Vacuum purification device for coating clamp
By designing a vacuum purification device for coating fixtures, utilizing the negative pressure principle of a vacuum cleaner and zoned dust collection areas, the problem of dust affecting the adhesion of the coating on the surface of crystal wafers was solved, thereby improving the stability and electrical performance of the metal coating medium on crystal wafers.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-24
- Publication Date
- 2026-03-17
AI Technical Summary
Dust adheres to the surface of crystal wafers before they are plated with metal, affecting the adhesion and electrical performance of the plating layer and posing a potential quality risk.
Design a vacuum purification device for coating fixtures, comprising a vacuum table, a vacuum chamber frame, a vacuum cover, a vacuum assembly, and an electronic control unit. Utilizing the negative pressure principle of a vacuum cleaner and zoned vacuum areas, it removes dust from the crystal sheet and dissolves it in a fluid.
It effectively removes dust from the surface of crystal wafers, improves the adhesion of the metal plating medium, avoids damage to electrical performance, and ensures product quality.
Smart Images

Figure CN223996830U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of dust purification technology, specifically relating to a vacuum purification device for a coating fixture. Background Technology
[0002] Before the crystal wafers are plated with metal media, dust adheres to the surface of the crystal wafers during the loading process. After the plating, the adhesion of the metal media will be greatly affected or damaged, which will seriously affect the electrical performance of the product and pose quality risks in the short or long term, failing to meet the user's requirements. Utility Model Content
[0003] In order to solve the above-mentioned problems in the existing technology, the purpose of this utility model is to provide a vacuum purification device for coating fixtures.
[0004] The technical solution adopted in this utility model includes:
[0005] A vacuuming table with a vacuuming chamber frame fixedly connected to the vacuuming table. An air outlet is formed at the bottom of the vacuuming chamber frame, and a vacuuming clamp frame for loading materials is fixedly installed inside the vacuuming chamber frame.
[0006] A vacuum cleaner cover, which is attached to the top of the vacuum table;
[0007] A vacuuming assembly includes a vacuum bin, the upper end of which is connected to the air outlet. Inside the vacuum bin, an upper vacuuming zone and a lower water storage zone are formed. The upper vacuuming zone is used to draw air from the vacuuming clamp frame, and the upper vacuuming zone stores dust removal fluid.
[0008] As a preferred embodiment of this utility model, the lower end of the dust collection chamber frame is open, and a supporting ventilator is provided at the open end. The supporting ventilator is fixedly connected to the dust collection clamp frame, and a material storage space is formed inside the dust collection clamp frame. The material storage space is connected to the dust collection component.
[0009] As a preferred embodiment of this utility model, one end of the dust collection cover is rotatably connected to the dust collection table, and hinge blocks are provided on both sides of the dust collection cover. The hinge blocks are fixedly connected to the dust collection table, and a hydraulic rod is hinged to the hinge block. The other end of the hydraulic rod is hinged to the side of the dust collection table.
[0010] As a preferred embodiment of this utility model, the dust collection cover is provided with a plurality of air inlets, the air inlets penetrating the dust collection cover, and the dust collection cover is provided with a filter screen, the filter screen being fixedly connected to the lower end face of the dust collection cover.
[0011] As a preferred embodiment of this utility model, a handle is provided at the end of the dust collection cover away from the filter screen. The handle is fixedly connected to the dust collection cover and is located at one edge of the dust collection cover.
[0012] As a preferred embodiment of this invention, a visible liquid level window is formed on the dust collection bin, and the visible liquid level window is located on the periphery of the lower water storage area.
[0013] As a preferred embodiment of this utility model, the bottom of the vacuum cleaning table is provided with telescopic legs, which are fixedly connected to the vacuum cleaning table.
[0014] As a preferred embodiment of this invention, it further includes an electronic control unit, which is fixedly connected to the vacuum cleaning table and electrically connected to the vacuum cleaning assembly.
[0015] The beneficial effects of this utility model are as follows:
[0016] This utility model is a vacuum purification device for coating fixtures. It utilizes the negative pressure principle of vacuum cleaner suction to remove dust and foreign objects adhering to the surface of the vacuum fixture frame and the crystal wafers loaded inside the vacuum chamber. This prevents the metal plating medium on the crystal wafers from being poorly adhered or affecting its electrical performance due to dust. At the same time, by dividing the vacuum chamber in the vacuum assembly into an upper vacuuming area and a lower water storage area, the upper vacuuming area is used to remove dust from the vacuum fixture frame, while the lower water storage area collects the dust removed from the upper vacuuming area. This allows the dust and other foreign objects to dissolve directly in the fluid, preventing dust from being scattered around inside the vacuum chamber. Attached Figure Description
[0017] The present invention will now be described in further detail with reference to the accompanying drawings and specific implementation methods.
[0018] Figure 1 This is a schematic diagram of the structure of this utility model;
[0019] Figure 2 This is a schematic diagram of the structure of this utility model from another perspective;
[0020] Figure 3 This is a partial structural schematic diagram of the present invention.
[0021] In the diagram: 1. Vacuuming table; 2. Vacuuming cover; 3. Telescopic support leg; 4. Vacuuming assembly; 5. Electrical control unit; 11. Vacuuming chamber frame; 12. Vacuuming clamp frame; 13. Support vent plate; 111. Hinge block; 112. Hydraulic rod; 113. Air outlet; 121. Material storage space; 21. Filter screen; 22. Air inlet; 23. Handle; 41. Vacuuming bucket; 42. Upper vacuuming area; 43. Lower water storage area; 431. Visible liquid level window. Detailed Implementation
[0022] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining the present utility model and are not intended to limit the present utility model; that is, the described embodiments are only some embodiments of the present utility model, and not all embodiments. The components of the embodiments of the present utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0023] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0024] The following is combined Figure 1-3 This invention describes a specific embodiment of a coating fixture vacuum purification device, comprising:
[0025] A vacuuming table 1 is provided with a vacuuming chamber frame 11, which is fixedly connected to the vacuuming table 1. An air outlet 113 is formed at the bottom of the vacuuming chamber frame 11. A vacuuming clamp frame 12 for loading materials is fixedly provided inside the vacuuming chamber frame 11. Before the metal plating medium of the crystal wafer is deposited, it is stored in the vacuuming clamp frame 12. By sucking through the air outlet 113, the dust particles and dust in the vacuuming chamber frame 11 are sucked out, removing the dust and dust adhering to the crystal wafer, thereby improving the bonding stability of the metal plating medium of the crystal wafer and avoiding affecting the electrical performance of the product.
[0026] The dust cover 2 is attached to the top of the dust collection table 1. By attaching the dust cover 2 to the dust collection table 1, the dust cover 2 can reduce the flow of space above the material, thereby preventing dust and debris from adhering to the surface of the crystal sheet.
[0027] The vacuuming assembly 4 includes a vacuum bin 41, the upper end of which is connected to the air outlet 113. Inside the vacuum bin 41, an upper vacuuming area 42 and a lower water storage area 43 are formed. The upper vacuuming area 42 is used to draw air from the vacuum clamp frame 12. The upper vacuuming area 42 stores dust removal fluid. The upper vacuuming area 42 is used to draw air from the vacuum clamp frame 12 to remove dust and foreign objects from the vacuum chamber frame 11, thereby cleaning the stored water crystal and the vacuum clamp frame 12. The lower water storage area 43 can process the dust after it is drawn, preventing the dust from being scattered around inside the vacuuming assembly 4.
[0028] Please refer to Figures 1-2As shown, the lower end of the dust collection frame 11 is open, and a supporting ventilator plate 13 is provided at the open end. The supporting ventilator plate 13 is fixedly connected to the dust collection clamp frame 12. A material storage space 121 is formed inside the dust collection clamp frame 12, and the material storage space 121 is connected to the dust collection assembly 4.
[0029] Please refer to Figures 2-3 As shown, one end of the dust collection cover 2 is rotatably connected to the dust collection table 1. The dust collection cover 2 has hinge blocks 111 on both sides. The hinge blocks 111 are fixedly connected to the dust collection table 1. A hydraulic rod 112 is hinged to the hinge block 111. The other end of the hydraulic rod 112 is hinged to the side of the dust collection table 1. The dust collection cover 2 can be opened on the dust collection table 1 by extending and retracting the hydraulic rod 112.
[0030] Please refer to Figures 1-2 As shown, the dust collection cover 2 has several air inlets 22 that penetrate the dust collection cover 2. The dust collection cover 2 is provided with a filter screen 21, which is fixedly connected to the lower end face of the dust collection cover 2. The air inlets 22 are used for air intake when the dust collection assembly 4 is working. By providing a filter screen 21 on the lower end face of the dust collection cover 2, the filter screen 21 can prevent dust and impurities from entering the material storage space 121 and causing contamination to the crystal sheet and the dust collection clamp frame 12 when the dust collection assembly 4 is working. This achieves cleaning of the inside of the material storage space 121 while preventing the dust collection assembly 4 from sucking dust into the material storage space 121 during operation.
[0031] Please refer to Figures 1-3 As shown, the end of the dust collection cover 2 away from the filter screen 21 is provided with a handle 23. The handle 23 is fixedly connected to the dust collection cover 2 and is located at one edge of the dust collection cover 2. The handle 23 facilitates the opening of the dust collection cover 2 on the dust collection table 1, and facilitates the loading and unloading of materials in the material storage space 121.
[0032] Please refer to Figure 2 As shown, a visible liquid level window 431 is formed on the dust collection bin 41. The visible liquid level window 431 is located on the periphery of the lower water storage area 43. The lower water storage area 43 is used to collect and process the dust collected. The suctioned gas can be directly introduced to the bottom of the fluid so that the dust can be directly dissolved in the water, avoiding the dust from being scattered around in the dust collection bin 41. In addition, the visible liquid level window 431 allows workers to visually observe the liquid level in the dust collection bin 41, keeping the liquid level at the highest and lowest points of the visible liquid level window 431. By controlling the liquid level, the volume of dust and debris and the volume of fluid in the lower water storage area 43 can be judged in a timely manner, so as to clean or add fluid to the lower water storage area 43 in a timely manner.
[0033] Please refer to Figures 1-2As shown, the bottom of the vacuum table 1 is provided with telescopic legs 3, which are fixedly connected to the vacuum table 1. The telescopic legs 3 can be extended and retracted by ropes. The extension and retraction method can be an automatic extension and retraction structure or a manual extension and retraction locking structure, which is not specifically limited here.
[0034] Please refer to Figure 2 As shown, it also includes an electronic control unit 5, which is fixedly connected to the vacuum table 1 and electrically connected to the vacuum assembly 4. The electronic control unit 5 is used to control the operating status of the device, and at the same time, it can be used to control the suction power of the upper vacuum area 42 to clean the material storage space 121.
[0035] Working principle of this utility model:
[0036] Before loading the storage crystal, the upper suction area 42 in the suction assembly 4 is opened and the dust is cleaned by closing the dust suction cover 2 and opening the dust suction area 42. The vacuum cleaner in the upper suction area 42 works to create negative pressure in the suction clamp frame 12 to suck up the dust and particulate matter in the suction clamp frame 12.
[0037] After cleaning the inside of the vacuum clamp frame 12, open the vacuum cover 2, place the solid crystal wafer into the material storage space 121, close the vacuum cover 2, and turn on the vacuum assembly 4 to clean the material stored in the vacuum clamp frame 12. Use the powerful suction to remove the dust and foreign objects attached to the crystal wafer. During this process, since the vacuum cover 2 has several air inlets 22 and a filter screen 21, it ensures that the vacuum assembly 4 can work while preventing dust and debris from entering the material storage space 121 and contaminating the crystal wafer.
[0038] The dust collection bin 41 in the dust collection assembly 4 is divided into an upper dust collection area 42 and a lower water storage area 43. The upper dust collection area 42 is used to suck up the material storage space 121, and the lower water storage area 43 is used to clean and collect the dust particles sucked up. By directly introducing the sucked gas and dust particles into the bottom of the fluid, the dust enters the lower water storage area 43 and dissolves in the water, preventing the dust from being scattered around in the dust collection bin 41. At the same time, the volume of dust collected in the lower water storage area 43 and the amount of fluid stored can be directly judged by observing the visible liquid level window 431 on the lower water storage area 43. The fluid is kept between the upper and lower liquid levels of the visible liquid level window 431 to ensure the normal operation of the dust collection assembly 4.
[0039] The electronic control unit 5 can control the operating status of the device and control the suction pressure of the upper dust collection area 42 in the material storage space 121; the telescopic support leg 3 can control the height between the dust collection table 1 and the ground, so that dust collection buckets 41 of different heights and sizes can be placed to adapt to different production needs.
[0040] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0041] The above description is merely an example and illustration of the structure of this utility model. Those skilled in the art can make various modifications or additions to the specific embodiments described or use similar methods to replace them, as long as they do not deviate from the structure of the utility model or exceed the scope defined in the claims, they should all fall within the protection scope of this utility model.
Claims
1. A vacuum cleaning apparatus for a coating fixture, characterized by, The utility model relates to a dust collection table (1) is provided with dust collection bin frame (11) on it, and the dust collection bin frame (11) is fixedly connected with the dust collection table (1), the bottom of dust collection bin frame (11) forms air outlet (113), and the dust collection bin frame (11) is fixedly provided with dust collection clamp frame (12) for loading material in it. A dust collection cover (2) is hingedly connected to the top of the dust collection table (1). A dust collection assembly (4) is provided, which includes a dust collection barrel (41) having an upper end in communication with the air outlet (113), and an upper dust collection zone (42) and a lower water storage zone (43) formed inside the dust collection barrel (41), wherein the upper dust collection zone (42) is used for sucking air in the dust collection clamp frame (12), and a dust removal fluid is stored in the upper dust collection zone (42). The lower end of the dust collection bin frame (11) is open, and a support air permeable plate (13) is arranged at the opening, the support air permeable plate (13) is fixedly connected with the dust collection clamp frame (12), a material storage space (121) is formed in the dust collection clamp frame (12), and the material storage space (121) is in communication with the dust collection assembly (4).
2. The vacuum cleaning device for a coating fixture according to claim 1, characterized in that: One end of the dust collection cover (2) is rotatably connected to the dust collection table (1), hinge blocks (111) are arranged on both sides of the dust collection cover (2), the hinge blocks (111) are fixedly connected to the dust collection table (1), hydraulic rods (112) are hingedly arranged on the hinge blocks (111), and the other ends of the hydraulic rods (112) are hingedly connected to the side surfaces of the dust collection table (1).
3. The vacuum cleaning device for a coating fixture according to claim 2, characterized in that: A plurality of air inlet holes (22) are formed in the dust collection cover (2), the air inlet holes (22) penetrate through the dust collection cover (2), a filter screen (21) is arranged on the dust collection cover (2), and the filter screen (21) is fixedly connected to the lower end surface of the dust collection cover (2).
4. The vacuum cleaning device for a coating fixture according to claim 1, wherein: A handle (23) is arranged at the end of the dust collection cover (2) away from the filter screen (21), the handle (23) is fixedly connected to the dust collection cover (2) and located at the edge of one end of the dust collection cover (2).
5. The vacuum cleaning device for a coating fixture according to claim 4, characterized in that: A visual liquid level window (431) is formed on the dust collection barrel (41), and the visual liquid level window (431) is located on the circumferential surface of the lower water storage zone (43).
6. The vacuum cleaning device for a coating fixture according to claim 1, wherein: The bottom of the dust collection table (1) is provided with telescopic legs (3), and the telescopic legs (3) are fixedly connected to the dust collection table (1).
7. The vacuum cleaning device for a coating fixture according to claim 1, wherein: An electric control unit (5) is further provided, which is fixedly connected to the dust collection table (1) and electrically connected to the dust collection assembly (4).
8. The vacuum cleaning device for a coating fixture according to claim 7, characterized in that: