Double-sided multi-layer coating equipment

Abstract

The utility model relates to the field of vacuum coating, and discloses double-sided multi-layer coating equipment which comprises a shell and a cover plate, and the shell is provided with a transmission cavity and a coating cavity; the cover plate is attached to the shell to seal the transmission cavity and the coating cavity; an unwinding structure and a first tracking structure are arranged on one side, corresponding to the transmission cavity, of the cover plate; the unwinding structure comprises a first mounting seat, a first driving unit and a guide rail group, the first mounting seat is provided with a first rotating shaft, a to-be-coated substrate is wound on the first rotating shaft, one end of the first driving unit is in transmission connection with the guide rail group, and the first mounting seat is in transmission connection with the guide rail group; the first driving unit is configured to drive the guide rail group to rotate so as to enable the first mounting seat to move along the length direction of the guide rail group to adjust the position of the base material; the first tracking structure is used for monitoring the deviation state of the unwound base material; according to the utility model, the position of the first mounting seat can be adjusted in time through the guide rail group after the deviation of the position of the base material is monitored, so that the unwinding position of the base material is adjusted, and the problem of wrinkles after the base material is unwound is solved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating, and in particular to a double-sided multilayer coating equipment. Background Technology

[0002] Currently, most flexible vacuum coating equipment uses a single coating station, completing the coating process on one side in one cycle. Then, workers manually adjust the coating to coat the other side. Even equipment capable of double-sided coating typically deposits a single material layer. With increasing market demand and technological advancements, higher requirements are being placed on efficiency and quality, as well as on the structure and function of the coating layers. Therefore, single-sided or single-layer coatings are no longer sufficient to meet these needs.

[0003] While some existing equipment uses double-sided sputtering coating technology, there is no clear solution for coating deviation and film wrinkling during the winding process, nor is there a good solution for film tearing and coating in the double-sided coating process. Utility Model Content

[0004] The technical problem to be solved by this utility model is: how to solve the problems of coating deviation, film wrinkling, and how to apply and peel off the film. In order to solve the above technical problems, this utility model provides a double-sided multilayer coating equipment, including a housing and a cover plate; the housing is divided into a transmission cavity and multiple coating cavities; the coating cavities are provided with cathode groups for coating.

[0005] The cover plate is fitted to the housing to seal the transmission cavity and the coating cavity; the cover plate is provided with an unwinding structure, a first tracking structure, a first cooling main roller, a surface adjustment structure, a second cooling main roller and a winding structure on one side corresponding to the transmission cavity;

[0006] The unwinding structure includes a first mounting base, a first driving unit, and a guide rail assembly. The first mounting base is provided with a first rotating shaft, on which the substrate to be coated is wound. The guide rail assembly is disposed in the transmission cavity. One end of the first driving unit is fixed to the inner wall of the housing, and the other end of the first driving unit is throttle-connected to the guide rail assembly. The first mounting base is throttle-connected to the guide rail assembly. The first driving unit is configured to drive the guide rail assembly to rotate so that the first mounting base moves along the length direction of the guide rail assembly to adjust the position of the substrate.

[0007] The first tracking structure is used to monitor the offset state of the substrate after unwinding; the first cooling main roller and the second cooling main roller are both used to drive the substrate to move between the transmission cavity and the coating cavity to complete the coating; the surface adjustment structure is used to switch the coating surface of the substrate on the first cooling main roller and the second cooling main roller; the winding structure is used to wind up and correct the deviation of the coating layer after coating.

[0008] Preferably, the housing is provided with a first coating cavity, a second coating cavity, a third coating cavity, a fourth coating cavity, a fifth coating cavity, and a sixth coating cavity. The first coating cavity, the second coating cavity, and the segmental coating cavity are symmetrically arranged along the central axis of the housing with the fourth coating cavity, the fifth coating cavity, and the sixth coating cavity. A water-cooled partition is provided between adjacent coating cavities. The outer side wall of the first cooling main roller is located in the transmission cavity, the first coating cavity, the second coating cavity, and the third coating cavity, respectively. The outer side wall of the second cooling main roller is located in the transmission cavity, the fourth coating cavity, the fifth coating cavity, and the sixth coating cavity, respectively.

[0009] Preferably, the first tracking structure includes a second mounting base, which houses a second rotating shaft, a guide roller group, a second driving unit, and a correction sensor. The guide roller group is used to guide the substrate output by the unwinding structure, and the correction sensor is used to detect the position of the substrate on the guide roller group. The second driving unit is configured to rotate the guide roller group around the second rotating shaft to adjust the contact state between the guide roller group and the substrate.

[0010] Preferably, the cover plate is further provided with a film-tearing structure on the side facing the housing. The film-tearing structure includes a third mounting base, the third mounting base is provided with a third driving unit and a third rotating shaft, the third rotating shaft is used to wind the protective film, and the third driving unit is configured to drive the third rotating shaft to rotate to achieve film tearing.

[0011] Preferably, the cover plate is further provided with a second tracking structure and a film covering structure on the side facing the housing; the winding structure is the same as the unwinding structure; the first tracking structure is the same as the second tracking structure, and the second tracking structure is configured to detect the position state of the substrate before entering the winding structure; the film covering structure is the same as the tear-off structure, and the film covering structure is configured to cover the substrate with a protective film before entering the winding structure.

[0012] Preferably, the surface adjustment structure includes a first tension roller, a flattening roller, and a second tension roller; the substrate output from the first cooling main roller passes sequentially through the first tension roller, the flattening roller, and the second tension roller to the second cooling main roller; the substrate moves from the bottom of the first cooling main roller to the top of the first tension roller, and then passes through the top of the flattening roller and the bottom of the second tension roller before moving to the top of the second cooling main roller, thereby achieving surface adjustment of the coating surface on the substrate.

[0013] The first cooling main roller rotates counterclockwise, and the second cooling main roller rotates clockwise.

[0014] Preferably, a first guide roller is provided between the first tracking structure and the film-tearing structure; a third tension roller and a second guide roller are provided sequentially between the first tracking structure and the first cooling main roller.

[0015] Preferably, a third guide roller and a fourth tension roller are sequentially arranged between the second cooling main roller and the second tracking structure; a fourth guide roller and a fifth guide roller are sequentially arranged between the coating structure and the second tracking structure.

[0016] Preferably, the cover plate is further provided with a lifting structure, which is used to lift the unwinding structure into the working cavity of the housing.

[0017] Preferably, the device further includes a displacement device, the cover plate being fixed to the displacement device, the displacement device being used to drive the cover plate to fit and seal with the housing.

[0018] Compared with the prior art, the double-sided multilayer coating equipment provided in this embodiment of the present invention has the following advantages:

[0019] In this invention, when a substrate needs to be coated, the substrate wound on the first mounting base is guided to the first cooling main roller by the first tracking structure. After the first cooling main roller drives it into the coating chamber to complete coating on one side, the substrate is guided to the second cooling main roller by the surface adjustment structure to complete the surface adjustment process. The second cooling main roller then drives the substrate into the coating chamber to complete coating on the other side. The first tracking structure can monitor the position of the substrate after unwinding. When a deviation is detected in the unwinding of the substrate, the first driving unit can drive the first mounting base to move along the length of the guide rail group, thereby adjusting the position of the substrate on the first mounting base and adjusting the exit state of the substrate, thus solving the problems of coating deviation and film wrinkles. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the internal structure of this utility model;

[0021] Figure 2 This is a schematic diagram of the unwinding structure of this utility model;

[0022] Figure 3 This is a schematic diagram of the first tracking structure of this utility model;

[0023] Figure 4 This is a schematic diagram of the tear-off film structure of this utility model;

[0024] Figure 5 This is a side view of the structure of this utility model.

[0025] In the diagram: 1. Housing; 11. Transmission cavity; 111. First guide roller; 112. Third tension roller; 113. Second guide roller; 114. Third guide roller; 115. Fourth tension roller; 116. Fourth guide roller; 117. Fifth guide roller;

[0026] 12. Coating chamber; 13. Cathode assembly; 2. Cover plate;

[0027] 21. Unwinding structure; 211. First mounting base; 2111. First rotating shaft; 212. First drive unit; 213. Guide rail assembly; 214. Substrate;

[0028] 22. First tracking structure; 221. Second mounting base; 222. Second rotating shaft; 223. Guide roller assembly; 224. Second drive unit; 225. Correction sensor;

[0029] 23. Film-tearable structure; 231. Third mounting base; 232. Third drive unit; 233. Third rotating shaft; 234. Protective film;

[0030] 24. First cooling main roller; 25. Surface adjustment structure; 251. First tension roller; 252. Flattening roller; 253. Second tension roller; 26. Second cooling main roller; 27. Rewinding structure; 28. Second tracking structure; 29. ​​Coating structure; 20. Lifting structure; 3. Displacement device. Detailed Implementation

[0031] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0032] like Figure 1 and Figure 2 As shown, a preferred embodiment of the present invention provides a double-sided multilayer coating device, which includes a housing 1 and a cover plate 2; the housing 1 is provided with a transmission cavity 11 and a plurality of coating cavities 12; the coating cavities 12 are provided with cathode groups 13 for coating.

[0033] The cover plate 2 is fitted to the housing 1 to seal the transmission cavity 11 and the coating cavity 12; the cover plate 2 is provided with an unwinding structure 21, a first tracking structure 22, a first cooling main roller 24, a surface adjustment structure 25, a second cooling main roller 26 and a winding structure 27 on one side corresponding to the transmission cavity 11.

[0034] The unwinding structure 21 includes a first mounting base 211, a first driving unit 212, and a guide rail assembly 213. The first mounting base 211 is provided with a first rotating shaft 2111, on which the substrate 214 to be coated is wound. The guide rail assembly 213 is disposed in the transmission cavity 11. One end of the first driving unit 212 is fixed to the inner wall of the housing 1, and the other end of the first driving unit 212 is connected to the guide rail assembly 213. The first mounting base 211 is connected to the guide rail assembly 213. The first driving unit 212 is configured to drive the guide rail assembly 213 to rotate so that the first mounting base 211 moves along the length direction of the guide rail assembly 213 to adjust the position of the substrate 214.

[0035] The first tracking structure 22 is used to monitor the offset state of the substrate after unwinding; the first cooling main roller 24 and the second cooling main roller 26 are both used to drive the substrate 214 to move between the transmission cavity 11 and the coating cavity 12 to complete the coating; the surface adjustment structure 25 is used to switch the coating surface of the substrate 214 on the first cooling main roller 24 and the second cooling main roller 26; the winding structure 27 is used for winding and correcting the film layer after coating.

[0036] Specifically, when the substrate 214 is coated, the substrate 214 wound on the first rotating shaft 2111 is guided by the first tracking structure 22 to the first cooling main roller 24. The first cooling main roller 24 sequentially carries it into different coating chambers 12 to complete the coating work on one side. Then, it enters the second cooling main roller 26 through the face-changing structure 25, so that the coated side of the substrate 214 is in close contact with the outer wall of the second cooling main roller 26, while the uncoated side faces outward. Subsequently, the second cooling main roller 26 drives the substrate 214 into different coating chambers 12 to complete the coating on the other side of the substrate 214. Finally, the winding structure 27 winds up and stores the substrate 214 that has been coated on both sides. In the actual coating growth process, the substrate 214 film layer often experiences positional deviation during transport, leading to coating misalignment and film wrinkling. Previously, this problem often required manual adjustment after stopping the machine, which was very troublesome. In this embodiment, the first tracking structure 22 can monitor the position of the substrate 214 film layer. When the position of the substrate 214 film layer is detected to be deviated, the first driving unit 212 in the unwinding structure 21 can drive the guide rail group 213 to move, thereby driving the first mounting base 211 to move along the length direction of the guide rail group 213, thereby adjusting the position of the substrate 214 film layer output by the unwinding structure 21, thus solving the problems of coating misalignment and film wrinkling.

[0037] In some embodiments, the housing 1 is provided with a first coating cavity 12, a second coating cavity 12, a third coating cavity 12, a fourth coating cavity 12, a fifth coating cavity 12, and a sixth coating cavity 12. The first coating cavity 12, the second coating cavity 12, and the segment coating cavity 12 are symmetrically arranged along the central axis of the housing 1 with the fourth coating cavity 12, the fifth coating cavity 12, and the sixth coating cavity 12. A water-cooled partition is provided between adjacent coating cavities 12. The outer side wall of the first cooling main roller 24 is located in the transmission cavity 11, the first coating cavity 12, the second coating cavity 12, and the third coating cavity 12, respectively. The outer side wall of the second cooling main roller 26 is located in the transmission cavity 11, the fourth coating cavity 12, the fifth coating cavity 12, and the sixth coating cavity 12, respectively.

[0038] Specifically, depending on the required number of coating layers, the number of coating chambers 12 can be set differently, and different cathode groups 13 can be set in each coating chamber 12. During coating, depending on the process requirements, different cathode groups 13 in different coating chambers 12 can be selectively activated. If one set of cathode groups 13 is not activated, the coating work of the next set of film layers is carried out according to the movement direction and sequence of the substrate 214. When at least two sets of cathode groups 13 are activated, the coating work of two, three or more film layers can be carried out on one side of multiple substrates 214, realizing flexibility and improving efficiency and applicability.

[0039] like Figure 3 As shown, in some embodiments, the first tracking structure 22 includes a second mounting base 221. The second mounting base 221 is provided with a second rotating shaft 222, a guide roller group 223, a second drive unit 224, and a correction sensor 225. The guide roller group 223 is used to guide the substrate 214 output by the unwinding structure. The correction sensor 225 is used to detect the position state of the substrate 214 on the guide roller group 223. The second drive unit 224 is configured to rotate the guide roller group 223 around the second rotating shaft 222 to adjust the contact state between the guide roller group 223 and the substrate 214.

[0040] Specifically, the unwinding structure outputs the substrate 214 to the guide roller group 223 of the first tracking structure 22. The second driving unit 224 can drive the guide roller group 223 to rotate around the second rotating shaft 222, thereby adjusting the contact state between the guide roller group 223 and the substrate 214, so that the guide roller group 223 can press on the substrate 214 and apply pressure to the substrate 214. The guide roller group 223 pressing on the substrate 214 can guide the substrate 214 and apply tension, making the substrate 214 smoother during the transmission process and less prone to wrinkles, ensuring the smoothness and flatness of the substrate 214 during the unwinding process. The deviation sensor 225 can monitor the deviation state of the film layer of the substrate 214 on the guide roller group 223. The monitored state is fed back to the controller, which can then control the first drive unit 212 in the unwinding structure 21 to adjust the state of the substrate 214 during unwinding, thereby solving the problem of film layer misalignment of the substrate 214 until the edge of the film layer of the substrate 214 is at the center of the detection origin of the correction sensor 225, indicating that the film layer has no deviation, thus realizing the process of correction adjustment.

[0041] like Figure 4 As shown, in some embodiments, the cover plate 2 is further provided with a film-tearing structure 23 on the side facing the housing 1. The film-tearing structure 23 includes a third mounting base 231, the third mounting base 231 is provided with a third driving unit 232 and a third rotating shaft 233, the third rotating shaft 233 is used to wind the protective film 234, and the third driving unit 232 is configured to drive the third rotating shaft 233 to rotate to achieve film tearing.

[0042] Specifically, before coating the substrate 214, the protective film 234 on the substrate 214 needs to be torn off so that the film particles on the cathode group 13 can be sputtered onto the substrate 214 to complete the coating process. During the coating process, the protective film 234 on the substrate 214 is wound on a rotating shaft. The unwinding structure 21 continuously outputs the substrate 214 to the first tracking structure 22. After being guided by the first tracking structure 22, the substrate 214 is transported to the coating chamber 12 by the first cooling main roller 24, while the protective film 234 is wound on the third rotating shaft 233. When tearing the film, the third driving unit 232 drives the third rotating shaft 233 to rotate, thereby applying tension to the protective film 234 to complete the winding of the protective film 234. In conjunction with the tension applied to the substrate 214 by the first cooling main roller 24, the protective film 234 is separated from the substrate 214, completing the film tearing process of the substrate 214.

[0043] In some embodiments, the cover plate 2 is further provided with a second tracking structure 28 and a film covering structure 29 on the side facing the housing 1; the winding structure 27 has the same structure as the unwinding structure 21; the first tracking structure 22 has the same structure as the second tracking structure 28, and the second tracking structure 28 is configured to detect the position state of the substrate 214 before entering the winding structure 27; the film covering structure 29 has the same structure as the tear-off structure 23, and the film covering structure 29 is configured to cover the substrate 214 before entering the winding structure 27 with a protective film 234.

[0044] Specifically, the positional deviation of the substrate 214 is prone to occur not only during unwinding but also during rewinding, which can easily lead to uneven rewinding and wrinkles. After the substrate 214 is coated, it also needs to be covered with a protective film 234 to protect the coated film layer. Therefore, during rewinding, the substrate 214 also needs to be corrected and covered with the protective film 234. After the substrate 214 completes the coating work on the second side of the second cooling main roller 26, the substrate 214 is conveyed to the second tracking structure 28. At the same time, the protective film 234 on the rotating shaft of the coating structure 29 is also conveyed to the second tracking structure 28 along with the substrate 214. When the sensor on the second tracking structure 28 detects a positional deviation of the film layer of the substrate 214, the drive unit in the rewinding structure 27 will drive the rewinding substrate 214 to translate and adjust the position of the rewound substrate 214, thereby adjusting the position of the substrate 214 on the second tracking structure 28, and thus solving the problem of wrinkles and unevenness of the substrate 214 during the transmission and winding process. The protective film 234 output by the coating structure 29 will adhere to the film layer of the substrate 214 through the pressure applied by the guide roller group 223 in the second tracking structure 28, thereby completing the coating work and providing protection for the coated film layer.

[0045] In some embodiments, the surface adjustment structure 25 includes a first tension roller 251, a flattening roller 252, and a second tension roller 253; the substrate 214 output from the first cooling main roller 24 passes sequentially through the first tension roller 251, the flattening roller 252, and the second tension roller 253 to the second cooling main roller 26; the substrate 214 is wound from the bottom of the first cooling main roller 24 to the top of the first tension roller 251, and then passes through the top of the flattening roller 252 and the bottom of the second tension roller 253 before being wound to the top of the second cooling main roller 26, so as to achieve surface adjustment of the coating surface on the substrate 214;

[0046] The first cooling main roller 24 rotates counterclockwise, and the second cooling main roller 26 rotates clockwise.

[0047] Specifically, in one embodiment, the first cooling main roller 24 is located on the left side of the housing 1, while the second cooling main roller 26 is located on the right side of the housing 1. After the substrate 214 output from the unwinding structure 21 is guided by the second tracking structure 28, it adheres to the outer wall of the first cooling main roller 24 on the upper right side and moves counterclockwise. The substrate 214 enters multiple coating chambers 12 sequentially from the transmission chamber 11 for coating, and then exits from the right side of the first cooling main roller 24. After being guided by the first tension roller 251 and the flattening roller 252, the substrate 214 enters the second cooling main roller 26 from below the second tension roller 253. The substrate 214 is coated on the upper left side and is attached to the second cooling main roller 26. During this process, the coated side of the substrate 214 is attached to the side wall of the second cooling main roller 26, while the uncoated side of the substrate 214 faces outward. Driven by the second cooling main roller 26, the substrate 214 is sequentially driven from the transmission cavity 11 into multiple coating cavities 12 for coating. The flattening roller 252 can guide the substrate 214, making the transmission of the substrate 214 smoother and less prone to wrinkles. The first tension roller 251 and the second tension roller 253 can apply pressure to the substrate 214, so that the substrate 214 is always in a stretched state. The transmission of the substrate 214 is smoother and more stable, and less prone to wrinkles.

[0048] In some embodiments, a first guide roller 111 is provided between the first tracking structure 22 and the film-tearing structure 23; a third tension roller 112 and a second guide roller 113 are provided sequentially between the first tracking structure 22 and the first cooling main roller 24.

[0049] Furthermore, a third guide roller 114 and a fourth tension roller 115 are sequentially arranged between the second cooling main roller 26 and the second tracking structure 28; a fourth guide roller 116 and a fifth guide roller 117 are sequentially arranged between the coating structure 29 and the second tracking structure 28.

[0050] Specifically, the first guide roller 111 can apply a lateral thrust to the protective film 234, so that the third rotating shaft 233 can better wind and collect the torn protective film 234; while the third tension roller 112 and the second guide roller 113 can provide guidance and support for the substrate 214 after the film is torn, so that the substrate 214 can be transported to the first cooling main roller 24 more smoothly; while the third guide roller 114 and the fourth tension roller 115 can guide and apply tension to the substrate 214 output from the second cooling main roller 26 to the second tracking structure 28, so that the substrate 214 is more stable and reliable during the transport process; the fourth guide roller 116 and the fifth guide roller 117 can guide the protective film 234 output from the coating structure 29 to the second tracking structure 28, so that the coverage of the protective film 234 is more flat.

[0051] like Figure 5As shown, in some embodiments, the cover plate 2 is also provided with a lifting structure 20, which is used to lift the unwinding structure 21 into the working cavity of the housing 1. The lifting structure 20 makes it easier and less labor-intensive to replace the unwinding structure 21 and the substrate 214 on it, reducing the trouble of manually replacing the substrate 214 to be coated.

[0052] In some embodiments, a displacement device 3 is also included. The cover plate 2 is fixed to the displacement device 3, which drives the cover plate 2 to fit and seal against the housing 1. The displacement device 3 can drive the cover plate 2 closer to or away from the housing 1. When the substrate 214 needs to be coated, the displacement device 3 can drive the cover plate 2 closer to and against the housing 1, thereby sealing the transmission cavity 11 and the coating cavity 12, facilitating subsequent vacuuming of the coating cavity 12 and the transmission cavity 11, and thus facilitating the coating work. When coating is not required, the displacement device can drive the cover plate 2 away from the housing 1, thereby facilitating the maintenance and replacement of the cover plate 2 and various components inside the housing 1 by the operator, ensuring the smooth progress of subsequent coating work.

[0053] In summary, this utility model embodiment provides a double-sided multilayer coating equipment. When a substrate 214 needs to be coated, the substrate 214 wound on the first mounting base 211 is guided to the first cooling main roller 24 by the first tracking structure 22. After being driven into the coating chamber 12 by the first cooling main roller 24 to complete coating on one side, the substrate 214 is adjusted by the surface adjustment structure 25 and then guided to the second cooling main roller 26. The second cooling main roller 26 then drives the substrate 214 into the coating chamber 12 to complete coating on the other side of the substrate 214. The first tracking structure 22 can... The system can monitor the position of the substrate 214 after unwinding. When a deviation is detected in the unwinding of the substrate 214, the first drive unit 212 can drive the first mounting base 211 to move along the length of the guide rail assembly 213, thereby adjusting the position of the substrate 214 on the first mounting base 211 and adjusting the lead-out state of the substrate 214. This solves the problems of coating deviation and film wrinkling. At the same time, the second tracking structure 28, in conjunction with the winding structure 27, can also adjust the position of the substrate 214 before winding, thereby avoiding problems such as offset and wrinkling of the substrate 214 during winding. The tear-off structure 23 and the coating structure 29 can conveniently and quickly complete the tear-off and coating work of the substrate 214, facilitating the coating process and providing better protection for the coated film.

[0054] The above are merely preferred embodiments of this utility model. It should be noted that, for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of this utility model, and these improvements and substitutions should also be considered within the protection scope of this utility model.

Claims

1. A double-sided multilayer coating equipment, characterized in that, The utility model relates to a kind of coating machine, including: Shell, transmission cavity and multiple film coating cavities are arranged in the shell;The cathode group for film coating is arranged in the film coating cavity;Cover plate, the transmission cavity and the film coating cavity are closed by the shell;The cover plate is provided with unwinding structure, first tracking structure, first cooling main roller, adjusting structure, second cooling main roller and winding structure corresponding to one side of the transmission cavity; The unwinding structure includes first mounting seat, first drive unit and guide rail group, the first mounting seat is provided with first rotating shaft, the first rotating shaft is wound with substrate to be coated, the guide rail group is arranged in the transmission cavity, one end of the first drive unit is fixed to the inner wall of the shell, the other end of the first drive unit is drivingly connected with the guide rail group, the first mounting seat is drivingly connected with the guide rail group, the first drive unit is configured to drive the guide rail group to rotate to make the first mounting seat move along the length direction of the guide rail group to adjust the position of the substrate; The first tracking structure is used to monitor the deviation state of the substrate after unwinding;The first cooling main roller and the second cooling main roller are used to drive the substrate to move between the transmission cavity and the film coating cavity to complete coating;The adjusting structure is used to switch the coating surface of the substrate on the first cooling main roller and the second cooling main roller;The winding structure is used for winding and correcting the film layer after coating. The shell is provided with first film coating cavity, second film coating cavity, third film coating cavity, fourth film coating cavity, fifth film coating cavity and sixth film coating cavity, the first film coating cavity, second film coating cavity and segment film coating cavity are symmetrically arranged with the fourth film coating cavity, fifth film coating cavity and sixth film coating cavity along the central axis of the shell, water-cooled partition plate is arranged between adjacent film coating cavities;The outer side wall of the first cooling main roller is located in the transmission cavity, the first film coating cavity, the second film coating cavity and the third film coating cavity respectively;The outer side wall of the second cooling main roller is located in the transmission cavity, the fourth film coating cavity, the fifth film coating cavity and the sixth film coating cavity respectively.

2. The dual-sided multi-layer coating apparatus of claim 1, wherein, The first tracking structure includes second mounting seat, the second mounting seat is provided with second rotating shaft, guide roller group, second drive unit and deviation sensor, the guide roller group is used to guide the substrate output by the unwinding structure, the deviation sensor is used to detect the position state of the substrate on the guide roller group, the second drive unit is configured to rotate the guide roller group around the second rotating shaft to adjust the contact state of the guide roller group and the substrate.

3. The dual-sided multi-layer coating apparatus of claim 2, wherein, The side of the cover plate towards the shell is also provided with film tearing structure, the film tearing structure includes third mounting seat, the third mounting seat is provided with third drive unit and third rotating shaft, the third rotating shaft is used to wind protective film, the third drive unit is configured to drive the third rotating shaft to rotate to realize film tearing.

4. The double-sided multi-layer coating apparatus according to claim 3, wherein The side of the cover plate towards the shell is also provided with second tracking structure and film coating structure;The winding structure and the unwinding structure are the same structure;The first tracking structure and the second tracking structure are the same structure, the second tracking structure is configured to detect the position state of the substrate before entering the winding structure.

5. The double-sided multi-layer coating apparatus according to claim 4, wherein ​ The film covering structure is configured to cover a protective film on the substrate before entering the winding structure.

6. The dual-sided multi-layer coating apparatus of claim 1, wherein, The film adjusting structure comprises a first tension roller, a flattening roller and a second tension roller; the substrate substrate output by the first cooling main roller passes through the first tension roller, the flattening roller and the second tension roller in sequence to the second cooling main roller; the substrate substrate is wound from the bottom of the first cooling main roller to the top of the first tension roller, passes through the top of the flattening roller and the bottom of the second tension roller, and is then wound to the top of the second cooling main roller to adjust the film surface on the substrate substrate. The first cooling main roller rotates in a counterclockwise direction, and the second cooling main roller rotates in a clockwise direction.

7. The dual-sided multi-layer coating apparatus of claim 5, wherein, A first guide roller is arranged between the first tracking structure and the film tearing structure; a third tension roller and a second guide roller are arranged between the first tracking structure and the first cooling main roller in sequence.

8. The dual-sided multi-layer coating apparatus of claim 5, wherein, A third guide roller and a fourth tension roller are arranged between the second cooling main roller and the second tracking structure in sequence; a fourth guide roller and a fifth guide roller are arranged between the film covering structure and the second tracking structure in sequence.

9. The dual-sided multi-layer coating apparatus of claim 1, wherein, The cover plate is further provided with a hoisting structure for hoisting the unwinding structure into the working cavity of the shell.

10. The dual-sided multi-layer coating apparatus of claim 1, wherein, Further comprising a displacement device, the cover plate is fixed to the displacement device, and the displacement device is used to drive the cover plate to be attached to the shell. The film covering structure is configured to cover a protective film on the substrate before entering the winding structure. The film adjusting structure comprises a first tension roller, a flattening roller and a second tension roller; the substrate substrate output by the first cooling main roller passes through the first tension roller, the flattening roller and the second tension roller in sequence to the second cooling main roller; the substrate substrate is wound from the bottom of the first cooling main roller to the top of the first tension roller, passes through the top of the flattening roller and the bottom of the second tension roller, and is then wound to the top of the second cooling main roller to adjust the film surface on the substrate substrate. The first cooling main roller rotates in a counterclockwise direction, and the second cooling main roller rotates in a clockwise direction. A first guide roller is arranged between the first tracking structure and the film tearing structure; a third tension roller and a second guide roller are arranged between the first tracking structure and the first cooling main roller in sequence. A third guide roller and a fourth tension roller are arranged between the second cooling main roller and the second tracking structure in sequence; a fourth guide roller and a fifth guide roller are arranged between the film covering structure and the second tracking structure in sequence. The cover plate is further provided with a hoisting structure for hoisting the unwinding structure into the working cavity of the shell. Further comprising a displacement device, the cover plate is fixed to the displacement device, and the displacement device is used to drive the cover plate to be attached to the shell.

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