Mass spectrometer ion beam detection device

Abstract

The utility model relates to the technical field of mass spectrometers, and provides a mass spectrometer ion beam detection device which comprises a slit plate, a supporting sheet and a ceramic column, at least one current pin is arranged in the circumferential direction of the slit plate, a slit is formed in the center of the slit plate, the supporting sheet is of a plate-shaped structure with a hole formed in the middle, and a round hole is formed in the middle of the supporting sheet. A plurality of ceramic columns used for insulation of the slit plates and the supporting pieces are evenly arranged in the circumferential direction of the supporting piece round holes at intervals, the slit plates and the supporting pieces are arranged at intervals through the ceramic columns, at least one supporting column is connected with the supporting pieces, and the supporting columns are located on the sides, away from the ceramic columns, of the supporting pieces. The focusing condition of the ion beam in the middle of the flight orbit of the double-focusing mass spectrometer can be detected, instrument faults are eliminated in a sectional mode, and instrument debugging efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of mass spectrometry technology, and more specifically, to an ion beam detection device for a mass spectrometer. Background Technology

[0002] Mass spectrometers, as crucial tools for analyzing the composition of substances, rely heavily on the precise focusing and propagation of the ion beam for their performance. In traditional mass spectrometer designs, detectors (such as Faraday cups and electron multipliers) are typically located at the end of the mass analyzer to receive the final ion current signal and generate a mass spectrum. However, this design has significant limitations: for devices with long ion orbits, such as magnetoelectric dual-focusing mass spectrometers, relying solely on the end detector during commissioning makes it difficult to monitor the ion beam focusing status in the middle of the flight path (such as between the electrostatic and magnetic analyzers, or between the ion source and the mass analyzer) in real time. This results in inefficient troubleshooting, requiring repeated disassembly or adjustment of components, significantly increasing commissioning time and costs.

[0003] In existing technologies, some attempts have been made to introduce detection devices in the middle of the ion orbit. For example, some schemes use movable probes or segmented electrodes to infer the focusing state by measuring the ion beam current locally. However, such methods have significant drawbacks: first, the mechanical structure is complex, and probe movement can easily introduce vibration interference, affecting detection accuracy; second, the installation process requires damaging the vacuum chamber or adjusting the original orbit structure, resulting in high operational risks and poor compatibility; third, insufficient insulation design may lead to signal leakage, especially in high-voltage environments, where the stability of the current signal is difficult to guarantee. In addition, existing devices mostly rely on manual adjustment and repeated measurements, resulting in low automation and limited data acquisition efficiency. Utility Model Content

[0004] The purpose of this invention is to provide a mass spectrometer ion beam detection device that can detect the focusing status of the ion beam in the middle of the flight trajectory of a dual-focusing mass spectrometer, eliminate instrument malfunctions in stages, and improve instrument debugging efficiency.

[0005] To solve the above-mentioned technical problems, the technical solution adopted in this application is as follows:

[0006] This application provides an ion beam detection device for a mass spectrometer, which includes a slit plate with at least one current pin arranged circumferentially on the slit plate and a slit at the center of the slit plate; a support plate with a central hole in the center and a circular hole in the center; ceramic pillars evenly spaced along the circumference of the circular hole of the support plate for insulating the slit plate and the support plate; the ceramic pillars space the slit plate and the support plate apart; and at least one support pillar connected to the support plate, with the support pillar located on the side of the support plate away from the ceramic pillar.

[0007] The slit plate is used to receive the ion beam. The current signal of the ion beam is output to the micro-galvanometer through the lead wire connected by the current pin. The slit plate has a slit. When the ion beam is collimated, the output current signal is the weakest. When the ion beam deviates from the center of the track, the output current signal is stronger. The ion beam detection device of this application should be installed at the ion flight track axis of the mass spectrometer. In particular, the center of the slit should be at the same horizontal height as the ion beam track.

[0008] In some embodiments of this utility model, the slit plate is provided with a plurality of through holes in the circumferential direction, the through holes corresponding to the ceramic column. The slit plate and the ceramic column are connected by connecting screws, which achieve mechanical positioning and fix the slit plate and the ceramic column. At the same time, the ceramic column is connected to the support plate, so that the support plate and the slit plate are fixedly connected. Due to the design of the ceramic column, there is a gap between the support plate and the slit plate. The ceramic column can also play an insulating role, preventing the current on the slit plate from flowing into the support plate, so that the measurement results are more accurate.

[0009] In some embodiments of this utility model, a ceramic plate is also provided between the connecting screw and the slit plate. Since the connecting screw is made of metal, the ceramic plate is provided to further enhance the insulation performance. The ceramic plate blocks the direct contact between the connecting screw and the slit plate, prevents current from flowing out through the connecting screw, and ensures that the current flows to the current pin.

[0010] In some embodiments of this utility model, a washer is also provided between the ceramic sheet and the connecting screw. The washer disperses the pressure of the connecting screw, protects the ceramic sheet, and prevents the ceramic sheet from deforming and breaking due to excessive tightening force of the connecting screw.

[0011] In some embodiments of this utility model, the surface of the support column is provided with a groove, and the support column is a cylindrical metal rod with threads at both ends. The groove can prevent slipping during installation and facilitate installation and use.

[0012] In some embodiments of this utility model, there are two support columns, which are symmetrically arranged at both ends of the support sheet. The two support columns can prevent the support sheet from tilting, thereby affecting the ion beam detection results.

[0013] In some embodiments of this utility model, the support plate is provided with a threaded hole in the circumferential direction, and the support column passes through the threaded hole and is threadedly connected to the nut. The threaded connection allows for flexible adjustment of the height and angle of the support plate, making it easy to adjust the support plate to achieve the effect of a tilt angle of 0.

[0014] In some embodiments of this utility model, the support sheet is circular, and a circular hole is provided at the center of the support sheet. The diameter of the circular hole is larger than that of the slit. The circular hole is provided to allow the ion beam to pass through, and the diameter of the circular hole must be larger than the width of the slit. If the diameter of the hole is smaller than that of the slit, the ion beam cannot pass through completely, which will affect the detection results.

[0015] In some embodiments of this utility model, the slit plate is circular, including a first plate and a second plate. The first plate and the second plate are connected to form a slit at the center of the slit plate. The slit is formed by spot welding. Therefore, it needs to be designed as a two-piece structure to ensure precise control of the slit width and meet the required technical requirements. In contrast, an integral structure is formed by direct cutting, which has lower precision and cannot achieve precise control.

[0016] In some embodiments of this utility model, the midpoint of the slit is located on the axis of the circular hole, and the midpoint of the slit coincides with the axis of the circular hole of the support plate, ensuring that the ion beam passes through the center in a straight line. Precise alignment reduces ion beam offset and improves detection accuracy.

[0017] Compared with the prior art, the embodiments of this utility model have at least the following advantages or beneficial effects:

[0018] 1. By using an ion beam baffle, the focusing of the ion beam in the middle of the flight path of the dual-focusing mass spectrometer is detected, allowing for segmented troubleshooting of instrument malfunctions and improving instrument debugging efficiency.

[0019] 2. Through ceramic insulation, slit centering design, and precise component positioning, electrical interference and mechanical deviation are significantly reduced, ensuring high-fidelity acquisition of ion beam signals.

[0020] 3. Multiple insulation structures effectively isolate current leakage and improve signal stability.

[0021] 4. The slit and circular aperture axis are aligned, and the slit width is adjustable to ensure that the ion beam passes through in a straight line and reduce signal deviation. Attached Figure Description

[0022] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 A schematic diagram of the overall structure of an ion beam detection device for a mass spectrometer provided by this utility model;

[0024] Figure 2 This invention provides a schematic diagram of the voltage-current relationship during detection in a mass spectrometer ion beam detection device.

[0025] Icons: 1-Slit plate; 2-Support plate; 3-Connecting screw; 4-Washer; 5-Ceramic plate; 6-Ceramic post; 7-Support post; 8-Nut; 9-Current pin. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0028] Example

[0029] Please refer to Figure 1-2 , Figure 1 The diagram shown is a schematic representation of the overall structure of an embodiment of this utility model. Figure 2 The diagram shown is a schematic representation of the voltage-current relationship during detection in an embodiment of this utility model.

[0030] This embodiment provides a mass spectrometer ion beam detection device, which includes a slit plate 1, at least one current pin 9 arranged circumferentially on the slit plate 1, a slit at the center of the slit plate 1, a support plate 2, the support plate 2 having a plate-like structure with a hole in the center, a ceramic column 6, a plurality of ceramic columns 6 evenly spaced along the circumferential direction of the circular hole of the support plate 2 for insulating the slit plate 1 and the support plate 2, the ceramic columns 6 spaced apart from the slit plate 1 and the support plate 2, and a support column 7, at least one of which is connected to the support plate 2, the support column 7 being located on the side of the support plate 2 away from the ceramic column 6.

[0031] To prevent current from flowing from the slit plate 1 into the support plate 2, the slit plate 1 is provided with several through holes on its circumference, which correspond to the ceramic column 6. The slit plate 1 and the ceramic column 6 are connected by connecting screws 3, which achieve mechanical positioning and fix the slit plate 1 and the ceramic column 6. At the same time, the ceramic column 6 is connected to the support plate 2, so that the support plate 2 and the slit plate 1 are fixedly connected. Due to the design of the ceramic column 6, there is a gap between the support plate 2 and the slit plate 1. The ceramic column 6 can also play an insulating role, preventing current from flowing from the slit plate 1 into the support plate 2, so that the measurement results are more accurate.

[0032] To prevent current from flowing to the connecting screw 3, a ceramic plate 5 is provided between the connecting screw 3 and the slit plate 1. Since the connecting screw 3 is made of metal, the ceramic plate 5 is provided to further enhance the insulation performance. The ceramic plate 5 blocks the direct contact between the connecting screw 3 and the slit plate 1, preventing current from flowing out through the connecting screw 3 and ensuring that the current flows to the current pin 9.

[0033] To prevent the ceramic sheet 5 from deforming or breaking, a washer 4 is provided between the ceramic sheet 5 and the connecting screw 3. The washer 4 disperses the pressure of the connecting screw 3, protects the ceramic sheet 5, and prevents the ceramic sheet 5 from deforming and breaking due to excessive tightening force of the connecting screw 3.

[0034] To provide an anti-slip effect during installation, grooves are provided on the surface of the support column 7. The support column 7 is a cylindrical metal rod with threads at both ends. The grooves provide an anti-slip effect during installation and facilitate installation and use.

[0035] To prevent the support plate 2 from tilting, there are two support columns 7, which are symmetrically arranged at both ends of the support plate 2. The two support columns 7 can prevent the support plate 2 from tilting, thereby affecting the ion beam detection results.

[0036] In order to adjust the tilt angle of the support plate 2, the support plate 2 is provided with a threaded hole on the circumference. The support column 7 passes through the threaded hole and is threadedly connected to the nut 8. The threaded connection allows for flexible adjustment of the height and angle of the support plate 2, making it easy to adjust the support plate 2 to achieve the effect of a tilt angle of 0.

[0037] In order to allow the ion beam to pass through smoothly and achieve the detection effect, the support plate 2 is circular, and a circular hole is opened at the center of the support plate 2. The diameter of the circular hole is larger than that of the slit. The circular hole is opened to allow the ion beam to pass through, and the diameter of the circular hole must be larger than the width of the slit. If the diameter of the hole is smaller than that of the slit, the ion beam cannot pass through completely, which will affect the detection results.

[0038] In order to precisely control the width of the slit, the aforementioned slit plate 1 is circular, including a first plate and a second plate. The first plate and the second plate are connected to form a slit at the center of the slit plate 1. The slit is formed by spot welding. Therefore, it needs to be designed as a two-piece structure to ensure precise control of the slit width and meet the required technical requirements. In contrast, a one-piece structure is formed by direct cutting, which has lower precision and cannot achieve precise control.

[0039] To ensure that the ion beam passes through the center in a straight line, the midpoint of the slit is located on the axis of the circular hole. The midpoint of the slit coincides with the axis of the circular hole of the support plate 2. Precise alignment reduces ion beam offset and improves detection accuracy.

[0040] In use, when the detection device is installed between the electrostatic analyzer and the magnetic analyzer, the ion beam can be scanned from left to right on the slit plate 1 by continuously adjusting the electrode voltage on the electrostatic analyzer. During this process, the current magnitude corresponding to different voltages is recorded, and a voltage-current relationship graph can be obtained, from which the beam width of the ion beam can be calculated. Figure 2 As shown, during the voltage rise process, the current of the micro-ammeter decreases, stabilizes, and rises. The ratio of the voltage difference during the current decrease (or rise) phase to the voltage difference during the phase from the start of the decrease to the start of the rise (or from the end of the decrease to the end of the rise) is the ratio of the ion beam width to the slit width. By repeatedly measuring several sets of data and calculating the average value, the width of the ion beam and the corresponding voltage when the ion beam is collimated can be determined. At the same time, the ratio of the maximum current value to the minimum current value during this process is the non-pass rate when the ion beam is collimated, which reflects the focusing effect of the ion beam in the vertical direction. Similarly, when the detection device is installed in the middle part of the ion source and the mass analyzer, the current signal received by the detection device can also be observed by adjusting the voltage of the ion source focusing lens group, thereby judging the focusing effect of the ion beam after exiting the ion source.

[0041] The above are merely preferred embodiments of this utility model and are not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A mass spectrometer ion beam detection device, characterized by, The utility model relates to a kind of ceramic column and support column, including: Slit plate, at least one current pin is arranged circumferentially, slit is opened at the center of slit plate; Support sheet, the support sheet is the plate structure of middle part aperture, and circular hole is arranged in the middle part; Ceramic column, several ceramic columns for the insulation of slit plate and support sheet are uniformly spaced along the circumferential direction of support sheet circular hole, and slit plate and support sheet are spaced by ceramic column; Support column, at least one support column is arranged to be connected with support sheet, and support column is located at the side of support sheet away from ceramic column.

2. A mass spectrometer ion beam detection device according to claim 1, characterised in that, Slit plate is provided with a plurality of through holes circumferentially, and through hole corresponds with ceramic column, and slit plate and ceramic column are connected by connecting screw thread.

3. A mass spectrometer ion beam detection device according to claim 2, wherein, Connecting screw and slit plate are further provided with ceramic sheet between them.

4. A mass spectrometer ion beam detection device as claimed in claim 3, wherein, Gasket is further provided between ceramic sheet and connecting screw.

5. The mass spectrometer ion beam detection device of claim 1, wherein, Groove is opened on the surface of support column.

6. The mass spectrometer ion beam detection device of claim 1, wherein, Threaded hole is opened on the circumferential direction of support sheet, and support column is connected with nut by screwing through threaded hole.

7. The mass spectrometer ion beam detection device of claim 1, wherein, Support sheet is circular, and circular hole is opened at the center of support sheet, and the aperture of circular hole is larger than slit.

8. A mass spectrometer ion beam detection device according to claim 7, wherein, Slit plate is circular, including first plate body and second plate body, and first plate body and second plate body are connected to form slit at the center of slit plate.

9. A mass spectrometer ion beam detection device as claimed in claim 8, wherein, The midpoint position of slit is located on the axis of circular hole.

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