Baffle device of crucible slewing mechanism

Abstract

The baffle device comprises a rotating mechanism, a supporting column, a connecting rod and a baffle, a rotating air cylinder is arranged in the rotating mechanism, the top of the rotating mechanism is connected with the supporting column, the top of the supporting column is connected with the connecting rod through a locking device, the connecting rod is perpendicular to the supporting column, and the baffle is arranged on the supporting column. The end, away from the supporting column, of the connecting rod is connected with the upper surface of a baffle, dense grids are arranged at the bottom of the baffle and used for enhancing the adsorption effect and preventing adsorbed materials from falling onto the crucible during pre-melting, and before heating is started, the rotating mechanism is controlled by the rotating air cylinder to rotate so that the baffle can move to the position above the crucible body; the materials need to be pre-melted before the crucible is completely heated, the materials with poor uniformity are shielded, and after pre-melting is completed, the rotating mechanism is controlled by the rotating air cylinder to rotate, so that the baffle is moved away from the upper portion of the crucible body, and evaporation is carried out.

Description

Technical Field

[0001] This utility model relates to the field of vacuum evaporation equipment technology, and more specifically, to a baffle device for a crucible rotation mechanism. Background Technology

[0002] In vacuum coating processes, pre-melting of the coating material is a crucial pretreatment step to ensure coating uniformity. During pre-melting, the solid coating material is melted and initially vaporized by heating an evaporation source (such as a crucible) to remove volatile impurities and achieve uniform distribution of the coating material. However, in the initial stage of pre-melting, temperature gradients or material characteristics often lead to coating material splashing and incomplete local vaporization, resulting in an uneven evaporation state. If vapor deposition is performed directly at this point, the splashed particles or unevenly melted coating material will deposit on the substrate surface, causing problems such as film thickness fluctuations and porosity defects, severely affecting the coating quality.

[0003] In traditional processes, a baffle device is usually used to cover the evaporation source during the pre-melting stage to block the uneven evaporation of materials in the initial stage. After the film material is fully melted and the evaporation is stable, the baffle is removed to carry out the formal coating.

[0004] The prior art CN214168113U discloses a crucible baffle mechanism for a vapor deposition machine, and the prior art CN214300326U discloses a magnetohydrodynamic integrated source baffle opening and closing mechanism. Both baffles / shields are thin sheets, and the mating surface between the baffle and the crucible or evaporation source is usually a planar structure. After one metal is vapor deposited, when another metal is vapor deposited, the film material already on the baffle is easy to fall onto the crucible, affecting the vapor deposition effect. Utility Model Content

[0005] In view of this, in order to solve the problem that existing baffles / shiels are all thin sheets, and the mating surface between the baffle and the crucible or evaporation source is usually a planar structure, when depositing one metal and continuing to deposit another metal, the film material on the baffle is easy to fall onto the crucible, affecting the evaporation effect, this utility model proposes a baffle device for a crucible rotation mechanism. By setting a grid to enhance the adsorption effect and setting a folded edge reinforcement structure on the edge of the baffle, it can prevent small particles or vapors from escaping from the edge during the pre-melting process.

[0006] A baffle device for a crucible rotation mechanism 3 is provided. The crucible rotation mechanism 3 is mounted on the bottom plate 10 of the cavity of a vacuum evaporation machine. The crucible rotation mechanism 3 includes an electron gun device 1, a crucible body 2, and a rotation mechanism 3. The crucible body 2 is located at the top of the rotation mechanism 3, and the electron gun device 1 is located on one side of the crucible body 2. The rotation mechanism 3 drives the crucible body 2 to rotate. After being redirected by a magnetic field, the electron gun device 1 emits an electron beam to bombard and heat the film material inside the crucible. The feature is that a baffle device 4 is provided above the crucible body 2. The baffle device 4 includes a rotating mechanism 5, a support column 6, a connecting rod 7, and a baffle 8. A rotating cylinder 51 is provided inside the rotating mechanism 5. The support column 6 is connected to the top of the support column 6 via a locking device 9. The connecting rod 7 is perpendicular to the support column 6. The end of the connecting rod 7 away from the support column 6 is connected to the upper surface of the baffle 8. The bottom of the baffle 8 is provided with a densely distributed mesh 81 to enhance the adsorption effect and prevent the adsorbed material from falling onto the crucible during pre-melting. Before heating begins, the rotating mechanism 5 is rotated by the rotating cylinder 51, thereby moving the baffle 8 above the crucible body 2. Before the crucible is fully heated, the material needs to be pre-melted to cover the part of the material with poor uniformity. After pre-melting, the rotating mechanism 5 is rotated by the rotating cylinder 51, thereby moving the baffle 8 away from the crucible body 2 for vapor deposition.

[0007] Furthermore, the mesh 81 is made of stainless steel, and the gap of the mesh 81 is adjusted according to the size of the film material dust and the distance between the evaporation source and the baffle 8.

[0008] Furthermore, the mesh 81 is welded to the baffle 8.

[0009] Furthermore, the edge of the baffle 8 extends downward with a folded edge 82 to prevent small particles or vapor from escaping from the edge during the pre-melting process, while also strengthening the structural strength of the baffle 8.

[0010] Furthermore, the crucible body 2 is provided with a ring of holes 22, and the extension line of the inner wall of the holes 22 extending outward is the maximum evaporation angle. The diameter of the baffle 8 is larger than the extension line of the inner wall of the holes 22 extending outward, thereby ensuring that the material will not be evaporated outside the baffle 8 during pre-melting.

[0011] Furthermore, the rotating mechanism 5 includes a rotating cylinder 51, a coupling 52, and a rotating shaft 53. The bottom of the coupling 52 is connected to the rotating cylinder 51, and the top of the coupling 52 is rotatably connected to the bottom of the rotating shaft 53. The rotating cylinder 51 controls the rotating shaft 53 to rotate through the coupling 52, thereby causing the baffle 8 to rotate left and right.

[0012] Furthermore, a bearing base 55 is sleeved on the outer side of the rotating shaft 53, and the bearing base 55 is connected to the bottom of the base plate 10, so that the baffle device 4 is connected to the base plate 10. A mounting seat 54 extends outward from the top of the rotating shaft 53, and the lower surface edge of the mounting seat 54 is engaged with the upper surface of the bearing base 55. A ball bearing 56 is sleeved between the rotating shaft 53 and the bearing base 55 for the rotating shaft 53 to rotate.

[0013] Furthermore, a flange seat 57 is provided between the bearing base 55 and the bearing base 55, and the coupling 52 is placed inside the flange seat 57 to protect the coupling 52 and support the bearing base 55.

[0014] Furthermore, the bottom of the support column 6 is provided with a support column seat 61, which is connected to the bearing base 55 by bolts.

[0015] Furthermore, the locking device 9 is located on the top of the support column 6. The locking device 9 includes a fixing block 91, a locking block 92, and a fixing frame 93. The fixing frame 93 is locked to the locking block 92, and the fixing frame 93 and the locking block 92 lock the support column 6 inside.

[0016] Furthermore, the top of the fixing frame 93 is provided with a groove 931, and the fixing block 91 is disposed in the groove 931 for limiting the fixing block 91.

[0017] Furthermore, the top of one side of the fixing block 91 is connected to one end of the connecting rod 7, and the fixing block 91 is provided with a clearance hole 911 in the middle for clearance of the support column 6.

[0018] Furthermore, the fixed block 91 has a horizontal locking hole 912 at the end away from the connecting rod 7. The locking hole 912 is used to install screws, which facilitates the disassembly of the locking device 9 and also facilitates the adjustment of the tightness between the support column 6 and the locking device 9.

[0019] The beneficial effects of this utility model are as follows: This utility model proposes a baffle device for a crucible rotation mechanism. The baffle device 4 includes a rotating mechanism 5, a support column 6, a connecting rod 7, and a baffle 8. The rotating mechanism 5 is equipped with a rotating cylinder 51. The top of the rotating mechanism 5 is connected to the support column 6. The top of the support column 6 is connected to the connecting rod 7 through a locking device 9. The connecting rod 7 is perpendicular to the support column 6. The end of the connecting rod 7 away from the support column 6 is connected to the upper surface of the baffle 8. The bottom of the baffle 8 is provided with a densely distributed mesh 81 to enhance the adsorption effect and prevent adsorption during pre-melting. The material falls onto the crucible. The edge of the baffle 8 extends downwards with a folded edge 82 to prevent small particles or vapor from escaping from the edge during the pre-melting process, while also strengthening the structural strength of the baffle 8. Before heating begins, the rotating mechanism 5 is rotated by the rotating cylinder 51, thereby moving the baffle 8 above the crucible body 2. Before the crucible is fully heated, the material needs to be pre-melted to cover the part of the material with poor uniformity. After pre-melting, the rotating mechanism 5 is rotated by the rotating cylinder 51, thereby moving the baffle 8 away from above the crucible body 2 for vapor deposition. Attached Figure Description

[0020] Figure 1 This is a connection structure diagram of the baffle device of the crucible rotation mechanism of this utility model.

[0021] Figure 2 This is an overall structural diagram of the baffle device of the crucible rotation mechanism of this utility model.

[0022] Figure 3 This is a cross-sectional view of the baffle device of the crucible rotation mechanism of this utility model.

[0023] Figure 4 This is a plan view of the bottom of the baffle of the baffle device of the crucible rotation mechanism of this utility model.

[0024] Figure 5 This is a structural diagram showing the connection between the locking block and the fixing frame of the baffle device in the crucible rotation mechanism of this utility model.

[0025] Figure 6 This is a structural diagram of the fixing block of the baffle device of the crucible rotation mechanism of this utility model.

[0026] Explanation of main component symbols

[0027] Electron gun device 1, crucible body 2, cavity 22, rotary mechanism 3, baffle device 4, rotating mechanism 5, rotary cylinder 51, coupling 52, rotating shaft 53, mounting base 54, bearing base 55, ball bearing 56, flange seat 57, support column 6, support column seat 61, connecting rod 7, baffle 8, mesh 81, folded edge 82, locking device 9, fixing block 91, clearance hole 911, locking hole 912, locking block 92, fixing frame 93, groove 931, base plate 10.

[0028] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this utility model. Detailed Implementation Example 1:

[0029] A baffle device for a crucible rotation mechanism 3 is provided. The crucible rotation mechanism 3 is mounted on the bottom plate 10 of the cavity of a vacuum evaporation machine. The crucible rotation mechanism 3 includes an electron gun device 1, a crucible body 2, and a rotation mechanism 3. The crucible body 2 is located at the top of the rotation mechanism 3, and the electron gun device 1 is located on one side of the crucible body 2. The rotation mechanism 3 drives the crucible body 2 to rotate. After being redirected by a magnetic field, the electron gun device 1 emits an electron beam to bombard and heat the film material inside the crucible. The feature is that a baffle device 4 is provided above the crucible body 2. The baffle device 4 includes a rotating mechanism 5, a support column 6, a connecting rod 7, and a baffle 8. A rotating cylinder 51 is provided inside the rotating mechanism 5. The support column 6 is connected to the top of the support column 6 via a locking device 9. The connecting rod 7 is perpendicular to the support column 6. The end of the connecting rod 7 away from the support column 6 is connected to the upper surface of the baffle 8. The bottom of the baffle 8 is provided with a densely distributed mesh 81 to enhance the adsorption effect and prevent the adsorbed material from falling onto the crucible during pre-melting. Before heating begins, the rotating mechanism 5 is rotated by the rotating cylinder 51, thereby moving the baffle 8 above the crucible body 2. Before the crucible is fully heated, the material needs to be pre-melted to cover the part of the material with poor uniformity. After pre-melting, the rotating mechanism 5 is rotated by the rotating cylinder 51, thereby moving the baffle 8 away from the crucible body 2 for vapor deposition.

[0030] The mesh 81 is made of stainless steel, and the gap between the mesh 81 is adjusted according to the size of the film material dust and the distance between the evaporation source and the baffle 8.

[0031] The mesh 81 is welded to the baffle 8.

[0032] The baffle 8 has a folded edge 82 extending downwards from its edge, which is used to prevent small particles or vapor from escaping from the edge during the pre-melting process, and at the same time to strengthen the structural strength of the baffle 8.

[0033] The crucible body 2 is provided with a ring of holes 22. The extension line of the inner wall of the holes 22 extending outward is the maximum evaporation angle. The diameter of the baffle 8 is larger than the extension line of the inner wall of the holes 22 extending outward, so as to ensure that the material will not evaporate outside the baffle 8 during pre-melting.

[0034] The rotating mechanism 5 includes a rotating cylinder 51, a coupling 52, and a rotating shaft 53. The bottom of the coupling 52 is connected to the rotating cylinder 51, and the top of the coupling 52 is rotatably connected to the bottom of the rotating shaft 53. The rotating cylinder 51 controls the rotating shaft 53 to rotate through the coupling 52, thereby causing the baffle 8 to rotate left and right.

[0035] A bearing base 55 is sleeved on the outside of the rotating shaft 53. The bearing base 55 is connected to the bottom of the base plate 10, so that the baffle device 4 is connected to the base plate 10. A mounting seat 54 extends outward from the top of the rotating shaft 53. The lower edge of the mounting seat 54 is engaged with the upper surface of the bearing base 55. A ball bearing 56 is sleeved between the rotating shaft 53 and the bearing base 55 for the rotating shaft 53 to rotate.

[0036] A flange seat 57 is provided between the bearing base 55 and the bearing base 55. The coupling 52 is placed inside the flange seat 57 to protect the coupling 52 and support the bearing base 55.

[0037] The bottom of the support column 6 is provided with a support column base 61, and the support column base 61 is connected to the bearing base 55 by bolts.

[0038] The locking device 9 is located on the top of the support column 6. The locking device 9 includes a fixing block 91, a locking block 92, and a fixing frame 93. The fixing frame 93 is locked to the locking block 92, and the fixing frame 93 and the locking block 92 lock the support column 6 inside.

[0039] The top of the fixing frame 93 is provided with a groove 931, and the fixing block 91 is disposed in the groove 931 for limiting the fixing block 91.

[0040] The top of one side of the fixing block 91 is connected to one end of the connecting rod 7, and the fixing block 91 is provided with a clearance hole 911 in the middle for clearance of the support column 6.

[0041] The fixed block 91 has a horizontal locking hole 912 at the end away from the connecting rod 7. The locking hole 912 is used to install screws, which facilitates the disassembly of the locking device 9 and also facilitates the adjustment of the tightness between the support column 6 and the locking device 9.

[0042] The beneficial effects of this utility model are as follows: This utility model proposes a baffle device for a crucible rotation mechanism. The baffle device 4 includes a rotating mechanism 5, a support column 6, a connecting rod 7, and a baffle 8. The rotating mechanism 5 is equipped with a rotating cylinder 51. The top of the rotating mechanism 5 is connected to the support column 6. The top of the support column 6 is connected to the connecting rod 7 through a locking device 9. The connecting rod 7 is perpendicular to the support column 6. The end of the connecting rod 7 away from the support column 6 is connected to the upper surface of the baffle 8. The bottom of the baffle 8 is provided with a densely distributed mesh 81 to enhance the adsorption effect and prevent adsorption during pre-melting. The material falls onto the crucible. The edge of the baffle 8 extends downwards with a folded edge 82 to prevent small particles or vapor from escaping from the edge during the pre-melting process, while also strengthening the structural strength of the baffle 8. Before heating begins, the rotating mechanism 5 is rotated by the rotating cylinder 51, thereby moving the baffle 8 above the crucible body 2. Before the crucible is fully heated, the material needs to be pre-melted to cover the part of the material with poor uniformity. After pre-melting, the rotating mechanism 5 is rotated by the rotating cylinder 51, thereby moving the baffle 8 away from above the crucible body 2 for vapor deposition.

[0043] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A baffle device of a crucible rotating mechanism, the crucible rotating mechanism (3) is arranged on the cavity bottom plate (10) of a vacuum evaporation machine, the crucible rotating mechanism (3) comprises an electron gun device (1), a crucible body (2) and a rotating mechanism (3), the crucible body (2) is arranged on the top of the rotating mechanism (3), the electron gun device (1) is arranged on one side of the crucible body (2), the crucible body (2) is driven to rotate by the rotating mechanism (3), and the electron gun device (1) emits an electron beam after being turned by a magnetic field to bombard and heat film material in the crucible to achieve heating, characterized in that: The baffle device (4) is arranged above the crucible body (2), and comprises a rotating mechanism (5), a support column (6), a connecting rod (7) and a baffle (8). ​ 2. The baffle apparatus for a crucible-rotating mechanism according to claim 1, wherein: The grid (81) is made of stainless steel, and the gap of the grid (81) is adjusted according to the size of the film material dust and the distance between the evaporation source and the baffle (8).

3. The baffle apparatus for a crucible-rotating mechanism according to claim 1, wherein: The grid (81) is welded to the baffle (8).

4. The baffle apparatus for a crucible-rotating mechanism according to claim 1, wherein: The baffle (8) has a flange (82) extending downward from the edge, which is used to prevent small particles or vapor from escaping from the edge during the pre-melting process, and to strengthen the structural strength of the baffle (8).

5. The baffle apparatus for a crucible-rotating mechanism as claimed in claim 1, wherein: The crucible body (2) is provided with a circle of acupoints (22), the outer extension line of the inner wall of the acupoint (22) is the maximum evaporation angle, and the diameter of the baffle (8) is greater than the outer extension line of the inner wall of the acupoint (22), so that the material during pre-melting cannot be evaporated to the outside of the baffle (8).

6. The baffle apparatus for a crucible-rotating mechanism according to claim 1, wherein: The rotating mechanism (5) comprises a rotating cylinder (51), a shaft coupling (52) and a rotating shaft (53), the bottom of the shaft coupling (52) is connected with the rotating cylinder (51), the top of the shaft coupling (52) is rotatably connected with the bottom of the rotating shaft (53), and the rotating cylinder (51) controls the rotation of the rotating shaft (53) through the shaft coupling (52) to make the baffle (8) rotate left and right.

7. The baffle apparatus for a crucible-rotating mechanism according to claim 6, wherein: The rotating shaft (53) is provided with a bearing base (55) outside, which is connected with the bottom of the bottom plate (10), so that the baffle device (4) is connected to the bottom plate (10), the top of the rotating shaft (53) extends outwardly and has a mounting seat (54), the lower surface edge of the mounting seat (54) is clamped with the upper surface of the bearing base (55), and the rotating shaft (53) and the bearing base (55) are provided with a ball bearing (56) therebetween for the rotation of the rotating shaft (53).

8. The baffle apparatus of claim 7, wherein: The bearing base (55) is provided with a flange seat (57) therebetween, and the shaft coupling (52) is arranged in the flange seat (57) to protect the shaft coupling (52) and support the bearing base (55).

9. The baffle apparatus for a crucible-rotating mechanism according to claim 7, wherein: The bottom of the support column (6) is provided with a support column seat (61), and the support column seat (61) is connected with the bearing base (55) through bolts.

10. The shield apparatus for a crucible-rotating mechanism as claimed in claim 1, characterized by: The locking device (9) is arranged at the top of the support column (6), and the locking device (9) comprises a fixing block (91), a locking block (92) and a fixing frame (93). The fixing frame (93) is locked with the locking block (92), and the fixing frame (93) and the locking block (92) lock the support column (6) in the interior.

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