Tail gas treatment device and semiconductor processing system

Abstract

The utility model provides a tail gas treatment device and a semiconductor processing system.The tail gas treatment device comprises a water tank, a water inlet mechanism, a liquid level sensor, a flow guide mechanism, an anti-leakage sensor and a controller, the liquid level sensor is arranged on the side wall of the water tank, and the flow guide mechanism and the water inlet mechanism both communicate with the water tank; the height of the joint of the flow guide mechanism and the water tank is larger than that of the liquid level sensor, the leakage-proof sensor is arranged in the flow guide mechanism, and the controller is electrically connected with the water inlet mechanism, the liquid level sensor and the leakage-proof sensor. Wherein the liquid level sensor is used for detecting the liquid level in the water tank, and the leak-proof sensor is used for detecting whether purified water exists in the flow guide mechanism or not; the controller is used for controlling the water inlet mechanism to stop working when purified water is detected in the flow guide mechanism. The tail gas treatment device and the semiconductor processing system have the advantage that liquid in the water tank can be prevented from leaking when the liquid level sensor fails.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing technology, and more specifically, to an exhaust gas treatment device and a semiconductor processing system. Background Technology

[0002] In semiconductor processing systems, exhaust gas treatment devices are the mainstream equipment for exhaust gas treatment. They offer stable processes, simple operation, and low manpower maintenance costs.

[0003] The exhaust gas treatment device works by filling a tank with plasma water. Exhaust gas is input through the inlet, and the treated gas is discharged through the outlet after being purified by the plasma water. To ensure that the plasma water level in the tank does not become too high, a level sensor is installed inside the tank. When the level sensor detects that the plasma water level has reached a set height, the system will stop adding water to the tank.

[0004] However, corrosive gases are often used in semiconductor processes, so level sensors may fail. If a level sensor fails, the system will keep filling the tank with water, causing it to overflow, affecting the operation of other machines, and potentially causing a safety accident.

[0005] In summary, existing technologies present a problem where liquid level sensors may fail during semiconductor processing, potentially impacting safe production. Summary of the Invention

[0006] The purpose of this application is to provide an exhaust gas treatment device and a semiconductor processing system to solve the problem that liquid level sensors in the prior art may fail and affect safe production.

[0007] To achieve the above objectives, the technical solutions adopted in the embodiments of this application are as follows:

[0008] On one hand, this application provides an exhaust gas treatment device, which includes a water tank, a water inlet mechanism, a liquid level sensor, a flow guiding mechanism, a leak-proof sensor, and a controller. The liquid level sensor is disposed on the side wall of the water tank. The flow guiding mechanism and the water inlet mechanism are both connected to the water tank, and the height of the connection between the flow guiding mechanism and the water tank is higher than the height of the liquid level sensor. The leak-proof sensor is disposed within the flow guiding mechanism. The controller is electrically connected to the water inlet mechanism, the liquid level sensor, and the leak-proof sensor, respectively.

[0009] The water tank is used to hold purified water, and the water tank is provided with an air inlet and an air outlet. The purified water in the water tank is used to purify the exhaust gas entering through the air inlet.

[0010] The liquid level sensor is used to detect the liquid level in the water tank, and the leak prevention sensor is used to detect whether there is purified water in the flow guiding mechanism.

[0011] The controller is used to control the water inlet mechanism to stop working when purified water is detected in the flow guiding mechanism.

[0012] Optionally, the flow guiding mechanism includes a flow guiding pipe and a water storage box, one end of the flow guiding pipe is connected to the water tank, and the other end of the flow guiding pipe is connected to the water storage box.

[0013] Optionally, the leak-proof sensor is located at the bottom of the water storage box, and when the leak-proof sensor detects purified water information, it transmits the purified water information to the controller.

[0014] Optionally, the guide tube is a transparent tube, and the leak-proof sensor is an optical sensor. The leak-proof sensor is sleeved outside the guide tube and transmits the purified water information to the controller when it detects purified water information.

[0015] Optionally, the diameter of the guide tube is 0.8 to 1.2 cm.

[0016] Optionally, the connection between the flow guiding mechanism and the water tank is 2-3 cm higher than the height of the liquid level sensor.

[0017] Optionally, the liquid level sensor includes a first liquid level sensor and a second liquid level sensor. Both the first liquid level sensor and the second liquid level sensor are electrically connected to the controller. The height of the second liquid level sensor is higher than the height of the first liquid level sensor. The height of the connection between the flow guiding mechanism and the water tank is higher than the height of the second liquid level sensor.

[0018] When the second liquid level sensor detects purified water information, the controller controls the water inlet mechanism to stop working.

[0019] Optionally, the exhaust gas treatment device further includes a water outlet mechanism and a third liquid level sensor. The water outlet mechanism is connected to the water tank, the third liquid level sensor is electrically connected to the controller, and the height of the third liquid level sensor is lower than the height of the first liquid level sensor.

[0020] When the third liquid level sensor does not detect purified water information, the controller controls the water outlet mechanism to stop working.

[0021] Optionally, both the air inlet and the air outlet are located at the top of the water tank.

[0022] On the other hand, this application also provides a semiconductor processing system, which includes processing equipment and the above-mentioned exhaust gas treatment device, wherein the processing equipment is connected to the exhaust port of the water tank.

[0023] Compared with the prior art, this application has the following advantages:

[0024] This application provides an exhaust gas treatment device and a semiconductor processing system. The exhaust gas treatment device includes a water tank, a water inlet mechanism, a liquid level sensor, a flow guiding mechanism, a leak-proof sensor, and a controller. The liquid level sensor is disposed on the side wall of the water tank. The flow guiding mechanism and the water inlet mechanism are both connected to the water tank, and the height of the connection between the flow guiding mechanism and the water tank is higher than the height of the liquid level sensor. The leak-proof sensor is disposed inside the flow guiding mechanism. The controller is electrically connected to the water inlet mechanism, the liquid level sensor, and the leak-proof sensor. The water tank is used to contain purified water and is provided with an air inlet and an air outlet. The purified water in the water tank is used to purify the exhaust gas entering through the air inlet. The liquid level sensor is used to detect the liquid level in the water tank, and the leak-proof sensor is used to detect whether there is purified water in the flow guiding mechanism. The controller is used to control the water inlet mechanism to stop working when purified water is detected in the flow guiding mechanism.

[0025] Because the exhaust gas treatment device provided in this application includes a flow guiding mechanism and a leak-proof sensor, even if the liquid level sensor fails, as the liquid level in the water tank rises, liquid will flow through the flow guiding mechanism. When the leak-proof sensor detects liquid flowing through the flow guiding mechanism, the controller will directly control the water inlet mechanism to stop working. This ensures that even if the liquid level sensor fails, water injection can be stopped in time, guaranteeing the normal operation of the machine. On the other hand, by diverting excess purified water from the water tank through the flow guiding mechanism, the liquid level in the water tank can be maintained at the height of the connection between the flow guiding mechanism and the water tank when the liquid level sensor fails, thereby preventing liquid leakage.

[0026] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0027] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the exhaust gas treatment device provided in the embodiments of this application.

[0029] Figure 2 This is a schematic diagram of the exhaust gas treatment device provided in the embodiments of this application.

[0030] In the picture:

[0031] 110-Water tank; 111-Air inlet; 112-Air outlet; 113-Water inlet; 114-Water outlet; 120-Controller; 130-Level sensor; 131-First level sensor; 132-Second level sensor; 140-Leakage prevention sensor; 150-Water inlet mechanism; 160-Water outlet mechanism; 170-Flow guiding mechanism; 171-Flow guiding pipe; 172-Water storage box; 180-Third level sensor. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0033] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0034] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the description of this application, terms such as "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0035] It should be noted that in this paper, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0036] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0037] As described in the background section, in an exhaust gas treatment device, if the liquid level sensor in the water tank fails, the machine will continuously fill the water tank with water, and the drain pump will not work. This will lead to a risk of liquid leakage in the machine, affecting the operation of other machines, and may even cause a safety accident.

[0038] In view of this, in order to solve the above problems, this application provides an exhaust gas treatment device, which achieves the purpose of preventing liquid leakage in the water tank by setting a flow guiding mechanism and an anti-leakage sensor.

[0039] The exhaust gas treatment device provided in this application is described below by way of example:

[0040] As an optional implementation, please refer to Figure 1 and Figure 2 The exhaust gas treatment device includes a water tank 110, a water inlet mechanism 150, a liquid level sensor 130, a flow guiding mechanism 170, a leak prevention sensor 140, and a controller 120. The liquid level sensor 130 is installed on the side wall of the water tank 110. The flow guiding mechanism 170 and the water inlet mechanism 150 are both connected to the water tank 110, and the height of the connection between the flow guiding mechanism 170 and the water tank 110 is higher than the height of the liquid level sensor 130. The leak prevention sensor 140 is installed inside the flow guiding mechanism 170. The controller 120 is connected to the water inlet mechanism 150 and the water level sensor 130. The level sensor 130 and the leak prevention sensor 140 are electrically connected; the water tank 110 is used to contain purified water, and the water tank 110 is provided with an air inlet 111 and an air outlet 112. The purified water in the water tank 110 is used to purify the exhaust gas entering through the air inlet 111; the level sensor 130 is used to detect the level in the water tank 110, and the leak prevention sensor 140 is used to detect whether there is purified water in the flow guiding mechanism 170; the controller 120 is used to control the water inlet mechanism 150 to stop working when purified water is detected in the flow guiding mechanism 170.

[0041] The purified water described in this application can be deionized water, and both the air inlet 111 and the air outlet 112 are located at the top of the water tank 110. When the exhaust gas treatment device is working, the air inlet 111 is used to introduce exhaust gas. After being purified by the deionized water, the exhaust gas is discharged through the air outlet 112. The air outlet 112 can be connected to semiconductor processing equipment, thereby enabling the utilization of the purified gas.

[0042] Furthermore, the exhaust gas treatment device is also equipped with an inlet 113 and an outlet 114. The water tank 110 is connected to the water inlet mechanism 150 through the inlet 113 and to the water outlet mechanism 160 through the outlet 114. It should be noted that the water inlet mechanism 150 described in this application can be a water pump, which can inject water into the water tank 110; the water outlet mechanism 160 described in this application can be a water pump, which can extract liquid from the water tank 110, and both the water inlet mechanism 150 and the water outlet mechanism 160 are controlled by the controller 120.

[0043] In addition, a liquid level sensor 130 is installed in the water tank 110. The liquid level sensor 130 is used to detect the liquid level in the water tank 110, and the liquid level sensor 130 can be positioned relatively high in the water tank 110 to enable high-level warning. That is, when the liquid level sensor 130 detects purified water, it indicates that the current liquid level is high. If water is continuously added to the water tank 110, a liquid leakage fault may occur. Therefore, after receiving the signal from the liquid level sensor 130 that purified water has been detected, the controller 120 controls the water inlet mechanism 150 to stop working, so that water inlet 113 stops flowing in. Of course, in some implementations, the controller 120 can also control the water outlet mechanism 160 to work to lower the liquid level.

[0044] However, in practical applications, the gas entering through the air inlet 111 is generally corrosive, causing the level sensor 130 to be corroded. Consequently, even if the liquid level in the water tank 110 is high, the level sensor 130 will not send a signal, and the controller 120 will not be able to make timely control. This ultimately leads to the continuous filling of water through the water inlet 113, causing the purified water in the water tank 110 to exceed the maximum capacity of the water tank 110, resulting in a leakage fault, affecting the operation of other machines, and even potentially causing a safety accident.

[0045] Therefore, by setting up a flow guiding mechanism 170 and an anti-leakage sensor 140, this application achieves the following: Firstly, even if the liquid level sensor 130 fails, as the liquid level in the water tank 110 rises, liquid will flow through the flow guiding mechanism 170. When the anti-leakage sensor 140 detects liquid flowing through the flow guiding mechanism 170, the controller 120 will directly control the water inlet mechanism 150 to stop working. This ensures that even if the liquid level sensor 130 fails, water injection can be stopped in time, guaranteeing the normal operation of the machine. Secondly, by diverting excess purified water from the water tank 110 through the flow guiding mechanism 170, the liquid level in the water tank 110 can be maintained at the height of the connection between the flow guiding mechanism 170 and the water tank 110 when the liquid level sensor 130 fails, thereby preventing liquid leakage.

[0046] As one implementation, the flow guiding mechanism 170 includes a flow guiding pipe 171 and a water storage box 172. One end of the flow guiding pipe 171 is connected to the water tank 110, and the other end of the flow guiding pipe 171 is connected to the water storage box 172. The water storage box 172 ensures that even in the event of a malfunction in the level sensor 130, the liquid in the water tank 110 will preferentially flow into the water storage box 172, thus preventing liquid leakage in a short period and giving personnel ample time for repairs.

[0047] In one implementation, the leak-proof sensor 140 is disposed at the bottom of the water storage box 172. When the leak-proof sensor 140 detects purified water information, it transmits the purified water information to the controller 120. This placement allows the leak-proof sensor 140 to be directly disposed within the water storage box 172, thus making it less susceptible to the effects of corrosive gases within the water tank 110. This ensures that the probability of leak-proof sensor 140 failure is lower in the event of a failure of the level sensor 130, providing an effective leak-proof protection mechanism for the water tank 110.

[0048] In another implementation, the guide pipe 171 is a transparent pipe, and the leak-proof sensor 140 is an optical sensor. The leak-proof sensor 140 is sleeved outside the guide pipe 171 and transmits the purified water information to the controller 120 when it detects purified water. This arrangement ensures that the level sensor 130 and the leak-proof sensor 140 are in different environments, and the leak-proof sensor 140 is completely unaffected by corrosive gases, providing a more effective leak-proof protection mechanism for the water tank 110. Furthermore, the leak-proof sensor 140 is easy to install, reducing the system's cost.

[0049] Of course, in some possible implementations, the two types of leak-proof sensors 140 mentioned above can be used simultaneously, thereby improving the stability and reliability of the leak-proof protection mechanism.

[0050] It should be noted that when setting the guide pipe 171, a hole can be directly made in the side wall of the water tank 110, and the size of the hole is the same as the size of the selected guide pipe 171. Optionally, the diameter of the guide pipe 171 is 0.8 to 1.2 cm. Furthermore, the connection point between the guide mechanism 170 and the water tank 110 is 2 to 3 cm higher than the height of the level sensor 130. This implementation method allows for rapid control in the event of a malfunction of the level sensor 130. Alternatively, an alarm device can be set in the system; once the leakage sensor detects a signal, the controller 120 will trigger an alarm on the machine and simultaneously stop water injection.

[0051] In one implementation, the liquid level sensor 130 includes a first liquid level sensor 131 and a second liquid level sensor 132. Both the first liquid level sensor 131 and the second liquid level sensor 132 are electrically connected to the controller 120. The height of the second liquid level sensor 132 is higher than the height of the first liquid level sensor 131. The height of the connection between the flow guiding mechanism 170 and the water tank 110 is higher than the height of the second liquid level sensor 132. When the second liquid level sensor 132 detects purified water information, the controller 120 controls the water inlet mechanism 150 to stop working.

[0052] In practical applications, when the first liquid level sensor 131 does not detect a signal, the controller 120 can control the water inlet mechanism 150 to operate and the water outlet mechanism 160 to stop operating, so that water is continuously added to the water tank 110. At the same time, when the second liquid level sensor 132 detects a signal, it indicates that the liquid level in the water tank 110 is relatively high. Therefore, the controller 120 can control the water outlet mechanism 160 to operate and the water inlet mechanism 150 to stop operating, so that the purified water in the water tank 110 can be discharged, thereby ensuring that the purified water in the water tank 110 can always be maintained within a certain height range, improving the exhaust gas purification effect.

[0053] Optionally, the exhaust gas treatment device also includes a third liquid level sensor 180, the water outlet mechanism 160 is connected to the water tank 110, the third liquid level sensor 180 is electrically connected to the controller 120, and the height of the third liquid level sensor 180 is lower than the height of the first liquid level sensor 131; when the third liquid level sensor 180 does not detect purified water information, the controller 120 controls the water outlet mechanism 160 to stop working.

[0054] Understandably, the third liquid level sensor 180 is a low-level sensor, which can be set near the bottom of the water tank 110. Once the third liquid level sensor 180 does not detect a signal, it means that the liquid level in the water tank 110 is too low and purified water needs to be injected into the water tank 110.

[0055] Based on the above implementation, this application also provides a semiconductor processing system, which includes processing equipment and the aforementioned exhaust gas treatment device. The processing equipment is connected to the exhaust port 112 of the water tank 110. The gas purified by the water tank 110 is input into the processing equipment through the exhaust port 112, for example, into the heating chamber of the processing equipment, so as to realize the normal operation of the processing equipment.

[0056] In summary, this application provides an exhaust gas treatment device and a semiconductor processing system. The exhaust gas treatment device includes a water tank, a water inlet mechanism, a liquid level sensor, a flow guiding mechanism, a leak-proof sensor, and a controller. The liquid level sensor is disposed on the side wall of the water tank. The flow guiding mechanism and the water inlet mechanism are both connected to the water tank, and the height of the connection between the flow guiding mechanism and the water tank is higher than the height of the liquid level sensor. The leak-proof sensor is disposed inside the flow guiding mechanism. The controller is electrically connected to the water inlet mechanism, the liquid level sensor, and the leak-proof sensor. The water tank is used to contain purified water and has an air inlet and an air outlet. The purified water in the water tank is used to purify the exhaust gas entering through the air inlet. The liquid level sensor is used to detect the liquid level in the water tank, and the leak-proof sensor is used to detect whether there is purified water in the flow guiding mechanism. The controller is used to control the water inlet mechanism to stop working when purified water is detected in the flow guiding mechanism. Because the exhaust gas treatment device provided in this application includes a flow guiding mechanism and a leak-proof sensor, even if the liquid level sensor fails, as the liquid level in the water tank rises, liquid will flow through the flow guiding mechanism. When the leak-proof sensor detects liquid flowing through the flow guiding mechanism, the controller will directly control the water inlet mechanism to stop working. This ensures that even if the liquid level sensor fails, water injection can be stopped in time, guaranteeing the normal operation of the machine. On the other hand, by diverting excess purified water from the water tank through the flow guiding mechanism, the liquid level in the water tank can be maintained at the height of the connection between the flow guiding mechanism and the water tank when the liquid level sensor fails, thereby preventing liquid leakage.

[0057] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

[0058] It will be apparent to those skilled in the art that this application is not limited to the details of the exemplary embodiments described above, and that this application can be implemented in other specific forms without departing from the spirit or essential characteristics of this application. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this application is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this application. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. An exhaust gas treatment device, characterized by, The tail gas treatment device comprises a water tank, a water inlet mechanism, a liquid level sensor, a flow guide mechanism, a leakage prevention sensor and a controller, the liquid level sensor is arranged on the side wall of the water tank, the flow guide mechanism and the water inlet mechanism are in communication with the water tank, the height of the connection between the flow guide mechanism and the water tank is higher than the height of the liquid level sensor, the leakage prevention sensor is arranged in the flow guide mechanism, and the controller is electrically connected with the water inlet mechanism, the liquid level sensor and the leakage prevention sensor respectively; wherein, The water tank is used for containing purified water, and the water tank is provided with an air inlet and an air outlet, and the purified water in the water tank is used for purifying the tail gas entering through the air inlet; The liquid level sensor is used for detecting the liquid level in the water tank, and the leakage prevention sensor is used for detecting whether there is purified water in the flow guide mechanism; The controller is used for controlling the water inlet mechanism to stop working when the purified water is detected in the flow guide mechanism.

2. The exhaust treatment device of claim 1, wherein, The flow guide mechanism comprises a flow guide pipe and a water storage box, one end of the flow guide pipe is in communication with the water tank, and the other end of the flow guide pipe is in communication with the water storage box.

3. The exhaust treatment device of claim 2, wherein, The leakage prevention sensor is arranged at the bottom of the water storage box, and when the leakage prevention sensor detects the purified water information, the purified water information is transmitted to the controller.

4. The exhaust treatment device of claim 2, wherein, The flow guide pipe is a transparent pipe, the leakage prevention sensor is an optical sensor, the leakage prevention sensor is sleeved outside the flow guide pipe, and when the purified water information is detected, the purified water information is transmitted to the controller.

5. The exhaust treatment device of claim 2, wherein, The diameter of the flow guide pipe is 0.8-1.2 cm.

6. The exhaust treatment device of claim 1, wherein, The height of the connection between the flow guide mechanism and the water tank is 2-3 cm higher than the height of the liquid level sensor.

7. The exhaust treatment device of claim 1, wherein, The liquid level sensor comprises a first liquid level sensor and a second liquid level sensor, the first liquid level sensor and the second liquid level sensor are electrically connected with the controller, the height of the second liquid level sensor is higher than the height of the first liquid level sensor, and the height of the connection between the flow guide mechanism and the water tank is higher than the height of the second liquid level sensor; When the second liquid level sensor detects the purified water information, the controller controls the water inlet mechanism to stop working.

8. The exhaust treatment device of claim 7, wherein, The tail gas treatment device further comprises a water outlet mechanism and a third liquid level sensor, the water outlet mechanism is in communication with the water tank, the third liquid level sensor is electrically connected with the controller, and the height of the third liquid level sensor is lower than the height of the first liquid level sensor; When the third liquid level sensor does not detect the purified water information, the controller controls the water outlet mechanism to stop working.

9. The exhaust treatment device of claim 1, wherein, The air inlet and the air outlet are arranged on the top of the water tank.

10. A semiconductor processing system, characterized by comprising: The semiconductor processing system comprises a processing equipment and the tail gas treatment device according to any one of claims 1-9, and the processing equipment is in communication with the air outlet of the water tank.

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