Non-contact crystal ingot resistivity measuring device

Abstract

The utility model relates to a non-contact crystal ingot resistivity measuring device, which comprises an equipment support, a linear module and a jacking rotating mechanism, wherein the linear module and the jacking rotating mechanism are arranged on the equipment support; the workpiece carrying table is arranged at the moving end of the linear module, the workpiece tray is arranged at the output end of the jacking rotating mechanism, and the resistivity probe is installed on the equipment support in the mode that the direction of the detection end is the same as the jacking direction of the jacking rotating mechanism. The moving path of the workpiece carrying table sequentially passes through the workpiece tray and the resistivity probe, and the workpiece carrying table is provided with a strip-shaped measuring opening for the workpiece tray and the resistivity probe to penetrate through. According to the utility model, the workpiece tray and the resistivity probe are arranged on the same side, and the movable workpiece carrying table is assisted to drive the workpiece to feed, so that the non-contact measurement of the resistivity of the workpiece and the workpiece transposition are realized, the resistivity value corresponding to each coordinate position of the workpiece can be output, the measurement is accurate, the operation is simple, and the full-coverage scanning measurement can be realized.

Description

Technical Field

[0001] This utility model relates to the technical field of semiconductor manufacturing, and in particular to a non-contact ingot resistivity measuring device. Background Technology

[0002] Resistivity is one of the important parameters characterizing the conductivity of doped semiconductor materials. In today's integrated circuit and photovoltaic energy industries, measuring the resistivity of semiconductor materials has become a routine procedure. There are many methods for measuring resistivity, such as the four-probe method, the van der Bauer method, and the eddy current method. The four-probe method is a standard method widely used in the global semiconductor industry. Its advantages include simple equipment, high accuracy, and no strict requirements on sample shape. However, the four-probe method also has obvious disadvantages: First, it is a contact measurement method, and the process of the probe contacting the sample inevitably introduces damage and contamination; second, for wafers with an insulating layer on the surface, the four-probe method cannot measure the bulk resistivity of the wafer unless the probe pierces the insulating layer; third, the four-probe method is a localized detection technique, and given the current trend of continuously increasing semiconductor substrate size, it can only perform localized sampling and cannot achieve full-coverage scanning measurement of the entire large-size wafer, which needs improvement. Utility Model Content

[0003] The present invention aims to address the aforementioned shortcomings in the existing technology by providing a non-contact ingot resistivity measuring device, which has the advantages of accurate measurement, simple operation, and easy output of resistivity values ​​corresponding to each coordinate position of the workpiece.

[0004] The above-mentioned utility model objective is achieved through the following technical solution:

[0005] A non-contact ingot resistivity measuring device includes a device support, a linear module and a lifting and rotating mechanism mounted on the device support, a workpiece platform mounted on the moving end of the linear module, a workpiece tray mounted on the output end of the lifting and rotating mechanism, and a resistivity probe mounted on the device support with its detection end facing the same direction as the lifting and rotating mechanism. The moving path of the workpiece platform passes sequentially through the workpiece tray and the resistivity probe, and the workpiece platform has a strip-shaped measuring port for the workpiece tray and the resistivity probe to pass through.

[0006] By adopting the above technical solution, during the inspection process, the workpiece is pre-mounted on the workpiece platform, and then a linear module drives the workpiece through the resistivity probe. The resistivity probe uses non-contact resistivity measurement, which will not damage the ingot. Furthermore, it can measure the resistivity of the workpiece surface in a detection area with the feed direction as the long side and the width of the resistivity probe's detection end as the short side during the feeding process, thus obtaining the resistivity of the detection area. This is not limited by the workpiece size. Then, the linear module drives the workpiece through the workpiece tray, and the lifting and rotating mechanism drives the workpiece tray through the strip-shaped measurement port and into contact with the workpiece surface. At this point, the workpiece is removed from the workpiece platform. The workpiece is then transferred and installed onto the workpiece tray. A lifting and rotating mechanism then drives the workpiece tray to rotate, which in turn rotates the workpiece by a predetermined angle. The workpiece tray then resets, and the rotated workpiece is transferred and installed onto the workpiece platform. This process is repeated multiple times until multiple detection areas approximately cover the workpiece surface layer. The resistivity values ​​corresponding to each coordinate position of the workpiece are then output. The measurement is accurate, the operation is simple, and it can achieve full-coverage scanning measurement. Furthermore, the workpiece platform and workpiece tray can be installed on and detached from each other using vacuum adsorption, temporary adhesion, clamping and limiting, or overlapping methods.

[0007] The present invention is further configured such that: the workpiece platform has a first vacuum module, and the air inlet of the first vacuum module is arranged relative to the workpiece surface.

[0008] By adopting the above technical solution, the first vacuum module adsorbs the surface of the workpiece through the air inlet when it is working, so as to realize the stable installation of the workpiece on the workpiece platform and improve the detection accuracy.

[0009] The present invention is further configured such that: a positioning part is provided on the workpiece platform, and the positioning part is arranged circumferentially relative to the workpiece.

[0010] By adopting the above technical solution, the positioning part can be the outline of the workpiece, or a protrusion or groove that can limit the circumferential movement of the workpiece, which facilitates the positioning and installation of the workpiece on the workpiece platform.

[0011] The present invention is further configured such that: the workpiece tray has a second vacuum module, and the air inlet of the second vacuum module is arranged relative to the workpiece surface.

[0012] By adopting the above technical solution, the second vacuum module adsorbs the surface of the workpiece through the air inlet when it is working, so as to realize the stable installation of the workpiece on the workpiece tray and facilitate the workpiece rotation.

[0013] The present invention is further configured such that: the linear module includes a first drive motor and a linear guide rail mounted on the equipment support, a transmission screw rotatably connected to the equipment support, a first drive wheel mounted on the output shaft of the first drive motor, a first driven wheel mounted on the transmission screw, a first transmission belt sleeved on the first drive wheel and the first driven wheel, and a transmission nut threadedly connected to the transmission screw; the workpiece platform is slidably connected to the linear guide rail and mounted on the transmission nut.

[0014] By adopting the above technical solution, when the first drive motor is working, it drives the first driven wheel and the transmission screw to rotate through the first driving wheel and the first transmission belt. Since the transmission nut is threadedly connected to the transmission screw, the transmission nut will move along the length direction of the transmission screw under the rotation of the transmission screw, thereby driving the workpiece platform to slide on the linear guide rail, realizing the linear movement of the workpiece platform and the workpiece in the horizontal direction, which is convenient for measuring the resistivity of the workpiece.

[0015] The present invention is further configured such that: the linear module further includes a pair of first slotted photoelectric switches disposed on the equipment support and a first positioning piece disposed on the transmission nut, wherein one of the first slotted photoelectric switches is arranged close to the workpiece tray and the other first slotted photoelectric switch is arranged on the side of the resistivity probe away from the workpiece tray, and the movement path of the first positioning piece passes through the pair of first slotted photoelectric switches in sequence.

[0016] By adopting the above technical solution, when the transmission nut drives the workpiece stage to slide on the linear guide rail, the first positioning plate will also move accordingly. When the first positioning plate moves to the first slotted photoelectric switch on the side of the resistivity probe away from the workpiece tray, the first slotted photoelectric switch will sense the first positioning plate and send a signal, indicating that the workpiece stage has moved to the initial measurement position, at which point resistivity measurement can be performed. After the measurement is completed, the first drive motor continues to work, driving the workpiece stage to move closer to the workpiece tray. When the first positioning plate moves to another first slotted photoelectric switch, the photoelectric switch will sense the first positioning plate and send a signal, indicating that the workpiece stage has moved to the end position, at which point the movement of the workpiece stage can be stopped, and the workpiece can be rotated. By setting a pair of first slotted photoelectric switches and first positioning plates, the movement position of the workpiece stage can be precisely controlled, improving the accuracy and reliability of the measurement.

[0017] The present invention is further configured such that: the lifting and rotating mechanism includes a lifting cylinder and a second drive motor disposed on the equipment support, a mounting base disposed on the lifting cylinder, a rotating shaft rotatably connected to the mounting base, a second driving wheel disposed on the output shaft of the second drive motor, a second driven wheel rotatably connected to the equipment support and slidably connected to the rotating shaft, and a second transmission belt sleeved on the second driving wheel and the second driven wheel, wherein the end of the rotating shaft passes through the equipment support and is disposed on the workpiece tray.

[0018] By adopting the above technical solution, when the lifting cylinder is working, it can drive the mounting base and the rotating shaft rotatably connected to the mounting base to rise or fall, thereby driving the workpiece tray and the workpiece placed on the workpiece tray to rise or fall; when the second drive motor is working, it can drive the rotating shaft to rotate through the second driving wheel, the second transmission belt and the second driven wheel, thereby driving the workpiece tray and the workpiece to rotate, which facilitates the measurement of different positions of the workpiece; by setting up a lifting and rotating mechanism, the height and angle of the workpiece can be adjusted, further improving the flexibility and accuracy of the measurement; at the same time, the end of the rotating shaft passes through the equipment support and is set on the workpiece tray, which can realize the stable support of the workpiece platform and the workpiece tray, ensuring the stability of the measurement.

[0019] The present invention is further configured such that: the lifting and rotating mechanism includes a second slotted photoelectric switch disposed on the equipment support and a second positioning plate disposed on the second driven wheel, wherein the moving path of the second positioning plate passes through the second slotted photoelectric switch.

[0020] By adopting the above technical solution, when the second driven wheel rotates, the second positioning plate will move accordingly, and its movement path will pass through the second slotted photoelectric switch. The second slotted photoelectric switch can accurately sense the position and movement state of the second positioning plate, thereby realizing precise control and monitoring of the rotation angle of the lifting and rotating mechanism. This setting not only improves the automation level of the equipment, but also ensures the accuracy and stability of the measurement. Through the cooperation of the second slotted photoelectric switch and the second positioning plate, the rotation state and position of the workpiece pallet and the workpiece can be monitored in real time, providing reliable data support for subsequent measurement work.

[0021] The present invention is further configured such that the height of the resistivity probe on the equipment support is adjustable.

[0022] By adopting the above technical solution, the height of the resistivity probe can be adjusted according to actual needs, so that it can more accurately approach the surface of the workpiece to be measured, thereby obtaining more accurate resistivity data.

[0023] The present invention is further configured to include a fixed base disposed on the equipment support, a threaded micrometer disposed on the fixed base, and an adjusting base disposed on the movable end of the threaded micrometer and slidably connected to the fixed base, wherein the resistivity probe is disposed on the adjusting base.

[0024] By adopting the above technical solution, the threaded micrometer can accurately adjust the height of the adjusting seat, thereby achieving precise control of the height of the resistivity probe; through the cooperation of the threaded micrometer and the adjusting seat, the distance between the resistivity probe and the workpiece to be measured can be easily adjusted, ensuring the stability and reliability of the measurement results.

[0025] In summary, the beneficial technical effects of this utility model are as follows: by arranging the workpiece tray and resistivity probe on the same side, and supplementing it with a movable workpiece stage to drive the workpiece feed, non-contact measurement of workpiece resistivity and workpiece rotation can be achieved. This avoids probe damage to the ingot and is not limited by workpiece size. It is suitable for ingot and wafer inspection. By repeating this process multiple times, the resistivity values ​​corresponding to each coordinate position of the workpiece can be output. The measurement is accurate, the operation is simple, and full-coverage scanning measurement can be achieved. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the non-contact crystal ingot resistivity measuring device according to Embodiment 1 of this utility model.

[0027] Figure 2 This is a schematic diagram of the connection relationship between the workpiece stage and the workpiece tray in Embodiment 2 of this utility model.

[0028] Figure 3 This is a schematic diagram showing the connection relationship between the non-contact crystal ingot resistivity measuring device and the equipment housing assembly in Embodiment 2 of this utility model.

[0029] Figure 4 This is a schematic diagram showing the connection relationship between the equipment support and the resistivity probe in Embodiment 3 of this utility model.

[0030] Figure 5 This is a schematic diagram showing the connection relationship between the equipment support, the linear module, and the workpiece platform in Embodiment 4 of this utility model.

[0031] Figure 6 This is a schematic diagram of the non-contact crystal ingot resistivity measuring device of Embodiment 5 of this utility model.

[0032] Figure 7 This is a schematic diagram showing the connection relationship between the equipment support, the lifting and rotating mechanism, and the workpiece tray in Embodiment 6 of this utility model.

[0033] Figure 8This is a schematic diagram showing the connection relationship between the equipment support, the micro-motion slide, and the resistivity probe in Embodiment 7 of this utility model.

[0034] In the diagram: 1. Equipment support; 2. Linear module; 21. First drive motor; 22. Linear guide rail; 23. Transmission screw; 24. First driving wheel; 25. First driven wheel; 26. First transmission belt; 27. Transmission nut; 28. First slotted photoelectric switch; 29. ​​First positioning plate; 3. Lifting and rotating mechanism; 31. Lifting cylinder; 32. Second drive motor; 33. Mounting base; 34. Rotating shaft; 35. Second driving wheel; 36. Second driven wheel; 37. Second transmission belt; 38. Second slotted photoelectric switch; 39. Second positioning plate; 4. Workpiece platform; 41. Positioning part; 5. Workpiece tray; 6. Micro-motion slide; 61. Fixed base; 62. Threaded micrometer; 63. Adjustment base; 7. Resistivity probe; 8. Equipment housing assembly; 81. Integrated industrial control computer; 82. Vacuum pressure switch; 83. Start button; 84. Stop button; 85. Emergency stop button. Detailed Implementation

[0035] To make the technical means, creative features, objectives and effects of this utility model clearer and easier to understand, the present utility model will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0036] Example 1: Refer to Figure 1 This utility model discloses a non-contact ingot resistivity measuring device, comprising a device support 1, a linear module 2 and a lifting and rotating mechanism 3 mounted on the device support 1, a workpiece platform 4 mounted on the moving end of the linear module 2, a workpiece tray 5 mounted on the output end of the lifting and rotating mechanism 3, a micro-motion slide 6 mounted on the device support 1, and a resistivity probe 7 mounted on the moving end of the micro-motion slide 6 with its detection end facing the same direction as the lifting and rotating mechanism 3. The moving path of the workpiece platform 4 passes sequentially through the workpiece tray 5 and the resistivity probe 7, and the workpiece platform 4 has a strip-shaped measuring port for the workpiece tray 5 and the resistivity probe 7 to pass through.

[0037] During the inspection process, the workpiece is pre-mounted on the workpiece stage 4, and then the linear module 2 drives the workpiece past the resistivity probe 7. The resistivity probe 7 uses non-contact resistivity measurement, which will not damage the ingot. It can measure the resistivity of the workpiece surface in the detection area with the feed direction as the long side and the width of the detection end of the resistivity probe 7 as the short side during the feeding process, and is not limited by the size of the workpiece. Then the linear module 2 drives the workpiece past the workpiece tray 5, and the lifting and rotating mechanism 3 drives the workpiece tray 5 to pass through the strip measurement port and contact the workpiece surface. At this time, the workpiece is detached from the workpiece stage 4 and transferred. The workpiece is installed on the workpiece tray 5, and then the lifting and rotating mechanism 3 drives the workpiece tray 5 to rotate, thereby rotating the workpiece by a predetermined angle. After that, the workpiece tray 5 is reset, and the rotated workpiece is transferred and installed on the workpiece stage 4. This process is repeated multiple times until multiple detection areas approximately cover the surface layer of the workpiece. The resistivity value corresponding to each coordinate position of the workpiece can then be output. The measurement is accurate, the operation is simple, and it can achieve full coverage scanning measurement. In addition, the workpiece stage 4 and the workpiece tray 5 can be installed on the workpiece stage 4 and the workpiece tray 5, and the workpiece can be detached and transferred between the two by means of vacuum adsorption, temporary adhesion, clamping and limiting, or overlapping.

[0038] Example 2: Refer to Figure 2 This utility model discloses a non-contact ingot resistivity measuring device. Unlike embodiment 1, this device includes a first vacuum module on the workpiece stage 4 to facilitate the installation and detachment of the workpiece on the workpiece platform 4 and workpiece tray 5. The air inlet of the first vacuum module is arranged relative to the workpiece surface. When the first vacuum module operates, it adsorbs the workpiece surface through the air inlet, achieving stable installation of the workpiece on the workpiece platform 4 and improving detection accuracy. Simultaneously, a positioning part 41 is provided on the workpiece platform 4, arranged circumferentially relative to the workpiece. The positioning part 41 is the workpiece outline, facilitating the positioning and installation of the workpiece on the workpiece platform 4. Furthermore, the workpiece tray 5 has a second vacuum module, with its air inlet arranged relative to the workpiece surface. When the second vacuum module operates, it adsorbs the workpiece surface through the air inlet, achieving stable installation of the workpiece on the workpiece tray 5 and facilitating workpiece rotation.

[0039] Reference Figure 3In addition, the non-contact ingot resistivity measuring device is integrated into the equipment housing assembly 8 during the equipment assembly process. The equipment housing assembly 8 is equipped with an integrated industrial control computer 81, a vacuum pressure switch 82, a start button 83, a stop button 84, and an emergency stop button 85. Among them, the integrated industrial control computer 81 runs the detection software and program. After the resistivity probe 7 completes the detection program, the detection software visually displays the resistivity values ​​of various areas of the workpiece. The vacuum pressure switch 82 is used to determine whether the workpiece is attracted by the workpiece platform 4 or the workpiece tray 5. The start button 83 is used to start the equipment, the stop button 84 is used to stop the equipment, and the emergency stop button 85 is used to terminate the equipment operation in case of equipment malfunction, so as to facilitate user operation.

[0040] Example 3: Reference Figure 4 This invention discloses a non-contact crystal ingot resistivity measuring device, which differs from Embodiment 1 in that the cross-section of the detection end of the resistivity probe 7 is triangular, circular, or square.

[0041] Example 4: Reference Figure 5 This utility model discloses a non-contact ingot resistivity measuring device, which differs from Embodiment 1 in that the linear module 2 includes a first drive motor 21 and a linear guide rail 22 mounted on the equipment support 1, a transmission screw 23 rotatably connected to the equipment support 1, a first drive wheel 24 mounted on the output shaft of the first drive motor 21, a first driven wheel 25 mounted on the transmission screw 23, a first transmission belt 26 sleeved on the first drive wheel 24 and the first driven wheel 25, a transmission nut 27 threadedly connected to the transmission screw 23, a pair of first slotted photoelectric switches 28 mounted on the equipment support 1, and a first positioning piece 29 mounted on the transmission nut 27. The workpiece platform 4 is slidably connected to the linear guide rail 22 and mounted on the transmission nut 27; one of the first slotted photoelectric switches 28 is arranged close to the workpiece tray 5, and the other is arranged on the side of the resistivity probe 7 away from the workpiece tray 5. The movement path of the first positioning piece 29 passes sequentially through the pair of first slotted photoelectric switches 28.

[0042] When the first drive motor 21 is working, it drives the first driven wheel 25 and the transmission screw 23 to rotate through the first driving wheel 24 and the first transmission belt 26. Since the transmission nut 27 is threadedly connected to the transmission screw 23, the transmission nut 27 will move along the length direction of the transmission screw 23 under the rotation of the transmission screw 23, thereby driving the workpiece platform 4 to slide on the linear guide rail 22, realizing the linear movement of the workpiece platform 4 and the workpiece in the horizontal direction, which is convenient for measuring the resistivity of the workpiece. When the transmission nut 27 drives the workpiece platform 4 to slide on the linear guide rail 22, the first positioning plate 29 will also move accordingly. When the first positioning plate 29 moves to the first slotted photoelectric switch 28 on the side of the resistivity probe 7 away from the workpiece tray 5, the first slotted photoelectric switch 28 will sense the first positioning plate 29 and send a signal, indicating that the workpiece platform 4 has moved to the initial measurement position, and resistivity measurement can be performed at this time. After the measurement is completed, the first drive motor 21 continues to work, driving the workpiece platform 4 to move closer to the workpiece tray 5. When the first positioning plate 29 moves to another first slotted photoelectric switch 28, the photoelectric switch will sense the first positioning plate 29 and send a signal, indicating that the workpiece platform 4 has moved to the end position, and the movement of the workpiece platform 4 can be stopped for workpiece rotation. By setting a pair of first slotted photoelectric switches 28 and first positioning plates 29, the movement position of the workpiece platform 4 can be precisely controlled, improving the accuracy and reliability of the measurement.

[0043] Example 5: Refer to Figure 6 This invention discloses a non-contact ingot resistivity measuring device, which differs from Embodiment 4 in that the lifting and rotating mechanism 3 and the workpiece tray 5 are arranged in two groups and symmetrically on both sides of the resistivity probe 7. Correspondingly, the first slotted photoelectric switches 28 are arranged close to the two workpiece trays 5 respectively.

[0044] Example 6: Refer to Figure 7 This utility model discloses a non-contact ingot resistivity measuring device, which differs from Embodiment 1 in that the lifting and rotating mechanism 3 includes a lifting cylinder 31 and a second drive motor 32 mounted on the equipment support 1, a mounting base 33 mounted on the lifting cylinder 31, a rotating shaft 34 rotatably connected to the mounting base 33, a second driving wheel 35 mounted on the output shaft of the second drive motor 32, a second driven wheel 36 rotatably connected to the equipment support 1 and slidably connected to the rotating shaft 34, a second transmission belt 37 sleeved on the second driving wheel 35 and the second driven wheel 36, a second slotted photoelectric switch 38 mounted on the equipment support 1, and a second positioning piece 39 mounted on the second driven wheel 36. The end of the rotating shaft 34 passes through the equipment support 1 and is mounted on the workpiece tray 5, and the movement path of the second positioning piece 39 passes through the second slotted photoelectric switch 38.

[0045] When the lifting cylinder 31 is working, it can drive the mounting base 33 and the rotating shaft 34 rotatably connected to the mounting base 33 to rise or fall, thereby driving the workpiece tray 5 and the workpiece placed on the workpiece tray 5 to rise or fall. When the second drive motor 32 is working, it can drive the rotating shaft 34 to rotate through the second drive wheel 35, the second transmission belt 37 and the second driven wheel 36, thereby driving the workpiece tray 5 and the workpiece to rotate, which facilitates the measurement of different positions of the workpiece. By setting up the lifting and rotating mechanism 3, the height and angle of the workpiece can be adjusted, further improving the flexibility and accuracy of the measurement. At the same time, the end of the rotating shaft 34 passes through the equipment support 1 and is set on the workpiece tray 5, which can realize the stable support of the workpiece platform 4 and the workpiece tray 5, ensuring the stability of the measurement. When the second driven wheel 36 rotates, the second positioning piece 39 moves accordingly, and its movement path passes through the second slotted photoelectric switch 38. The second slotted photoelectric switch 38 can accurately sense the position and movement status of the second positioning piece 39, thereby realizing precise control and monitoring of the rotation angle of the lifting and rotating mechanism 3. This setting not only improves the automation level of the equipment, but also ensures the accuracy and stability of the measurement. Through the cooperation of the second slotted photoelectric switch 38 and the second positioning piece 39, the rotation status and position of the workpiece tray 5 and the workpiece can be monitored in real time, providing reliable data support for subsequent measurement work.

[0046] Example 7: Refer to Figure 8 This invention discloses a non-contact ingot resistivity measuring device. Unlike Embodiment 1, the height of the resistivity probe 7 on the device support 1 is adjustable. The micro-motion slide 6 includes a fixed base 61 mounted on the device support 1, a threaded micrometer 62 mounted on the fixed base 61, and an adjusting base 63 with a movable end mounted on the threaded micrometer 62 and slidably connected to the fixed base 61. The resistivity probe 7 is mounted on the adjusting base 63. The threaded micrometer 62 can precisely adjust the height of the adjusting base 63, thereby achieving precise control of the height of the resistivity probe 7. Through the cooperation of the threaded micrometer 62 and the adjusting base 63, the distance between the resistivity probe 7 and the workpiece can be easily adjusted. The height of the resistivity probe 7 can be adjusted according to actual needs, allowing it to more accurately approach the surface of the workpiece, thereby obtaining more accurate resistivity data and ensuring the stability and reliability of the measurement results.

[0047] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the spirit and scope of the technical solutions of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A non-contact ingot resistivity measuring device, comprising a device support (1), a linear module (2) and a jacking and rotating mechanism (3) arranged on the device support (1), characterized in that: The device further comprises a workpiece carrier (4) arranged at the moving end of the linear module (2), a workpiece tray (5) arranged at the output end of the jacking and rotating mechanism (3), and a resistivity probe (7) arranged on the equipment support (1) in a manner that the detection end faces the same direction as the jacking direction of the jacking and rotating mechanism (3), the moving path of the workpiece carrier (4) sequentially passes through the workpiece tray (5) and the resistivity probe (7), and the workpiece carrier (4) is provided with a strip-shaped measurement opening for the workpiece tray (5) and the resistivity probe (7) to pass through.

2. The non-contacting ingot resistivity measuring device of claim 1, wherein: The workpiece carrier (4) is provided with a first vacuum pumping module, and the air inlet of the first vacuum pumping module is arranged relative to the workpiece surface.

3. The non-contact ingot resistivity measuring apparatus according to claim 2, characterized by: The workpiece carrier (4) is provided with a positioning portion, and the positioning portion is arranged relative to the workpiece circumference.

4. The non-contact ingot resistivity measuring apparatus according to claim 1, characterized by: The workpiece tray (5) is provided with a second vacuum pumping module, and the air inlet of the second vacuum pumping module is arranged relative to the workpiece surface.

5. The non-contact ingot resistivity measuring apparatus as defined in claim 1, wherein: The linear module (2) comprises a first driving motor (21) and a linear guide rail (22) arranged on the equipment support (1), a transmission screw rod (23) rotatably connected to the equipment support (1), a first driving wheel (24) arranged on the output shaft of the first driving motor (21), a first driven wheel (25) arranged on the transmission screw rod (23), a first transmission belt (26) sleeved on the first driving wheel (24) and the first driven wheel (25), and a transmission nut (27) threadedly connected to the transmission screw rod (23), and the workpiece carrier (4) is slidably connected to the linear guide rail (22) and arranged on the transmission nut (27).

6. A non-contact ingot resistivity measuring device according to claim 5, wherein: The linear module (2) further comprises a pair of first slot-type photoelectric switches (28) arranged on the equipment support (1) and a first positioning sheet (29) arranged on the transmission nut (27), one of the first slot-type photoelectric switches (28) is arranged close to the workpiece tray (5), the other first slot-type photoelectric switch (28) is arranged on the side of the resistivity probe (7) away from the workpiece tray (5), and the moving path of the first positioning sheet (29) sequentially passes through the pair of first slot-type photoelectric switches (28).

7. The non-contact ingot resistivity measuring device of claim 1, wherein: The jacking and rotating mechanism (3) comprises a jacking cylinder (31) and a second driving motor (32) arranged on the equipment support (1), a mounting seat (33) arranged on the jacking cylinder (31), a rotating shaft (34) rotatably connected to the mounting seat (33), a second driving wheel (35) arranged on the output shaft of the second driving motor (32), a second driven wheel (36) rotatably connected to the equipment support (1) and slidably connected to the rotating shaft (34), and a second transmission belt (37) sleeved on the second driving wheel (35) and the second driven wheel (36), and the end of the rotating shaft (34) passes through the equipment support (1) and is arranged on the workpiece tray (5).

8. The non-contact ingot resistivity measuring device of claim 7, wherein: The jacking and rotating mechanism (3) further comprises a second slot photoelectric switch (38) arranged on the equipment support (1), and a second positioning sheet (39) arranged on the second driven wheel (36), wherein the moving path of the second positioning sheet (39) passes through the second slot photoelectric switch (38).

9. The non-contact ingot resistivity measuring device of claim 1, wherein: The height of the resistivity probe (7) on the equipment support (1) is adjustable.

10. The non-contact ingot resistivity measuring device of claim 9, wherein: Further comprising a fixing base (61) arranged on the equipment support (1), a screw micrometer (62) arranged on the fixing base (61), and an adjusting base (63) arranged on the moving end of the screw micrometer (62) and slidingly connected to the fixing base (61), wherein the resistivity probe (7) is arranged on the adjusting base (63).

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