Automatic feeding and discharging mechanism

Abstract

The utility model discloses an automatic feeding and discharging mechanism which comprises a double-mover linear motor, a first material taking assembly, a second material taking assembly and an anti-collision assembly, the double-mover linear motor comprises a first mover and a second mover, the first material taking assembly is connected to the first mover, the second material taking assembly is connected to the second mover, and the anti-collision assembly is connected to the first mover. The anti-collision assembly is arranged between the first material taking assembly and the second material taking assembly. The first material taking assembly and the second material taking assembly can carry out feeding and discharging on products correspondingly, that is, the feeding process and the automatic discharging process of the products can be carried out at the same time, so that the waiting time of feeding and discharging is shortened, and the machining efficiency of the products is improved; and moreover, under the condition that the first material taking assembly and the second material taking assembly move independently, collision can be avoided through the anti-collision assembly, normal proceeding of the feeding process and the discharging process is guaranteed, and the working reliability of the automatic feeding and discharging mechanism is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to an automatic loading and unloading mechanism. Background Technology

[0002] Currently, in the semiconductor ingot processing, ingots can be loaded and unloaded using robotic arms. However, after ingot processing is complete, the processed ingots must first be unloaded by a robotic arm, and then the ingots to be processed must be loaded by another robotic arm. The loading and unloading processes cannot be performed simultaneously, resulting in long waiting times and thus affecting the ingot processing efficiency. Utility Model Content

[0003] In view of the shortcomings of the prior art, this application provides an automatic loading and unloading mechanism that can simultaneously load and unload products, thereby improving product processing efficiency.

[0004] The following technical solution is adopted in this embodiment:

[0005] An automatic loading and unloading mechanism includes:

[0006] A double-moving linear motor, comprising a first mover and a second mover;

[0007] The first material handling component is connected to the first moving part;

[0008] The second material handling assembly is connected to the second moving part; and

[0009] An anti-collision component is disposed between the first mover and the second mover to prevent the first mover from contacting the second mover; or, it is disposed between the first material handling component and the second material handling component to prevent the first material handling component from contacting the second material handling component.

[0010] Furthermore, in the automatic loading and unloading mechanism, the anti-collision component includes an anti-collision sensor and an anti-collision sensing plate. The anti-collision sensor is disposed on the first moving part, and the anti-collision sensing plate is disposed on the second moving part; or, the anti-collision sensor is disposed on the first material handling component, and the anti-collision sensing plate is disposed on the second material handling component.

[0011] Furthermore, in the automatic loading and unloading mechanism, the anti-collision component includes a limiting member, which is disposed on the first picking component / second picking component; or, the limiting member is disposed on the first moving part / second picking part.

[0012] Furthermore, in the automatic loading and unloading mechanism, the anti-collision component also includes a buffer member, which is disposed at the end of the limiting member.

[0013] Furthermore, the automatic loading and unloading mechanism also includes one or more limit sensors, which are mounted on the dual-moving linear motor. Both the first and second moving parts are equipped with limit sensing plates.

[0014] Furthermore, the automatic loading and unloading mechanism also includes a first driving component and a second driving component. The first driving component is connected to the first moving part, the first picking component is disposed at the driving end of the first driving component, the second driving component is connected to the second moving part, and the second picking component is disposed at the driving end of the second driving component.

[0015] Furthermore, in the automatic loading and unloading mechanism, the first picking component and / or the second picking component includes a bracket, multiple grippers, and a picking drive component. The bracket is disposed at the driving end of the first drive component and / or the second drive component. The multiple grippers are circumferentially arranged on the bracket, and each gripper is slidably disposed on the bracket along the radial direction of the circumference. The picking drive component is disposed on the bracket and is used to drive the multiple grippers to move simultaneously toward / away from the center of the circumference.

[0016] Furthermore, the automatic loading and unloading mechanism also includes multiple connecting rods and a transmission component rotatably mounted on the bracket. The multiple connecting rods correspond one-to-one with multiple grippers. One end of the multiple connecting rods is arranged circumferentially and rotatably connected to the transmission component. The center of the circumference is the rotation center of the transmission component. The other end of the multiple connecting rods is rotatably connected to the corresponding gripper. The material picking drive assembly is used to drive the transmission component to rotate or to drive any gripper to move.

[0017] Furthermore, in the automatic loading and unloading mechanism, at least one of the grippers includes a moving part, a clamping part, and a supporting part connected in sequence. The moving part is slidably disposed on the bracket, and the clamping part and the supporting part form a preset angle.

[0018] Furthermore, in the automatic loading and unloading mechanism, the gripper also includes a sliding part and an elastic element. The sliding part is slidably disposed on the bracket along the radial direction of the circumference, and the moving part is slidably disposed on the sliding part along the radial direction of the circumference. The two ends of the elastic element are respectively connected to / abut against the sliding part and the moving part.

[0019] Compared to existing technologies, the automatic loading and unloading mechanism provided in this application allows the first and second picking components to load and unload products respectively, meaning that the loading and unloading processes can be performed simultaneously, reducing waiting time and improving processing efficiency. Furthermore, when the first and second picking components move independently, an anti-collision component can prevent collisions, ensuring the normal operation of the loading and unloading processes and improving the reliability of the automatic loading and unloading mechanism. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of a specific embodiment of the automatic loading and unloading mechanism provided in this application.

[0021] Figure 2 for Figure 1 The diagram shows the structure of the automatic loading and unloading mechanism from another angle.

[0022] Figure 3 for Figure 1 The diagram shows the structure of the first drive component and the first material handling component in the automatic loading and unloading mechanism.

[0023] Figure 4 for Figure 1 The diagram shows the structure of the first material handling component in the automatic loading and unloading mechanism.

[0024] Figure 5 for Figure 4 The diagram shows the structure of the first material handling component removing the material handling drive component.

[0025] Figure 6 for Figure 4 The diagram shows the structure of the gripper in the first material handling assembly.

[0026] Among them, 1. Double-acting linear motor; 11. First actuator; 12. Second actuator; 2. First material handling assembly; 21. Material handling drive assembly; 211. Motor; 212. Lead screw; 213. Slider; 214. Mounting base; 215. Column; 22. Bracket; 23. Gripper; 231. Moving part; 232. Clamping part; 233. Supporting part; 234. Sliding part; 24. Connecting rod; 25. Transmission component; 26. First sensor; 27. First sensing plate; 28. Second sensor; 29. ​​Second sensing plate; 3. Second material handling assembly; 41. Anti-collision sensor; 42. Anti-collision sensing plate; 43. Limiting component; 44. Buffer component; 5. First drive assembly; 6. Second drive assembly; 100. Product. Detailed Implementation

[0027] To make the objectives, technical solutions, and effects of this application clearer and more explicit, the following detailed description of this application is provided with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining this application and are not intended to limit this application. Unless further described, elements, structures, and features in one embodiment may be advantageously combined with other embodiments.

[0028] It should be noted that when a metastructure is referred to as "fixed to" or "set on" another metastructure, it can be directly on or indirectly on that other metastructure. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated.

[0029] The terms “length”, “width”, “upper”, “lower”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inner”, “outer”, etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation.

[0030] Please see Figure 1 The automatic loading and unloading mechanism provided in this application includes a dual-movement linear motor 1, a first material picking component 2, a second material picking component 3, and an anti-collision component. The dual-movement linear motor 1 includes a first mover 11 and a second mover 12. The first material picking component 2 is connected to the first mover 11, the second material picking component 3 is connected to the second mover 12, and the anti-collision component is disposed between the first material picking component 2 and the second material picking component 3.

[0031] The first mover 11 and the second mover 12 can move independently on the motion guide rail of the dual-motor linear motor 1, so as to drive the first material handling assembly 2 and the second material handling assembly 3 to move to the required positions respectively. The first material handling assembly 2 and the second material handling assembly 3 can handle different products 100 respectively, thereby completing the loading and unloading of different products 100.

[0032] For example, product 100 is a crystal ingot. During the crystal ingot processing, after the crystal ingot on the processing platform is processed, the first material handling component 2 can unload the processed crystal ingot to transport it from the processing platform to the finished product area; at the same time, the second material handling component 3 can load the crystal ingot to be processed to transport it from the raw material area to the processing platform.

[0033] As can be seen, since the automatic loading and unloading processes of the product can be carried out simultaneously, after the handling is completed, the first picking component 2 can immediately return to the unloading waiting position without having to perform the loading step or wait for the loading to be completed; after the loading is completed, the second picking component 3 can immediately return to the loading waiting position without having to perform the unloading step or wait for the unloading to be completed, which greatly saves CT and effectively improves the efficiency of loading and unloading.

[0034] The anti-collision component is used to prevent the first mover 11 from directly contacting the second mover 12, thereby avoiding a collision between the first mover 11 and the second mover 12; or, the anti-collision component is used to prevent the first material handling component 2 from directly contacting the second material handling component 3, thereby avoiding a collision between the first material handling component 2 and the second material handling component 3, ensuring the normal operation of the loading and unloading processes, and improving the working reliability of the automatic loading and unloading mechanism.

[0035] Please see Figure 2 In some embodiments, the anti-collision assembly includes an anti-collision sensor 41 and an anti-collision sensing sheet 42, with the anti-collision sensor 41 disposed on the first mover 11 and the anti-collision sensing sheet 42 disposed on the second mover 12.

[0036] Designers can set the anti-collision sensor 42 to a certain length according to the actual application environment of the automatic loading and unloading mechanism to form a sufficient safety distance. When the first mover 11 and the second mover 12 move relative to each other and approach each other, if the anti-collision sensor 42 extends into the sensing end of the anti-collision sensor 41, it can notify the control system and control the dual-motor linear motor 1 to stop driving, preventing the first mover 11 and the second mover 12 from continuing to approach each other, thereby avoiding a collision between the first mover 11 and the second mover 12.

[0037] Alternatively, the anti-collision sensor 41 can be installed on the first material handling assembly 2, and the anti-collision sensing plate 42 can be installed on the second material handling assembly 3. When the first material handling assembly 2 and the second material handling assembly 3 move relative to each other and approach each other, if the anti-collision sensing plate 42 extends into the sensing end of the anti-collision sensor 41, the control system can be notified and the double-acting linear motor 1 can be controlled to stop driving, preventing the first material handling assembly 2 and the second material handling assembly 3 from continuing to approach each other, thereby avoiding a collision between the first material handling assembly 2 and the second material handling assembly 3.

[0038] Please see Figure 3 In some embodiments, the anti-collision component includes a limiting member 43, which may be disposed on the first mover 11 and oriented toward the second mover 12; of course, the limiting member 43 may also be disposed on the second mover 12 and oriented toward the first mover 11.

[0039] When the first mover 11 and the second mover 12 move relative to each other and approach each other, the limiting member 43 can play a hard limiting role to prevent the first mover 11 and the second mover 12 from continuing to approach each other, thereby avoiding a collision between the first mover 11 and the second mover 12.

[0040] Alternatively, the limiting member 43 can be disposed on the first picking component 2 or the second picking component 3. When the first picking component 2 and the second picking component 3 move relative to each other and approach each other, the limiting member 43 can prevent the first picking component 2 and the second picking component 3 from continuing to approach each other, thereby avoiding a collision between the first picking component 2 and the second picking component 3.

[0041] Furthermore, the anti-collision component may also include a buffer 44, which is disposed at the end of the limiting component 43 to buffer the impact between the limiting component 43 and other moving parts or material picking components during the hard limiting process, thereby improving the reliability of the automatic loading and unloading mechanism.

[0042] The buffer 44 can be directly buffered using structures such as rubber blocks and springs, or it can be buffered using commercially available hydraulic, hydropneumatic, or elastic colloidal buffers.

[0043] In some embodiments, the automatic loading and unloading mechanism further includes one or more limit sensors, which are disposed on the dual-mover linear motor 1, and limit sensing plates are provided on both the first mover 11 and the second mover 12.

[0044] The limit sensor can be set at the limit position of the movement stroke of the first mover 11 and the second mover 12. Through the cooperation of the limit sensor and the limit sensing plate, the double mover linear motor 1 is controlled to stop moving when the movement of the first mover 11 or the second mover 12 reaches the limit position, so as to prevent the movement of the first mover 11 and the second mover 12 from exceeding the stroke.

[0045] In some embodiments, the automatic loading and unloading mechanism further includes a first driving component 5 and a second driving component 6. The first driving component 5 is connected to the first mover 11, the first material picking component 2 is disposed at the driving end of the first driving component 5, the second driving component 6 is connected to the second mover 12, and the second material picking component 3 is disposed at the driving end of the second driving component 6.

[0046] If the driving direction of the dual-actuator linear motor 1 is defined as along the X direction, then the first driving component 5 may include one or more of the Z-axis driving module, Y-axis driving module, and rotary driving module to drive the first material handling component 2 to move along the Z-axis, or move along the Y-axis, or rotate.

[0047] Similarly, the second drive component 6 may also include one or more of a Z-axis drive module, a Y-axis drive module, and a rotary drive module to drive the second material handling component 3 to move along the Z-axis, or move along the Y-axis, or rotate.

[0048] Please see Figure 4 In some embodiments, the first material handling component 2 includes a material handling drive component 21, a support 22 and a plurality of grippers 23. The support 22 is disposed on the drive end of the first drive component 5. The plurality of grippers 23 are arranged circumferentially on the support 22, and each gripper 23 is slidably disposed on the support 22 along the radial direction of the circumference. The material handling drive component 21 is disposed on the support 22 and is used to drive the plurality of grippers 23 to move simultaneously toward / away from the center of the circumference.

[0049] During the clamping process, under the force of multiple grippers 23, the product 100 will reach a certain force balance position. When the products 100 clamped each time have the same shape and size, for example, the products 100 clamped are all cylindrical semiconductor ingots of a certain size, then the force balance position of the product 100 is consistent each time it is clamped, thus completing the positioning of the product 100 during the material handling process and improving the positioning accuracy of the product 100.

[0050] After clamping is completed, the first moving part 11 and the first driving component 5 will move the driving jaws 23 and the clamped product 100 to automatically transport the product 100 to the required position. Then, the material picking driving component 21 will drive the multiple jaws 23 to release the clamps on the product 100, thereby completing the transport process of the product 100. This process does not require the setting of additional centering fixtures to position the product 100, which can reduce positioning costs and effectively improve positioning efficiency.

[0051] Please see Figure 5 The first material handling component 2 may also include multiple connecting rods 24 and a transmission component 25 rotatably mounted on the bracket 22. The multiple connecting rods 24 correspond one-to-one with multiple grippers 23. One end of the multiple connecting rods 24 is arranged in a circle and rotatably connected to the transmission component 25 respectively. The center of the circle is the rotation center of the transmission component 25. The other end of the multiple connecting rods 24 is rotatably connected to the corresponding gripper 23 respectively.

[0052] The material handling drive assembly 21 can directly drive the transmission component 25 to rotate around the rotation center, and drive all the connecting rods 24 to rotate together, thereby applying corresponding pulling or pushing forces to all the grippers 23, so that the grippers 23 move along the set trajectory.

[0053] Alternatively, the material handling drive assembly 21 can drive a certain gripper 23 to move along a set trajectory, thereby driving the transmission component 25 to rotate around the rotation center through the corresponding connecting rod 24, and at the same time driving other grippers 23 to move along the set trajectory through the transmission component 25 and other connecting rods 24.

[0054] Specifically, the material handling drive assembly 21 may include a motor 211 and a lead screw module. The lead screw module consists of a lead screw 212 and a slider 213. The motor 211 is mounted on the bracket 22 and is connected to the lead screw 212 for transmission. The slider 213 is connected to a gripper 23 and is threaded to the lead screw 212.

[0055] When the motor 211 drives the lead screw 212 to rotate, the slider 213 will drive the corresponding gripper 23 to move precisely the required distance, and at the same time drive the other grippers 23 to move along the set trajectory through the transmission component 25 and other connecting rods 24.

[0056] In some embodiments, a plurality of grippers 23 are arranged in a circle with the rotation center of the transmission member 25 as the center, and each link 24 has the same size.

[0057] When the transmission component 25 rotates, each link 24 rotates at the same angle, so that each gripper 23 can not only move synchronously, but also move the same distance, ensuring the positioning effect of centering and clamping the product 100.

[0058] Furthermore, guide members can be provided on the bracket 22 to guide the movement of the grippers 23, ensuring that each gripper 23 slides along the radial direction of the circumference.

[0059] For example, the guide components are a guide rail and a moving block. The guide rail is fixed on the bracket 22, the moving block is installed on the guide rail, and the gripper 23 is connected to the moving block. Through the cooperation of the guide rail and the moving block, the gripper 23 is slidably connected to the bracket 22, and the gripper 23 moves along a set trajectory.

[0060] In some embodiments, the material handling drive assembly 21 further includes a mounting base 214 and a column 215. The column 215 is disposed on the bracket 22, and the mounting base 214 is disposed on the column 215 and located above the transmission member 25. The mounting base 214 is also connected to the drive end of the first drive assembly 5. The material handling drive assembly 21 is disposed on the mounting base 214 and is used to drive a gripper 23 to move radially along the circumference.

[0061] At this time, the first drive assembly 5, the material picking drive assembly 21, the mounting base 214, the transmission component 25, and the bracket 22 are arranged in sequence along the vertical direction, which can effectively utilize the space in the vertical direction and make the structure of the first material picking assembly 2 more compact.

[0062] Specifically, the number of columns 215 can be set to multiple and distributed on the side of the transmission component 25, so that the mounting base 214 is suspended above the transmission component 25. Then, the motor 211 is installed on the mounting base 214, and the rotating shaft of the motor 211 is connected to the lead screw 212 through the coupling. At the same time, the mounting base 214 is provided with a connector, which is connected to the drive end of the first drive component 5 through the connector.

[0063] In some embodiments, the device further includes a first sensor 26 and a first sensing plate 27, wherein the first sensor 26 is disposed on the bracket 22 and the first sensing plate 27 is disposed on the gripper 23 connected to the slider 213.

[0064] The first sensor 26 and the first sensing plate 27 can work together to confirm the position of the gripper 23. Specifically, when the first sensing plate 27 moves with the gripper 23, it passes the sensing end of the first sensor 26. At this time, the material handling drive assembly 21 can be set to stop driving, so that each gripper 23 stops moving, in order to avoid the gripper 23 applying excessive pressure to the product 100 during the gripping process, thereby causing damage to the gripper 23 and the product 100.

[0065] Multiple grippers 23 can be configured with the same or similar structures, or they can be configured with different structures. See also... Figure 6 In some embodiments, one of the grippers 23 may include a moving part 231, a clamping part 232 and a supporting part 233 connected in sequence. The moving part 231 is slidably disposed on the bracket 22, and the clamping part 232 and the supporting part 233 form a preset angle.

[0066] The preset angle formed by the clamping part 232 and the supporting part 233 can be the same as the angle formed by the bottom surface and the side surface of the product 100. For example, when the product 100 is a crystal ingot, the preset angle formed by the clamping part 232 and the supporting part 233 is degrees.

[0067] During the clamping process of product 100, clamping part 232 can be used to apply lateral clamping force to product 100, while supporting part 233 is located below product 100 and plays a supporting role for product 100, ensuring that product 100 will not fall during the clamping process.

[0068] Furthermore, the aforementioned gripper 23 also includes a sliding part 234 and an elastic element (not shown in the figure). The sliding part 234 is slidably disposed on the support 22 along the radial direction of the circumference formed by the plurality of grippers 23, and the moving part 231 is slidably disposed on the sliding part 234 along the radial direction of the circumference formed by the plurality of grippers 23. The two ends of the elastic element are respectively connected to / abut against the sliding part 234 and the moving part 231.

[0069] During the clamping process of product 100, when the clamping part 232 applies a lateral clamping force to product 100, the clamping part 232 is subjected to a reaction force, causing relative sliding between the sliding part 234 and the moving part 231, thereby stretching / compressing the elastic element, causing the elastic element to generate elastic force to prevent relative sliding between the sliding part 234 and the moving part 231, thereby reducing the clamping force applied by the clamping part 232 to product 100, and ultimately achieving the purpose of elastically clamping product 100.

[0070] Furthermore, the first and second components 2 may also include a second sensor 28 and a second sensing plate 29. The second sensor 28 is disposed on the sliding part 234, and the second sensing plate 29 is disposed on the moving part 231. When the second sensing plate 29 moves with the moving part 231, it can pass through the sensing end of the second sensor 28.

[0071] The second sensor 28 and the second sensing plate 29 can cooperate to confirm the position of the moving part 231. Specifically, when the second sensing plate 29 moves with the moving part 231, it passes through the sensing end of the second sensor 28. At this time, the second drive assembly 21 can be set to stop driving, so that each gripper 23 stops moving, in order to avoid the gripper 23 applying excessive pressure to the product 100 during the gripping process, exceeding the maximum elastic gripping limit, thereby causing damage to the gripper 23 and the product 100.

[0072] The second material handling component 3 may adopt the same or similar structure as the first material handling component 2, or it may adopt a different structure, such as picking up the product through a suction cup structure, picking up the product through a claw, etc.

[0073] It is understood that those skilled in the art can make equivalent substitutions or changes based on the technical solution and concept of this application, and all such substitutions or changes should fall within the protection scope of the appended claims.

Claims

1. An automatic loading and unloading mechanism, characterized in that, The application relates to a double-mover linear motor, which comprises a first mover and a second mover. The application also relates to a first material taking assembly connected to the first mover. The application also relates to a second material taking assembly connected to the second mover. The application also relates to an anti-collision assembly arranged between the first mover and the second mover to prevent the first mover from contacting the second mover, or arranged between the first material taking assembly and the second material taking assembly to prevent the first material taking assembly from contacting the second material taking assembly. The anti-collision assembly comprises an anti-collision sensor arranged on the first mover and an anti-collision sensing sheet arranged on the second mover, or the anti-collision sensor arranged on the first material taking assembly and the anti-collision sensing sheet arranged on the second material taking assembly. The anti-collision assembly comprises a limiting piece arranged on the first material taking assembly / the second material taking assembly, or arranged on the first mover / the second mover.

2. The automatic loading and unloading mechanism according to claim 1, characterized in that, The anti-collision assembly further comprises a buffer piece arranged at the end of the limiting piece.

3. The automatic loading and unloading mechanism according to claim 1, characterized in that, The application further comprises one or more limit sensors arranged on the double-mover linear motor, and limit sensing sheets arranged on the first mover and the second mover.

4. The automatic loading and unloading mechanism according to claim 3, characterized in that, The application further comprises a first driving assembly connected to the first mover and a second driving assembly connected to the second mover.

5. The automatic loading and unloading mechanism according to claim 1, characterized in that, The first material taking assembly and / or the second material taking assembly comprises a support arranged at the driving end of the first driving assembly and / or the second driving assembly, a plurality of clamping jaws circumferentially arranged on the support and sliding along the radial direction of the circumference, and a material taking driving assembly arranged on the support and used for driving the plurality of clamping jaws to move towards or away from the center of the circumference.

6. The automatic loading and unloading mechanism according to claim 1, characterized in that, The application further comprises a plurality of connecting rods corresponding to the plurality of clamping jaws, and a transmission piece rotatably arranged on the support, one end of each connecting rod is circumferentially arranged and rotatably connected to the transmission piece, and the other end of each connecting rod is rotatably connected to a corresponding clamping jaw, the material taking driving assembly is used for driving the transmission piece to rotate or driving any clamping jaw to move.

7. The automatic loading and unloading mechanism according to claim 6, characterized in that, At least one clamping jaw comprises a moving part, a clamping part and a supporting part connected in sequence, the moving part is slidingly arranged on the support, and the clamping part and the supporting part form a preset angle.

8. The automatic loading and unloading mechanism according to claim 7, characterized in that, The clamping jaw further comprises a sliding part and an elastic piece, the sliding part is slidingly arranged on the support along the radial direction of the circumference, the moving part is slidingly arranged on the sliding part along the radial direction of the circumference, and the two ends of the elastic piece are connected to or abut against the sliding part and the moving part.

9. The automatic loading and unloading mechanism according to claim 7, characterized in that, ​ 10. The automatic loading and unloading mechanism according to claim 9, characterized in that, ​

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