, a third beam-splitting mirror 6, and a fourth beam-splitting mirror 7;

[0040] The beam splitting spacing precision adjustment platform 21 is located between the third beam splitting mirror 6 and the third-stage beam splitter 8.

[0041] Optionally, the laser output unit includes a galvanometer 11 and a field mirror 12;

[0042] It also includes a spectral system temperature controller 13 and an online power monitoring energy feedback device.

[0043] Optionally, it also includes a beam splitting heat dissipation unit 15, which is disposed on one side of the beam splitting laser 1.

[0044] Optionally, the processing wavelength range of the beam splitter is 266-106400nm.

[0045] Optionally, the beam expander 9 is a variable beam expander / contractor used to expand or contract the laser beam.

[0046] Optionally, the variable beam expander / contractor has an adjustment unit for adjusting the divergence angle.

[0047] Optionally, the beam splitting spacing precision adjustment platform 21 includes a first beam splitting adjustment assembly with a rotatable and adjustable reflector and a second beam splitting adjustment assembly with a rotatable and adjustable reflector.

[0048] Optionally, it also includes a multi-stage beam splitting system housing 16, which has an optical cavity inside, and the beam splitting components are all disposed inside the optical cavity.

[0049] Optionally, the first beam splitting adjustment assembly includes a first adjusting mirror 17, a first motor, and a first adjusting base 18. The first motor is connected to the first adjusting base 18, and the first adjusting base 18 is used to cause the first adjusting mirror 17 to rotate.

[0050] The second beam splitting adjustment assembly includes a second adjustment reflector 19, a second motor, and a second adjustment base 20. The second motor is connected to the second adjustment base 20, and the second adjustment base 20 is used to cause the second adjustment reflector 19 to rotate.

[0051] The working principle of this utility model:

[0052] In this embodiment, the beam splitter 1 is equipped with two laser units, that is, each laser unit is equipped with a laser output port, and each laser output port corresponds to a beam splitting component. The laser beam output from the laser output port is output from the laser output unit after passing through the beam splitting component. Each beam splitting component corresponds to a laser output unit. Specifically, after the laser beam is emitted, it is emitted from the laser output port to the first reflector and then transmitted to the half-wave plate. The above is mainly used to control and change the polarization state of the laser beam. Then, it is split by the second beam splitter 4 (the second beam splitter selects the second beam splitter) to form two laser beams. One of the beams is split by the third beam splitter 8 to form two laser beams. They are synchronously transmitted to the beam expander 9. The laser beam through the beam expander 9 passes through the fourth beam splitter and the beam shaper 10 to form two laser beams. Finally, the laser beam output from one laser output port passes through the beam splitting component to form four laser beams, which are transmitted to the laser output unit for output. The four laser beams are focused onto the working surface by the galvanometer 11 and the field mirror 12.

[0053] Another laser beam is split by a second-stage beam splitter 4 (second-stage beam splitter mirror). This laser beam is reflected and transmitted sequentially through a second beam splitter mirror 5, a third beam splitter mirror 6, and a fourth beam splitter mirror 7. The fourth beam splitter mirror 7 is mounted on a precision beam splitting adjustment platform 21. After the beam splitting distance is precisely adjusted, the single laser beam reflected by the fourth beam splitter mirror 7 is transmitted to a third-stage beam splitter 8 for splitting into two laser beams. These two beams are then simultaneously transmitted to a beam expander 9. The two laser beams passing through the beam expander 9 are then split by a fourth-stage beam splitter and a beam shaper 10 to form four laser beams.

[0054] This embodiment can realize multiple laser beams, and this solution is compatible with one to eight laser beam outputs. That is, one laser unit can output up to eight laser beams for processing.

[0055] A unit consists of a four-stage beam splitter and a beam shaper 10. One side of this unit can shape the beam, while the other side can split the beam. The beam shaper can shape the beam into a circular, square, or stripe beam. The other side can be set to split the beam as needed. This solution uses two-way beam splitting, which can achieve a beam spot size of 150*150um. This device can be used to operate and process normally in the 266-106400nm wavelength band.

[0056] The beam-splitting spacing precision adjustment platform 21 can adjust the beam spacing according to requirements, and can achieve adjustment from μm to mm. This device can be used for normal operation and processing in the 266-106400nm wavelength band.

[0057] The three-stage beam splitter 8 uses an optical diffraction device (DOE) to split the transmitted single laser beam into two laser beams. The beam splitting can be designed according to needs. This device can be used to operate and process normally in the 266-106400nm wavelength range.

[0058] The second beam splitter 5, the third beam splitter 6, and the fourth beam splitter 7 can adjust the horizontal and vertical beam level. By adjusting the position and state of the second beam splitter 5, the third beam splitter 6, and the fourth beam splitter 7, the beam spot is ensured to be parallel to the third beam splitter for beam splitting. A shaping mirror can be installed in the third beam splitter, and the beam enters the beam expander 9 after passing through the shaping mirror. All of the above components can be used to operate and process normally in the 266-106400nm wavelength band.

[0059] Each beam splitter adjusts the beam splitting ratio by changing the spacing between optical components, enabling the output of 36 laser beams instead of two.

[0060] In this embodiment, the beam splitter 1 is equipped with two laser units, and the two laser units can work simultaneously.

[0061] In this embodiment, the beam splitting heat dissipation unit 15 ensures better heat dissipation for the beam splitting component and the beam splitting laser 1, thereby guaranteeing greater stability and consistency of the optical path. A heat sink with inserts can be selected.

[0062] The beam splitting system temperature controller 13 can ensure the temperature of the laser and optical path system, establish an absolutely constant temperature and humidity working environment, and ensure the stability and consistency of the optical path to a greater extent.

[0063] The online power detection energy feedback unit 14 is set on one side of the first beam splitter 2. It can be an online power meter to ensure that the laser output from each laser output port is consistent. It can form a closed loop of power feedback by real-time calibration through the power detected by the power meter and the set power to ensure the consistency and stability of the processing effect.

[0064] The sixth innovation of this system is the use of a half-wave plate after the laser output. A half-wave plate is a key optical element, mainly used to control and change the polarization state of light.

[0065] Changing the polarization direction of light: Half-wave plates can precisely control the polarization direction of light by introducing a phase difference between orthogonal polarization components. Adjusting the polarization state of laser output: In semiconductor lasers, half-wave plates are used to adjust the direction of linearly polarized light to ensure its compatibility with subsequent optical components.

[0066] In this embodiment, a half-wave plate can be used to control and compensate for the polarization state, reduce the depolarization effect, and improve transmission efficiency.

[0067] In this embodiment, the beam-splitting spacing precision adjustment platform 21 can be precisely adjusted by electronic control, achieving micrometer-level adjustments. The beam spacing can be adjusted according to requirements, from micrometer to millimeter. This device can be used for normal operation and processing in the 266-106400nm wavelength band.

[0068] This embodiment can be used for laser processing of crystalline silicon solar cells and perovskite solar cells. It can be used for PERC, TOPCON, HJT, XBC and perovskite solar cells. The processing size is not limited to half cells and full cells. The laser process includes, but is not limited to, laser film opening, laser oxidation, laser etching, laser direct writing, laser SE, laser sintering, laser windowing, laser thinning, laser repair, laser heating, laser annealing, laser transfer, laser passivation, laser crystallization, laser non-destructive cutting and other laser processes.

[0069] In this embodiment, the beam expander 9 is a variable beam expander / contractor; it is mainly used to adjust the diameter of the laser beam, thereby expanding and constricting the laser beam. This optical element is crucial in laser systems and is widely used in laser micromachining. Specifically: it can adjust the laser beam diameter; the beam reducer can shrink the diameter of the laser beam, which is very useful in some applications requiring small spot sizes; it can control the beam divergence angle: by adjusting the parameters of the beam reducer, the divergence angle of the laser beam can be controlled, thereby affecting the beam's transmission characteristics and focusing effect; it can adapt to different wavelengths; the beam reducer design is suitable for lasers of different wavelengths, such as ultraviolet, visible, and near-infrared spectral ranges, meeting the needs of different application scenarios; it has high pointing stability; it adopts a special mechanical design to ensure the pointing stability of the laser beam when adjusting the beam diameter, which is crucial for high-precision laser processing; it can expand and constrict the beam with high performance; all optical elements are made of fused silica with a high damage threshold coating, which can withstand high-power lasers and ensure high performance in the beam expansion and constriction process; and it has an adjustable divergence angle: some beam reducer designs allow adjustment of the divergence angle to adapt to specific laser processing requirements.

[0070] This embodiment greatly improves the efficiency of laser processing while ensuring the overall product yield and stability.

[0071] In this embodiment, the rotatable and adjustable reflector refers to the first adjustable reflector 17 or the second adjustable reflector 19, which is used to process the substrate / battery. When the number of lines being processed is odd, one of the laser beams can be cut off by the beam cutter. When the number of lines is even, the beam cutter function of the beam cutter does not need to be activated.

[0072] Specifically, the power output end of the first motor is connected to the input end of the first adjusting base 18, the output end of the first adjusting base 18 is connected to the first adjusting reflector 17, the power output end of the second motor is connected to the input end of the second adjusting base 20, and the output end of the second adjusting base 20 is connected to the second adjusting reflector 19. In this embodiment, the transmission of reflected light (second beam) can be controlled by adjusting the angle of the high-precision motor (first motor) to rotate the first adjusting reflector 17, and then the angle of reflected light (second beam) can be controlled by adjusting the high-precision motor (second motor) to rotate the second adjusting reflector 19. Finally, the light is transmitted to the next node through the second adjusting reflector 19. In this embodiment, the next node of the beam splitting spacing precision adjustment platform 21 is the three-stage beam splitter 8. The first motor and the second motor can be precisely controlled at the μm level through software. The rotation angle can be as low as 0.01 degrees, and the corresponding spacing can be adjusted from 10 μm to 10 mm. Figure 4 As shown, the arrows indicate the transmission directions of the laser beam, the first beam, and the second beam.

[0073] The technical means disclosed in this utility model are not limited to those disclosed in the above embodiments, but also include technical solutions composed of any combination of the above technical features. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model, and these improvements and modifications are also considered within the scope of protection of this utility model.

Claims

1. An adjustable pitch multi-stage optical system, characterized by, It comprises: A light splitting laser, which comprises at least two laser output ends for emitting laser beams; At least one light splitting component is arranged for each laser output end; The light splitting component comprises a first light splitting mirror, a half-wave mirror, a secondary light splitter, a reflection adjustment module, a tertiary light splitter, a beam expander, a quaternary light splitter and a beam shaper in sequence; At least one laser output unit is arranged for each light splitting component; The reflection adjustment module is provided with a light splitting distance precision adjustment platform to adjust the light splitting distance.

2. The adjustable distance multi-stage light splitting system according to claim 1, wherein The reflection adjustment module comprises a second light splitting mirror, a third light splitting mirror and a fourth light splitting mirror; The light splitting distance precision adjustment platform is arranged between the third light splitting mirror and the tertiary light splitter.

3. The adjustable distance multi-stage light splitting system according to claim 2, wherein The laser output unit comprises a galvanometer and a field lens; It further comprises a light splitting system temperature controller and an online power monitoring energy feedback device.

4. The adjustable distance multi-stage light splitting system according to claim 2, wherein It further comprises a light splitting heat dissipation unit arranged on one side of the light splitting laser.

5. The adjustable distance multi-stage light splitting system according to claim 1, wherein The machining wave band range of the light splitting component is 266-106400nm.

6. The adjustable distance multi-stage light splitting system according to claim 1, wherein The beam expander is a variable beam expander and beam reducer for expanding or reducing the laser beam.

7. The adjustable distance multi-stage light splitting system according to claim 6, wherein The variable beam expander and beam reducer has an adjustment unit for adjusting the divergence angle.

8. The adjustable distance multi-stage light splitting system according to claim 1, wherein The light splitting distance precision adjustment platform comprises a first light splitting adjustment component with a rotatable adjusting mirror and a second light splitting adjustment component with a rotatable adjusting mirror.

9. The adjustable distance multi-stage light splitting system according to claim 2, wherein It further comprises a multi-stage light splitting system cover, and an optical cavity is arranged in the cover, and the light splitting components are arranged in the optical cavity.

10. The adjustable distance multi-stage light splitting system according to claim 8, wherein The first light splitting adjustment component comprises a first adjusting mirror, a first motor and a first adjusting base, the first motor is connected with the first adjusting base, and the first adjusting base is used to drive the first adjusting mirror to rotate; The second light splitting adjustment component comprises a second adjusting mirror, a second motor and a second adjusting base, the second motor is connected with the second adjusting base, and the second adjusting base is used to drive the second adjusting mirror to rotate.

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